CA2033181C - Two valve micropump with improved outlet - Google Patents

Two valve micropump with improved outlet Download PDF

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Publication number
CA2033181C
CA2033181C CA 2033181 CA2033181A CA2033181C CA 2033181 C CA2033181 C CA 2033181C CA 2033181 CA2033181 CA 2033181 CA 2033181 A CA2033181 A CA 2033181A CA 2033181 C CA2033181 C CA 2033181C
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CA
Canada
Prior art keywords
valve
pump
wafer
inlet
micropump according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CA 2033181
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French (fr)
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CA2033181A1 (en
Inventor
Harald T. G. Van Lintel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Debiotech SA
Original Assignee
Westonbridge International Ltd
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Filing date
Publication date
Priority claimed from CH2241/89A external-priority patent/CH680009A5/en
Priority claimed from FR8910699A external-priority patent/FR2650634B1/en
Application filed by Westonbridge International Ltd filed Critical Westonbridge International Ltd
Publication of CA2033181A1 publication Critical patent/CA2033181A1/en
Application granted granted Critical
Publication of CA2033181C publication Critical patent/CA2033181C/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/109—Valves; Arrangement of valves inlet and outlet valve forming one unit
    • F04B53/1092—Valves; Arrangement of valves inlet and outlet valve forming one unit and one single element forming both the inlet and outlet closure member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/0009—Special features
    • F04B43/0081—Special features systems, control, safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2205/00—General characteristics of the apparatus
    • A61M2205/02—General characteristics of the apparatus characterised by a particular materials
    • A61M2205/0244—Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2205/00—General characteristics of the apparatus
    • A61M2205/02—General characteristics of the apparatus characterised by a particular materials
    • A61M2205/0272—Electro-active or magneto-active materials
    • A61M2205/0294—Piezoelectric materials
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
    • A61M5/142—Pressure infusion, e.g. using pumps
    • A61M5/14212—Pumping with an aspiration and an expulsion action
    • A61M5/14224—Diaphragm type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
    • B01L2400/0481—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure squeezing of channels or chambers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2260/00—Function
    • F05B2260/60—Fluid transfer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F16K15/14—Check valves with flexible valve members
    • F16K15/144—Check valves with flexible valve members the closure elements being fixed along all or a part of their periphery
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps

Abstract

Pumping takes place within the micropump as a result of the deformation of a plate (12) using a piezoelectric pad (13). The deformation produces a variation in volume within a pumping chamber (15) defined inside a plate (11) which is made of a material which can be machined using photolithographic processes. The pump outlet (3) is blocked off, selectively, by a membraned check-valve (18) which is in direct communication with another check-valve (16) via the pumping chamber. The check-valve (16) selectively enables the pumping chamber to communicate with the pump inlet (2). The outlet valve membrane (18) has a layer of oxide (17) providing a pretension on closing. The check-valve thus has a regulatory effect on the pump operation, making the flow almost independent of the outlet (3) pressure.

Description

TWO VALVE MICROPUMP WITH IMPROVED OUTLET
FIELD OF THE INVENTION

The present invention relates to micropumps in which at least part of the pump mechanism is made by machining a silicon wafer using photolithographic technology.
Pumps of this type can be used notably for the in situ administration of medicaments whereby miniaturization of the pump enables the patient to wear it on his person or possibly to have a pump directly implanted in his body. In addition, using pumps of this type, small quantities of liquid to be injected can be accurately metered.
DESCRIPTION OF THE PRIOR ART
In an article entitled "A piezoelectric micropump based on micromachining of silicon" which appeared in "Sensors and Actuators" No. 15 (1988), pages 153 to 167, H. van Lintel et al describe two embodiments of a micropump each comprising a stack of three wafers, i.e. a wafer of machined silicon arranged between two wafers of glass_ The silicon wafer defines a pumping chamber with one of the glass wafers, it being possible for the part coinciding with this chamber to be deformed by drive means, in the present case a piezoelectric crystal. The latter comprises electrodes which, when connected to a source of alternative potential, cause deformation of the crystal and thus of the glass wafer, the latter in turn causing variation in the volume of the pumping chamber.
The pumping chamber is connected on one side and on the other side respectively to non-return valves machined from silicon the seat of which is composed of the other glass wafer.
Study of the mode of operation of the pump according to the first embodiment (Figure la) described in the above mentioned article shows that the fluid output delivered by this pump depends greatly on the outlet pressure over the entire operating range. It was found that this relationship between output and pressure is virtually linear, the output falling as pressure rises.
In other words, a pump of this type cannot be used for the above mentioned medical applications in which, in contrast, the output from the pump outlet must be independent of the pressure, at least in the normal operating range of the pump.
For this reason the authors propose in this same article (second embodiment shown in Figure 1b) adding a regulating valve to the above described assembly disposed between the second valve downstream from the pumping chamber and the pump outlet.
This valve isolates the pump from the outlet when it is closed.
Since the regulating valve has a certain degree of mechanical bias against closure, the outlet pressure is only able to open the valve after reaching a certain value. As a result, a form of independence of output in relation to outlet pressure develops in the useful operating range of the pump, ie.
when the regulating valve is not kept open by the outlet pressure .
Thus, although this second design gives a favourable output pressure diagram, it should nevertheless be noted that a pump manufactured in this manner still has disadvantages.
The regulating valve further obstructs the pump since it must be situated within the thickness of the silicon wafer and thus takes up additional surface area. It also increases the cost price of the pump.
It should also be noted that the regulating valve increases the complexity of the pump and thus the risk of incorrect functioning or manufacturing error.
OBJECTS OF THE INVENTION
It is an object of the invention to provide a micropump of the type set out above which avoids the disadvantages of the pumps described in the above mentioned article whilst presenting good characteristics in relation to the outlet pressure over the useful operating range of the pump_ BRIEF SUMMARY OF THE INVENTION
It is thus an object of the invention to provide a micropump having a first wafer of a material capable of being machined using photolithographic technology in such a way as to define with at least one second support wafer bonded face to face with the first wafer a pumping chamber, a first valve of the non-return type through which said pumping chamber is able to communicate selectively with one pump inlet and a second valve of the membrane type through which said pumping chamber can communicate selectively with one outlet of the pump, means being provided to cause a periodic variation in the volume of said pumping chamber, wherein said outlet communicates directly with an isolated volume of said pumping chamber by means of said second valve and situated on the same side of this valve as the channel through which this valve communicates with the pumping chamber in such a way that both the pressures prevailing in this pumping chamber and this outlet act in the direction of opening on said second valve and in that said second valve is in open communications with said first valve via said pumping chamber in such a way that, during the outlet phase of the pump, this chamber communicates directly with said outlet through said second valve in the open position.
By virtue of these characteristics, said second valve not only regulates output in such a way as to render the latter virtually independent of the pressure in the pump outlet over its entire normal operating range, but it also acts as the element closing the pumping chamber during the inlet phase of the pump.
Other characteristics and advantages of the invention are better illustrated by the following description of several embodiments of the micropump according to the invention, with reference to the accompanying drawings, in which:
BRIEF DESCRIPTION OF THE DRAWINGS

