CN100459095C - Silicon sheet pre-positioning system based on multiple sensor data fusing - Google Patents
Silicon sheet pre-positioning system based on multiple sensor data fusing Download PDFInfo
- Publication number
- CN100459095C CN100459095C CNB2006101482134A CN200610148213A CN100459095C CN 100459095 C CN100459095 C CN 100459095C CN B2006101482134 A CNB2006101482134 A CN B2006101482134A CN 200610148213 A CN200610148213 A CN 200610148213A CN 100459095 C CN100459095 C CN 100459095C
- Authority
- CN
- China
- Prior art keywords
- sensor
- silicon chip
- signal
- data
- module
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
This invention relates to a pre-location systm for silicon chips combined by multiple sensor data, in which, a sensor module connects detected Si chip information to a signal regulation module to regulate it then to be connected to a data collecting module to convert the signals to data and output them to a chip like core notch computation module to process the data to get the regulation volume of a movement control module to be output to it to finish the actual operation for locating the chip, a limit control module diagnoses limits and eliminates fault for the movement control module, which outputs part signals to a signal process module to provide outer clock signal for the data collection module.
Description
Technical field
What the present invention relates to is a kind of system of semiconductor lithography technical field, particularly a kind of silicon sheet pre-positioning system that merges based on multi-sensor data.
Background technology
When mask aligner developed into nanoscale, the silicon chip that requires silicon chip transmission system to transmit must reach micron-sized repeated positioning requirements, and what finish the location in silicon chip transmission system is exactly silicon sheet pre-positioning system.Silicon chip is arbitrarily to put in film magazine, because the gap of film magazine causes the off-centre at random of silicon chip existence ± 2mm, and breach direction at random, when manipulator takes out silicon chip and is sent on the pre-determined bit platform from film magazine after, silicon chip pre-determined bit platform must be adjusted silicon chip off-centre and breach direction at random, finishes micron-sized location.The required equipment of silicon sheet pre-positioning system generally comprises following components: optical detector is used to detect silicon chip edge; A rotary unit is used to drive silicon chip and rotates; To heart actuator, be used for the silicon chip centre of form is moved on to the pivot of rotary unit.The core algorithm of location is the finding algorithm of the silicon chip centre of form and the breach centre of form.
Through the literature search of prior art is found, to mention in No. 6932558, the US patent, the silicon sheet pre-positioning system in past usually adopts a linear CCD sensor silicon chip edge.Silicon chip pre-determined bit step is the rotation silicon chip, observes linear ccd signal waveform.When the silicon chip center overlapped with the turntable center, the linear CCD signal waveform was a reference waveform, otherwise will be a similar sine curve.Can obtain the off-centre of silicon chip like this by the comparison of actual waveform and reference waveform.Eccentric known after, the silicon chip lower end has three pillars to rise to raise silicon chip, make itself and turntable disengaging, then heart actuator is moved silicon chip its centre of form is overlapped with the turntable center.Repeating this process arrives within the particular range up to the silicon chip centre of form.Then turntable drive silicon chip rotates once more, finds silicon chip to be hidden the minimum place of length to CCD, and just the minimum point of breach is carried out notch alignment then.This silicon sheet pre-positioning system precision is not high, and especially barbed portion utilizes the single sampled point of minimum point to locate, and precision is subjected to sample frequency and interference effect very big.
Silicon sheet pre-positioning system described in the Chinese patent publication number CN1787200A also is to use a marginal date in the linear CCD sensor acquisition silicon chip rotary course, adopt the match of least square circle algorithm to obtain the radius and the central coordinate of circle of silicon chip, the rotation silicon chip, its center of circle is rotated to X-axis forward place, rotary unit is descended, silicon chip is switched in the heart actuator from rotary unit, then heart actuator is moved silicon chip its center of circle is overlapped with pivot, to finish location, the silicon chip center of circle.According to circle sampling data before, adopt the edge rate method to find the breach coarse position, near breach rotated to the ccd sensor scan line breach is carefully sampled among a small circle, equally with least square circle algorithm match breach, obtain the central coordinate of circle of breach circle, the intersection point of the breach center of circle and pivot line and silicon chip edge is the breach center, and the breach center is rotated to the angle of appointment, to finish silicon chip breach location.This system asks the silicon chip center of circle and the breach center of circle with least square circle fitting algorithm, yet that silicon chip contains is jagged, is not a standard round, so can only remove the barbed portion data when calculating.The coarse positioning of breach directly determines the starting and ending point of the thin sampling of breach in addition, and relatively poor with edge rate method coarse positioning breach precision, directly influences the fine positioning of breach.
