CA2348606A1 - Membrane-actuated charge controlled mirror - Google Patents

Membrane-actuated charge controlled mirror Download PDF

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Publication number
CA2348606A1
CA2348606A1 CA002348606A CA2348606A CA2348606A1 CA 2348606 A1 CA2348606 A1 CA 2348606A1 CA 002348606 A CA002348606 A CA 002348606A CA 2348606 A CA2348606 A CA 2348606A CA 2348606 A1 CA2348606 A1 CA 2348606A1
Authority
CA
Canada
Prior art keywords
membrane
controlled mirror
charge controlled
array
actuated charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002348606A
Other languages
French (fr)
Other versions
CA2348606C (en
Inventor
William P. Robinson
Michael J. Little
Eric A. Gifford
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Memsolutions, Inc.
William P. Robinson
Michael J. Little
Eric A. Gifford
Intel Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memsolutions, Inc., William P. Robinson, Michael J. Little, Eric A. Gifford, Intel Corporation filed Critical Memsolutions, Inc.
Publication of CA2348606A1 publication Critical patent/CA2348606A1/en
Application granted granted Critical
Publication of CA2348606C publication Critical patent/CA2348606C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Abstract

An electrostatically actuated micromirror light modulator that exhibits increased deflection range, better charge efficiency and improved electrostatic stability. A thin insulating membrane (14) that is supported on a post array (16) decouples the electron beam (20) from the micromirror array (18) inside the vacuum cell (34). The membrane is just thick enough to stop the incident electrons from penetrating through to the mirrors but is thin enough to maintain resolution of the deposited charge pattern.
CA002348606A 1998-10-15 1999-10-14 Membrane-actuated charge controlled mirror Expired - Fee Related CA2348606C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/172,613 1998-10-15
US09/172,613 US5991066A (en) 1998-10-15 1998-10-15 Membrane-actuated charge controlled mirror
PCT/US1999/021457 WO2000022473A1 (en) 1998-10-15 1999-10-14 Membrane-actuated charge controlled mirror

Publications (2)

Publication Number Publication Date
CA2348606A1 true CA2348606A1 (en) 2000-04-20
CA2348606C CA2348606C (en) 2009-09-08

Family

ID=22628443

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002348606A Expired - Fee Related CA2348606C (en) 1998-10-15 1999-10-14 Membrane-actuated charge controlled mirror

Country Status (9)

Country Link
US (1) US5991066A (en)
EP (1) EP1121619B1 (en)
JP (1) JP4394287B2 (en)
KR (1) KR100585545B1 (en)
AT (1) ATE323295T1 (en)
AU (1) AU6498099A (en)
CA (1) CA2348606C (en)
DE (1) DE69930863T2 (en)
WO (1) WO2000022473A1 (en)

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Also Published As

Publication number Publication date
DE69930863D1 (en) 2006-05-24
AU6498099A (en) 2000-05-01
JP2002527791A (en) 2002-08-27
KR100585545B1 (en) 2006-05-30
WO2000022473A1 (en) 2000-04-20
CA2348606C (en) 2009-09-08
KR20010107918A (en) 2001-12-07
US5991066A (en) 1999-11-23
DE69930863T2 (en) 2007-03-01
EP1121619A4 (en) 2005-05-11
ATE323295T1 (en) 2006-04-15
EP1121619A1 (en) 2001-08-08
EP1121619B1 (en) 2006-04-12
JP4394287B2 (en) 2010-01-06

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