- Figure 1 is a diagrammatic sectional view of the the micropump of the invention;
- Figure 2 shows a plan view of the intermediate wafer of the pump shown in Figure 1;
- Figure 3 is a view showing the lower face of the intermediate wafer of a micropump designed according to a second -embodiment of the invention, the view being taken along the line III-III of Figure 4;
- Figures 4 and 5 are sectional views taken along the lines IV-IV and V-V respectively of Figure 3;
- Figure 6 is a sectional view of a micropump constructed according to a third embodiment of the invention;
- Figure 7 is a view of the lower face of the intermediate wafer of the pump shown in Figure 6, this view being taken along the line VII-VII of Figure 6;
- Figure 8 is a view of the lower face of an intermediate wafer of a micropump constructed according to a fourth embodiment of the invention;
- Figures 9 and 10 are sectional views taken along the lines IX-IX and X-X respectively of Figure 8;
- Figure 11 shows a partial sectional view of a fifth embodiment of the invention;
- Figure 12 is a partial plan view of the micropump shown in Figure 11; and - Figure 13 is a graph showing the characteristics of the output as a function of the pressure measured in a micropump designed according to the invention where the inlet pressure equals zero_ DETAILED DESCRIPTION OF THE INVENTION
Reference will first be made to Figures 1 and 2 which show a first embodiment of the micropump according to the invention.
It should be noted that the thicknesses of the various wafers comprising the micropump have been greatly exaggerated in the drawings in the interest of clarity.
= The micropump of Figures 1 and 2 has a base wafer 1 of, for example, glass, which is pierced by two channels 2 and 3 forming the inlet channel and the outlet channel of the pump respectively. These channels 2 and 3 communicate with connectors 4 and 5 respectively.
The connector 4 is connected to a tube 6 which in turn is connected to a reservoir 7 containing the liquid to be pumped.
The reservoir is closed by a pierced cap, a movable piston isolating the working volume of the reservoir 7 from the outside. This reservoir can, for example, contain a medicament if the pump is used to inject a precise dose of this medicament into the human body. In this application the micropump can be worn on the body of the patient or implanted therein.
The outlet connector 5 may be connected to an injection needle (not shown) joined thereto by a tube 10.
Use of the micropump of the invention in this manner is particularly suitable for treating certain forms of cancer with peptides where medication should preferably be in the form of accurate and repeated doses of small amounts of the medicament at regular intervals. Another potential application could be for the treatment of diabetics who need regular low doses of a medicament in the course of the day, the dose being determined for example by methods known per se, measuring the blood sugar level and automatically instructing the pump to inject a suitable dose of insulin.
A wafer 11 of silicon or other material capable of being machined using photolithographic engraving technology is bonded to the glass wafer 1. Above this silicon wafer is a glass closure wafer 12, the thickness of which is such that it can be deformed by a control element 13 which, in the application of the invention described herein, is a piezoelectric disc provided with electrodes 13a and 13b connected to an alternating current generator 14. This disc may be that manufactured by Philips under the reference number PXE-52 and may be bonded to the wafer 12 using a suitable adhesive.
For purposes of example, the intermediate silicon wafer 11 can have a <100> crystalline orientation so as to render it suitable for etching and to give it the requisite strength.
The wafers 1 and 12 are preferably carefully polished.
The wafers 11 and 12 together define first of all a pumping chamber 15 (see also Figure 2) for example circular in shape, this chamber being situated below an area of the wafer 12 which can be flexed by the control element 13.
A first valve 16 of the non-return type machined out of the silicon wafer 11 is interposed between the inlet channel 2 and the pumping chamber 15. This valve is located under the pumping chamber and comprises a membrane 16a substantially circular in shape and pierced in its centre by an opening 16b which is square in the embodiment shown. On the side of the channel 2, the valve 16 has an annular rib 16c which is substantially triangular in section. This rib 16c surrounds the opening 16b and is covered by a fine oxide layer 17 also obtained using photolithographic technology which subjects the membrane 16a to a certain degree of bias or pretension tending to cause the top of the rib 16c to bear against the glass wafer 1, the latter thus acting as seat for the valve 16.
The outlet channel 3 of the pump communicates with the pumping chamber 15 via the intermediary of a valve 18, the design of which is identical to that of the valve 16 except for the thickness of the layer, 17 compared to that of the valve 16, the bias imposed by this oxide layer 17 can differ from that used for the valve 16. Figure 1 shows that this valve does not have a central opening similar to the opening 16b of the valve 16.

It will be noted that the pumping chamber communicates with the valve 18 via an opening 19 and a passage 20, both machined in the silicon wafer 11.
The valve 18 thus comprises a membrane 18a and an annular rib 18c covered by an oxide layer 17 and defines above the channel 3 a volume 18d in which the outlet pressure prevails.
When the valve 18 is opened, this volume communicates directly with the inlet valve 16 through the pumping chamber 15 with the result that a minimum of flow resistance is imposed on the fluid driven out of the pump during the outlet phase. Moreover, when the valve 18 is closed, the outlet pressure only acts on a small area of the membrane 18a compared to the substantially larger area on which the pressure prevailing in the pumping chamber is able to act. This results in regulation of the outlet output which becomes virtually independent of the outlet pressure (see Figure 13), this effect being produced by the pretension provided by the oxide layer 17.
By way of example, the thickness of the wafers 1, 11 and 12 may be about 1 mm, 0.3 mm and 0.2 mm respectively for a surface area of the wafers of the order of 15 by 20 mm.

