CN101118618A - Engineering data analyse data-base enquiring system and method - Google Patents
Engineering data analyse data-base enquiring system and method Download PDFInfo
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Abstract
The present invention discloses and provides an inquiry system and a method for an analysis database of engineering data, wherein the method includes the following procedures: a) an analysis database of engineering is provided, which contains multiple data. b) The multiple data of the analysis database of engineering is classified into data areas attached to multiple departments according to departments. c) The data areas attached to multiple departments are sorted into multiple department login data areas based upon the selecting frequency. d) When logging in, an operator selects one correspondence among the multiple department login data areas according to the department that the operator belongs to. e) The number of times that the operator selects the multiple department login data areas is recorded and the selecting frequency of the data areas attached to multiple departments is accumulated and updated. f) The procedure c) is repeated within a fixed period.
Description
Technical field
The invention relates to a kind of inquiry system and method that is applied to database, refer to a kind of inquiry system and method for engineering data analyse data-base especially.
Background technology
Development along with computer integrated manufacturing and infotech, in the wafer manufacture process, might cause the data of product quality source of variation, all can by factory operate control system (ManufacturingExecution System, MES) and the assistance of robotization collected.Partial data also can carry out real-time monitoring and control on the line directly by means of statistical process control (SPC) module of MES.But because SPC is only helpful to the variation that cause specific caused, there is no help, also can't satisfy wafer factory improving constantly the demand of product quality and yield for the variation that common cause caused.Therefore, wafer factory is for strengthening competitive power, the utmost point need a cover in conjunction with statistical method and data seize project data analytic system outside the line that technology etc. analyzes functions (Engineering Data Analysis, EDA).
8 o'clock wafer epoch in the past, engineering analysis software all is mounted on slip-stick artist's the personal computer, the slip-stick artist can analyze with PC, comparatively trouble is when running into software and must upgrade version, information personnel must be mobilized on every slip-stick artist's the seat with all strength and be installed, and routine was for several times upgraded in every month, often just allows information personnel busy endlessly, not only influence the development progress of engineering analysis software, also have influence on slip-stick artist's work efficiency.And enter 12 o'clock wafers after the epoch, not only data analysis amount explodes hundreds of times, the limited arithmetic capability of personal computer becomes and is difficult to load, analysis software also needs to bring in constant renewal in response to the lifting of process technique at any time version, it is complicated that all kinds of slip-stick artist's demands are tending towards, and the original information framework has not applied and used.For satisfying wafer factory to improving constantly the demand of product quality and yield, the many resources of many numerous and confused inputs of wafer factory develop solution.
In the known technology; the EDA system utilizes statistical method and data technology such as to seize; analysis causes the reason of yield and abnormal quality, makes necessary decision-making to assist the engineering staff, for example shuts down, stops line, adjusts process parameter and to the subsequent treatment of abnormal products etc.Yet analyze, find out the reason that causes low yield in the production run in data, and this analysis result is offered wafer factory with when improving on the processing procedure.These complicated analytical procedures are necessary, handle but tend to expend the considerable time.On the other hand, in the face of huge database, how the analysis operation person finds suitable parameter or data in huge data, also be another work that has degree of difficulty, time-consuming effort again.
Therefore, how to research and develop a kind of inquiry system and method for engineering data analyse data-base, make the operator can the most simple and rapid efficient obtain required project data and analyze, this target of the required develop actively research of this association area at present really.Inventor etc., the whence studies intensively, and be engaged in the many years of experience in the research field with it, the inquiry system and the method for a kind of engineering data analyse data-base of the present invention are proposed then, importing by intelligent recognition module, after data in the engineering data analyse data-base are earlier done preliminary classification according to department, again data are sorted according to the frequency that this department clicks.Can save a lot of times of slip-stick artist.Wherein system can rearrangement every day.By this, make the operator can be familiar with system immediately, when operator's accessing system, also can classify simultaneously according to this registrant affiliated function, the most appropriate real-time parameter of operator and related data are provided, avoid the waste of time and manpower, can effectively solve known problem, be a rare invention in fact.
Summary of the invention
Fundamental purpose of the present invention is for providing a kind of querying method of engineering data analyse data-base, importing by intelligent recognition module, after data in the engineering data analyse data-base are earlier done preliminary classification according to department, again data are sorted according to the frequency that this department clicks.Can make the operator can the most simple and rapid efficient obtain required project data analyzes.
