CA2087625C - Non-systolic time delay and integration printing - Google Patents
Non-systolic time delay and integration printing Download PDFInfo
- Publication number
- CA2087625C CA2087625C CA002087625A CA2087625A CA2087625C CA 2087625 C CA2087625 C CA 2087625C CA 002087625 A CA002087625 A CA 002087625A CA 2087625 A CA2087625 A CA 2087625A CA 2087625 C CA2087625 C CA 2087625C
- Authority
- CA
- Canada
- Prior art keywords
- modulator
- data
- cells
- addressing circuitry
- photosensitive media
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K15/00—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers
- G06K15/02—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers
- G06K15/12—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers
- G06K15/1238—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers simultaneously exposing more than one point
- G06K15/1242—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers simultaneously exposing more than one point on one main scanning line
- G06K15/1252—Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using printers by photographic printing, e.g. by laser printers simultaneously exposing more than one point on one main scanning line using an array of light modulators, e.g. a linear array
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Facsimile Scanning Arrangements (AREA)
- Fax Reproducing Arrangements (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
A method for printing or exposing photosensitive media is disclosed herein.
The method uses standard spatial light modulators with standard addressing circuitry. The data is written to the device for the first row, the photosensitive media is exposed to the light reflected from the device, and the device is turned off.
The data from the first row is then written to the second line of the device, and new data is loaded into the first line of the device. The media is again exposed.
This is repeated until the entire region of the drum is completely exposed. The device can be repositioned to cover a different region of the drum and the process would be repeated.
The method uses standard spatial light modulators with standard addressing circuitry. The data is written to the device for the first row, the photosensitive media is exposed to the light reflected from the device, and the device is turned off.
The data from the first row is then written to the second line of the device, and new data is loaded into the first line of the device. The media is again exposed.
This is repeated until the entire region of the drum is completely exposed. The device can be repositioned to cover a different region of the drum and the process would be repeated.
Description
20~76~~
NON-SYSTOLIC TIME DELAY AND INTEGRATION PRINTING
BACKGROUND OF THE INVENTION
1. Field of the invention This invention relates to methods of printing, more specifically to printing using spatial light modulators.
NON-SYSTOLIC TIME DELAY AND INTEGRATION PRINTING
BACKGROUND OF THE INVENTION
1. Field of the invention This invention relates to methods of printing, more specifically to printing using spatial light modulators.
2. Back,~round of the invention The use of spatial light modulators in conjunction with a light source has many advantages over other types of optical printing, such as those employing scanned lasers. The spatial light modulator can use simpler illumination schemes, normally requires less peripheral equipment, and less power. Printing on large-area, low-sensitivity photosensitive materials, however, does bring up new areas of concern.
One of the many areas such photosensitive materials are used is in the patterning of printed circuit boards (PCBs), and printing plates. Normally, a sheet of such material or the negative that will be used to expose such media is wrapped around a drum, and the desired pattern is exposed onto the sheet using lasers while the drum spins, much like a xerographic printer. It would be an advantage to use spatial light modulators for reasons discussed above.
Some problems exist, however, with the use of spatial light modulators (SLMs), such as liquid crystal display cells (LCD), or deformable mirror devices (DlViDs). In order for the machine to be coat-effective, it must produce a certain number of completed sheets of material in a given time frame. As it turns out, this requirement is difficult to meet using standard light sources and simple modulators. The light is :., .,.
20~7~2~
not bright enough to expose the media within the time limit, as it is a "slow"
media, requiring long exposure.
One solution is discussed in U.S. Patent 5,049, 901. This solution uses a 1000 cell X 100 line spatial light modulator array. The data is loaded onto the cells of the array from the top down. After the first line of data is loaded onto the first row of cells, it is exposed onto the drum. Then the first line of data is then shifted down to the second row of cells. The second line of data is loaded onto the first row of cells, and then these two rows are exposed. The data shifting down the array is coordinated with the spinning of the drum, so the same data is exposed onto the same line on the drum for approximately 100 lines.
Typically, the illumination patterns from conventional light sources are brighter in the center than at the edges, and no illumination pattern is completely uniform. This is corrected with the last lines of the array. Depending on the amount of correction necessary, the number of lines is up to the designer. The center cell or cells are turned off after a predetermined number of lines. The cells on either side of the center region are left on for a pre-determined number of lines. The cells further away from the center regions are Left on for even more lines. This continues until the last line, in which only the cells at the edges remain on. In this way, the darker areas of the image are exposed for longer durations to equalize exposure time across the image.
This solution involves the use of a modulator array consisting of an array of shift registers rather than conventional x/y addressing. The registers shift the data .: ~~~~..,.,.~..._._... .._ _ .
20~'~~25 down the array, as discussed previously. For some applications, or some modulators, shift registers are impractical because of the amount of space they require.
In the case of the DMD, the complexity of the shift registers makes it difficult to manufacture the device using the already-established processing techniques.
;;;
rij ~~~,~.,e . ......
SUMMARY OF THE INVENTION
The present invention disclosed herein comprises a method of printing or exposing photosensitive media using the cells of a standard spatial light modulator and standard addressing circuitry that allows the use of a less-powerful lamp, and smaller geometries of addressing circuitry. It is an advantage of this invention that it does not require a custom spatial light modulator.
In accordance with one aspect of the present invention there is provided a method of printing using at least one spatial light modulator, each said modulator comprised of an array of individually addressable cells arranged in a plurality of rows, and addressing circuitry corresponding to said rows of cells, said method comprising the steps of: a. printing comprising the steps of: i. writing a line of data to said addressing circuitry corresponding to a row of said cells of said modulator; ii. illuminating said modulator with light from a light source;
iii.
reflecting said light to a photosensitive media with said modulator such that said reflected light forms an image on said photosensitive media; iv. writing new data to said addressing circuitry such that each line of data previously written is written to said addressing circuitry corresponding to a row of said cells adjacent to a row of said cells corresponding to said addressing circuitry said line of data was previously written to; b. repeating steps ii. through iv. of said printing step until a predetermined region on said photosensitive media has been completely exposed;
and c. repositioning said at least one modulator to expose a different region on said photosensitive media.