The wafers may also be fixed to one another using various conventional bonding technology such as adhesion or, for example, the technology known as anodic welding.
Figures 3 to 5 show a second embodiment of the micropump of the invention which is substantially identical in design to the micropump shown in Figures 1 and 2. The identical elements consequently bear the same reference numerals given earlier.
However it differs in that the annular chamber 16e (Figure 4) surrounding the annular rib 16c of the inlet valve 16 is not only connected to the inlet channel 2, but also to a compensation chamber 21 defined in the wafer 11 above the valve 18 and closed by the closure wafer 12, this latter in this case covering the entire surface of the pump. This connection is provided by the intermediary of a communicating channel 22 machined in the silicon and composed of three branches 22a, 22b and 22c disposed at right angles in the wafer 11. It should be noted that the branch 22c of this channel is not at the same level as the two other branches 22a and 22b, the branches 22b and 22c communicating with one another via a communicating opening 23 provided in the wafer 11. In addition, the branch 22c (Figure 5) communicates with the inlet channel 2 via a communicating opening 24 which connects this branch to a small cavity 25 provided in the silicon wafer 11 just above the inlet channel 2.
The channel 22 is designed to provide a communication between the channel 2 of the pump and the chamber 21 provided above the membrane 18a of the outlet valve 18 in such a way as to keep this closed if there is overpressure at the entrance to the pump. This arrangement serves to guard against overpressure.
Figures 6 and 7 to which reference will now be made represent a third embodiment of the micropump of the invention.
In this case, the above described design principle remains the same except that the pumping chamber 15 is disposed asymmetrically in respect of the inlet and outlet valves.
This pump is also composed of three wafers, namely a support wafer 26, of, for example, glass, a wafer 27 of, for example silicon or other suitable material, and a closing wafer 28 of, for example, flexible glass, located in a zone above the pumping chamber 15 with the aid of a piezoelectric disc 29 or other suitable control element.
The pumping chamber 15 is defined by the wafer 27 and the wafer 28, these two wafers also defining an inlet chamber 30 (shown only on Figure 6) into which opens an inlet opening 30a which is provided in the wafer 28.
The chamber 30 communicates with a channel 31 (shown only in Figure 7) located in the upper part of the wafer 27 and this channel 31 communicates with a second channel 32 provided in the wafer 27 on the side of the wafer 26. The channel 32 opens into an annular chamber 33 of an inlet valve 34 of identical design to that of the valve 16 previously described. This inlet valve communicates with the chamber 15 through a central opening 35.
The chamber 15 also communicates with an outlet valve 36 via the intermediary of an opening 37 and of a channel 38 both provided in the wafer 27. In addition, the outlet valve 36 which is designed to close the outlet opening 36a (Figure 6) is designed in the same way as the outlet valve of the preceding embodiments except that it has a projection 39 on the side of its membrane opposite the closing rib of the valve. This projection 39 which is at the centre of the membrane is designed to limit the amplitude of movement thereof thanks to the effect of the stop which it can exert on the wafer 28 in the event that the outlet pressure exceeds a predetermined permissible value.
In the embodiment that has just been described the inlet opening 30a opens into the chamber 30 which is located above the outlet valve 36 and thus serves as compensation chamber similar to the chamber 21 of the preceding embodiment. This design consequently also provides a protection against overpressure.
Reference will now be made to Figures 8 to 10 which represent a fourth embodiment of the invention_ In this case the micropump also has three wafers 40, 41 and 42. The wafer 40 is made for example of glass and has an outlet channel 43. The wafer 41 is made of silicon or of another suitable material using photolithographic processes in such a way as to define a pumping chamber 44, an inlet valve 45 and an outlet valve 46 communicating with the pumping chamber 44 via channels 47 and 48 respectively.
In this embodiment, a control element such as a piezoelectric disc 49 is placed directly on the silicon disc 41 in the zone which coincides with the pumping chamber 44 so that, to obtain a pumping effect, it is this wafer 41 which is flexed to change the volume of the pumping chamber. It is also desirable to provide a thin layer of silicon oxide 49a between the wafer 41 and the crystal 49 so as to insulate the corresponding electrode of the disc in respect of this wafer.
The wafer 42 only partially covers the wafer 41 and comprises an inlet opening 50 which opens into an annular compensation chamber 51 provided above the outlet valve 46. It will be noted that this valve is provided with a projection 52 making it possible to limit the amplitude of the membrane of this valve, the projection being able to bear against the lower face of the wafer 42 should the outlet pressure against the valve become excessive.
It will also be noted that the positions of the inlet and outlet valves 45 and 46 are reversed, the seat of the inlet valve being composed of the wafer 42 whereas the seat of the valve 46 is composed, as in the other embodiments, of the wafer 40. This arrangement has no special influence on the working of the pump.
Figure 11 shows another embodiment of the invention in which a chamber 54 above the outlet valve 53 is closed by a connection organ 55 made for example of plastic and bonded to the silicon wafer 56. The chamber 54 which, in effect, communicates with the inlet of the pump is totally insulated from the outer atmosphere. An advantage of this construction is that there is no need to use a special closing wafer.
As in the case of the pump of Figures 8 - 10 (channel 57) and in that of Figure 11 (chamber 54), the outlet valves are connected to the pump inlet so as to guard against overpressure.
The mode of operation of the micropump of the invention will now be examined with particular reference to the diagram of Figure 13 which shows output as a function of pressure in the outlet channel.
It will be noted that the operation is the same in all the above described embodiments. For purposes of simplification the following description therefore relates only to the embodiment of Figures 1 and 2.
When no electric potential is applied to the piezoelectric disc 13, the inlet valves 16 and outlet valves 18 are in the closed position. When an electric potential is applied, the piezoelectric disc 13 flexes, causing the wafer. 12 to bend towards the inside. The pressure in the pumping chamber 15 therefore rises, actuating the opening of the outlet valve 18 as soon as the force acting on the membrane as a result of the pressure in the chamber 15 is greater than the difference between the force created by the pretension of the valve 18, ensured by the layer of silicon oxide 17 and the force resulting from the pressure in the outlet channel 3. The fluid contained in the pumping chamber is thus driven towards the outlet channel 3 by displacement of the flexible zone of the wafer 12. During this phase, the inlet valve 16 is kept closed by the pressure prevailing in the pumping chamber 15. The fluid runs without encountering noteworthy resistance so that the pumping chamber then communicates directly with the outlet channel 3_ In contrast, when the electrical potential is reversed, the piezoelectric disc 13 resumes its initial shape or is flexed in 10 the other direction so that the pressure in the pumping chamber 15 falls. This causes the outlet valve 18 to close as soon as the force induced by the pressure in the pumping chamber 15 is lower than the difference between the force created by the pretension of the valve and the force due to the pressure in the 15 outlet channel 3. The inlet valve 16 opens as soon as the sum of the force due to the pressure in the pumping chamber and of the force created by the pretension of the valve 16 is lower than the force due to the pressure in the inlet channel 2. There is then aspiration of the fluid in the pumping chamber 15 via the inlet channel 2 as a result of displacement of the flexible zone of the wafer 12.
By choosing a large ratio between the diameter of the membrane of the outlet valve 18 and its seat, the pressure in the outlet channel 3 has little influence on the pressure in the pumping chamber needed to open the outlet valve. As a result, by carefully choosing this ratio as well as the control frequency of the piezoelectric disc, it is possible to ensure that the outlet pressure has only very little influence on the outlet output. It is thus possible to determine the outlet output/pressure curves such as those shown in Figure 13. In this figure the curve A was obtained by applying a voltage at 2 Hz to the piezoelectric disc of a micropump according to Figures 3 to 5 having approximately the dimensions stated hereinabove, the outlet output remaining virtually constant at a value of 30 pl/min (most favourable choice). If one controls the piezoelectric disc with a voltage at 5 Hz, this outlet is _....... ..~---__ brought to about 64 p1/min. Thus, as can be seen from the graphs of Figure 13, the choice of a given pretension on the membrane of the outlet valve keeps the output constant at the values shown whereas the outlet pressure can vary from 0 to 70 cm H20. In addition, the graphs show that the output remains constant even for the negative values of the difference between the outlet pressure and the inlet pressure (parts C and D
respectively of the graphs). This situation can, for example, arise when there is overpressure at the pump inlet.
It will be noted that the micropump, regardless of the embodiment described hereinabove, is compact and simple, presents little resistance to flow and makes it possible to determine with very good approximation a constant output as a function of the outlet pressure.
In all these embodiments, except those of Figures 1 and 2, the pump was designed to guard against overpressure since the inlet of the pump communicates with a chamber situated above the outlet valve. Consequently, if such overpressure occurs, it acts on the outlet valve in the direction of closure, thereby insulating the outlet channel from the pumping chamber. This property of the pump can be important when the pump is worn by a patient who also wears a flexible reservoir. If the latter compresses the reservoir (for example by knocking it against an obstacle) the overpressure in the pump aspiration does not cause any output on the outlet side thereof.
In addition, due to the communication between the compensation chamber and the pump inlet, variation in the inlet pressure has only very little influence on the outlet output in the normal operating range of the pump.
It should be noted that the communication can also be effected by a connection outside the pump. For example, the pump of Figures 1 and 2 could be provided with a tube connecting the inlet to the outlet.
Finally, Figure 1 shows that it is possible to connect an operating control element to the silicon wafer for example in the form of a strain gauge 11A, the variation in the resistance of which could be measured to show that the pump is operating correctly or else the membrane on which the gauge is bonded has ruptured. One or several of these control elements may of course be provided in all the embodiments described.

Claims (20)