For reaching above-mentioned purpose, of the present invention one implements the sample attitude for a kind of querying method of engineering data analyse data-base is provided than broad sense, and comprising the following step a) provides engineering data analyse data-base, has many data in it; B), be categorized as data field under a plurality of departments according to affiliated function with many data of this project Data Analysis Data Base; C) data field under respectively should a plurality of departments selects for use the number of times ordering to be a plurality of departments login data areas according to one; D) when the operator logins,, select one in this a plurality of departments login data areas certainly and select corresponding person for use according to the department under this operator; E) write down the number of times that this a plurality of departments login data areas is selected in this operator operation for use, and accumulative total upgrade data field under these a plurality of departments this select number of times for use; And f) in the fixed cycle, repeating step c).
According to the present invention the conception, wherein this project Data Analysis Data Base be applied to the semiconductor crystal wafer manufacturing industry the project data analytic system (Engineering Data Analysis, EDA).
The conception according to the present invention, wherein this step b) and this step c) are to finish by intelligent enquiring component (Intelligence Query Component).
The conception according to the present invention, wherein these many data all have product type, batch, fields such as wafer number, process parameter, process work bench, process specifications or manufacturing step.
The conception according to the present invention, wherein each field all has its affiliated a plurality of engineering parameters.
The conception according to the present invention, when wherein this operator logined, the data of this department's login data areas were in the selected field of operator, selected number of times for use according to this, by sort less a plurality of engineering parameters under it of as many as.
The querying method of conception also comprises step g) in this fixed cycle according to the present invention, respectively at data field under these a plurality of departments, selects number of times for use according to this, by as many as this a plurality of engineering parameters that sort less.
The conception according to the present invention, wherein this to select number of times for use be the number of times of selecting for use under each this project parameter.
The conception according to the present invention, wherein this step g) also comprises step g 1) according to these a plurality of engineering parameters of ordering, produce Plato's analytic statistics table.
The conception according to the present invention, wherein this step d) also comprises steps d 1) after operator's login, show this Plato's analytic statistics table, in order to this operator's reference to be provided.
The conception according to the present invention, wherein this step d) also comprises steps d 2) show that this operator when last time logining, uses the record of this department's login data areas.
The conception according to the present invention, wherein this step d) also comprises steps d 0) verify this operator's the message of logining, and confirm this operator affiliated function.
A further object of the present invention is for providing a kind of inquiry system of engineering data analyse data-base, importing by intelligent recognition module, after data in the engineering data analyse data-base are earlier done preliminary classification according to department, again data are sorted according to the frequency that this department clicks.Can make the operator can the most simple and rapid efficient obtain required project data analyzes.
For reaching above-mentioned purpose, of the present invention one implements the sample attitude for a kind of inquiry system of engineering data analyse data-base is provided than broad sense, and comprise: engineering data analyse data-base have many data in it, and these many data has engineering parameter respectively; Intelligent enquiring component (Intelligence QueryComponent), connect this project Data Analysis Data Base, in order to should many data be categorized as data field under a plurality of departments according to affiliated function, simultaneously more respectively should the affiliated data field of a plurality of departments, selecting for use number of times to sort according to one becomes a plurality of departments login data areas, and wherein this selects for use time number system to add up in response to the operator selects for use; And operator interface, connect this intelligent enquiring component, when being used to the operator and logining,,, select one in this a plurality of departments login data areas certainly and select the unlatching corresponding person for use according to the department under this operator by this intelligent enquiring component.
The conception according to the present invention, wherein this project Data Analysis Data Base is applied to the project data of semiconductor crystal wafer manufacturing industry.
The conception according to the present invention, wherein these many data can have product type, batch, fields such as wafer number, process parameter, process work bench, process specifications or manufacturing step; And this project parameter is contained in one of these fields.
The conception according to the present invention, when wherein this operator logined, the data of this department's login data areas were selected number of times in the selected field of operator for use according to this, are sorted less by as many as.
The conception according to the present invention, wherein this to select number of times for use be the number of times of selecting for use under each this project parameter.
The conception according to the present invention, wherein this operator interface also when this operator logins, provides Plato's analytic statistics table.