Above-mentioned pre-positioning system limits to jointly, and (1) all adopts linear CCD sensor silicon chip edge, and this sensor sample frequency is less, has directly limited the sampling number in a week, thereby has limited the space of precision improvement.(2) the linear CCD transducer takes up room greatlyyer, and under the situation that main machine frame bulk limits, the bulk of ccd sensor can't meet the demands.(3) when silicon chip is adjusted off-centre, need silicon chip and rotary unit to break away from, it is switched in the heart actuator, the latter adjusts silicon chip then, and silicon chip center and turntable center are overlapped.This method of adjustment not only causes surface contact and particle to produce, and the adjustment time is longer, and silicon chip can produce small skew in handoff procedure in addition, causes the introducing of error.
Summary of the invention
The objective of the invention is to solve deficiency of the prior art, a kind of novel silicon sheet pre-positioning system based on the multi-sensor data fusion of independent research is finished needed micron order location in the silicon slice transmission course.
The present invention is achieved by the following technical solutions:
The present invention includes six modules: sensor assembly, signal condition module, data acquisition module, silicon chip centre of form breach computing module, motion-control module, spacing control module.Sensor assembly is connected to the signal condition module with detected silicon chip information, the signal condition module is nursed one's health it after receiving silicon chip information, signal after the conditioning is connected to data acquisition module, conversion of signals after data acquisition module is nursed one's health the signal condition module becomes data, and the data after will changing output to silicon chip centre of form breach computing module, silicon chip centre of form breach computing module is handled data acquisition module data converted, obtain the adjustment amount of motion-control module, and this adjustment amount outputed to motion-control module, the adjustment amount that motion-control module obtains according to silicon chip centre of form breach computing module is finished the practical operation of silicon chip location, motion-control module is carried out spacing diagnosis to spacing control module and fault is got rid of, motion-control module outputs to signal processing module with part signal and further handles, for data acquisition module provides external timing signal.
Described sensor assembly is made up of laser displacement sensor and controller, laser-transmitting formula transducer (being called for short light transparent transmission sensor) and controller, current vortex sensor and controller thereof.The bigger laser displacement sensor sensing head of mechanical dimension is to inlay to be placed in the main machine frame, does not take real space.Laser displacement sensor is measured silicon chip edge and is obtained radial distance; Light transparent transmission sensor is used for detecting the breach data, and its sensing head is installed in the upper and lower surface at silicon chip edge respectively, by shading amount size decision radial distance.Circular runout when current vortex sensor is used for detecting the turntable high speed rotating.These sensor output signals are introduced into to be gathered after the signal condition module is nursed one's health again.The controller unification of each transducer is placed in the control cubicle, the binding post of signal slave controller rear board is drawn, three controllers are all drawn the I/O signal that some sensor states read and control, and they all are the OC doors, must connect in the signal condition module and draw resistance.
Described laser displacement sensor measuring range is ± 5mm, and resolution is 0.3 μ m, light transparent transmission sensor surveyed area 5 * 1mm, and resolution is 2～5 μ m, electric vortex sensor measuring scope 1mm, resolution is 0.4 μ m.
Described signal condition module, it is exactly a block signal conditioning plate that physics embodies, and mainly finishes the analog signal of sensor output is carried out Filtering Processing, disturbs to eliminate; The processing of the OC gate circuit of transducer digital signal, the amplification of turntable code signal, process of frequency multiplication also have the spacing processing of actuator with the external timing signal as data collecting card.