CLAIMS:
1. A micropump comprising a first wafer, at least one second wafer adhered face to face to said first wafer to form a pump chamber, and actuator means for causing a periodic variation in the volume of said pump chamber, wherein said first wafer is made of a material capable of being machined using photolithographic technology and is machined in such a way as to define said pump chamber, a first valve of the check-valve type through which said pump chamber can selectively communicate with an inlet of the pump and a second valve of the membrane type through which said pump chamber can selectively communicate with an outlet of the pump, wherein said outlet communicates directly with an isolated volume of said pump chamber defined by an annular rib of said second valve in its closed position, wherein said annular rib of said second valve, said outlet of the pump and a channel through which said second valve communicates with the pump chamber are situated on the same side of said first wafer in such a way that the pressures prevailing respectively in said pump chamber and in said outlet act in the direction of opening said second valve, wherein said pump is without a valve of the check-valve type between said first and second valves such that said second valve is in continuous communication with said first valve via said pump chamber during the input phase of the pump and said pump chamber communicates directly with said outlet via said second valve in its open position during the output phase of the pump, and wherein said second valve is pretensioned to be normally closed such that pump output is substantially independent of outlet pressure over a predetermined pressure range.
2. A micropump according to claim 1, wherein the pump inlet communicates with a compensation chamber disposed above said second valve so as to close the latter under the influence of the pressure prevailing at said inlet.
3. A micropump according to claim 1, wherein a detector element, such as a strain gauge is fixed to said first wafer to monitor the correct working of the pump.
4. A micropump according to claim 3, wherein the pump inlet communicates with a compensation chamber disposed above said second valve so as to close the latter under the influence of the pressure prevailing at said inlet.
5. A micropump according to claim 1, wherein it comprises a third wafer covering said first wafer at least over part of its surface and delimiting therewith at least one chamber designed to form an active cavity of the pump.
6. A micropump according to claim 5, wherein the pump inlet communicates with a compensation chamber disposed above said second valve so as to close the latter under the influence of the pressure prevailing at said inlet.
7. A micropump according to claim 5, wherein said means provided for causing a periodic variation in the volume of the pump chamber comprises a piezoelectric disc fixed to said third wafer in a zone coinciding with said pump chamber.
8. A micropump according to claim 7, wherein the pump inlet communicates with a compensation chamber disposed above said second valve so as to close the latter under the influence of the pressure prevailing at said inlet.
9. A micropump according to claim 5, wherein said means provided for causing a periodic variation in the volume of the pump chamber comprise a piezoelectric disc, in that said pump chamber is delimited by said first and second wafers and in that said piezoelectric disc is fixed to said first wafer in an uncovered zone of the same coinciding with said pump chamber.
10. A micropump according to claim 9, wherein the pump inlet communicates with a compensation chamber disposed above said second valve so as to close the latter under the influence of the pressure prevailing at said inlet.
11. A micropump according to claim 5, wherein said third wafer is so designed as to also form at least one connection by which said actuator means can be connected to an external actuating circuit.
12. A micropump according to claim 11, wherein the pump inlet communicates with a compensation chamber disposed above said second valve so as to close the latter under the influence of the pressure prevailing at said inlet.
13. A micropump according to claim 1, wherein said first valve and/or said second valve comprises a membrane provided in the plan of said first wafer and in the center of which is provided an annular rib, wherein the top of said rib is designed to bear against another wafer serving as a seat for this valve, and wherein at least said rib is covered by an oxide layer inducing in the membrane a predetermined pretension so that the valve is normally closed.
14. A micropump according to claim 13, wherein the pump inlet communicates with a compensation chamber disposed above said second valve so as to close the latter under the influence of the pressure prevailing at said inlet.
15. A micropump according to claim 13, wherein the membrane of the second valve is at least partially covered by a layer of a material which creates shearing forces in the membrane thereby inducing additional pretension.
16. A micropump according to claim 15, wherein the pump inlet communicates with a compensation chamber disposed above said second valve so as to close the latter under the influence of the pressure prevailing at said inlet.
17. A micropump according to claim 13, wherein on the side opposite said rib, said membrane is provided with a projection extending towards another wafer of the pump and designed to limit the travel of the membrane in the event that this is subjected to an excess pressure.
18. A micropump according to claim 17, wherein the pump inlet communicates with a compensation chamber disposed above said second valve so as to close the latter under the influence of the pressure prevailing at said inlet.
19. A micropump according to claim 13, wherein the rib provided respectively on the membrane of said first valve and on the membrane of said second valve are disposed on opposite faces of these membranes.
20. A micropump according to claim 19, wherein the pump inlet communicates with a compensation chamber disposed above said second valve so as to close the latter under the influence of the pressure prevailing at said inlet.
CA 2033181 1989-06-14 1990-06-12 Two valve micropump with improved outlet Expired - Lifetime CA2033181C (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
CH02241/89-1 1989-06-14
CH2241/89A CH680009A5 (en) 1989-06-14 1989-06-14 Micro-pump-for injection of medication dose
FR89/10699 1989-08-07
FR8910699A FR2650634B1 (en) 1989-08-07 1989-08-07 IMPROVED MICROPUMP
PCT/CH1990/000145 WO1990015929A1 (en) 1989-06-14 1990-06-12 Improved micro-pump

Publications (2)

Publication Number Publication Date
CA2033181A1 CA2033181A1 (en) 1990-12-15
CA2033181C true CA2033181C (en) 2000-10-24

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CA 2033181 Expired - Lifetime CA2033181C (en) 1989-06-14 1990-06-12 Two valve micropump with improved outlet

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JP (1) JPH04501449A (en)
KR (1) KR920701670A (en)
AT (1) ATE110142T1 (en)
AU (1) AU633104B2 (en)
CA (1) CA2033181C (en)
DE (1) DE69011631T2 (en)
ES (1) ES2061042T3 (en)
NO (1) NO173755C (en)
WO (1) WO1990015929A1 (en)