The conception according to the present invention, this Plato's analytic statistics table wherein, between the fixed cycle, this of each this project parameter of this user affiliated function selected the number of times statistics for use.
Description of drawings
Fig. 1 discloses the inquiry system of a kind of engineering data analyse data-base of preferred embodiment of the present invention.
Fig. 2 discloses another synoptic diagram of the inquiry system of engineering data analyse data-base of the present invention.
Fig. 3 discloses the querying method of a kind of engineering data analyse data-base of preferred embodiment of the present invention.
[main element label declaration]
11: engineering data analyse data-base 12: intelligent enquiring component
13: operator interface 21: operator
22: hurdle frame 23: Plato's analytic statistics table
S31～S36: method step
Embodiment
Some exemplary embodiments that embody feature of the present invention and advantage will be described in detail in the explanation of back segment.Be understood that the present invention can have various variations on different aspects, its neither departing from the scope of the present invention, and explanation wherein and to be shown in be when the usefulness that explain in essence, but not in order to restriction the present invention.
See also Fig. 1, disclose the inquiry system of a kind of engineering data analyse data-base of preferred embodiment of the present invention, comprise: engineering data analyse data-base 11 have many data in it, and these many data has engineering parameter respectively; Intelligent enquiring component (Intelligence Query Component) 12, connect this project Data Analysis Data Base 11, in order to should many data be categorized as data field under a plurality of departments according to affiliated function, simultaneously more respectively should the affiliated data field of a plurality of departments, select for use number of times ordering to become a plurality of departments login data areas according to one, wherein this to select number of times for use be to add up in response to the operator selects for use; And operator interface 13, connect this intelligent enquiring component 12, when being used to the operator and logining,,, select one in this a plurality of departments login data areas certainly and select the unlatching corresponding person for use according to the department under this operator by this intelligent enquiring component.In embodiments of the present invention, this project Data Analysis Data Base 11 for the project data analytic system that is applied to the semiconductor crystal wafer manufacturing industry (Engineering Data Analysis, EDA).Project data in this database is all taken from the manufacturing control system in the procedure for producing, thus each data can comprise product type, batch, field such as wafer number, process parameter, process work bench, process specifications or manufacturing step; This project parameter then can be defined sorting parameter in each field.The operator can analyze the correlativity of each engineering parameter and yield according to data of database, and then the usefulness of processing procedure improvement or quality monitoring control is provided.
Refer again to Fig. 2, disclose another synoptic diagram of the inquiry system of engineering data analyse data-base of the present invention.When practical application, when operator's 21 logins, the data of this department's login data areas with this project parameter, are selected number of times according to this in the selected field of operator, are sorted less to the 22 confession operator references of hurdle frame by as many as.Certainly, this operator interface 13 also can be in response to operator's request, when these operator's 21 logins, Plato's analytic statistics table 23 is provided, this Plato's analytic statistics table 23 wherein, between the fixed cycle, this of each this project parameter of these user 21 affiliated functions selected the number of times statistical form for use.
Owing to after this inquiry system by the use of intelligent enquiring component, can be done preliminary classification according to department with data, again data are sorted according to the frequency that this department clicks.Therefore, behind registrant's accessing system, system can classify according to this registrant affiliated function, and allow this registrant in the dilatory menu of selecting field, can see that its affiliated function clicked number of times parameter from high to low in two months, and can see the parameter that this registrant is used during last once login, so can save a lot of times of slip-stick artist.Wherein system can rearrangement every day.By such mode, also can allow the faster left-hand seat of the new person of company, and to understand which parameter be often to use with colleague institute of department, saving is much groped the time.
Corresponding aforesaid enforcement aspect, the present invention also provides a kind of querying method of engineering data analyse data-base.See also Fig. 3, disclose the querying method of a kind of engineering data analyse data-base of preferred embodiment of the present invention.As Fig. 3 and shown in Figure 2, the step of this method comprises at least a) provides engineering data analyse data-base 11, have many data in it, shown in step S31, wherein this project Data Analysis Data Base 11 be the project data analytic system that is applied to the semiconductor crystal wafer manufacturing industry (Engineering DataAnalysis, EDA); B), be categorized as data field under a plurality of departments according to affiliated function, shown in step S32 with many data of this project Data Analysis Data Base 11; C) data field under respectively should a plurality of departments selects for use the number of times ordering to be a plurality of departments login data areas according to one, shown in step S33; D) when operator's 21 logins,, select one in this a plurality of departments login data areas certainly and select corresponding person for use, shown in step S34 according to the department under this operator 21; E) write down the number of times that this a plurality of departments login data areas is selected in this operator operation for use, and accumulative total upgrade data field under these a plurality of departments this select number of times for use, shown in step S35; And f) in the fixed cycle, repeating step c), shown in step S36.