Described data acquisition module adopt turntable encoding process signal as external clock carry out laser displacement, light is saturating and the synchronous acquisition of three sensor signals of current vortex, the angle information of each collection point correspondence is also known like this.Concerning light the saturating and current vortex sensor, what gather is through filtered analog quantity, and the laser displacement sensor controller provides one 40 core parallel port data wire in addition, wherein this 21 radical word line of 13～33 pins reflects the complement code of controller screen display value, as long as this 21 radical word line of synchronous acquisition, in software, finish the conversion of complement code then, just can accurately obtain controller screen display value, the interference of so just having avoided analog signal to exist to true form.
Described silicon chip centre of form breach computing module, calculate the silicon chip centre of form and the silicon chip breach centre of form respectively, calculate necessary each the angle corresponding radial distance of known silicon chip of the silicon chip centre of form, because data acquisition is that code signal with turntable is as external clock, so the angle of data collection point correspondence is known, but the data of laser displacement sensor are not merely represented the radial distance of silicon chip, because have the circular runout of 3 μ m and the beat of 70 μ rad during the turntable high speed rotating at least, therefore need survey the circular runout and the Run-out error (jump in the unified footpath that shows as) of turntable with current vortex sensor, from the measured value of laser displacement sensor, eliminate the radial distance that just obtains silicon chip then.Obtain radius data and this point corresponding angle of the desirable turntable center of circle to the silicon chip border after the data fusion of laser displacement and current vortex sensor, (r θ), utilizes the system of material points gravity model appoach to obtain the silicon chip centre of form then promptly to obtain the data point polar coordinates.After the centre of form was adjusted, this carried out the detection of silicon chip breach.Laser displacement sensor is when detecting breach, and light is got to the reverberation that the breach hypotenuse reflects and returned less than a laser sense side receiver lens place, causes breach to detect failure, so the Data Detection of breach adopts the light transparent transmission sensor of correlation sensing head up and down.Turntable rotates silicon chip arrives under the light transparent transmission sensor sensing head breach, and turntable slow rotation then is with the breach data of light transparent transmission sensor acquisition and adopt aforementioned identical algorithms to calculate the breach centre of form.After two centres of form are all known, just can know that actual actuator finishes the adjustment amount of silicon chip location.
Described motion-control module, it is actuator with a four-axis movement control card control four-degree-of-freedom, turntable (θ axle) is placed on below, and the X-Y axle that two straight-line displacement platforms are formed places the turntable top, and Z axle of next door support fixed installation is rectilinear motion up and down.Because the X-Y axle places the turntable top, when adjusting silicon chip off-centre, directly adjust the X-Y axle and get final product like this, do not need the disengaging of the sucker on silicon chip and the turntable.Send instruction by calling built-in function in the software to control card, finish corresponding operation after the instruction that the latter accepts, such as the control card initialization or drive the motion etc. of actuator.
Described spacing control module realizes the spacing diagnosis and the eliminating of four actuators.X, Y, Z displacement platform have carried limit switch at two ends, when limit switch is pushed down, can call the built-in function realization software of control card and eliminate, but if machinery is stuck, just must power up the hardware elimination in the outside, and the time that powers up be 0.8s.Turntable can unrestrictedly rotate, but in native system for prevent the coiling and the zero-point positioning problem can only allow it rotate a week, so limit switch has been installed respectively at its two ends, left and right sides, after spacing pushing down, the turntable outage stops, can utilize I/O mouth control turntable to switch on, and rotation is unclamped limit switch temporarily.
