CN101292150A - 光散射和成像光学系统 - Google Patents

光散射和成像光学系统 Download PDF

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CN101292150A
CN101292150A CNA2006800384715A CN200680038471A CN101292150A CN 101292150 A CN101292150 A CN 101292150A CN A2006800384715 A CNA2006800384715 A CN A2006800384715A CN 200680038471 A CN200680038471 A CN 200680038471A CN 101292150 A CN101292150 A CN 101292150A
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detector
optical element
scattered light
light
lens
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CN101292150B (zh
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B·S·弗里茨
J·A·科克斯
P·罗伊蒂曼
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Honeywell International Inc
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    • G01N15/1433
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Electro-optical investigation, e.g. flow cytometers
    • G01N15/1484Electro-optical investigation, e.g. flow cytometers microstructural devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N21/49Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/53Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4233Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
    • G02B27/4244Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application in wavelength selecting devices
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1814Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G02B5/1819Plural gratings positioned on the same surface, e.g. array of gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Electro-optical investigation, e.g. flow cytometers
    • G01N15/1434Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Electro-optical investigation, e.g. flow cytometers
    • G01N15/1434Electro-optical investigation, e.g. flow cytometers using an analyser being characterised by its optical arrangement
    • G01N2015/1447Spatial selection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Electro-optical investigation, e.g. flow cytometers
    • G01N2015/1493Particle size
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N2021/4704Angular selective
    • G01N2021/4707Forward scatter; Low angle scatter
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N2021/4704Angular selective
    • G01N2021/4711Multiangle measurement
    • G01N2021/4716Using a ring of sensors, or a combination of diaphragm and sensors; Annular sensor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N21/4788Diffraction

Abstract

将散射光(32,33)和图象(31)光传送到多个探测器(35,36,37)的光学元件(38)。光学元件(38)具有衍射分束器和成像透镜的属性。所检测的光来自被照明的目标(12)。光学元件(38)用于经由多个区域将来自目标(12)的散射光(32,33)分别传送到特定的探测器(36,37)。后面的光学元件(38)可以包括混合透镜上的多个环形区域衍射结构。

Description

光散射和成像光学系统
技术领域
本发明关于光学装置,特别关于包含散射光的光学装置。更特别地,本发明关于收集来自散射光和图像的信息。
发明内容
本发明是利用成像和散射光的测量以及检测得到来自关注区域的数据的光学系统。
附图说明
图1是确定粒子直径和流速的光学成像通道;
图2是确定粒子类型的光学散射通道;
图3是光学成像和散射通道的组合;和
图4是具有多区域衍射结构的光学散射装置。