When practical application, wherein this step b) to this step f) is mainly finished by intelligent enquiring component (Intelligence Query Component) 12.Same, the project data in this database is all taken from the manufacturing control system in the procedure for producing, thus each data can comprise product type, batch, fields such as wafer number, process parameter, process work bench, process specifications or manufacturing step; This project parameter then can be defined sorting parameter in each field.The operator can analyze the correlativity of each engineering parameter and yield according to data of database, and then the usefulness of processing procedure improvement or quality monitoring control is provided.In fact, in the factory of wafer production, engineers selects the parameter number of times to be 8000 times in project data analytic system EDA data base querying weekly.If to grasp analysis CD metric data is example, this CD metric data has 10 QC engineering parameters altogether.Can find behind 5 slip-stick artists of actual sample survey, search the required time with the known technology interface, average each operation needs 53.2 seconds altogether.Yet quoting System and method for of the present invention, to search the required time then be 7.5 seconds.So quote the technology of the present invention, average each inquiry difference is 45.7 seconds.With regard to direct benefit, annual can save (or shortening) slip-stick artist's issue handling time approximately=(52*8000*45.7)/(60*60*8*22)=30 people/moon.On the other hand, the query statistic data of all departments regularly (the common product cycle is two months) can be more one be advanced output, so that R﹠amp to be provided; D or other unit are as improving processing procedure with reference to usefulness.Moreover, with regard to indirect benefit, reduction in processing time, the means with more can high usage solve the processing procedure problem fast.So, nature can improve the blunt rate of product, and fast product is imported market.
In sum, the invention provides a kind of inquiry system of engineering data analyse data-base, by the importing of intelligent recognition module, the data in the engineering data analyse data-base are earlier done preliminary classification according to department after, again data are sorted according to the frequency that this department clicks.Can make the operator can the most simple and rapid efficient obtain required project data and analyze, a large amount of minimizing operators is to the processing time of engineering problem.On the other hand, reduction in processing time with the solution of favourable processing procedure problem, also can reduce production costs, improve the production yield naturally, and this can't reach for known technology.The technology of the present invention has practicality, novelty and creativeness, files an application in the whence in accordance with the law.
Can appoint by those skilled in the art even if the present invention has been described in detail by the above embodiments and to execute that the craftsman thinks and be to modify right neither taking off as all as claims Protector that scope is desired.
Claims (19)
1. the querying method of an engineering data analyse data-base comprises the following step:
A) provide engineering data analyse data-base, have many data in it;
B), be categorized as data field under a plurality of departments according to affiliated function with many data of this project Data Analysis Data Base;
C) data field under respectively should a plurality of departments is according to selecting for use the number of times ordering to be a plurality of departments login data areas;
D) when the operator logins,, select one in this a plurality of departments login data areas certainly and select corresponding person for use according to the department under this operator;
E) write down the number of times that this a plurality of departments login data areas is selected in this operator operation for use, and accumulative total upgrade data field under these a plurality of departments this select number of times for use; And
F) in the fixed cycle, repeating step c).
2., querying method according to claim 1, wherein this project Data Analysis Data Base is applied to the project data analytic system of semiconductor crystal wafer manufacturing industry.
3. querying method according to claim 1, wherein this step b) and this step c) are to finish by intelligent enquiring component.
4. querying method according to claim 1, wherein these many data all have product type, batch, field such as wafer number, process parameter, process work bench, process specifications or manufacturing step.
5. querying method according to claim 4, wherein each field all has its affiliated a plurality of engineering parameters.
6. querying method according to claim 5, when wherein this operator logined, the data of this department's login data areas were in the selected field of operator, selected number of times for use according to this, by sort less a plurality of engineering parameters under it of as many as.
7. querying method according to claim 5 also comprises step g) in this fixed cycle, respectively at data field under these a plurality of departments, selects number of times for use according to this, by as many as this a plurality of engineering parameters that sort less.