Families Citing this family (275)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH681168A5 (en) * 1989-11-10 1993-01-29 Westonbridge Int Ltd Micro-pump for medicinal dosing
EP0435653B1 (en) * 1989-12-27 1994-06-01 Seiko Epson Corporation Micropump
DE4006152A1 (en) * 1990-02-27 1991-08-29 Fraunhofer Ges Forschung MICROMINIATURIZED PUMP
CA2065735A1 (en) * 1990-07-10 1992-01-11 Harald T. G. Van Lintel Valve and micropump incorporating said valve
GB2254830A (en) * 1991-04-15 1992-10-21 Westonbridge Int Ltd Manufacturing thin plates having surface structures of different depths or heights
DE4143343C2 (en) * 1991-09-11 1994-09-22 Fraunhofer Ges Forschung Microminiaturized, electrostatically operated micromembrane pump
FR2705693B1 (en) * 1993-05-24 1995-07-28 Neuchatel Universite Method of manufacturing a micro-machined device to contain or convey a fluid.
US5466932A (en) * 1993-09-22 1995-11-14 Westinghouse Electric Corp. Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases
WO1995009987A1 (en) * 1993-10-04 1995-04-13 Research International, Inc. Micromachined fluid flow regulators
CH689836A5 (en) * 1994-01-14 1999-12-15 Westonbridge Int Ltd Micropump.
DE4402119C2 (en) * 1994-01-25 1998-07-23 Karlsruhe Forschzent Process for the production of micromembrane pumps
US5472577A (en) * 1994-06-30 1995-12-05 Iowa State University Research Foundation Fluid pumping system based on electrochemically-induced surface tension changes
DE19546570C1 (en) * 1995-12-13 1997-03-27 Inst Mikro Und Informationstec Fluid micropump incorporated in silicon chip
US6068751A (en) * 1995-12-18 2000-05-30 Neukermans; Armand P. Microfluidic valve and integrated microfluidic system
SE9600659D0 (en) * 1996-02-22 1996-02-22 Siemens Elema Ab Pump
US5961298A (en) * 1996-06-25 1999-10-05 California Institute Of Technology Traveling wave pump employing electroactive actuators
AU717626B2 (en) * 1996-10-03 2000-03-30 Debiotech S.A. Micro-machined device for fluids and method of manufacture
DE19648695C2 (en) * 1996-11-25 1999-07-22 Abb Patent Gmbh Device for the automatic and continuous analysis of liquid samples
DE19802367C1 (en) * 1997-02-19 1999-09-23 Hahn Schickard Ges Microdosing device array and method for operating the same
EP1003973B1 (en) * 1997-08-20 2003-04-16 Westonbridge International Limited Micro pump comprising an inlet control member for its self-priming
US7485263B2 (en) * 1997-08-26 2009-02-03 Eppendorf Ag Microproportioning system
DE19737978C2 (en) 1997-08-30 1999-09-16 Bayer Ag Electrochromic mirror
US6833242B2 (en) * 1997-09-23 2004-12-21 California Institute Of Technology Methods for detecting and sorting polynucleotides based on size
US7214298B2 (en) * 1997-09-23 2007-05-08 California Institute Of Technology Microfabricated cell sorter
US7070577B1 (en) 1998-02-02 2006-07-04 Medtronic, Inc Drive circuit having improved energy efficiency for implantable beneficial agent infusion or delivery device
EP1058565B1 (en) 1998-02-02 2003-05-02 Medtronic, Inc. Implantable drug infusion device having a safety valve
JP3543604B2 (en) * 1998-03-04 2004-07-14 株式会社日立製作所 Liquid sending device and automatic analyzer
US5993414A (en) * 1998-04-23 1999-11-30 Medtronic, Inc. Implantable device
US7875440B2 (en) 1998-05-01 2011-01-25 Arizona Board Of Regents Method of determining the nucleotide sequence of oligonucleotides and DNA molecules
US6780591B2 (en) 1998-05-01 2004-08-24 Arizona Board Of Regents Method of determining the nucleotide sequence of oligonucleotides and DNA molecules
MXPA01009999A (en) * 1999-04-06 2003-07-14 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth.
US7214540B2 (en) 1999-04-06 2007-05-08 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US7247490B2 (en) * 1999-04-06 2007-07-24 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US20020164812A1 (en) * 1999-04-06 2002-11-07 Uab Research Foundation Method for screening crystallization conditions in solution crystal growth
US7250305B2 (en) * 2001-07-30 2007-07-31 Uab Research Foundation Use of dye to distinguish salt and protein crystals under microcrystallization conditions
US7244396B2 (en) * 1999-04-06 2007-07-17 Uab Research Foundation Method for preparation of microarrays for screening of crystal growth conditions
US7144616B1 (en) * 1999-06-28 2006-12-05 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US6929030B2 (en) * 1999-06-28 2005-08-16 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7306672B2 (en) * 2001-04-06 2007-12-11 California Institute Of Technology Microfluidic free interface diffusion techniques
US8709153B2 (en) 1999-06-28 2014-04-29 California Institute Of Technology Microfludic protein crystallography techniques
US7052545B2 (en) * 2001-04-06 2006-05-30 California Institute Of Technology High throughput screening of crystallization of materials
US7459022B2 (en) * 2001-04-06 2008-12-02 California Institute Of Technology Microfluidic protein crystallography
US6818395B1 (en) 1999-06-28 2004-11-16 California Institute Of Technology Methods and apparatus for analyzing polynucleotide sequences
US7601270B1 (en) * 1999-06-28 2009-10-13 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US6899137B2 (en) * 1999-06-28 2005-05-31 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US7217321B2 (en) * 2001-04-06 2007-05-15 California Institute Of Technology Microfluidic protein crystallography techniques
US7195670B2 (en) * 2000-06-27 2007-03-27 California Institute Of Technology High throughput screening of crystallization of materials
US7244402B2 (en) * 2001-04-06 2007-07-17 California Institute Of Technology Microfluidic protein crystallography
US8550119B2 (en) * 1999-06-28 2013-10-08 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8052792B2 (en) * 2001-04-06 2011-11-08 California Institute Of Technology Microfluidic protein crystallography techniques
US20080277007A1 (en) * 1999-06-28 2008-11-13 California Institute Of Technology Microfabricated elastomeric valve and pump systems
AU2001240040A1 (en) * 2000-03-03 2001-09-17 California Institute Of Technology Combinatorial array for nucleic acid analysis
US7867763B2 (en) 2004-01-25 2011-01-11 Fluidigm Corporation Integrated chip carriers with thermocycler interfaces and methods of using the same
US20050118073A1 (en) * 2003-11-26 2005-06-02 Fluidigm Corporation Devices and methods for holding microfluidic devices
US6296452B1 (en) 2000-04-28 2001-10-02 Agilent Technologies, Inc. Microfluidic pumping
US7471394B2 (en) * 2000-08-02 2008-12-30 Honeywell International Inc. Optical detection system with polarizing beamsplitter
US8329118B2 (en) * 2004-09-02 2012-12-11 Honeywell International Inc. Method and apparatus for determining one or more operating parameters for a microfluidic circuit
US7630063B2 (en) * 2000-08-02 2009-12-08 Honeywell International Inc. Miniaturized cytometer for detecting multiple species in a sample
US7283223B2 (en) * 2002-08-21 2007-10-16 Honeywell International Inc. Cytometer having telecentric optics
US20060263888A1 (en) * 2000-06-02 2006-11-23 Honeywell International Inc. Differential white blood count on a disposable card
US7130046B2 (en) * 2004-09-27 2006-10-31 Honeywell International Inc. Data frame selection for cytometer analysis
US6837476B2 (en) * 2002-06-19 2005-01-04 Honeywell International Inc. Electrostatically actuated valve
US8071051B2 (en) * 2004-05-14 2011-12-06 Honeywell International Inc. Portable sample analyzer cartridge
US7420659B1 (en) 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US7641856B2 (en) * 2004-05-14 2010-01-05 Honeywell International Inc. Portable sample analyzer with removable cartridge
US7016022B2 (en) * 2000-08-02 2006-03-21 Honeywell International Inc. Dual use detectors for flow cytometry
US7242474B2 (en) * 2004-07-27 2007-07-10 Cox James A Cytometer having fluid core stream position control
US7215425B2 (en) * 2000-08-02 2007-05-08 Honeywell International Inc. Optical alignment for flow cytometry
US7262838B2 (en) * 2001-06-29 2007-08-28 Honeywell International Inc. Optical detection system for flow cytometry
US6568286B1 (en) 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US7978329B2 (en) * 2000-08-02 2011-07-12 Honeywell International Inc. Portable scattering and fluorescence cytometer
US6422826B1 (en) 2000-06-02 2002-07-23 Eastman Kodak Company Fluid pump and method
US6970245B2 (en) * 2000-08-02 2005-11-29 Honeywell International Inc. Optical alignment detection system
US7351376B1 (en) * 2000-06-05 2008-04-01 California Institute Of Technology Integrated active flux microfluidic devices and methods
AU2001273057A1 (en) * 2000-06-27 2002-01-08 Fluidigm Corporation A microfluidic design automation method and system
US6533951B1 (en) 2000-07-27 2003-03-18 Eastman Kodak Company Method of manufacturing fluid pump
US7277166B2 (en) * 2000-08-02 2007-10-02 Honeywell International Inc. Cytometer analysis cartridge optical configuration
US7000330B2 (en) * 2002-08-21 2006-02-21 Honeywell International Inc. Method and apparatus for receiving a removable media member
US6382228B1 (en) 2000-08-02 2002-05-07 Honeywell International Inc. Fluid driving system for flow cytometry
US7061595B2 (en) * 2000-08-02 2006-06-13 Honeywell International Inc. Miniaturized flow controller with closed loop regulation
WO2002023163A1 (en) 2000-09-15 2002-03-21 California Institute Of Technology Microfabricated crossflow devices and methods
US6386680B1 (en) 2000-10-02 2002-05-14 Eastman Kodak Company Fluid pump and ink jet print head
US7678547B2 (en) * 2000-10-03 2010-03-16 California Institute Of Technology Velocity independent analyte characterization
US7097809B2 (en) * 2000-10-03 2006-08-29 California Institute Of Technology Combinatorial synthesis system
WO2002029106A2 (en) * 2000-10-03 2002-04-11 California Institute Of Technology Microfluidic devices and methods of use
AU1189702A (en) 2000-10-13 2002-04-22 Fluidigm Corp Microfluidic device based sample injection system for analytical devices