In accordance with another aspect of the present invention there is provided a method of printing using at least one spatial light modulator, each said modulator comprised of an array of individually addressable cells arranged in a plurality of rows, and addressing circuitry corresponding to said rows of cells, said method comprising the steps of: a. printing comprising the steps of: i. writing a line of data to said addressing circuitry corresponding to a row of said cells of said modulator; ii. illuminating said modulator with light from a light source;
iii.
reflecting said light to a photosensitive media with said modulator such that said reflected light forms an image on said photosensitive media; iv. writing new data to said addressing circuitry such that each line of data previously written is written to said addressing circuitry corresponding to a row of said cells adjacent to a row of said cells corresponding to said addressing circuitry said line of data was previously written to; and b. repeating steps ii. through iv. of said printing step until a predetermined region on said photosensitive media has been completely exposed.
Page 4a BRxEF DESCRLPTION OF THE DRAWINGS
For a more complete understanding of the present invention and for further .advantages thereof, reference is now made to the following Detailed Description taken in conjunction with the accompanying Drawings in which:
FIGURE la shows a spatial light modulator.
FIGURE 1 b shows a timing diagram for the exposure time of a spatial light modulator.
FIGURE 2a shows a spatial light modulator and the area it exposes on a photoreceptor drum.
FIGURE 2b shows a portion of the face of~ a modulator which would be active when it has been fully loaded with a data pattern that might be used.
FIGURE 3 shows an adapted spatial light modulator.
FIGURE 4 shows three spatial Light modulators and the area they expose on a photoreceptor drum.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
Figure la shows a typical spatial light modulator array 10. The modulator may consist of individual cells, or cells grouped in regions, such as lines.
The modulator shown has lines depicted, but it is understood that these lines could consist of hundreds of cells. S irnilarly, the modulator could be of any type, but for discussion purposes, the modulator discussed will be of the deformable mirror type. Deformable mirror devices, or DMDs, consist of a multiplicity of tiny mirrors suspended over an air gap. Addressing circuitry is associated with each tiny mirror, which causes the mirror to deflect in one direction or another, 1 o depending on the architecture c~f the DMD, and the data in the addressing circuitry.
The addressing circuitry normally consists of one or more transistors and is preferably underneath the air g;ap on the substrate. When a transistor is turned on, electrostatic forces build in the; air gap, causing the mirror to be deflected towards the transistor.
I5 The array shown is assumed to be 768 cells wide, and 576 lines long, a configuration that is currently manufactured by the assignee of the present invention for video applications. Row 1 on the modulator, designated by reference numeral 12, is at the top of the: device. It is loaded with data for the first line to be exposed on the pllotosensitiwe media. Aiaer it is exposed, the illumination 2o must be turned off. Unlike the method previously discussed with respect to U.S. Patent No. 5,049,901, thf; data is not shifted down the device. Instead, according to the preferred embodiment, the entire device is rewritten. The first line of data is then written to the addressing circuitry for row 2 on the device, shown with reference numeral 14. The data for data line 2 is written onto the addressing circuitry for row 1 on the device. This is repeated until the entire device minus whatever number of correction lines has been filled with data. When the next line is written to modulator row l, according to the preferred embodiment, it will be the 477'" line of data, rather than the 576'"
line of data for reasons discussed in detail below. The number of lines of data is determined by the size of the drum. Typically, the designer would coordinate the loading of line 1 of data with some feature on the drum. A possible synchronization point would be the area of the drum's surface that has the fixtures which hold the negative in lalace. Many thousands of lines of data. may be 1o necessary to completely expose the entire circumference of the negative on the drum .
Numeral 16 depicts row 476 of the device. The lines between this row and the bottom row of the device 18, which is the 576t~' line of the array, is used to equalize the illumination profile as previously discussed, and which will be further discussed at Figure 2b.
Figure 1b shows the timing of the light source for the above scheme. The horizontal axis 20 is. the time axis. 'the vertical axis 22 is the illumination intensity axis. During the time interval between tic marks 24 and 26, the light is on the device. During the interval between tic marks 26 and 28, the illumination is off as the data is written to the device. The entire interval shown by tic marks 24 to 28 on the horizontal axis is the amount of time to expose and then rewrite the device.
Obviously, as can be seen by this diagram, the illumination is only on a fraction of the total interval 28. This low duty cycle may result in a loss of brightness as great as an order of magnitude. However, this loss is not as drastic as it seems, as it ran be compensated for in other areas. For example, using multiple devices in tandem re~ui.res less repositioning to cover the entire negative, making the overall system using spatial light modulators faster than first considered. As another example, all 576 rows do not have to be used. To write 100 rows as in the method previously discussed in U.S. Patent No. 5,049,091, it takes a modulator with circuitry such as the DMD 25 p,seconds to complete the operation.
Figure 2a shows the modulator positioned to write onto or expose the drum.
The light could be positioned sc.~mewhere around position 30, and the light would l0 travel along path 32 to the modulator array 10. Typically, there are optical elements such as lenses or mirrors in this path. Since the geometry of the path and the combination of the elements have so many possible variations, they are not shown.
As light from path 32 impinges upon the modulator, the selected cells on the modulator direct their respective portions of the beam to the drum 36 along path 34. The cells that are not selfacted to send light to the drum can be configured to either return light back to the source or to direct it away fxom the drum in another direction. The self;ction depcxnds on the confines of the optical system and the capabilities of the spatial light modulator.
2o Region 38 on drum 36 shows the area being exposed on the photosensitive material on the face of the drum. Photosensitive, in the application, is meant to include any material that develops some kind of differentiation that can be exploited for printing between areas exposed to radiation and areas not exposed to the radiation. The radiation is typically in the infrared to ultraviolet range, due to the, availability of sources and optics, but is not assumed to be limited to that range. The photosensitive media could be intended for use as a negative for a printing process, such as in printing negatives for printed circuit boards, (PCBs), an offset printing plate, a film or paper positive (a negative that has been color or contrast reversed), or other such items. Additionally, this media could be the finished photographic product. For example, instead of making a negative to pattern the PCB, the board itself could be patterned directly. Additionally, other items could be printed or exposed directly, such as film or paper positives.
Figure 2b shows what the data would possibly look like on the face of the modulator 10 as if seen from the drum. The region 1 l, that is not hatched is the area being used to balance out the illumination profile.
In order to further overcome the limitation of rewriting the device every cycle, an adaptation of the video chip is shown in Figure 3. A bank of shift registers 40a-40b are now at the top of the modulator 10. This is used to load the data into the columns of addressing circuitry. This can be used to speed up the write time of the device during the OFF part of the cycle. Instead of resetting the device and then loading all of the data lines into the device from off chip, switches 42a-42b are activated and the data currently in row 1 12 can be written up into shift register 40, the switches 42a-42b are then returned to the position shown and the data written down into row 2 14. Switches 44a-44b are closed as shown in this figure for writing. Each set of switches, such as 42a and 44b, are tied together such that when 42a is open 44b is closed and when 42a is closed 44b is open.