8. querying method according to claim 7, wherein this to select number of times for use be the number of times of selecting for use under each this project parameter.
9. querying method according to claim 7, wherein this step g) also comprises step g 1) according to these a plurality of engineering parameters of ordering, produce Plato's analytic statistics table.
10. querying method according to claim 9, wherein this step d) also comprises steps d 1) after operator's login, show this Plato's analytic statistics table, in order to this operator's reference to be provided.
11. querying method according to claim 1, wherein this step d) also comprises steps d 2) show that this operator when last time logining, uses the record of this department's login data areas.
12. querying method according to claim 1, wherein this step d) also comprises steps d 0) verify this operator's the message of logining, and confirm this operator affiliated function.
13. the inquiry system of an engineering data analyse data-base comprises:
Engineering data analyse data-base have many data in it, and these many data has engineering parameter respectively;
Intelligent enquiring component, connect this project Data Analysis Data Base, in order to should many data be categorized as data field under a plurality of departments according to affiliated function, simultaneously more respectively should the affiliated data field of a plurality of departments, select for use number of times ordering to become a plurality of departments login data areas according to one, wherein this to select number of times for use be to add up in response to the operator selects for use; And
Operator interface connects this intelligent enquiring component, when being used to the operator and logining, by this intelligent enquiring component, according to the department under this operator, selects one in this a plurality of departments login data areas certainly and selects the unlatching corresponding person for use.
14. inquiry system according to claim 13, wherein this project Data Analysis Data Base is applied to the project data of semiconductor crystal wafer manufacturing industry.
15. inquiry system according to claim 13, wherein these many data can have product type, batch, field such as wafer number, process parameter, process work bench, process specifications or manufacturing step; And this project parameter is contained in one of these fields.
16. inquiry system according to claim 15, when wherein this operator logined, the data of this department's login data areas were selected number of times in the selected field of operator for use according to this, are sorted less by as many as.
17. inquiry system according to claim 13, wherein this to select number of times for use be the number of times of selecting for use under each this project parameter.
18. inquiry system according to claim 17, wherein this operator interface also when this operator logins, provides Plato's analytic statistics table.
19. inquiry system according to claim 18, this Plato's analytic statistics table wherein, between the fixed cycle, this of each this project parameter of this user affiliated function selected the number of times statistics for use.
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| CNA2006101084226A CN101118618A (en) | 2006-08-02 | 2006-08-02 | Engineering data analyse data-base enquiring system and method |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103196922A (en) * | 2013-04-09 | 2013-07-10 | 上海华力微电子有限公司 | Defect checking load counting system and method |
| CN103455533A (en) * | 2012-05-28 | 2013-12-18 | 冲电气工业株式会社 | Query system, query terminal, and query method |
| CN104731904A (en) * | 2015-03-23 | 2015-06-24 | 上海华力微电子有限公司 | Inquiring system and method applied to commonality analysis of furnace tube equipment |
| CN106547807A (en) * | 2015-09-23 | 2017-03-29 | 财团法人工业技术研究院 | Data analysis method and device |
| CN110851460A (en) * | 2019-10-24 | 2020-02-28 | 华中科技大学 | Graphic query method for product research progress and application thereof |
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2006
- 2006-08-02 CN CNA2006101084226A patent/CN101118618A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103455533A (en) * | 2012-05-28 | 2013-12-18 | 冲电气工业株式会社 | Query system, query terminal, and query method |
| CN103196922A (en) * | 2013-04-09 | 2013-07-10 | 上海华力微电子有限公司 | Defect checking load counting system and method |
| CN104731904A (en) * | 2015-03-23 | 2015-06-24 | 上海华力微电子有限公司 | Inquiring system and method applied to commonality analysis of furnace tube equipment |
| CN106547807A (en) * | 2015-09-23 | 2017-03-29 | 财团法人工业技术研究院 | Data analysis method and device |
| CN106547807B (en) * | 2015-09-23 | 2021-01-22 | 财团法人工业技术研究院 | Data analysis method and device |
| US11086881B2 (en) | 2015-09-23 | 2021-08-10 | Industrial Technology Research Institute | Method and device for analyzing data |
| CN110851460A (en) * | 2019-10-24 | 2020-02-28 | 华中科技大学 | Graphic query method for product research progress and application thereof |
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