When the present invention worked, sensor assembly detected silicon chip edge radial information and turntable circular runout information, and signal inserts signal regulating panel and handles.The signal condition module is mainly finished transducer output analog signal is carried out the processing of Filtering Processing, digital signal OC gate circuit, amplification of turntable code signal and process of frequency multiplication etc.Digital signal that data collecting module collected is conditioned and analog signal, the external clock of gathering is provided by the turntable code signal after handling, can realize synchronous data sampling like this, and can know the pairing angle value of each data point, gather the deposit data of coming and in the industrial computer internal memory, calculate for silicon chip centre of form breach computing module.Silicon chip centre of form breach computing module will be handled the data that the data acquisition module obtains earlier, at first the laser displacement sensor data are carried out D/A conversion and software filtering, merge the silicon chip radial distance that obtains each angle position correspondence by multi-sensor data then, calculate the silicon chip centre of form and the breach centre of form, finally release the adjustment amount that the X of actuator, Y, R platform realize need walking about in the silicon chip location.Motion-control module is finished the practical operation of silicon chip location, and according to actuator's adjustment amount that silicon chip centre of form breach computing module is tried to achieve, industrial computer sends order to four-axis movement control card, and the latter drives actuator's action.Spacing control module can detect actuator whether arrive spacing, if, can adjust actuator by spacing recovering state to normal condition.
The present invention adopts laser displacement sensor and light transparent transmission sensor to be used the detection silicon chip edge, and their volumes are very little, add the laser displacement sensor sensing head actual be to be embedded in the main machine frame, so transducer takies actual bulk hardly.Their sample frequency is higher than the sample frequency of linear CCD transducer far away, can realize high-speed sampling, increases silicon chip edge one all sampling numbers greatly, thereby can improve precision.The present invention calculates the silicon chip centre of form and the breach centre of form with the system of material points gravity model appoach, and this method is the repeatability precision height not only, and is applicable to and promptly the silicon chip shape is not required the object of Any shape.The present invention does not need the disengaging of silicon chip and rotating mechanism, thereby has improved the location efficiency of the silicon chip centre of form, and avoided the generation of particle and error when adjusting the coincidence of the silicon chip centre of form and turntable center.Precision height of the present invention, excellent in efficiency has improved the overall performance of mask aligner, greatly to the great significance of mask aligner.
Description of drawings
Fig. 1 is a structured flowchart of the present invention
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment has provided detailed execution mode and process being to implement under the prerequisite with the technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, present embodiment comprises six modules: sensor assembly, signal condition module, data acquisition module, silicon chip centre of form breach computing module, motion-control module, spacing control module.Sensor assembly is connected to the signal condition module with detected silicon chip information, the signal condition module is nursed one's health it after receiving silicon chip information, signal after the conditioning is connected to data acquisition module, conversion of signals after data acquisition module is nursed one's health the signal condition module becomes data, and the data after will changing output to silicon chip centre of form breach computing module, silicon chip centre of form breach computing module is handled data acquisition module data converted, obtain actuator's adjustment amount, and this actuator's adjustment amount outputed to motion-control module, actuator's adjustment amount that motion-control module obtains according to silicon chip centre of form breach computing module is finished the practical operation of silicon chip location.
Described sensor assembly mainly is made up of three transducers, and the laser displacement sensor sensing head is embedded in the main machine frame, and luminous point is beaten the rim detection silicon chip radial distance at silicon chip; Light transparent transmission sensor light belt, is mainly used in and detects silicon chip breach data according to the radial distance that how much detects silicon chip of shading towards the turntable center; Current vortex sensor detects the circular runout of sucker lower end axle, the circular runout of its reflection turntable.Each transducer all has a controller, and the controller unification is placed in the control cubicle, and the binding post of signal slave controller rear board is drawn.Three controllers are all drawn the I/O signal that some sensor states read (as the outrange state) and control (resetting as transducer), and they all are the OC doors, must connect in signal regulating panel and draw resistance.Light transparent transmission sensor and eddy current sensor output are analog signals, and laser displacement sensor provides analog and digital signal two kinds of outputs, the complement code of digital signal representation controller screen display value, for fear of the possible interference problem of analog signal, adopt digital signal output for core detection part laser displacement sensor.All output signals of transducer all entering signal conditioning plate are handled, and analog signal will be carried out filtering, and digital signal is all wanted pull-up resistor; The turntable code signal is four road differential signals, selects wherein one road signal introducing signal regulating panel for use, carries out voltage amplification processing and High frequency filter, and this signal will be as the external clock of data collecting card.When detecting the centre of form, signal frequency is not made change, and this moment, turntable three sensor output signals of synchronous acquisition that rotate a circle gathered that to count be 176000.When detecting breach, at barbed portion collection point as much as possible, the code signal of turntable has been carried out the quadruple processing, data volume is original four times like this.In addition, the spacing control of four actuators all is to finish in signal regulating panel, but at Fig. 1 for for the purpose of directly perceived, spacing control is divided into an independent module.