This configuration of the device eliminates a vast amount of off chip processing, and limits the off chip accesses to one row of data per line time. This speed-up will decrease the OFF interval in the timing diagram of Figure 1b and also decrease the brightness loss discussed previously.
The final problem addressed by this invention is that of bandwidth. In the method discussed in U.S. Patent No. 5,049,091, the output of the processor driving the device would typically be ~OMhz or 500 x 10a. In order to write 1000 columns, the entire device, at that data rate, the load time must be 1000/50 x 106, which equals 20 x 10-6, (20 .seconds)" Most binary (ON/OFF) spatial light modulators cannot be fully refreshed in 20 pseconds.
However, if the number of pixels to be written increased, by lining chips up together, (if the chip size was fixed), this could be reduced. Two 768 x 576 pixel chips together would mean that the processor would write 1536 columns per line so the line time would be 1536/50 x 106, or 30 pseconds, which is more reasonable, as the device refresh rate for modulators such as the DMD is approximately p,seconds ( .5 p.seconds per line, loading 50 lines from the top, and 50 lines from the bottom, simultaneously, equals 25 pseconds). Three chips used in tandem would give even more flexibility within a given time frame.
20 Three chips of 768 pixels wide have a time of 2304/50 x 106, or 46 seconds.
At this point the present embodiment of the invention is limited in speed not by the modulator, but by the output of the data, at 50 M~iz. Additionally, if the array size is not fixed, and one could use a chip that was larger, such as 1920 x 1080 pixels, the writing time would obviously be lengthened even more.
In short, a standard modulator with standard addressing can emulate or surpass the performance of a system using a customized device, using 100 of its 576 available rows. The standard modulator also give two further advantages. The first is system flexibility. With an array such as 768 x 576, instead of 1000 x 100, there are more rows to be used: The use of multiple devices allows the designers to consider a trade off not previously available. For example, using the 46 usecond 0 margin discussed above, another 25 lines on top and bottom could be loaded.
This would take 37.5 useconds, and add a total of 50 lines of data. They can use a lamp that does not have to be as bright as the current source, making it cheaper.
The trade offis that the third device may cost more. Another consideration not previously available is resolution control. The extra rows on the modulator can be used to 5 increase the resolution, allowing the equalization of the illumination profile to be more exact.
The second advantage not available in the customized-device system, is the use of already-established addressing schemes. An example of some of these schemes can be found in U.S. Patent No. 5,278,652. Further, using the standardized 0 modulator, which has data inputs on both the top and bottom, an addressing scheme could be used that accesses both the top and bottom of the modulator, as previously mentioned.
An example of chips used in concert is shown in Figure 4. The light impinges upon the modulators 10a, l Ob, 10c, simultaneously. The light from the selected cells of the devices well impinge upon the drum 36. The devices would most likely have to be aligned to eliminate the gaps between the right-most column of cells 48a, on device 10a, and the left-most column 46b, of device :lOb, and between 48b and 46c;. One of t:he many advantages of this is that the arm holding the devices (not shown) woulc:l only have to be repositioned one third as many times as previously required. 'hhis again lowers the amount of time used overall.
'lChis could also be repeated for as many devices from which the optics can effectively receive light. It is possible that an entire line of devices could be set together so that thc~ entire drum is exposed in one positioning of the arm, eliminating any possible errors from incorrect positioning during the steps across the drum.
Thus, although there has been described to this point particular embodiments of a method of printing using spatial light modulators with standard addressing circuitry, it is not intended that such specific references be considered as Limitations upon the scope of this invention except in-so-far as set forth in the following claims.
One of the many areas such photosensitive materials are used is in the patterning of printed circuit boards (PCBs), and printing plates. Normally, a sheet of such material or the negative that will be used to expose such media is wrapped around a drum, and the desired pattern is exposed onto the sheet using lasers while the drum spins, much like a xerographic printer. It would be an advantage to use spatial light modulators for reasons discussed above.
Some problems exist, however, with the use of spatial light modulators (SLMs), such as liquid crystal display cells (LCD), or deformable mirror devices (DlViDs). In order for the machine to be coat-effective, it must produce a certain number of completed sheets of material in a given time frame. As it turns out, this requirement is difficult to meet using standard light sources and simple modulators. The light is :., .,.
20~7~2~
not bright enough to expose the media within the time limit, as it is a "slow"
media, requiring long exposure.
One solution is discussed in U.S. Patent 5,049, 901. This solution uses a 1000 cell X 100 line spatial light modulator array. The data is loaded onto the cells of the array from the top down. After the first line of data is loaded onto the first row of cells, it is exposed onto the drum. Then the first line of data is then shifted down to the second row of cells. The second line of data is loaded onto the first row of cells, and then these two rows are exposed. The data shifting down the array is coordinated with the spinning of the drum, so the same data is exposed onto the same line on the drum for approximately 100 lines.
Typically, the illumination patterns from conventional light sources are brighter in the center than at the edges, and no illumination pattern is completely uniform. This is corrected with the last lines of the array. Depending on the amount of correction necessary, the number of lines is up to the designer. The center cell or cells are turned off after a predetermined number of lines. The cells on either side of the center region are left on for a pre-determined number of lines. The cells further away from the center regions are Left on for even more lines. This continues until the last line, in which only the cells at the edges remain on. In this way, the darker areas of the image are exposed for longer durations to equalize exposure time across the image.
This solution involves the use of a modulator array consisting of an array of shift registers rather than conventional x/y addressing. The registers shift the data .: ~~~~..,.,.~..._._... .._ _ .
20~'~~25 down the array, as discussed previously. For some applications, or some modulators, shift registers are impractical because of the amount of space they require.
In the case of the DMD, the complexity of the shift registers makes it difficult to manufacture the device using the already-established processing techniques.
;;;
rij ~~~,~.,e . ......
SUMMARY OF THE INVENTION
The present invention disclosed herein comprises a method of printing or exposing photosensitive media using the cells of a standard spatial light modulator and standard addressing circuitry that allows the use of a less-powerful lamp, and smaller geometries of addressing circuitry. It is an advantage of this invention that it does not require a custom spatial light modulator.