WO2002065005A1 (en) * 2000-11-06 2002-08-22 California Institute Of Technology Electrostatic valves for microfluidic devices
EP2381116A1 (en) * 2000-11-16 2011-10-26 California Institute of Technology Apparatus and methods for conducting assays and high throughput screening
US6951632B2 (en) * 2000-11-16 2005-10-04 Fluidigm Corporation Microfluidic devices for introducing and dispensing fluids from microfluidic systems
US6554410B2 (en) 2000-12-28 2003-04-29 Eastman Kodak Company Printhead having gas flow ink droplet separation and method of diverging ink droplets
US6505921B2 (en) 2000-12-28 2003-01-14 Eastman Kodak Company Ink jet apparatus having amplified asymmetric heating drop deflection
US20020098122A1 (en) * 2001-01-22 2002-07-25 Angad Singh Active disposable microfluidic system with externally actuated micropump
US20050143789A1 (en) * 2001-01-30 2005-06-30 Whitehurst Todd K. Methods and systems for stimulating a peripheral nerve to treat chronic pain
KR100398309B1 (en) 2001-02-20 2003-09-19 한국과학기술원 Micropump actuated by the movement of liquid drop induced by continuous electrowetting
US6620151B2 (en) * 2001-03-01 2003-09-16 Advanced Neuromodulation Systems, Inc. Non-constant pressure infusion pump
US20050196785A1 (en) * 2001-03-05 2005-09-08 California Institute Of Technology Combinational array for nucleic acid analysis
WO2002072892A1 (en) * 2001-03-12 2002-09-19 California Institute Of Technology Methods and apparatus for analyzing polynucleotide sequences by asynchronous base extension
US7670429B2 (en) * 2001-04-05 2010-03-02 The California Institute Of Technology High throughput screening of crystallization of materials
EP1384022A4 (en) 2001-04-06 2004-08-04 California Inst Of Techn Nucleic acid amplification utilizing microfluidic devices
US20020164816A1 (en) * 2001-04-06 2002-11-07 California Institute Of Technology Microfluidic sample separation device
US6752922B2 (en) * 2001-04-06 2004-06-22 Fluidigm Corporation Microfluidic chromatography
WO2002081183A1 (en) * 2001-04-06 2002-10-17 Fluidigm Corporation Polymer surface modification
US6805841B2 (en) 2001-05-09 2004-10-19 The Provost Fellows And Scholars Of The College Of The Holy And Undivided Trinity Of Queen Elizabeth Near Dublin Liquid pumping system
US6474781B1 (en) 2001-05-21 2002-11-05 Eastman Kodak Company Continuous ink-jet printing method and apparatus with nozzle clusters
GB0112784D0 (en) * 2001-05-25 2001-07-18 The Technology Partnership Plc Pump
US20050149304A1 (en) * 2001-06-27 2005-07-07 Fluidigm Corporation Object oriented microfluidic design method and system
US6450628B1 (en) 2001-06-27 2002-09-17 Eastman Kodak Company Continuous ink jet printing apparatus with nozzles having different diameters
US6994932B2 (en) * 2001-06-28 2006-02-07 Foamex L.P. Liquid fuel reservoir for fuel cells
US6491362B1 (en) 2001-07-20 2002-12-10 Eastman Kodak Company Continuous ink jet printing apparatus with improved drop placement
US7075162B2 (en) * 2001-08-30 2006-07-11 Fluidigm Corporation Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes
GB0123054D0 (en) * 2001-09-25 2001-11-14 Randox Lab Ltd Passive microvalve
US6827429B2 (en) 2001-10-03 2004-12-07 Eastman Kodak Company Continuous ink jet printing method and apparatus with ink droplet velocity discrimination
US6729856B2 (en) 2001-10-09 2004-05-04 Honeywell International Inc. Electrostatically actuated pump with elastic restoring forces
WO2003031066A1 (en) 2001-10-11 2003-04-17 California Institute Of Technology Devices utilizing self-assembled gel and method of manufacture
US8440093B1 (en) 2001-10-26 2013-05-14 Fuidigm Corporation Methods and devices for electronic and magnetic sensing of the contents of microfluidic flow channels
CH696661A5 (en) * 2001-11-06 2007-09-14 Hermann Dr Keller Infusion pump.
US7691333B2 (en) 2001-11-30 2010-04-06 Fluidigm Corporation Microfluidic device and methods of using same
AU2002351187A1 (en) 2001-11-30 2003-06-17 Fluidigm Corporation Microfluidic device and methods of using same
EP1461414B1 (en) * 2001-12-31 2009-04-22 The Provost Fellows and Scholars of the College of the Holy Undivided Trinity of Queen Elizabeth Near Dublin Assembly for cell-based assays
US6869275B2 (en) 2002-02-14 2005-03-22 Philip Morris Usa Inc. Piezoelectrically driven fluids pump and piezoelectric fluid valve
US6793328B2 (en) 2002-03-18 2004-09-21 Eastman Kodak Company Continuous ink jet printing apparatus with improved drop placement
WO2003085379A2 (en) 2002-04-01 2003-10-16 Fluidigm Corporation Microfluidic particle-analysis systems
US7312085B2 (en) 2002-04-01 2007-12-25 Fluidigm Corporation Microfluidic particle-analysis systems
US6682182B2 (en) 2002-04-10 2004-01-27 Eastman Kodak Company Continuous ink jet printing with improved drop formation
US20070026528A1 (en) * 2002-05-30 2007-02-01 Delucas Lawrence J Method for screening crystallization conditions in solution crystal growth
EP1518288A2 (en) * 2002-06-28 2005-03-30 Foamex L.P. Fuel reservoir for liquid fuel cells
US20040001991A1 (en) * 2002-07-01 2004-01-01 Kinkelaar Mark R. Capillarity structures for water and/or fuel management in fuel cells
WO2004005898A1 (en) * 2002-07-10 2004-01-15 Uab Research Foundation Method for distinguishing between biomolecule and non-biomolecule crystals
US7291410B2 (en) * 2002-09-18 2007-11-06 Kinkelaar Mark R Orientation independent liquid fuel reservoir
WO2004028955A2 (en) * 2002-09-25 2004-04-08 California Institute Of Technology Microfluidic large scale integration
US8220494B2 (en) * 2002-09-25 2012-07-17 California Institute Of Technology Microfluidic large scale integration
US8871446B2 (en) 2002-10-02 2014-10-28 California Institute Of Technology Microfluidic nucleic acid analysis
US6644792B1 (en) 2002-10-25 2003-11-11 Eastman Kodak Company Ink droplet forming apparatus and method for use in ink jet printer system
US8828663B2 (en) 2005-03-18 2014-09-09 Fluidigm Corporation Thermal reaction device and method for using the same
US7666361B2 (en) 2003-04-03 2010-02-23 Fluidigm Corporation Microfluidic devices and methods of using same
US7604965B2 (en) 2003-04-03 2009-10-20 Fluidigm Corporation Thermal reaction device and method for using the same
US7476363B2 (en) * 2003-04-03 2009-01-13 Fluidigm Corporation Microfluidic devices and methods of using same
US20050145496A1 (en) 2003-04-03 2005-07-07 Federico Goodsaid Thermal reaction device and method for using the same
EP1685282A2 (en) * 2003-04-17 2006-08-02 Fluidigm Corporation Crystal growth devices and systems, and methods for using same
WO2004098684A2 (en) * 2003-05-08 2004-11-18 Novo Nordisk A/S Skin mountable injection device with a detachable needle insertion actuation
EP1624914B1 (en) * 2003-05-08 2008-04-16 Novo Nordisk A/S Internal needle inserter
EP1475113A1 (en) * 2003-05-08 2004-11-10 Novo Nordisk A/S External needle inserter
AU2004240944A1 (en) 2003-05-20 2004-12-02 Fluidigm Corporation Method and system for microfluidic device and imaging thereof
US7152964B2 (en) * 2003-05-21 2006-12-26 Eastman Kodak Company Very high speed printing using selective deflection droplet separation
WO2005008348A2 (en) * 2003-07-07 2005-01-27 Georgia Tech Research Corporation System and method for thermal management using distributed synthetic jet actuators
EP1667829A4 (en) * 2003-07-28 2008-12-10 Fluidigm Corp Image processing method and system for microfluidic devices
EP1502613A1 (en) * 2003-08-01 2005-02-02 Novo Nordisk A/S Needle device with retraction means
US7413712B2 (en) * 2003-08-11 2008-08-19 California Institute Of Technology Microfluidic rotary flow reactor matrix
US7766902B2 (en) * 2003-08-13 2010-08-03 Wisconsin Alumni Research Foundation Microfluidic device for drug delivery
KR20060099520A (en) * 2003-10-21 2006-09-19 노보 노르디스크 에이/에스 Medical skin mountable device
US7169560B2 (en) * 2003-11-12 2007-01-30 Helicos Biosciences Corporation Short cycle methods for sequencing polynucleotides
US7407799B2 (en) 2004-01-16 2008-08-05 California Institute Of Technology Microfluidic chemostat
CN101914803B (en) * 2004-01-25 2012-07-04 弗卢丁公司 Crystal forming devices and systems and methods for making and using the same
WO2005080605A2 (en) 2004-02-19 2005-09-01 Helicos Biosciences Corporation Methods and kits for analyzing polynucleotide sequences
WO2005094920A1 (en) * 2004-03-30 2005-10-13 Novo Nordisk A/S Actuator system comprising lever mechanism
US7364277B2 (en) 2004-04-14 2008-04-29 Eastman Kodak Company Apparatus and method of controlling droplet trajectory
DE602005027700D1 (en) 2004-05-25 2011-06-09 Helicos Biosciences Corp PROCESS FOR NUCLEIC ACID IMMOBILIZATION
US7476734B2 (en) 2005-12-06 2009-01-13 Helicos Biosciences Corporation Nucleotide analogs
US20060024751A1 (en) * 2004-06-03 2006-02-02 Fluidigm Corporation Scale-up methods and systems for performing the same
US20060196638A1 (en) * 2004-07-07 2006-09-07 Georgia Tech Research Corporation System and method for thermal management using distributed synthetic jet actuators
US7273269B2 (en) 2004-07-30 2007-09-25 Eastman Kodak Company Suppression of artifacts in inkjet printing
US7612871B2 (en) * 2004-09-01 2009-11-03 Honeywell International Inc Frequency-multiplexed detection of multiple wavelength light for flow cytometry
WO2006032689A1 (en) * 2004-09-22 2006-03-30 Novo Nordisk A/S Medical device with transcutaneous cannula device
WO2006032692A1 (en) * 2004-09-22 2006-03-30 Novo Nordisk A/S Medical device with cannula inserter
US7630075B2 (en) * 2004-09-27 2009-12-08 Honeywell International Inc. Circular polarization illumination based analyzer system
US7261396B2 (en) * 2004-10-14 2007-08-28 Eastman Kodak Company Continuous inkjet printer having adjustable drop placement
CN100356071C (en) * 2004-10-25 2007-12-19 北京大学 Minitype jet pump and preparation method
US7288469B2 (en) * 2004-12-03 2007-10-30 Eastman Kodak Company Methods and apparatuses for forming an article
DE602005016298D1 (en) * 2004-12-06 2009-10-08 Novo Nordisk As VENTILATED DEVICE AT THE SKIN
