CA2084945A1 - Method and device for steering light - Google Patents

Method and device for steering light

Info

Publication number
CA2084945A1
CA2084945A1 CA002084945A CA2084945A CA2084945A1 CA 2084945 A1 CA2084945 A1 CA 2084945A1 CA 002084945 A CA002084945 A CA 002084945A CA 2084945 A CA2084945 A CA 2084945A CA 2084945 A1 CA2084945 A1 CA 2084945A1
Authority
CA
Canada
Prior art keywords
mirror
light
steering light
supporting elements
displaced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002084945A
Other languages
French (fr)
Other versions
CA2084945C (en
Inventor
William E. Nelson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
William E. Nelson
Texas Instruments Incorporated
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by William E. Nelson, Texas Instruments Incorporated filed Critical William E. Nelson
Publication of CA2084945A1 publication Critical patent/CA2084945A1/en
Application granted granted Critical
Publication of CA2084945C publication Critical patent/CA2084945C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Abstract

A method for periodically steering a beam of light is disclosed comprising the steps of reflecting a beam of light off of a mirror (16) suspended by at least two supporting elements (20). At least one of the supporting elements (20) is displaced from an edge of the mirror. A
periodic voltage is applied to an electrode displaced from the mirror to cause the mirror to rotate about an axis.
CA002084945A 1991-12-20 1992-12-09 Method and device for steering light Expired - Fee Related CA2084945C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US811,408 1991-12-20
US07/811,408 US5202785A (en) 1991-12-20 1991-12-20 Method and device for steering light

Publications (2)

Publication Number Publication Date
CA2084945A1 true CA2084945A1 (en) 1993-06-21
CA2084945C CA2084945C (en) 2003-03-18

Family

ID=25206469

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002084945A Expired - Fee Related CA2084945C (en) 1991-12-20 1992-12-09 Method and device for steering light

Country Status (5)

Country Link
US (1) US5202785A (en)
JP (1) JP3203276B2 (en)
KR (1) KR100276995B1 (en)
CA (1) CA2084945C (en)
TW (1) TW218936B (en)

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US7911672B2 (en) * 2006-12-26 2011-03-22 Zhou Tiansheng Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore
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Also Published As

Publication number Publication date
CA2084945C (en) 2003-03-18
JP3203276B2 (en) 2001-08-27
JPH0618804A (en) 1994-01-28
US5202785A (en) 1993-04-13
KR930013775A (en) 1993-07-22
TW218936B (en) 1994-01-11
KR100276995B1 (en) 2001-01-15

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