In accordance with one aspect of the present invention there is provided a method of printing using at least one spatial light modulator, each said modulator comprised of an array of individually addressable cells arranged in a plurality of rows, and addressing circuitry corresponding to said rows of cells, said method comprising the steps of: a. printing comprising the steps of: i. writing a line of data to said addressing circuitry corresponding to a row of said cells of said modulator; ii. illuminating said modulator with light from a light source;
iii.
reflecting said light to a photosensitive media with said modulator such that said reflected light forms an image on said photosensitive media; iv. writing new data to said addressing circuitry such that each line of data previously written is written to said addressing circuitry corresponding to a row of said cells adjacent to a row of said cells corresponding to said addressing circuitry said line of data was previously written to; b. repeating steps ii. through iv. of said printing step until a predetermined region on said photosensitive media has been completely exposed;
and c. repositioning said at least one modulator to expose a different region on said photosensitive media.
In accordance with another aspect of the present invention there is provided a method of printing using at least one spatial light modulator, each said modulator comprised of an array of individually addressable cells arranged in a plurality of rows, and addressing circuitry corresponding to said rows of cells, said method comprising the steps of: a. printing comprising the steps of: i. writing a line of data to said addressing circuitry corresponding to a row of said cells of said modulator; ii. illuminating said modulator with light from a light source;
iii.
reflecting said light to a photosensitive media with said modulator such that said reflected light forms an image on said photosensitive media; iv. writing new data to said addressing circuitry such that each line of data previously written is written to said addressing circuitry corresponding to a row of said cells adjacent to a row of said cells corresponding to said addressing circuitry said line of data was previously written to; and b. repeating steps ii. through iv. of said printing step until a predetermined region on said photosensitive media has been completely exposed.
Page 4a BRxEF DESCRLPTION OF THE DRAWINGS
For a more complete understanding of the present invention and for further .advantages thereof, reference is now made to the following Detailed Description taken in conjunction with the accompanying Drawings in which:
FIGURE la shows a spatial light modulator.
FIGURE 1 b shows a timing diagram for the exposure time of a spatial light modulator.
FIGURE 2a shows a spatial light modulator and the area it exposes on a photoreceptor drum.
FIGURE 2b shows a portion of the face of~ a modulator which would be active when it has been fully loaded with a data pattern that might be used.
FIGURE 3 shows an adapted spatial light modulator.
FIGURE 4 shows three spatial Light modulators and the area they expose on a photoreceptor drum.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
Figure la shows a typical spatial light modulator array 10. The modulator may consist of individual cells, or cells grouped in regions, such as lines.
The modulator shown has lines depicted, but it is understood that these lines could consist of hundreds of cells. S irnilarly, the modulator could be of any type, but for discussion purposes, the modulator discussed will be of the deformable mirror type. Deformable mirror devices, or DMDs, consist of a multiplicity of tiny mirrors suspended over an air gap. Addressing circuitry is associated with each tiny mirror, which causes the mirror to deflect in one direction or another, 1 o depending on the architecture c~f the DMD, and the data in the addressing circuitry.
The addressing circuitry normally consists of one or more transistors and is preferably underneath the air g;ap on the substrate. When a transistor is turned on, electrostatic forces build in the; air gap, causing the mirror to be deflected towards the transistor.
I5 The array shown is assumed to be 768 cells wide, and 576 lines long, a configuration that is currently manufactured by the assignee of the present invention for video applications. Row 1 on the modulator, designated by reference numeral 12, is at the top of the: device. It is loaded with data for the first line to be exposed on the pllotosensitiwe media. Aiaer it is exposed, the illumination 2o must be turned off. Unlike the method previously discussed with respect to U.S. Patent No. 5,049,901, thf; data is not shifted down the device. Instead, according to the preferred embodiment, the entire device is rewritten. The first line of data is then written to the addressing circuitry for row 2 on the device, shown with reference numeral 14. The data for data line 2 is written onto the addressing circuitry for row 1 on the device. This is repeated until the entire device minus whatever number of correction lines has been filled with data. When the next line is written to modulator row l, according to the preferred embodiment, it will be the 477'" line of data, rather than the 576'"
line of data for reasons discussed in detail below. The number of lines of data is determined by the size of the drum. Typically, the designer would coordinate the loading of line 1 of data with some feature on the drum. A possible synchronization point would be the area of the drum's surface that has the fixtures which hold the negative in lalace. Many thousands of lines of data. may be 1o necessary to completely expose the entire circumference of the negative on the drum .
Numeral 16 depicts row 476 of the device. The lines between this row and the bottom row of the device 18, which is the 576t~' line of the array, is used to equalize the illumination profile as previously discussed, and which will be further discussed at Figure 2b.
Figure 1b shows the timing of the light source for the above scheme. The horizontal axis 20 is. the time axis. 'the vertical axis 22 is the illumination intensity axis. During the time interval between tic marks 24 and 26, the light is on the device. During the interval between tic marks 26 and 28, the illumination is off as the data is written to the device. The entire interval shown by tic marks 24 to 28 on the horizontal axis is the amount of time to expose and then rewrite the device.
Obviously, as can be seen by this diagram, the illumination is only on a fraction of the total interval 28. This low duty cycle may result in a loss of brightness as great as an order of magnitude. However, this loss is not as drastic as it seems, as it ran be compensated for in other areas. For example, using multiple devices in tandem re~ui.res less repositioning to cover the entire negative, making the overall system using spatial light modulators faster than first considered. As another example, all 576 rows do not have to be used. To write 100 rows as in the method previously discussed in U.S. Patent No. 5,049,091, it takes a modulator with circuitry such as the DMD 25 p,seconds to complete the operation.
Figure 2a shows the modulator positioned to write onto or expose the drum.
The light could be positioned sc.~mewhere around position 30, and the light would l0 travel along path 32 to the modulator array 10. Typically, there are optical elements such as lenses or mirrors in this path. Since the geometry of the path and the combination of the elements have so many possible variations, they are not shown.
As light from path 32 impinges upon the modulator, the selected cells on the modulator direct their respective portions of the beam to the drum 36 along path 34. The cells that are not selfacted to send light to the drum can be configured to either return light back to the source or to direct it away fxom the drum in another direction. The self;ction depcxnds on the confines of the optical system and the capabilities of the spatial light modulator.