US20060134510A1 (en) * 2004-12-21 2006-06-22 Cleopatra Cabuz Air cell air flow control system and method
US7222639B2 (en) * 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7220549B2 (en) 2004-12-30 2007-05-22 Helicos Biosciences Corporation Stabilizing a nucleic acid for nucleic acid sequencing
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
JP2008528086A (en) 2005-01-24 2008-07-31 ノボ・ノルデイスク・エー／エス Medical device with protected puncture device
US7482120B2 (en) 2005-01-28 2009-01-27 Helicos Biosciences Corporation Methods and compositions for improving fidelity in a nucleic acid synthesis reaction
US7445017B2 (en) * 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
WO2006089958A1 (en) * 2005-02-25 2006-08-31 Novo Nordisk A/S Pump assembly with safety valve
US20060194724A1 (en) * 2005-02-25 2006-08-31 Whitehurst Todd K Methods and systems for nerve regeneration
CN101438143B (en) 2005-04-29 2013-06-12 霍尼韦尔国际公司 Cytometer cell counting and size measurement method
CN101175516B (en) * 2005-05-13 2011-02-16 诺和诺德公司 Medical device adapted to detect disengagement of a transcutaneous device
US7320338B2 (en) * 2005-06-03 2008-01-22 Honeywell International Inc. Microvalve package assembly
US8273294B2 (en) * 2005-07-01 2012-09-25 Honeywell International Inc. Molded cartridge with 3-D hydrodynamic focusing
US8361410B2 (en) * 2005-07-01 2013-01-29 Honeywell International Inc. Flow metered analyzer
CN101253401B (en) * 2005-07-01 2013-01-02 霍尼韦尔国际公司 A molded cartridge with 3D hydrodynamic focusing
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US7843563B2 (en) * 2005-08-16 2010-11-30 Honeywell International Inc. Light scattering and imaging optical system
US7666593B2 (en) 2005-08-26 2010-02-23 Helicos Biosciences Corporation Single molecule sequencing of captured nucleic acids
US20070051415A1 (en) * 2005-09-07 2007-03-08 Honeywell International Inc. Microvalve switching array
US7673976B2 (en) 2005-09-16 2010-03-09 Eastman Kodak Company Continuous ink jet apparatus and method using a plurality of break-off times
US7249830B2 (en) * 2005-09-16 2007-07-31 Eastman Kodak Company Ink jet break-off length controlled dynamically by individual jet stimulation
US7434919B2 (en) 2005-09-16 2008-10-14 Eastman Kodak Company Ink jet break-off length measurement apparatus and method
US7364276B2 (en) 2005-09-16 2008-04-29 Eastman Kodak Company Continuous ink jet apparatus with integrated drop action devices and control circuitry
US7624755B2 (en) 2005-12-09 2009-12-01 Honeywell International Inc. Gas valve with overtravel
JP2009521684A (en) * 2005-12-22 2009-06-04 ハネウェル・インターナショナル・インコーポレーテッド Portable sample analyzer cartridge
JP5175213B2 (en) * 2005-12-22 2013-04-03 ハネウェル・インターナショナル・インコーポレーテッド Portable sample analysis system
JP2009521683A (en) * 2005-12-22 2009-06-04 ハネウェル・インターナショナル・インコーポレーテッド Analyzer system
EP1966588B1 (en) * 2005-12-29 2018-12-12 Honeywell International Inc. Assay implementation in a microfluidic format
US7815868B1 (en) 2006-02-28 2010-10-19 Fluidigm Corporation Microfluidic reaction apparatus for high throughput screening
US7397546B2 (en) 2006-03-08 2008-07-08 Helicos Biosciences Corporation Systems and methods for reducing detected intensity non-uniformity in a laser beam
US20090062778A1 (en) * 2006-03-13 2009-03-05 Novo Nordisk A/S Medical System Comprising Dual-Purpose Communication Means
CN101401313B (en) * 2006-03-13 2014-06-11 诺沃—诺迪斯克有限公司 Secure pairing of electronic devices using dual means of communication
US7523762B2 (en) 2006-03-22 2009-04-28 Honeywell International Inc. Modulating gas valves and systems
EP1839695A1 (en) * 2006-03-31 2007-10-03 Debiotech S.A. Medical liquid injection device
CN101426542A (en) * 2006-04-26 2009-05-06 诺沃-诺迪斯克有限公司 Skin-mountable device in packaging comprising coated seal member
DE102006020716B4 (en) * 2006-05-04 2012-03-01 Technische Universität Dresden Microfluidic processor
WO2009111769A2 (en) * 2008-03-07 2009-09-11 Advanced Liquid Logic, Inc. Reagent and sample preparation and loading on a fluidic device
WO2007141210A1 (en) * 2006-06-06 2007-12-13 Novo Nordisk A/S Assembly comprising skin-mountable device and packaging therefore
US20070291058A1 (en) * 2006-06-20 2007-12-20 Fagerquist Randy L Continuous ink jet printing with satellite droplets
WO2008009290A1 (en) * 2006-07-20 2008-01-24 Cequr Aps. A flow system with a flow restrictor
US8007704B2 (en) * 2006-07-20 2011-08-30 Honeywell International Inc. Insert molded actuator components
FR2905429A1 (en) 2006-09-04 2008-03-07 Debiotech Sa DEVICE FOR DELIVERING A LIQUID COMPRISING A PUMP AND A VALVE
US7543604B2 (en) * 2006-09-11 2009-06-09 Honeywell International Inc. Control valve
US8202267B2 (en) * 2006-10-10 2012-06-19 Medsolve Technologies, Inc. Method and apparatus for infusing liquid to a body
US7777395B2 (en) * 2006-10-12 2010-08-17 Eastman Kodak Company Continuous drop emitter with reduced stimulation crosstalk
DE102006051535A1 (en) * 2006-10-27 2008-12-18 Andreas Dr. Richter Automatic microfluidic processor
US7644731B2 (en) 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
US7651206B2 (en) * 2006-12-19 2010-01-26 Eastman Kodak Company Output image processing for small drop printing
US20080161754A1 (en) * 2006-12-29 2008-07-03 Medsolve Technologies, Inc. Method and apparatus for infusing liquid to a body
WO2008103963A1 (en) * 2007-02-22 2008-08-28 Sterling Investments Lc Micro fluid transfer system
JP2010520409A (en) * 2007-03-06 2010-06-10 ノボ・ノルデイスク・エー／エス Pump assembly with actuator system
US7758171B2 (en) * 2007-03-19 2010-07-20 Eastman Kodak Company Aerodynamic error reduction for liquid drop emitters
DE102007035721B4 (en) * 2007-07-30 2019-02-07 Robert Bosch Gmbh Microvalve, method of manufacturing a microvalve and micropump
DE102007045637A1 (en) * 2007-09-25 2009-04-02 Robert Bosch Gmbh Microdosing device for dosing small amounts of a medium
JP2009083382A (en) * 2007-10-01 2009-04-23 Brother Ind Ltd Image forming device and image processing program
CN101888859B (en) * 2007-10-31 2014-09-17 诺沃-诺迪斯克有限公司 Non-porous material as sterilization barrier
US8708961B2 (en) * 2008-01-28 2014-04-29 Medsolve Technologies, Inc. Apparatus for infusing liquid to a body
US8795259B2 (en) * 2008-08-01 2014-08-05 Wisconsin Alumni Research Foundation Drug delivery platform incorporating hydrogel pumping mechanism with guided fluid flow
US8986250B2 (en) * 2008-08-01 2015-03-24 Wisconsin Alumni Research Foundation Drug delivery platform utilizing hydrogel pumping mechanism
US20100034704A1 (en) * 2008-08-06 2010-02-11 Honeywell International Inc. Microfluidic cartridge channel with reduced bubble formation
US8037354B2 (en) 2008-09-18 2011-10-11 Honeywell International Inc. Apparatus and method for operating a computing platform without a battery pack
US8267885B2 (en) * 2008-12-31 2012-09-18 Fresenius Medical Care Holdings, Inc. Methods and apparatus for delivering peritoneal dialysis (PD) solution with a peristaltic pump
US8197235B2 (en) 2009-02-18 2012-06-12 Davis David L Infusion pump with integrated permanent magnet
US8353864B2 (en) 2009-02-18 2013-01-15 Davis David L Low cost disposable infusion pump
TWI435196B (en) * 2009-10-15 2014-04-21 Pivotal Systems Corp Method and apparatus for gas flow control
US8104878B2 (en) 2009-11-06 2012-01-31 Eastman Kodak Company Phase shifts for two groups of nozzles
US8231207B2 (en) * 2009-11-06 2012-07-31 Eastman Kodak Company Phase shifts for printing at two speeds
US8226217B2 (en) * 2009-11-06 2012-07-24 Eastman Kodak Company Dynamic phase shifts to improve stream print
FR2952628A1 (en) * 2009-11-13 2011-05-20 Commissariat Energie Atomique PROCESS FOR MANUFACTURING AT LEAST ONE DEFORMABLE MEMBRANE MICROPUMP AND DEFORMABLE MEMBRANE MICROPUMP
US8328757B2 (en) * 2010-01-08 2012-12-11 Wisconsin Alumni Research Foundation Bladder arrangement for microneedle-based drug delivery device
JP5828372B2 (en) * 2010-09-21 2015-12-02 セイコーエプソン株式会社 Cooling device and projector
US9400004B2 (en) 2010-11-29 2016-07-26 Pivotal Systems Corporation Transient measurements of mass flow controllers
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US8741235B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Two step sample loading of a fluid analysis cartridge
US8741234B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Disposable cartridge for fluid analysis
US8741233B2 (en) 2011-12-27 2014-06-03 Honeywell International Inc. Disposable cartridge for fluid analysis
US8663583B2 (en) 2011-12-27 2014-03-04 Honeywell International Inc. Disposable cartridge for fluid analysis
AU2013216967A1 (en) * 2012-02-10 2014-08-28 Kci Licensing, Inc. Systems and methods for monitoring reduced pressure supplied by a disc pump system
DE102012206042B4 (en) 2012-04-13 2013-11-07 Technische Universität Dresden Method and device for targeted process control in a microfluidic processor with integrated active elements
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
US20140296784A1 (en) * 2013-03-27 2014-10-02 Animas Corporation Infusion device with layered structure having durable and disposable components
US9162454B2 (en) 2013-04-11 2015-10-20 Eastman Kodak Company Printhead including acoustic dampening structure
US9168740B2 (en) 2013-04-11 2015-10-27 Eastman Kodak Company Printhead including acoustic dampening structure
EP2868970B1 (en) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regulating device
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
US9199462B1 (en) 2014-09-19 2015-12-01 Eastman Kodak Company Printhead with print artifact supressing cavity
EP3939634A1 (en) * 2014-09-22 2022-01-19 Becton, Dickinson and Company Plate with integral fluid path channels
US10401202B2 (en) 2015-07-10 2019-09-03 Pivotal Systems Corporation Method and apparatus for gas flow control
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
CN110439803A (en) * 2019-08-28 2019-11-12 杨民寿 A kind of water pump
CN112843381A (en) * 2021-02-28 2021-05-28 吉林大学 Wheel type piezoelectric precision infusion pump with alarm function