For described signal condition module and data acquisition module, sensor signal inserts the data acquisition card terminal board after nursing one's health through signal regulating panel again, terminal board links to each other by cable with data collecting card in the industrial computer, the collecting work task is the digital and analog signaling synchronous acquisition task that external clock triggers, it has 3 passages, wherein two analog channels (representing light transparent transmission sensor passage and current vortex sensor passage respectively) and a digital channel (digital channel is formed in 21 laser displacement sensor outputs).As long as in software, allow turntable rotation, and start this task at once and just can carry out the data acquisition of silicon chip complete cycle, gather the deposit data of getting well in the Dram of opening up in advance, treat that silicon chip centre of form breach computing module handles.
Described silicon chip centre of form breach computing module is the key modules of native system, it must carry out data transaction, software filtering, Data Fusion to the data that leave in the internal memory of being come by the data collecting card collection earlier, and the data of handling just can be used for calculating the position of form center and the gap position of silicon chip.As follows for the work that the data processing division branch will be done, what laser displacement sensor was sampled is 21 position digital signals, and what still calculating needed is analog quantity, so must carry out digital-to-analogue conversion earlier, specifically be exactly the conversion of complement code, can obtain desirable value divided by 10000 again to true form.Next will carry out software filtering, because complete cycle sampled point number is 176000, but the centre of form of Practical Calculation silicon chip only needs 5500 points to get final product.In order to make full use of all sampled points, per 32 points are done once average, obtain a calculation level, can save computing time greatly like this under the prerequisite that guarantees precision.The following step will be to carry out data fusion, when calculating the centre of form, the laser displacement sensor data are comprising the circular runout of turntable, so the laser displacement sensor data deduct the radial distance that the reflection turntable current vortex sensor data of directly jumping are only actual silicon chip, the angle value of each point is known in advance, the polar coordinates of each calculation level are known so, utilize the system of material points gravity model appoach just can obtain the silicon chip centre of form.Because silicon chip one weekly data is known, the coarse position that can find breach in the character of barbed portion data variation rate absolute value maximum at the character or the light transparent transmission sensor of barbed portion data outrange according to laser displacement sensor.The X-Y axle moves, the silicon chip centre of form and turntable center are adjusted within the certain limit, then according to the breach coarse position rotating table of obtaining, breach is arrived under the light transparent transmission sensor sensing head, then turntable rotates at a slow speed, again gather the breach data, adopt the system of material points gravity model appoach to carry out the calculating of the breach centre of form, last rotating table makes silicon chip breach direction turn to the angle position of appointment.
Described motion-control module is made up of four actuators and four-axis movement control card, and turntable θ axle (resolution 9 μ rad) is placed on below; X-Y axle (resolution 8.5nm) places the turntable top, Z axle (resolution 7nm) is fixed on the support of next door, four-axis movement control card is based on pci bus, can directly insert in the PCI slot of industrial computer, also provide powerful motion control function library with card simultaneously, be packaged into the dynamic link library form, in software, only need call the motion control problem that built-in function just can solve actuator's complexity effectively.
Described spacing control module realizes the spacing diagnosis and the eliminating of four actuators.Each actuator all has limit switch, can stop operate as normal again just after must fixing a breakdown after spacing automatically when actuator is pressed onto.When Negative Limit or Positive Limit spacing alarm appear in X, Y, Z displacement platform, can directly call the built-in function of control card and eliminate fault, but if Motion Error words, what represent is that machinery is stuck, this moment must be at the external 15V power supply of displacement platform energization pins, and power up selection of time 0.8s, allow the displacement platform adjust.Turntable normally can unrestrictedly rotate, but in native system for prevent the coiling and the zero-point positioning problem can only allow it rotate a week, so limit switch has been installed respectively at its two ends, left and right sides, after spacing pushing down, the turntable outage stops, can utilize I/O mouth control turntable to switch on, and rotation is unclamped limit switch temporarily.