2o Region 38 on drum 36 shows the area being exposed on the photosensitive material on the face of the drum. Photosensitive, in the application, is meant to include any material that develops some kind of differentiation that can be exploited for printing between areas exposed to radiation and areas not exposed to the radiation. The radiation is typically in the infrared to ultraviolet range, due to the, availability of sources and optics, but is not assumed to be limited to that range. The photosensitive media could be intended for use as a negative for a printing process, such as in printing negatives for printed circuit boards, (PCBs), an offset printing plate, a film or paper positive (a negative that has been color or contrast reversed), or other such items. Additionally, this media could be the finished photographic product. For example, instead of making a negative to pattern the PCB, the board itself could be patterned directly. Additionally, other items could be printed or exposed directly, such as film or paper positives.
Figure 2b shows what the data would possibly look like on the face of the modulator 10 as if seen from the drum. The region 1 l, that is not hatched is the area being used to balance out the illumination profile.
In order to further overcome the limitation of rewriting the device every cycle, an adaptation of the video chip is shown in Figure 3. A bank of shift registers 40a-40b are now at the top of the modulator 10. This is used to load the data into the columns of addressing circuitry. This can be used to speed up the write time of the device during the OFF part of the cycle. Instead of resetting the device and then loading all of the data lines into the device from off chip, switches 42a-42b are activated and the data currently in row 1 12 can be written up into shift register 40, the switches 42a-42b are then returned to the position shown and the data written down into row 2 14. Switches 44a-44b are closed as shown in this figure for writing. Each set of switches, such as 42a and 44b, are tied together such that when 42a is open 44b is closed and when 42a is closed 44b is open.
This configuration of the device eliminates a vast amount of off chip processing, and limits the off chip accesses to one row of data per line time. This speed-up will decrease the OFF interval in the timing diagram of Figure 1b and also decrease the brightness loss discussed previously.
The final problem addressed by this invention is that of bandwidth. In the method discussed in U.S. Patent No. 5,049,091, the output of the processor driving the device would typically be ~OMhz or 500 x 10a. In order to write 1000 columns, the entire device, at that data rate, the load time must be 1000/50 x 106, which equals 20 x 10-6, (20 .seconds)" Most binary (ON/OFF) spatial light modulators cannot be fully refreshed in 20 pseconds.
However, if the number of pixels to be written increased, by lining chips up together, (if the chip size was fixed), this could be reduced. Two 768 x 576 pixel chips together would mean that the processor would write 1536 columns per line so the line time would be 1536/50 x 106, or 30 pseconds, which is more reasonable, as the device refresh rate for modulators such as the DMD is approximately p,seconds ( .5 p.seconds per line, loading 50 lines from the top, and 50 lines from the bottom, simultaneously, equals 25 pseconds). Three chips used in tandem would give even more flexibility within a given time frame.
20 Three chips of 768 pixels wide have a time of 2304/50 x 106, or 46 seconds.
At this point the present embodiment of the invention is limited in speed not by the modulator, but by the output of the data, at 50 M~iz. Additionally, if the array size is not fixed, and one could use a chip that was larger, such as 1920 x 1080 pixels, the writing time would obviously be lengthened even more.
In short, a standard modulator with standard addressing can emulate or surpass the performance of a system using a customized device, using 100 of its 576 available rows. The standard modulator also give two further advantages. The first is system flexibility. With an array such as 768 x 576, instead of 1000 x 100, there are more rows to be used: The use of multiple devices allows the designers to consider a trade off not previously available. For example, using the 46 usecond 0 margin discussed above, another 25 lines on top and bottom could be loaded.
This would take 37.5 useconds, and add a total of 50 lines of data. They can use a lamp that does not have to be as bright as the current source, making it cheaper.
The trade offis that the third device may cost more. Another consideration not previously available is resolution control. The extra rows on the modulator can be used to 5 increase the resolution, allowing the equalization of the illumination profile to be more exact.
The second advantage not available in the customized-device system, is the use of already-established addressing schemes. An example of some of these schemes can be found in U.S. Patent No. 5,278,652. Further, using the standardized 0 modulator, which has data inputs on both the top and bottom, an addressing scheme could be used that accesses both the top and bottom of the modulator, as previously mentioned.
An example of chips used in concert is shown in Figure 4. The light impinges upon the modulators 10a, l Ob, 10c, simultaneously. The light from the selected cells of the devices well impinge upon the drum 36. The devices would most likely have to be aligned to eliminate the gaps between the right-most column of cells 48a, on device 10a, and the left-most column 46b, of device :lOb, and between 48b and 46c;. One of t:he many advantages of this is that the arm holding the devices (not shown) woulc:l only have to be repositioned one third as many times as previously required. 'hhis again lowers the amount of time used overall.
'lChis could also be repeated for as many devices from which the optics can effectively receive light. It is possible that an entire line of devices could be set together so that thc~ entire drum is exposed in one positioning of the arm, eliminating any possible errors from incorrect positioning during the steps across the drum.
Thus, although there has been described to this point particular embodiments of a method of printing using spatial light modulators with standard addressing circuitry, it is not intended that such specific references be considered as Limitations upon the scope of this invention except in-so-far as set forth in the following claims.
Claims (20)
1. A method of printing using at least one spatial light modulator, each said modulator comprised of an array of individually addressable cells arranged in a plurality of rows, and addressing circuitry corresponding to said rows of cells, said method comprising the steps of:
a. printing comprising the steps of:
i. writing a line of data to said addressing circuitry corresponding to a row of said cells of said modulator;
ii. illuminating said modulator with light from a light source;
iii. reflecting said light to a photosensitive media with said modulator such that said reflected light forms an image on said photosensitive media;
iv. writing new data to said addressing circuitry such that each line of data previously written is written to said addressing circuitry corresponding to a row of said cells adjacent to said row of said cells corresponding to said addressing circuitry said line of data was previously written to;
b. repeating steps ii. through iv. of said printing step until a predetermined region on said photosensitive media has been completely exposed; and c. repositioning said at least one modulator to expose a different region on said photosensitive media.
a. printing comprising the steps of:
i. writing a line of data to said addressing circuitry corresponding to a row of said cells of said modulator;
ii. illuminating said modulator with light from a light source;
iii. reflecting said light to a photosensitive media with said modulator such that said reflected light forms an image on said photosensitive media;
iv. writing new data to said addressing circuitry such that each line of data previously written is written to said addressing circuitry corresponding to a row of said cells adjacent to said row of said cells corresponding to said addressing circuitry said line of data was previously written to;
b. repeating steps ii. through iv. of said printing step until a predetermined region on said photosensitive media has been completely exposed; and c. repositioning said at least one modulator to expose a different region on said photosensitive media.