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2127774A5 (en) * 1971-02-26 1972-10-13 Polypump Curacao Nv
DE2639992A1 (en) * 1976-09-04 1978-03-09 Sigdell Jan Erik Dr Infusion pump and flow meter - has single diaphragm for pump and inlet and outlet valves
US4265601A (en) * 1978-09-05 1981-05-05 Harold Mandroian Three valve precision pump apparatus with head pressure flowthrough protection
US4265600A (en) * 1978-09-05 1981-05-05 Harold Mandroian Pump apparatus
NL8302860A (en) * 1983-08-15 1985-03-01 Stichting Ct Voor Micro Elektr PIEZO ELECTRIC MICRO PUMP.
US4911616A (en) * 1988-01-19 1990-03-27 Laumann Jr Carl W Micro miniature implantable pump
CH679555A5 (en) * 1989-04-11 1992-03-13 Westonbridge Int Ltd
CH681168A5 (en) * 1989-11-10 1993-01-29 Westonbridge Int Ltd Micro-pump for medicinal dosing

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NO910192L (en) 1991-01-17
NO910192D0 (en) 1991-01-17
US5224843A (en) 1993-07-06
ES2061042T3 (en) 1994-12-01
ATE110142T1 (en) 1994-09-15
WO1990015929A1 (en) 1990-12-27
CA2033181A1 (en) 1990-12-15
AU633104B2 (en) 1993-01-21
EP0429591A1 (en) 1991-06-05
JPH04501449A (en) 1992-03-12
EP0429591B1 (en) 1994-08-17
KR920701670A (en) 1992-08-12
DE69011631T2 (en) 1995-03-23
AU5720790A (en) 1991-01-08
NO173755B (en) 1993-10-18
NO173755C (en) 1994-01-26
DE69011631D1 (en) 1994-09-22

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