具体实施方式
可能存在一种收集事物(例如在血细胞计数器流动通道(cytometer flow channel)中的)和细胞(例如白或红血细胞)的散射和成像信息的系统。例如,在血细胞计数器中,一些目标可以包括细胞类型的分类和计数,以及细胞体积的测量。对于这些目标的全光学方法可以通过测量各个角度的细胞的散射光以及成像细胞以确定其直径与可能的其它特性来实现。成像和散射可以利用两个独立的光学系统来实现,该光学系统分别如图1和2所示。然而,利用本方法,散射和成像可以利用一个独立的光学系统来实现,如图3所示。衍射或混合(即衍射-折射)光学元件的使用可以允许实现既能够成像也能够散射的光学链(optical train)。
图1说明了可以用于确定例如流动通道13中血细胞12(或其它粒子)的直径和流速的光学成像通道或链10。成像透镜14可以将来自细胞12的光15聚焦到成像探测器16上。探测器16可以是光电探测器阵列或一些其它用于图像检测的机构。透镜14和探测器16可以沿光轴17对准。
图2说明了可以用于确定流动通道13中血细胞12(或其它粒子)的类型和/或其它特性的光学散射通道或链20。散射离开细胞12的光18可以通过透镜23,其可以工作为散射收集透镜。散射光18可以由透镜23重定向(redirect),然后可以继续前进到达探测器21。探测器21可以是光电探测器或光电探测器阵列或一些其它机构。探测器21可以是环形探测器。探测器21可以检测光的FALS(前向角(forward angular)散射)和/或SALS(小角散射)。探测器19可以是可以沿光轴17继续前进的光的消光通道(未被细胞12散射)。
图3是可以用于确定流动通道13中血细胞12(或其他粒子)的直径、流速和/或类型(和/或包括可能的其他特性),或关注区域中的项目的散射和成像通道或链30的组合。粒子12可以由光源44照明。透镜24可以将来自细胞12的光15聚焦在具有双缝(slit)的成像探测器22上。可以把透镜24看作衍射分束器通道。光15可以具有正的第一级成像。探测器22可以由光电探测器阵列或一些其它用于图像检测并作为散射消光通道的机构构成。透镜24可以收集负的第一衍射级散射光18,该光可以继续前进到达探测器21。探测器21可以是光电探测器或光电探测器阵列或一些其它机构。探测器21可以是环形探测器。探测器21可以检测FALS和/或SALS光。探测器22可以是用于可以沿光轴17继续前进的光的部分消光通道。也可以分别把探测器16,19,21和22看作部分的成像通道、消光通道、FALS/SALS散射通道和/或具有双缝的成像通道。来自探测器21和22的信号可以到达处理器45,其用于关于目标12的信息输出和信号分析。
角度散射收集通道40(图4)可以实现以有效和紧密收集来自关注区域的散射光的角度区域31、32和33,该关注区域例如具有在通道中流动的细胞12(或其它粒子)的流动通道13。关注或目标区域可以由光源42照明。流动通道13可以是部分的血细胞计数器。收集光可以被重定向到具有类似区域并靠近在一起的小探测器35、36和37上。利用混合透镜38上的三个角度区域衍射表面结构,能够收集来自关注区域的散射光的环形区域31、32和33,并将这些不同的区域分别聚焦到相邻的探测器35、36和37上。通过利用将聚焦和光栅特性组合的单一光学元件38,完整或接近完整的环形散射区域31、32和33可以被捕获并重定向到紧密模块中的线性(或其它构形)探测器阵列35,36,37。
光学元件38的衍射表面结构的每个角度区域31、32和33可以具有相关的线性项(光栅),其将各个区域上被捕获的散射光重定向到透镜38的光轴39附近的横向位置。透镜38还可以用于聚焦被捕获的散射光。每个捕获区域可以通过特定区域中透镜38上的衍射结构重定向到可以支持例如探测器35,36和37的探测器阵列面41中的不同的横向位置。探测器可以具有相同面积,靠近在一起和/或紧密,具有最大的能量捕获。来自探测器35,36和37的信号可以到达处理器43,其用于关于目标12的信息输出和信号的分析。光收集区域可以包括消光区域31,尺寸区域32和结构区域33,其分别具有定向(direct)到探测器35,36和37的散射光。区域33可以是轴39最外面的区域,由透镜38上的衍射结构所传送。区域31可以是相对于轴39的最里面的区域,以及区域32可以是相当于透镜38的轴39在区域31和33之间的中间区域。作为替代,可以存在比角度散射收集通道40中的三个区域更多或更少的区域。
在本说明书中,尽管以另一种方式或时态陈述,但是一些内容可以具有假定或预言的特性。
尽管已经对于至少一个示例性例子描述了本发明,但是在阅读了本说明书以后,许多变化和变形对于本领域技术人员而言是显而易见的。因此,打算所附权利要求尽可能宽地考虑到现有技术而进行解释以包括所有的这些变化和变形。

Claims (21)

1.一种光学系统,包括:
光学元件,具有成像透镜和衍射分束器;
图像光探测器,位于沿光轴离光学元件的第一距离;和
散射光探测器,位于离光学元件的第二距离。
2.根据权利要求1所述的系统,其中:
散射光探测器是FALS和/或SALS散射通道;和
图像光探测器是具有双缝的成像通道。
3.根据权利要求2所述的系统,其中散射光探测器用于衍射级。
4.根据权利要求3所述的系统,其中图像光探测器用于另外的衍射级。
5.根据权利要求4所述的系统,进一步包括:
接近目标的光源;和
其中:
散射光探测器可以接收目标散射的光;和
图像光探测器可以接收目标图像的光。
6.根据权利要求5所述的系统,进一步包括连接到散射光探测器和图像光探测器的处理器。
7.一种散射光捕获系统,包括:
衍射透镜;和
接近衍射透镜的探测器阵列。
8.根据权利要求7所述的系统,其中衍射透镜具有多个环形区域。
9.根据权利要求8所述的系统,其中衍射结构在透镜上。
10.根据权利要求9所述的系统,其中透镜包括混合透镜。
11.根据权利要求10所述的系统,其中多个环形区域包括消光区域、尺寸区域和结构区域。
12.根据权利要求11所述的系统,其中:
消光区域投影在探测器阵列的第一探测器上;
尺寸区域投影在探测器阵列的第二探测器上;和
结构区域投影在探测器阵列的第三探测器上。
13.根据权利要求11所述的系统,其中多个环形区域传送目标散射的光。
14.一种检测方法,包括:
提供光学元件;
提供探测器阵列;
利用光学元件将散射光从目标定向到探测器阵列的第一探测器;
利用光学元件将成像光从目标定向到探测器阵列的第二探测器。
15.根据权利要求14所述的方法,其中光学元件是具有衍射结构的聚焦透镜。
16.一种检测方法,包括:
提供光学元件;和
利用光学元件经由多个区域将散射光从目标分别定向到多个探测器。