2. The method of claim 1 wherein said spatial light modulator is a micromirror device.
3. The method of claim 1 wherein said photosensitive media is a negative.
4. The method of claim 3 wherein said negative is for a printed circuit board.
5. The method of claim 3 wherein said negative is for an offset printing plate.
6. The method of claim 1 wherein said photosensitive media is a finished photographic product.
7. The method of claim 6 wherein said photographic product is a printed circuit board.
8. The method of claim 6 wherein said photographic product is an offset printing plate.
9. The method of claim 6 wherein said photographic product is a film positive.
10. The method of claim 6 wherein said photographic product is a paper positive.
11. A method of printing using at least one spatial light modulator, each said modulator comprised of an array of individually addressable cells arranged in a plurality of rows, and addressing circuitry corresponding to said rows of cells, said method comprising the steps of:
a. printing comprising the steps of:
i. writing a line of data to said addressing circuitry corresponding to a row of said cells of said modulator;
ii. illuminating said modulator with light from a light source;
iii. reflecting said light to a photosensitive media with said modulator such that said reflected light forms an image on said photosensitive media;
iv. writing new data to said addressing circuitry such that each line of data previously written is written to said addressing circuitry corresponding to a row of said cells adjacent to said row of said cells corresponding to said addressing circuitry said line of data was previously written to; and b. repeating steps ii. through iv. of said printing step until a predetermined region on said photosensitive media has been completely exposed.
a. printing comprising the steps of:
i. writing a line of data to said addressing circuitry corresponding to a row of said cells of said modulator;
ii. illuminating said modulator with light from a light source;
iii. reflecting said light to a photosensitive media with said modulator such that said reflected light forms an image on said photosensitive media;
iv. writing new data to said addressing circuitry such that each line of data previously written is written to said addressing circuitry corresponding to a row of said cells adjacent to said row of said cells corresponding to said addressing circuitry said line of data was previously written to; and b. repeating steps ii. through iv. of said printing step until a predetermined region on said photosensitive media has been completely exposed.
12. The method of claim 11 wherein said spatial light modulator is a micromirror device.
13. The method of claim 11 wherein said photosensitive media is a negative.
14. The method of claim 13 wherein said negative is for a printed circuit board.
15. The method of claim 13 wherein said negative is for an offset printing plate.
16. The method of claim 11 wherein said photosensitive media is a finished photographic product.
17. The method of claim 16 wherein said photographic product is a printed circuit board.
18. The method of claim 16 wherein said photographic product is an offset printing plate.
19. The method of claim 16 wherein said photographic product is a film positive.
20. The method of claim 16 wherein said photographic product is a paper positive.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US82466092A | 1992-01-23 | 1992-01-23 | |
US824,660 | 1992-01-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2087625A1 CA2087625A1 (en) | 1993-07-24 |
CA2087625C true CA2087625C (en) | 2006-12-12 |
Family
ID=25241992
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002087625A Expired - Fee Related CA2087625C (en) | 1992-01-23 | 1993-01-20 | Non-systolic time delay and integration printing |
Country Status (7)
Country | Link |
---|---|
US (1) | US6061075A (en) |
EP (1) | EP0556591B1 (en) |
JP (1) | JPH0655776A (en) |
KR (1) | KR100260563B1 (en) |
CA (1) | CA2087625C (en) |
DE (1) | DE69321381T2 (en) |
TW (1) | TW270980B (en) |
Families Citing this family (82)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6674562B1 (en) | 1994-05-05 | 2004-01-06 | Iridigm Display Corporation | Interferometric modulation of radiation |
US5459492A (en) * | 1993-08-30 | 1995-10-17 | Texas Instruments Incorporated | Method and apparatus for printing stroke and contone data together |
US5473358A (en) * | 1993-12-21 | 1995-12-05 | Xerox Corporation | Multi-level xerography exposure control through multi-beam overscan |
US8014059B2 (en) | 1994-05-05 | 2011-09-06 | Qualcomm Mems Technologies, Inc. | System and method for charge control in a MEMS device |
US6680792B2 (en) * | 1994-05-05 | 2004-01-20 | Iridigm Display Corporation | Interferometric modulation of radiation |
US5521748A (en) * | 1994-06-16 | 1996-05-28 | Eastman Kodak Company | Light modulator with a laser or laser array for exposing image data |
EP0709802A3 (en) * | 1994-10-31 | 1997-12-10 | Texas Instruments Incorporated | Optical scanning with overlap |
US5825400A (en) * | 1994-11-02 | 1998-10-20 | Texas Instruments, Inc. | Method and apparatus for ameliorating the effects of misalignment between two or more imaging elements |
US5630027A (en) * | 1994-12-28 | 1997-05-13 | Texas Instruments Incorporated | Method and apparatus for compensating horizontal and vertical alignment errors in display systems |
GB2310504A (en) * | 1996-02-23 | 1997-08-27 | Spectrum Tech Ltd | Laser marking apparatus and methods |
WO1999052006A2 (en) | 1998-04-08 | 1999-10-14 | Etalon, Inc. | Interferometric modulation of radiation |
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
WO2003007049A1 (en) | 1999-10-05 | 2003-01-23 | Iridigm Display Corporation | Photonic mems and structures |
DE10046518A1 (en) * | 2000-09-15 | 2002-04-04 | Fraunhofer Ges Forschung | Process for improving the image quality and increasing the writing speed when exposing photosensitive layers |
US6962771B1 (en) * | 2000-10-13 | 2005-11-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Dual damascene process |