Claims (9)
1, a kind of silicon sheet pre-positioning system that merges based on multi-sensor data, comprising: sensor assembly, signal condition module, data acquisition module, silicon chip centre of form breach computing module, motion-control module, spacing control module is characterized in that:
Described sensor assembly is connected to the signal condition module with detected silicon chip information,
Described signal condition module is nursed one's health it after receiving silicon chip information, and the signal after the conditioning is connected to data acquisition module,
Described data acquisition module becomes data with the conversion of signals after the signal condition module conditioning, and the data after will changing output to silicon chip centre of form breach computing module,
Described silicon chip centre of form breach computing module is handled data acquisition module data converted, and obtain the adjustment amount of motion-control module, and this adjustment amount is outputed to motion-control module,
The adjustment amount that described motion-control module obtains according to silicon chip centre of form breach computing module is finished the practical operation of silicon chip location,
Motion-control module is carried out spacing diagnosis to described spacing control module and fault is got rid of,
Described motion-control module outputs to signal processing module with part signal and further handles, for data acquisition module provides external timing signal;
Described sensor assembly, form by laser displacement sensor and controller, laser-transmitting formula transducer and controller, current vortex sensor and controller thereof, these transducers and controller thereof all are connected to signal processing module, the laser displacement sensor sensing head is to inlay to be placed in the main machine frame, and laser displacement sensor is measured silicon chip edge and obtained radial distance; Light transparent transmission sensor is used for detecting the breach data, and its sensing head is installed in the upper and lower surface at silicon chip edge respectively, by shading amount size decision radial distance; Circular runout when current vortex sensor is used for detecting the turntable high speed rotating; The controller unification of each transducer is placed in the control cubicle, and the binding post of signal slave controller rear board is drawn.
2, the silicon sheet pre-positioning system that merges based on multi-sensor data according to claim 1, it is characterized in that, described laser displacement sensor measuring range is ± 5mm, resolution is 0.3 μ m, laser-transmitting formula sensor zone 5 * 1mm, resolution is 2～5 μ m, electric vortex sensor measuring scope 1mm, and resolution is 0.4 μ m.
3, the silicon sheet pre-positioning system that merges based on multi-sensor data according to claim 1, it is characterized in that, described sensor assembly, laser-transmitting formula transducer wherein and current vortex sensor output are analog signals, and laser displacement sensor provides analog and digital signal two kinds of outputs, the complement code of digital signal representation controller screen display value for fear of the possible interference problem of analog signal, adopts digital signal output for core detection part laser displacement sensor; All output signals of transducer all entering signal conditioning plate are handled, and analog signal will be carried out filtering, and digital signal is all wanted pull-up resistor; The turntable code signal is four road differential signals, selects wherein one road signal introducing signal regulating panel for use, carries out voltage amplification processing and High frequency filter, and this signal will be as the external clock of data collecting card.
4, the silicon sheet pre-positioning system that merges based on multi-sensor data according to claim 1 is characterized in that, described signal condition module is finished the analog signal of sensor output is carried out Filtering Processing, disturbs to eliminate; The processing of the OC gate circuit of transducer digital signal, the amplification of turntable code signal, process of frequency multiplication also have the spacing processing of actuator with the external timing signal as data collecting card.
5, the silicon sheet pre-positioning system that merges based on multi-sensor data according to claim 1, it is characterized in that, described data acquisition module, adopt turntable encoding process signal to carry out the synchronous acquisition of laser displacement, laser-transmitting formula and three sensor signals of current vortex as external clock, the angle information of each collection point correspondence is also known like this; Laser-transmitting formula transducer and current vortex sensor collection be through filtered analog quantity, and the laser displacement sensor controller provides one 40 core parallel port data wire in addition, wherein this 21 radical word line of 13～33 pins reflects the complement code of controller screen display value, as long as this 21 radical word line of synchronous acquisition, in software, finish the conversion of complement code then to true form, just can obtain controller screen display value, the interference of so just having avoided analog signal to exist.
6, the silicon sheet pre-positioning system that merges based on multi-sensor data according to claim 1, it is characterized in that, described signal condition module and data acquisition module, sensor signal inserts the data acquisition card terminal board after nursing one's health through signal regulating panel again, terminal board links to each other by cable with data collecting card in the industrial computer, the collecting work task is the digital and analog signaling synchronous acquisition task that external clock triggers, it has 3 passages, wherein two analog channels are represented laser-transmitting formula sensor passage and current vortex sensor passage respectively, a digital channel is made up of laser displacement sensor output, as long as allow the turntable rotation, and start this task at once and just carry out the data acquisition of silicon chip complete cycle, gather good deposit data in the Dram of opening up in advance, treat that silicon chip centre of form breach computing module handles.
7, the silicon sheet pre-positioning system that merges based on multi-sensor data according to claim 1, it is characterized in that, described silicon chip centre of form breach computing module, calculate the silicon chip centre of form and the silicon chip breach centre of form respectively, calculate necessary each the angle corresponding radial distance of known silicon chip of the silicon chip centre of form, need survey the circular runout and the Run-out error of turntable with current vortex sensor, from the measured value of laser displacement sensor, eliminate the radial distance that just obtains silicon chip then; Obtain radius data and this point corresponding angle of the desirable turntable center of circle to the silicon chip border after the data fusion of laser displacement and current vortex sensor, (r θ), utilizes the system of material points gravity model appoach to obtain the silicon chip centre of form then promptly to obtain the data point polar coordinates; After the centre of form is adjusted, this carries out the detection of silicon chip breach, laser displacement sensor is when detecting breach, the Data Detection of breach adopts the light transparent transmission sensor of correlation sensing head up and down, turntable rotates silicon chip arrives under the light transparent transmission sensor sensing head breach, turntable slow rotation then, the breach data that obtain with light transparent transmission sensor also adopt aforementioned identical algorithms to calculate the breach centre of form; After two centres of form are all known, just can know that actual actuator finishes the adjustment amount of silicon chip location.
8, the silicon sheet pre-positioning system that merges based on multi-sensor data according to claim 1, it is characterized in that, described motion-control module, it is actuator with a four-axis movement control card control four-degree-of-freedom, turntable θ axle is placed on below, the X-Y axle that two straight-line displacement platforms are formed places the turntable top, Z axle of next door support fixed installation is rectilinear motion up and down, when adjusting silicon chip off-centre, directly adjust the X-Y axle, call built-in function in the software and send instruction, finish corresponding operation after the instruction that the latter accepts to control card.
9, the silicon sheet pre-positioning system that merges based on multi-sensor data according to claim 8, it is characterized in that, described spacing control module, realize the spacing diagnosis and the eliminating of four actuators, X, Y, Z displacement platform have carried limit switch at two ends, when limit switch is pushed down, call the built-in function of control card and realize the software elimination; If machinery is stuck, must power up the hardware elimination in the outside, and the time of powering up is 0.8s, in order to prevent coiling and zero-point positioning problem, allowing turntable rotate can only a week, at its two ends, left and right sides limit switch has been installed respectively, after spacing pushing down, the turntable outage stops, and utilize I/O mouth control turntable to switch on, and rotation is unclamped limit switch temporarily.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101482134A CN100459095C (en) | 2006-12-28 | 2006-12-28 | Silicon sheet pre-positioning system based on multiple sensor data fusing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101482134A CN100459095C (en) | 2006-12-28 | 2006-12-28 | Silicon sheet pre-positioning system based on multiple sensor data fusing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1988127A CN1988127A (en) | 2007-06-27 |
| CN100459095C true CN100459095C (en) | 2009-02-04 |
Family
ID=38184856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006101482134A Expired - Fee Related CN100459095C (en) | 2006-12-28 | 2006-12-28 | Silicon sheet pre-positioning system based on multiple sensor data fusing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100459095C (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104070518B (en) * | 2014-06-20 | 2015-09-02 | 浙江大学 | A kind of Three-degree-of-freeprecision precision adjustment device based on eccentric structure |
| WO2016199288A1 (en) * | 2015-06-12 | 2016-12-15 | 富士機械製造株式会社 | Relay device and manufacturing system |
| CN106950279A (en) * | 2017-04-05 | 2017-07-14 | 北京工业大学 | A kind of vortex scanning system of silicon solar cell defect |
| CN110459497B (en) * | 2018-05-08 | 2022-04-22 | 北京北方华创微电子装备有限公司 | Wafer pre-positioning method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1022369A (en) * | 1996-06-28 | 1998-01-23 | Nikon Corp | Wafer pre-aligning apparatus |
| US6275742B1 (en) * | 1999-04-16 | 2001-08-14 | Berkeley Process Control, Inc. | Wafer aligner system |
| US20040005212A1 (en) * | 2002-07-03 | 2004-01-08 | Wu Kung Chris | Wafer aligner |
| CN1787200A (en) * | 2005-10-28 | 2006-06-14 | 清华大学 | Method for controlling pre-aligning of silicon wafer |
| CN1866494A (en) * | 2006-06-12 | 2006-11-22 | 上海微电子装备有限公司 | High precision silicon slice bench and uses thereof |
-
2006
- 2006-12-28 CN CNB2006101482134A patent/CN100459095C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1022369A (en) * | 1996-06-28 | 1998-01-23 | Nikon Corp | Wafer pre-aligning apparatus |
| US6275742B1 (en) * | 1999-04-16 | 2001-08-14 | Berkeley Process Control, Inc. | Wafer aligner system |
| US20040005212A1 (en) * | 2002-07-03 | 2004-01-08 | Wu Kung Chris | Wafer aligner |
| CN1787200A (en) * | 2005-10-28 | 2006-06-14 | 清华大学 | Method for controlling pre-aligning of silicon wafer |
| CN1866494A (en) * | 2006-06-12 | 2006-11-22 | 上海微电子装备有限公司 | High precision silicon slice bench and uses thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1988127A (en) | 2007-06-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101574809B (en) | Zero-point positioning system, method and device for joint of robot | |
| CN201548211U (en) | Automatic detecting equipment for T-shaped guide rail straightness | |
| CN100459095C (en) | Silicon sheet pre-positioning system based on multiple sensor data fusing | |
| JP2000340639A (en) | Alignment device and alignment method for disk-like element | |
| CN101142545A (en) | Pointing device for a computer system with automatic detection of lifting, and relative control method | |
| CN101882030A (en) | Optical detection apparatus and method | |
| CN103872851B (en) | The rotating speed of electric rotating machine and displacement measurement system | |
| CN107393270A (en) | A kind of portable vision inspection device and method for electric meter detection | |
| CN103050427A (en) | Wafer pre-alignment method | |
| CN104111347B (en) | Raster encoder low-speed precision detection apparatus | |
| CN110687843B (en) | Multi-shaft multi-motor servo device based on ZYNQ and control method thereof | |
| CN101763071A (en) | Independent multi-axis motion controller | |
| CN102419157B (en) | Micro-depth-dimension automatic image measuring system | |
| CN204447416U (en) | The blood component separator that a kind of parameter is immediately adjustable | |
| CN104634244A (en) | Movable platform pose detection device of three-degree-of-freedom parallel mechanism and detection method of movement platform pose detection device | |
| CN202940701U (en) | Rotation speed and displacement measurement system for rotation motor | |
| CN102042248A (en) | Control system for fan | |
| CN105559782A (en) | Method, device and equipment for controlling moving speed of patient's bed | |
| CN101260967A (en) | XYY precision positioning platform calibration method | |
| CN106772684B (en) | Elevator light curtain reliability service life experiment device | |
| CN103336588B (en) | A kind of laser tracking mode wireless three-dimensional mouse | |
| CN210014751U (en) | Measuring device for detecting rotation angle of shaft | |
| CN201654544U (en) | Integral multi-axis movement controller based on Ethernet | |
| CN103822579A (en) | Control system for laser dimension measuring apparatus | |
| CN104755883B (en) | Resolver alignment system, robot and method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090204 Termination date: 20111228 |