17.根据权利要求16所述的方法,其中光学元件包括透镜上的多个区域衍射结构。
18.根据权利要求17所述的方法,其中多个区域包括:
围绕光轴的第一环形区域;
在第一环形区域外的第二环形区域;和
在第二环形区域外的第三环形区域。
19.根据权利要求18所述的方法,
经由第一环形区域的散射光到达多个探测器的第一探测器;
经由第二环形区域的散射光到达多个探测器的第二探测器;和
经由第三环形区域的散射光到达多个探测器的第三探测器。
20.根据权利要求19所述的方法,其中:
第一环形区域是消光区域;
第二环形区域是尺寸区域;和
第三环形区域是结构区域。
21.根据权利要求19所述的方法,其中目标可以是分析器流动通道中的粒子。
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CN109791103A (zh) * 2016-09-22 2019-05-21 Imec 非营利协会 使用薄透镜进行粒子检测
US10705001B2 (en) 2018-04-23 2020-07-07 Artium Technologies, Inc. Particle field imaging and characterization using VCSEL lasers for convergent multi-beam illumination
CN113484281A (zh) * 2021-05-28 2021-10-08 太原理工大学 一种基于生物组织独特光散射特性的光学加密装置及方法

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7996188B2 (en) 2005-08-22 2011-08-09 Accuri Cytometers, Inc. User interface for a flow cytometer system
US8017402B2 (en) 2006-03-08 2011-09-13 Accuri Cytometers, Inc. Fluidic system for a flow cytometer
US8303894B2 (en) 2005-10-13 2012-11-06 Accuri Cytometers, Inc. Detection and fluidic system of a flow cytometer
US20070127863A1 (en) * 2005-12-07 2007-06-07 Accuri Instruments Inc. System and method for guiding light from an interrogation zone to a detector system
US8031340B2 (en) * 2006-02-22 2011-10-04 Accuri Cytometers, Inc. Optical system for a flow cytometer
US8149402B2 (en) * 2006-02-22 2012-04-03 Accuri Cytometers, Inc. Optical system for a flow cytometer
US8283177B2 (en) 2006-03-08 2012-10-09 Accuri Cytometers, Inc. Fluidic system with washing capabilities for a flow cytometer
US7780916B2 (en) 2006-03-08 2010-08-24 Accuri Cytometers, Inc. Flow cytometer system with unclogging feature
US20070224684A1 (en) * 2006-03-22 2007-09-27 Olson David C Transportable flow cytometer
US8715573B2 (en) 2006-10-13 2014-05-06 Accuri Cytometers, Inc. Fluidic system for a flow cytometer with temporal processing
US8445286B2 (en) * 2006-11-07 2013-05-21 Accuri Cytometers, Inc. Flow cell for a flow cytometer system
US7739060B2 (en) * 2006-12-22 2010-06-15 Accuri Cytometers, Inc. Detection system and user interface for a flow cytometer system
US20080206804A1 (en) * 2007-01-19 2008-08-28 The General Hospital Corporation Arrangements and methods for multidimensional multiplexed luminescence imaging and diagnosis
US7843561B2 (en) * 2007-12-17 2010-11-30 Accuri Cytometers, Inc. Optical system for a flow cytometer with an interrogation zone
US8432541B2 (en) 2007-12-17 2013-04-30 Accuri Cytometers, Inc. Optical system for a flow cytometer with an interrogation zone
CN104155210B (zh) * 2008-10-02 2017-08-22 彼克斯赛尔医疗科技有限公司 基于粘弹性聚焦的光学成像
US8507279B2 (en) 2009-06-02 2013-08-13 Accuri Cytometers, Inc. System and method of verification of a prepared sample for a flow cytometer
WO2011106402A1 (en) 2010-02-23 2011-09-01 Accuri Cytometers, Inc. Method and system for detecting fluorochromes in a flow cytometer
US9551600B2 (en) 2010-06-14 2017-01-24 Accuri Cytometers, Inc. System and method for creating a flow cytometer network
CN103168225B (zh) 2010-10-25 2015-11-25 阿库里赛托梅特斯公司 用于收集流式细胞仪中的数据集的系统和用户接口
US8994941B2 (en) 2012-11-28 2015-03-31 General Electric Company Optical system, apparatus and method for performing flow cytometry
US10634602B2 (en) 2015-06-12 2020-04-28 Cytochip Inc. Fluidic cartridge for cytometry and additional analysis
CN108025904B (zh) 2015-06-12 2021-10-15 芯易诊有限公司 用于多分析物分析的流体单元和流体卡式盒
WO2017011554A1 (en) 2015-07-14 2017-01-19 Cytochip Inc. Volume sensing in fluidic cartridge
WO2019083844A1 (en) 2017-10-23 2019-05-02 Cytochip Inc. DEVICES AND METHOD FOR MEASURING TARGET ANALYTES AND PARTICLES
US20220412866A1 (en) * 2019-11-22 2022-12-29 Ams Ag Optical particle counter for air quality assessment

Family Cites Families (124)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH552805A (de) * 1972-05-19 1974-08-15 Turlabor Ag Apparat zur bestimmung des durchmessers kleiner teilchen.
US3822095A (en) 1972-08-14 1974-07-02 Block Engineering System for differentiating particles
US3928094A (en) 1975-01-16 1975-12-23 Fairchild Camera Instr Co Method of aligning a wafer beneath a mask and system therefor and wafer having a unique alignment pattern
US3976862A (en) 1975-03-18 1976-08-24 Block Engineering, Inc. Flow stream processor
US4273443A (en) 1979-11-21 1981-06-16 Coulter Electronics, Inc. Method and apparatus for measurement of reradiation in particle flow cell systems
US4341471A (en) * 1979-01-02 1982-07-27 Coulter Electronics, Inc. Apparatus and method for measuring the distribution of radiant energy produced in particle investigating systems
US4284412A (en) 1979-07-13 1981-08-18 Ortho Diagnostics, Inc. Method and apparatus for automated identification and enumeration of specified blood cell subclasses
JPS58143206A (ja) 1982-02-19 1983-08-25 Canon Inc 位置検知信号処理装置
US4441816A (en) * 1982-03-25 1984-04-10 The United States Of America As Represented By The United States Department Of Energy Optical double-slit particle measuring system
US4651564A (en) 1982-09-30 1987-03-24 Honeywell Inc. Semiconductor device
US4683159A (en) 1982-09-30 1987-07-28 Honeywell Inc. Semiconductor device structure and processing
US4478077A (en) 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor
US4478076A (en) 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor
US4501144A (en) 1982-09-30 1985-02-26 Honeywell Inc. Flow sensor
US4695034A (en) 1984-11-27 1987-09-22 Stec Inc. Fluid control device
US4745279A (en) 1986-01-02 1988-05-17 American Hospital Supply Corporation Hematocrit measuring apparatus
US4704033A (en) 1986-03-06 1987-11-03 Micronix Corporation Multiple wavelength linear zone plate alignment apparatus and method
NL8601000A (nl) 1986-04-21 1987-11-16 Jan Greve T H Twente Afdeling Het gebruik van gepolariseerd licht in stromingscytometrie.
DE3640616A1 (de) 1986-11-27 1988-06-09 Standard Elektrik Lorenz Ag Justiervorrichtung
US4818263A (en) 1987-06-11 1989-04-04 Tektronix, Inc. Method and apparatus for precisely positioning microlenses on optical fibers
US4874949A (en) 1987-09-14 1989-10-17 Vanderbilt University Method of measuring lung vascular function and transcapillary transport by the use of nonradioactive markers
US4911616A (en) 1988-01-19 1990-03-27 Laumann Jr Carl W Micro miniature implantable pump
US5760900A (en) 1989-03-18 1998-06-02 Canon Kabushiki Kaisha Method and apparatus for optically measuring specimen
US4932989A (en) 1989-04-05 1990-06-12 At&T Bell Laboratories Method and apparatus for fabricating microlenses on optical fibers
CH679555A5 (zh) 1989-04-11 1992-03-13 Westonbridge Int Ltd
CA2016699C (en) 1989-05-15 2003-11-18 Paul N. Marshall Lytic agents and uses thereof
JPH04501449A (ja) 1989-06-14 1992-03-12 ウエストンブリッジ インターナショナル リミティド マイクロポンプ
DE3926066A1 (de) 1989-08-07 1991-02-14 Ibm Deutschland Mikromechanische kompressorkaskade und verfahren zur druckerhoehung bei extrem niedrigem arbeitsdruck
CH681168A5 (en) 1989-11-10 1993-01-29 Westonbridge Int Ltd Micro-pump for medicinal dosing
US5244537A (en) 1989-12-27 1993-09-14 Honeywell, Inc. Fabrication of an electronic microvalve apparatus
KR910012538A (ko) 1989-12-27 1991-08-08 야마무라 가쯔미 마이크로 펌프 및 그 제조 방법
US5082242A (en) 1989-12-27 1992-01-21 Ulrich Bonne Electronic microvalve apparatus and fabrication
US5050429A (en) 1990-02-22 1991-09-24 Yamatake-Honeywell Co., Ltd. Microbridge flow sensor
US5096388A (en) 1990-03-22 1992-03-17 The Charles Stark Draper Laboratory, Inc. Microfabricated pump
DE69104585T2 (de) 1990-10-30 1995-05-18 Hewlett Packard Co Mikropumpe.
EP0485817B1 (en) 1990-11-03 1998-04-15 Horiba, Ltd. Apparatus for measuring a particle size distribution
US5108623A (en) 1990-11-19 1992-04-28 Gould Inc. Moving web filter assembly
US5194909A (en) 1990-12-04 1993-03-16 Tycko Daniel H Apparatus and method for measuring volume and hemoglobin concentration of red blood cells
DE4119955C2 (de) 1991-06-18 2000-05-31 Danfoss As Miniatur-Betätigungselement
US5176358A (en) 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
WO1994001809A1 (en) 1992-07-02 1994-01-20 Indigo N.V. Concentration detector for colored toner
JP3215175B2 (ja) 1992-08-10 2001-10-02 シスメックス株式会社 粒子分析装置
JP2720340B2 (ja) * 1992-10-11 1998-03-04 株式会社堀場製作所 レーザ回折式粒度分布測定方法
US5441597A (en) 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method
DE69432410T2 (de) 1993-05-14 2004-03-04 Coulter International Corp., Miami Retikulozyt bestimmungsverfahren und geraet, das lichtstreuungstechniken verwendet
ATE295551T1 (de) 1993-06-04 2005-05-15 Coulter Int Corp Verfahren und vorrichtung zur messung der teilchengrössenverteilung unter verwendung von laserstreuung
US5416580A (en) * 1993-07-07 1995-05-16 General Signal Corporation Methods and apparatus for determining small particle size distribution utilizing multiple light beams
JPH08128941A (ja) * 1994-10-31 1996-05-21 Shimadzu Corp 粒度分布測定装置
US5601080A (en) 1994-12-28 1997-02-11 Coretech Medical Technologies Corporation Spectrophotometric blood analysis
US5793485A (en) 1995-03-20 1998-08-11 Sandia Corporation Resonant-cavity apparatus for cytometry or particle analysis
US5528045A (en) 1995-04-06 1996-06-18 Becton Dickinson And Company Particle analyzer with spatially split wavelength filter
US5716852A (en) 1996-03-29 1998-02-10 University Of Washington Microfabricated diffusion-based chemical sensor
EP0839318B1 (en) 1995-06-16 2003-05-07 University of Washington Microfabricated differential extraction device and method
DE69619400T2 (de) 1995-06-16 2002-09-26 Univ Washington Seattle Flacher mikrogefertigter querstromfilter für flüssigkeiten
US5717631A (en) 1995-07-21 1998-02-10 Carnegie Mellon University Microelectromechanical structure and process of making same
US5633724A (en) 1995-08-29 1997-05-27 Hewlett-Packard Company Evanescent scanning of biochemical array
US5726751A (en) 1995-09-27 1998-03-10 University Of Washington Silicon microchannel optical flow cytometer
IT1280475B1 (it) 1995-11-09 1998-01-20 Fiat Ricerche Dispositivi a microfiltri selettivi di colori e immagini.
DE19546570C1 (de) 1995-12-13 1997-03-27 Inst Mikro Und Informationstec Fluidpumpe
JP3308441B2 (ja) 1995-12-19 2002-07-29 シスメックス株式会社 尿中有形成分分析装置
US5863502A (en) 1996-01-24 1999-01-26 Sarnoff Corporation Parallel reaction cassette and associated devices
US5948684A (en) 1997-03-31 1999-09-07 University Of Washington Simultaneous analyte determination and reference balancing in reference T-sensor devices
EP0910474B1 (en) 1996-06-14 2004-03-24 University of Washington Absorption-enhanced differential extraction method
US5764674A (en) 1996-06-28 1998-06-09 Honeywell Inc. Current confinement for a vertical cavity surface emitting laser
US5799030A (en) 1996-07-26 1998-08-25 Honeywell Inc. Semiconductor device with a laser and a photodetector in a common container
AU717626B2 (en) 1996-10-03 2000-03-30 Debiotech S.A. Micro-machined device for fluids and method of manufacture
US6124663A (en) 1996-12-16 2000-09-26 The Boeing Company Fiber optic connector having a microelectromechanical positioning apparatus and an associated fabrication method
US5683159A (en) 1997-01-03 1997-11-04 Johnson; Greg P. Hardware mounting rail
US6061131A (en) * 1997-01-08 2000-05-09 Horiba, Ltd. Optical axis adjustment apparatus and method for particle size distribution measuring equipment
US6097859A (en) 1998-02-12 2000-08-01 The Regents Of The University Of California Multi-wavelength cross-connect optical switch
EP1396736A3 (en) 1997-03-11 2004-12-29 Nihon Kohden Corporation Particle analyzer and composite lens formed by integrally joining plural lens elements of different focal points
JP3679601B2 (ja) * 1997-03-11 2005-08-03 日本分光株式会社 粒子分析装置及び複数の焦点位置を有するレンズ要素を一体化した複合レンズ
US5974867A (en) 1997-06-13 1999-11-02 University Of Washington Method for determining concentration of a laminar sample stream
WO1998059233A1 (en) 1997-06-23 1998-12-30 Luminex Corporation Interlaced lasers for multiple fluorescence measurement
US6082185A (en) 1997-07-25 2000-07-04 Research International, Inc. Disposable fluidic circuit cards
US5880474A (en) 1997-08-29 1999-03-09 Becton Dickinson And Company Multi-illumination-source flow particle analyzer with inter-location emissions crosstalk cancelation
US6007775A (en) 1997-09-26 1999-12-28 University Of Washington Multiple analyte diffusion based chemical sensor
US5822170A (en) 1997-10-09 1998-10-13 Honeywell Inc. Hydrophobic coating for reducing humidity effect in electrostatic actuators
US5836750A (en) 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
US5901939A (en) 1997-10-09 1999-05-11 Honeywell Inc. Buckled actuator with enhanced restoring force
US6106245A (en) 1997-10-09 2000-08-22 Honeywell Low cost, high pumping rate electrostatically actuated mesopump
US6116756A (en) 1997-12-12 2000-09-12 Xerox Corporation Monolithic scanning light emitting devices
US6054335A (en) 1997-12-12 2000-04-25 Xerox Corporation Fabrication of scanning III-V compound light emitters integrated with Si-based actuators
US5920380A (en) 1997-12-19 1999-07-06 Sandia Corporation Apparatus and method for generating partially coherent illumination for photolithography
JP3522535B2 (ja) 1998-05-29 2004-04-26 忠弘 大見 圧力式流量制御装置を備えたガス供給設備
DE19825192A1 (de) 1998-06-05 1999-12-16 Joerg Gutjahr Projektionsschirm
US6091197A (en) 1998-06-12 2000-07-18 Xerox Corporation Full color tunable resonant cavity organic light emitting diode
JP4001436B2 (ja) 1998-07-23 2007-10-31 三菱電機株式会社 光スイッチ及び光スイッチを用いた光路切換装置
DE19835070B4 (de) 1998-08-04 2006-03-16 Carl Zeiss Jena Gmbh Anordnung zur einstellbaren wellenlängenabhängigen Detektion in einem Fluoreszenzmikroskop
US6067157A (en) * 1998-10-09 2000-05-23 University Of Washington Dual large angle light scattering detection
US6032689A (en) 1998-10-30 2000-03-07 Industrial Technology Research Institute Integrated flow controller module
US6236458B1 (en) * 1998-11-20 2001-05-22 Horiba, Ltd. Particle size distribution measuring apparatus, including an array detector and method of manufacturing the array detector
US6091537A (en) 1998-12-11 2000-07-18 Xerox Corporation Electro-actuated microlens assemblies
US6184607B1 (en) 1998-12-29 2001-02-06 Honeywell International Inc. Driving strategy for non-parallel arrays of electrostatic actuators sharing a common electrode
US6215221B1 (en) 1998-12-29 2001-04-10 Honeywell International Inc. Electrostatic/pneumatic actuators for active surfaces
US6249341B1 (en) 1999-01-25 2001-06-19 Amnis Corporation Imaging and analyzing parameters of small moving objects such as cells
US6097485A (en) 1999-03-08 2000-08-01 Integrated Waveguides, Inc. Microchip optical transport technology for use in a personal flow cytometer
JP2003506810A (ja) * 1999-07-28 2003-02-18 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 光学走査装置
US6179586B1 (en) 1999-09-15 2001-01-30 Honeywell International Inc. Dual diaphragm, single chamber mesopump
US6240944B1 (en) 1999-09-23 2001-06-05 Honeywell International Inc. Addressable valve arrays for proportional pressure or flow control
US6813017B1 (en) * 1999-10-20 2004-11-02 Becton, Dickinson And Company Apparatus and method employing incoherent light emitting semiconductor devices as particle detection light sources in a flow cytometer
FR2801671B1 (fr) * 1999-11-29 2001-12-21 Commissariat Energie Atomique Dispositif de mesure, par diffraction, de tailles de particules sensiblement spheriques, notamment de gouttes opaques
US6281975B1 (en) 2000-03-07 2001-08-28 Eldex Laboratories, Inc. Capillary flow cell with bulbous ends
US20010030743A1 (en) 2000-03-10 2001-10-18 Carlos Araujo Laser alignment system with plural lasers for impingement on a single target
DE20008228U1 (de) 2000-05-09 2002-01-03 Busch Dieter & Co Prueftech Vorrichtung zur quantitativen Beurteilung der fluchtenden Lage zweier Maschinenteile, Werkstücke o.dgl.
US7630063B2 (en) 2000-08-02 2009-12-08 Honeywell International Inc. Miniaturized cytometer for detecting multiple species in a sample
US7978329B2 (en) 2000-08-02 2011-07-12 Honeywell International Inc. Portable scattering and fluorescence cytometer
US6597438B1 (en) 2000-08-02 2003-07-22 Honeywell International Inc. Portable flow cytometry
US6700130B2 (en) * 2001-06-29 2004-03-02 Honeywell International Inc. Optical detection system for flow cytometry
US6549275B1 (en) 2000-08-02 2003-04-15 Honeywell International Inc. Optical detection system for flow cytometry
US6382228B1 (en) 2000-08-02 2002-05-07 Honeywell International Inc. Fluid driving system for flow cytometry
JP3412606B2 (ja) * 2000-08-04 2003-06-03 株式会社島津製作所 レーザ回折・散乱式粒度分布測定装置
JP3658599B2 (ja) * 2000-08-07 2005-06-08 独立行政法人 宇宙航空研究開発機構 粒度分布測定方法および装置
TW452658B (en) * 2000-10-24 2001-09-01 Ind Tech Res Inst Thin infrared lens
EP1430335B1 (en) 2001-08-27 2017-01-11 Steyphi Services DE LLC Amplitude and phase control in distributed optical structures
JP2003305585A (ja) * 2001-09-11 2003-10-28 Seiko Epson Corp レーザー加工方法および加工装置
US6760107B1 (en) 2002-04-12 2004-07-06 Pointsource Technologies, Llc Detection of scattered light from particles
JP4143349B2 (ja) * 2002-07-22 2008-09-03 株式会社堀場製作所 粒径分布測定方法、粒径分布測定装置および粒径分布測定装置の測定プログラム
JP3962306B2 (ja) * 2002-09-25 2007-08-22 株式会社堀場製作所 粒径分布測定方法および装置
US6859276B2 (en) * 2003-01-24 2005-02-22 Coulter International Corp. Extracted polarization intensity differential scattering for particle characterization
JP3979304B2 (ja) * 2003-02-24 2007-09-19 日本光電工業株式会社 フローセル位置決め方法およびフローセル位置調整可能なフローサイトメータ
JP2005121415A (ja) * 2003-10-15 2005-05-12 Shimadzu Corp 粒度分布測定装置
US20050151968A1 (en) 2004-01-08 2005-07-14 The Lxt Group Systems and methods for continuous, on-line, real-time surveillance of particles in a fluid
US7471393B2 (en) * 2004-03-06 2008-12-30 Michael Trainer Methods and apparatus for determining the size and shape of particles

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105527202A (zh) * 2014-10-20 2016-04-27 株式会社岛津制作所 粒子量测定装置
CN107810403A (zh) * 2015-02-20 2018-03-16 阿提姆技术公司 多光束和会聚光照射交叉光束成像
CN107810403B (zh) * 2015-02-20 2020-10-16 阿提姆技术公司 多光束和会聚光照射交叉光束成像
US11300492B2 (en) 2015-02-20 2022-04-12 Artium Technologies, Inc. Multiple beam and convergent light illumination crossed-beam imaging
CN108027324A (zh) * 2015-08-31 2018-05-11 惠普发展公司,有限责任合伙企业 光谱显微镜
US10830643B2 (en) 2015-08-31 2020-11-10 Hewlett-Packard Development Company, L.P. Spectral microscope
CN109791103A (zh) * 2016-09-22 2019-05-21 Imec 非营利协会 使用薄透镜进行粒子检测
US10705001B2 (en) 2018-04-23 2020-07-07 Artium Technologies, Inc. Particle field imaging and characterization using VCSEL lasers for convergent multi-beam illumination
CN113484281A (zh) * 2021-05-28 2021-10-08 太原理工大学 一种基于生物组织独特光散射特性的光学加密装置及方法
CN113484281B (zh) * 2021-05-28 2023-03-14 太原理工大学 一种基于生物组织独特光散射特性的光学加密装置及方法

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