US6574033B1 (en) | 2002-02-27 | 2003-06-03 | Iridigm Display Corporation | Microelectromechanical systems device and method for fabricating same |
US6855482B2 (en) | 2002-04-09 | 2005-02-15 | Day International, Inc. | Liquid transfer articles and method for producing the same using digital imaging photopolymerization |
JP3938714B2 (en) | 2002-05-16 | 2007-06-27 | 大日本スクリーン製造株式会社 | Exposure equipment |
JP4201178B2 (en) | 2002-05-30 | 2008-12-24 | 大日本スクリーン製造株式会社 | Image recording device |
US7781850B2 (en) | 2002-09-20 | 2010-08-24 | Qualcomm Mems Technologies, Inc. | Controlling electromechanical behavior of structures within a microelectromechanical systems device |
JP4390189B2 (en) | 2003-04-10 | 2009-12-24 | 大日本スクリーン製造株式会社 | Pattern drawing device |
TW570896B (en) | 2003-05-26 | 2004-01-11 | Prime View Int Co Ltd | A method for fabricating an interference display cell |
US7706050B2 (en) | 2004-03-05 | 2010-04-27 | Qualcomm Mems Technologies, Inc. | Integrated modulator illumination |
US7060895B2 (en) * | 2004-05-04 | 2006-06-13 | Idc, Llc | Modifying the electro-mechanical behavior of devices |
US7164520B2 (en) * | 2004-05-12 | 2007-01-16 | Idc, Llc | Packaging for an interferometric modulator |
US7889163B2 (en) | 2004-08-27 | 2011-02-15 | Qualcomm Mems Technologies, Inc. | Drive method for MEMS devices |
US7602375B2 (en) * | 2004-09-27 | 2009-10-13 | Idc, Llc | Method and system for writing data to MEMS display elements |
US7936497B2 (en) | 2004-09-27 | 2011-05-03 | Qualcomm Mems Technologies, Inc. | MEMS device having deformable membrane characterized by mechanical persistence |
US8008736B2 (en) | 2004-09-27 | 2011-08-30 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device |
US20060076634A1 (en) | 2004-09-27 | 2006-04-13 | Lauren Palmateer | Method and system for packaging MEMS devices with incorporated getter |
US7532195B2 (en) | 2004-09-27 | 2009-05-12 | Idc, Llc | Method and system for reducing power consumption in a display |
US7920135B2 (en) | 2004-09-27 | 2011-04-05 | Qualcomm Mems Technologies, Inc. | Method and system for driving a bi-stable display |
US7583429B2 (en) | 2004-09-27 | 2009-09-01 | Idc, Llc | Ornamental display device |
US7813026B2 (en) | 2004-09-27 | 2010-10-12 | Qualcomm Mems Technologies, Inc. | System and method of reducing color shift in a display |
US7372613B2 (en) | 2004-09-27 | 2008-05-13 | Idc, Llc | Method and device for multistate interferometric light modulation |
US7675669B2 (en) | 2004-09-27 | 2010-03-09 | Qualcomm Mems Technologies, Inc. | Method and system for driving interferometric modulators |
US7653371B2 (en) | 2004-09-27 | 2010-01-26 | Qualcomm Mems Technologies, Inc. | Selectable capacitance circuit |
US7724993B2 (en) | 2004-09-27 | 2010-05-25 | Qualcomm Mems Technologies, Inc. | MEMS switches with deforming membranes |
US7916103B2 (en) * | 2004-09-27 | 2011-03-29 | Qualcomm Mems Technologies, Inc. | System and method for display device with end-of-life phenomena |
US7684104B2 (en) | 2004-09-27 | 2010-03-23 | Idc, Llc | MEMS using filler material and method |
US7420725B2 (en) | 2004-09-27 | 2008-09-02 | Idc, Llc | Device having a conductive light absorbing mask and method for fabricating same |
US7424198B2 (en) | 2004-09-27 | 2008-09-09 | Idc, Llc | Method and device for packaging a substrate |
US7679627B2 (en) | 2004-09-27 | 2010-03-16 | Qualcomm Mems Technologies, Inc. | Controller and driver features for bi-stable display |
US8124434B2 (en) | 2004-09-27 | 2012-02-28 | Qualcomm Mems Technologies, Inc. | Method and system for packaging a display |
US8878825B2 (en) | 2004-09-27 | 2014-11-04 | Qualcomm Mems Technologies, Inc. | System and method for providing a variable refresh rate of an interferometric modulator display |
CN100439967C (en) * | 2004-09-27 | 2008-12-03 | Idc公司 | Method and device for multistate interferometric light modulation |
US7710629B2 (en) | 2004-09-27 | 2010-05-04 | Qualcomm Mems Technologies, Inc. | System and method for display device with reinforcing substance |
US8310441B2 (en) | 2004-09-27 | 2012-11-13 | Qualcomm Mems Technologies, Inc. | Method and system for writing data to MEMS display elements |
US7719500B2 (en) | 2004-09-27 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | Reflective display pixels arranged in non-rectangular arrays |
US7701631B2 (en) | 2004-09-27 | 2010-04-20 | Qualcomm Mems Technologies, Inc. | Device having patterned spacers for backplates and method of making the same |
US7668415B2 (en) | 2004-09-27 | 2010-02-23 | Qualcomm Mems Technologies, Inc. | Method and device for providing electronic circuitry on a backplate |
US7355780B2 (en) | 2004-09-27 | 2008-04-08 | Idc, Llc | System and method of illuminating interferometric modulators using backlighting |
US7944599B2 (en) | 2004-09-27 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
US7692839B2 (en) | 2004-09-27 | 2010-04-06 | Qualcomm Mems Technologies, Inc. | System and method of providing MEMS device with anti-stiction coating |
US7843410B2 (en) | 2004-09-27 | 2010-11-30 | Qualcomm Mems Technologies, Inc. | Method and device for electrically programmable display |
US7893919B2 (en) | 2004-09-27 | 2011-02-22 | Qualcomm Mems Technologies, Inc. | Display region architectures |
US7136213B2 (en) | 2004-09-27 | 2006-11-14 | Idc, Llc | Interferometric modulators having charge persistence |
US7289259B2 (en) | 2004-09-27 | 2007-10-30 | Idc, Llc | Conductive bus structure for interferometric modulator array |
US7808703B2 (en) | 2004-09-27 | 2010-10-05 | Qualcomm Mems Technologies, Inc. | System and method for implementation of interferometric modulator displays |
US7920136B2 (en) | 2005-05-05 | 2011-04-05 | Qualcomm Mems Technologies, Inc. | System and method of driving a MEMS display device |
KR20080027236A (en) | 2005-05-05 | 2008-03-26 | 콸콤 인코포레이티드 | Dynamic driver ic and display panel configuration |
US7948457B2 (en) | 2005-05-05 | 2011-05-24 | Qualcomm Mems Technologies, Inc. | Systems and methods of actuating MEMS display elements |
JP4753625B2 (en) | 2005-05-31 | 2011-08-24 | 大日本スクリーン製造株式会社 | Pattern drawing apparatus and block number determination method |
US8391630B2 (en) | 2005-12-22 | 2013-03-05 | Qualcomm Mems Technologies, Inc. | System and method for power reduction when decompressing video streams for interferometric modulator displays |
US7795061B2 (en) | 2005-12-29 | 2010-09-14 | Qualcomm Mems Technologies, Inc. | Method of creating MEMS device cavities by a non-etching process |
US7916980B2 (en) | 2006-01-13 | 2011-03-29 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
US8194056B2 (en) | 2006-02-09 | 2012-06-05 | Qualcomm Mems Technologies Inc. | Method and system for writing data to MEMS display elements |
US7903047B2 (en) | 2006-04-17 | 2011-03-08 | Qualcomm Mems Technologies, Inc. | Mode indicator for interferometric modulator displays |
US7711239B2 (en) | 2006-04-19 | 2010-05-04 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device and method utilizing nanoparticles |
US8049713B2 (en) | 2006-04-24 | 2011-11-01 | Qualcomm Mems Technologies, Inc. | Power consumption optimized display update |
US7649671B2 (en) | 2006-06-01 | 2010-01-19 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device with electrostatic actuation and release |
US7702192B2 (en) | 2006-06-21 | 2010-04-20 | Qualcomm Mems Technologies, Inc. | Systems and methods for driving MEMS display |
US7835061B2 (en) | 2006-06-28 | 2010-11-16 | Qualcomm Mems Technologies, Inc. | Support structures for free-standing electromechanical devices |
US7777715B2 (en) | 2006-06-29 | 2010-08-17 | Qualcomm Mems Technologies, Inc. | Passive circuits for de-multiplexing display inputs |
US7527998B2 (en) | 2006-06-30 | 2009-05-05 | Qualcomm Mems Technologies, Inc. | Method of manufacturing MEMS devices providing air gap control |
US7763546B2 (en) | 2006-08-02 | 2010-07-27 | Qualcomm Mems Technologies, Inc. | Methods for reducing surface charges during the manufacture of microelectromechanical systems devices |
US7719752B2 (en) | 2007-05-11 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same |
US8736590B2 (en) | 2009-03-27 | 2014-05-27 | Qualcomm Mems Technologies, Inc. | Low voltage driver scheme for interferometric modulators |
CN102834761A (en) | 2010-04-09 | 2012-12-19 | 高通Mems科技公司 | Mechanical layer and methods of forming the same |
US8963159B2 (en) | 2011-04-04 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US9134527B2 (en) | 2011-04-04 | 2015-09-15 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
DE102016117863A1 (en) | 2016-09-22 | 2018-03-22 | Océ Holding B.V. | Electrophotography station and method for exposing an image carrier |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2812206A1 (en) * | 1978-03-20 | 1979-10-04 | Philips Patentverwaltung | OPTICAL PRINTER |
EP0072124B1 (en) * | 1981-08-03 | 1986-03-05 | Xerox Corporation | Light-modulating device comprising a multigate light valve |
US4560994A (en) * | 1981-10-08 | 1985-12-24 | Xerox Corporation | Two dimensional electro-optic modulator for printing |
US4838652A (en) * | 1985-05-15 | 1989-06-13 | Canon Kabushiki Kaisha | Image forming apparatus |
US4933687A (en) * | 1988-10-03 | 1990-06-12 | Cirrus Technology Inc. | Laser-actuated digital imaging system |
US5121146A (en) * | 1989-12-27 | 1992-06-09 | Am International, Inc. | Imaging diode array and system |
US5049901A (en) * | 1990-07-02 | 1991-09-17 | Creo Products Inc. | Light modulator using large area light sources |
-
1993
- 1993-01-20 CA CA002087625A patent/CA2087625C/en not_active Expired - Fee Related
- 1993-01-21 KR KR1019930000815A patent/KR100260563B1/en not_active IP Right Cessation
- 1993-01-22 EP EP93100994A patent/EP0556591B1/en not_active Expired - Lifetime
- 1993-01-22 DE DE69321381T patent/DE69321381T2/en not_active Expired - Fee Related
- 1993-01-25 JP JP4429993A patent/JPH0655776A/en active Pending
- 1993-08-02 TW TW082106150A patent/TW270980B/zh active
-
1994
- 1994-06-09 US US08/257,232 patent/US6061075A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0556591A1 (en) | 1993-08-25 |
DE69321381T2 (en) | 1999-05-06 |
DE69321381D1 (en) | 1998-11-12 |
TW270980B (en) | 1996-02-21 |
EP0556591B1 (en) | 1998-10-07 |
US6061075A (en) | 2000-05-09 |
CA2087625A1 (en) | 1993-07-24 |
JPH0655776A (en) | 1994-03-01 |
KR100260563B1 (en) | 2000-09-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA2087625C (en) | Non-systolic time delay and integration printing | |
US5486851A (en) | Illumination device using a pulsed laser source a Schlieren optical system and a matrix addressable surface light modulator for producing images with undifracted light | |
US5933183A (en) | Color spatial light modulator and color printer using the same | |
EP0652669B1 (en) | Combined modulator schemes for spatial light modulators | |
US6833908B2 (en) | Computer architecture for and method of high-resolution imaging using a low-resolution image transducer | |
US8599357B2 (en) | Photolithography system | |
US6965364B1 (en) | Device and method for compensating non-uniformities in imaging systems | |
CN102216849B (en) | Optical imaging writer system | |
EP1500515A2 (en) | Addressing the imaging elements of a spatial light modulator in an image recording apparatus | |
US4810058A (en) | Exposure device utilizing a liquid crystal shutter matrix | |
JPH05341630A (en) | Optical modulator for large-area light source | |
US4816846A (en) | Method and apparatus for direct color printing | |
JPH09318892A (en) | Printer and exposure method | |
JPH09244152A (en) | Image exposure device | |
CN103901730A (en) | Exposure device and exposure method | |
JP2001305664A (en) | Printer | |
KR20060134003A (en) | Spatial light modulator and method for performing dynamic photolithography | |
US20060132889A1 (en) | Method for increasing the resolution of a patial light modulator | |
JPS6234460A (en) | Exposure device for photosensitive film | |
JP2006113412A (en) | Drawing method and apparatus | |
US7133116B2 (en) | Defect mitigation in spatial light modulator used for dynamic photolithography | |
JP2001175002A (en) | Exposure device | |
KR100379731B1 (en) | Printing Method with Exposure Scheme for Minimizing Microbanding in SLM-based Printers | |
JPH09258339A (en) | Image forming device | |
JP2001287403A (en) | Printer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |