CN101846794A - Image space telecentric direct writing projection imaging objective lens for excimer laser microprocessing - Google Patents
Image space telecentric direct writing projection imaging objective lens for excimer laser microprocessing Download PDFInfo
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- CN101846794A CN101846794A CN 201010166769 CN201010166769A CN101846794A CN 101846794 A CN101846794 A CN 101846794A CN 201010166769 CN201010166769 CN 201010166769 CN 201010166769 A CN201010166769 A CN 201010166769A CN 101846794 A CN101846794 A CN 101846794A
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- lens
- excimer laser
- chief ray
- visual field
- axle
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Abstract
The invention discloses an image space telecentric direct writing projection imaging objective lens for excimer laser microprocessing, and belongs to the technical field of laser microprocessing and application thereof. The object space field and the image space field are in reduction scale. In the range of the object space field, all the principal rays, except the principal rays on the axis, irradiate on a projection object plane at a certain angle; and in the range of the image space field, all the principal rays are vertically incident to an imaging image surface. The structural form is divided into two parts: the first part consists of a fused quartz lens, wherein the lens adopts the structural form of a biconvex lens; and the second part consists of four fused quartz lenses, wherein the first lens adopts the structural form of a biconvex lens, the second lens adopts the structural form of a left concave lens and a right convex lens; the third lens adopts the structural form of a biconvex lens, and the fourth lens adopts the structural form of a left convex lens and a right concave lens. The image space telecentric direct writing projection imaging objective lens effectively improves the condition that the processed lower surface pattern is deflected to the outer side of an optical axis relative to the processed upper surface pattern of a processed workpiece, which is caused by the conventional direct writing projection imaging lenses for the excimer laser microprocessing.
Description
Technical field
The picture side that the present invention uses for a kind of excimer laser microfabrication heart far away is directly write the projection imaging object lens, it is the Liar that a kind of excimer laser projection imaging that will be incident upon on the mask plate is directly write on workpiece to be machined, be mainly used in the excimer laser mask and directly write the projection microfabrication, belong to laser fine processing and applied technical field thereof.
Background technology
The workpiece physical dimension of excimer laser microfabrication is generally between hundreds of micron to tens millimeter, the workpiece inner structure size is generally between hundreds of nanometer to tens micron, and the accuracy requirement to workpiece physical dimension and workpiece inner structure size is all very high, be generally tens nanometers extremely between several microns, therefore, directly write projection imaging system for excimer laser microfabrication mask, projection imaging object lens wherein must have image quality near diffraction limit, reach tens nanometers to several microns resolution with approach zero aberration rate.Simultaneously, in order to guarantee the effect of microfabrication, and the capacity usage ratio of raising excimer laser, projection imaging system requires the transmitance of object lens to approach 100%, this just requires the projection imaging object lens to have comparatively simple structure, usually require the eyeglass number few more good more, the general requirement is the 6-8 sheet, and best requirement is the 3-5 sheet.Owing to the monochromaticity and the special wavelength (248nm) of excimer laser, its projection imaging object lens do not need correcting chromatic aberration simultaneously, but available lens material has only fused quartz a kind of.Therefore, the projection imaging object lens that the excimer laser microfabrication is used need the parameter of choose reasonable object lens various aspects, comprise projection imaging multiplying power, f-number, visual field, rear cut-off distance or the like, correct various monochromatic aberrations.
At present, in the excimer laser microfabrication, employed projection imaging object lens are when design, only the consideration axle is gone up the requirement of chief ray at the vertical incidence machined surface of visual field, picture side, do not have to consider from of the requirement of axle chief ray at the vertical incidence machined surface of visual field, picture side, more do not consider of the influence of the size of excimer laser dispersion angle to chief ray vertical incidence machined surface, make that the situation of workpiece lower surface figure with respect to upper surface figure offset slightly outside optical axis appearring in the workpiece that the projection imaging object lens process in the practical application from the axle machining area.When the distance between upper surface and lower surface heals when big, this situation about departing to the optical axis outside more obviously.When processing stand was healed away from optical axis, this situation about departing to the optical axis outside was more obvious.As shown in Figure 1.
Summary of the invention
The objective of the invention is to: reaching the excimer laser microfabrication with directly writing under the prerequisite of the every index request of projection imaging object lens, when the projection imaging objective lens design, the excimer laser dispersion angle of considering the incident mask to mask after the influence of chief ray angle, and in the projection imaging object lens, introduce far core structure of picture side, thereby overcome the excimer laser microfabrication with the conventional deficiency of directly writing the projection imaging object lens, use workpiece that the projection imaging object lens of the present invention's design process occur from the axle machining area workpiece lower surface figure with respect to the situation of upper surface figure offset slightly outside optical axis be improved significantly.
To achieve these goals, the present invention has taked following technical scheme.This is directly write the projection imaging object lens and comprises first, second portion and diaphragm.Described first comprises first lens, first lens are the lens arrangement form of biconvex, described second portion comprises second lens, the 3rd lens, the 4th lens and the 5th lens of from left to right placing successively, described second lens adopt the lens arrangement form of biconvex, described the 3rd lens adopt the protruding lens arrangement form in the left recessed right side, described the 4th lens adopt the lens arrangement form of biconvex, described the 5th lens adopt the recessed lens arrangement form in the left protruding right side, and diaphragm is placed between first lens and second lens.
Dispersion angle is that the excimer laser of θ is radiated on the mask after shaping is handled, multiply by excimer laser dispersion angle θ by setting the normalization visual field chief ray angle of divergence for corresponding normalized factor, eliminate the actual value of excimer laser chief ray dispersion angle behind mask and the difference of Design Theory value.
After visual field chief ray 14 passes through second 3 on first 2 on first lens, first lens in the first successively on the axle, meet on the optical axis 1 a bit with the outer visual field of axle chief ray, this point also is diaphragm 12 positions, then successively behind second 11 on first 10 on second 9 on first 8 on second 7 on first 6 on second 5 on first 4 on second lens, second lens, the 3rd lens, the 3rd lens, the 4th lens, the 4th lens, the 5th lens, the 5th lens by second portion, vertical incidence workpiece processing upper surface.
Axle outer visual field chief ray 15 and optical axis 1 13 are dispersed at angle, the numerical value of setting this angle is that the normalized factor of corresponding normalization visual field multiply by excimer laser dispersion angle θ, axle outer visual field chief ray passes through first 2 on first lens in the first successively, behind second 3 on first lens, meet on the optical axis 1 a bit with visual field chief ray on the axle, this point also is diaphragm 12 positions, first 4 on second lens by second portion successively then, second 5 on second lens, first 6 on the 3rd lens, second 7 on the 3rd lens, first 8 on the 4th lens, second 9 on the 4th lens, first 10 on the 5th lens, behind second 11 on the 5th lens, vertical incidence workpiece processing upper surface.
After each field of view edge light passes through second 11 on first 10 on second 9 on first 8 on second 7 on first 6 on second 5 on first 4 on second 3 on first 2 on first lens, first lens, second lens, second lens, the 3rd lens, the 3rd lens, the 4th lens, the 4th lens, the 5th lens, the 5th lens in the first successively, intersect at the workpiece processing upper surface with separately chief ray.
Among the present invention, true field becomes scale down with visual field, picture side; In the true field scope, the chief ray, all chief rays are with set angle incident projection object plane on axle; In picture side's field range, all chief ray vertical incidence imaging image planes; Use workpiece that the present invention processes occur from the axle machining area workpiece lower surface figure with respect to the situation of upper surface figure offset slightly outside optical axis be improved significantly, as shown in Figure 2.
The present invention when the projection imaging objective lens design, consider that excimer laser is incident upon on the mask after, the excimer laser dispersion angle to mask after the influence of light ray energy distribution situation, and, the angle from the axle chief ray is set according to influencing situation; In the projection imaging object lens, introduce picture side's core structure far away, thereby make from the axle chief ray in visual field, picture side perpendicular to machined surface incident, overcome the excimer laser microfabrication with the conventional deficiency of directly writing object lens, use workpiece that the projection imaging object lens of the present invention's design process occur from the axle machining area workpiece lower surface figure with respect to the situation of upper surface figure offset slightly outside optical axis be improved significantly.
Description of drawings
Fig. 1 does not adopt processing work effect synoptic diagram of the present invention
Fig. 2 adopts processing work effect synoptic diagram of the present invention
Fig. 3 projection imaging object lens first structural drawing
Fig. 4 projection imaging object lens second portion structural drawing
Fig. 5 projection imaging objective lens arrangement figure
Fig. 6 projecting lens curvature of field curve map (unit: micron)
Fig. 7 projecting lens distortion curve figure (unit: number percent)
Among the figure: 1, optical axis; 2, first lens are first; 3, first lens are second; 4, second lens are first; 5, second lens are second; 6, the 3rd lens are first; 7, the 3rd lens are second; 8, the 4th lens are first; 9, the 4th lens are second; 10, the 5th lens are first; 11, the 5th lens are second; 12, light billows; 13, the outer visual field of the axle chief ray angle of divergence; 14, visual field chief ray on the axle; 15, the outer visual field of axle chief ray; 16, field of view edge light on the axle; 17, from axle field of view edge light.
Embodiment
The invention will be further described below in conjunction with accompanying drawing:
Present embodiment comprises first, second portion and diaphragm, and first is made of a slice fused quartz lens, has adopted the lens arrangement form of biconvex, as shown in Figure 3.Second portion from left to right is made of four fused quartz lens successively, be respectively second lens, the 3rd lens, the 4th lens and the 5th lens, second lens adopt the lens arrangement form of biconvex, the 3rd lens adopt the protruding lens arrangement form in the left recessed right side, the 4th lens adopt the lens arrangement form of biconvex, the 5th lens adopt the recessed lens arrangement form in the left protruding right side, and as shown in Figure 4, diaphragm is placed between first lens and second lens.
Visual field chief ray 14 is successively through behind second 3 on first 2 on first lens, first lens of directly writing first in the projecting lens on the axle, meet on the optical axis 1 a bit with the outer visual field of axle chief ray, this point also is diaphragm 12 positions, then successively behind second 11 on first 10 on second 9 on first 8 on second 7 on first 6 on second 5 on first 4 on second lens, second lens, the 3rd lens, the 3rd lens, the 4th lens, the 4th lens, the 5th lens, the 5th lens by second portion, vertical incidence workpiece processing upper surface.
Axle outer visual field chief ray 15 and optical axis 1 13 are dispersed at angle, the chief ray angle of divergence of the outer normalization of axle 0.5 visual field is set at 0.5 * θ °, the chief ray angle of divergence of the outer normalization of axle 0.707 visual field is set at 0.707 * θ °, the chief ray angle of divergence of the outer normalization of axle 1 visual field is θ °, axle outer visual field chief ray is successively through first 2 on first lens of directly writing first in the projection objective, behind second 3 on first lens, meet on the optical axis 1 a bit with visual field chief ray on the axle, this point also is diaphragm 12 positions, first 4 on second lens by second portion successively then, second 5 on second lens, first 6 on the 3rd lens, second 7 on the 3rd lens, first 8 on the 4th lens, second 9 on the 4th lens, first 10 on the 5th lens, behind second 11 on the 5th lens, vertical incidence workpiece processing upper surface.
Each visual field (on the axle visual field and axle an outer visual field) marginal ray 16,17 is successively through directly writing first 10 on second 9 on first 8 on second 7 on first 6 on second 5 on first 4 on second 3 on first 2 on first lens, first lens, second lens, second lens, the 3rd lens, the 3rd lens, the 4th lens, the 4th lens, the 5th lens, second 11 on the 5th lens in the projecting lens first, intersects at the workpiece processing upper surface with separately chief ray.
According to above-mentioned each visual field chief ray, the relation of projection objective various piece is directly write in marginal ray incident, utilize the PW algorithm that each parameter of optical system is carried out numerical solution, in solution procedure, be thin lens by setting first, second portion is the thin lens combination, between distance between mask and first and diaphragm and first apart from approximately equal, the logarithm value solution procedure is simplified, directly write the structure initial value of projecting lens, as shown in table 1, face number numbering in the table 1 is corresponding with the label among Fig. 5, initial value is brought into the optical design Optimization Software (as: ZEMAX of ray tracing class, Code V, OSLO, 8OD88 etc.) be optimized, finally obtain each parameter of optical system, as shown in table 2, the face number numbering in the table 2 is corresponding with the label among Fig. 5.
What finally obtain directly writes projection objective curvature of field curve map as shown in Figure 5, distortion curve figure as shown in Figure 6, your coefficient table of Saden is as shown in table 3, the face number numbering in the table 3 is corresponding with the label among Fig. 5.
Table 1 is directly write projection objective structure initial value
| The face number | The face type | Radius-of-curvature | Thickness | Material |
| Object plane | Index plane | Infinitely great | ??500 | Air |
| ??2 | Index plane | ??800 | ??5 | Fused quartz |
| ??3 | Index plane | ??-800 | ??500 | Air |
| Diaphragm | Index plane | Infinitely great | ??50 | Air |
| ??4 | Index plane | ??100 | ??5 | Fused quartz |
| ??5 | Index plane | ??-200 | ??5 | Air |
| ??6 | Index plane | ??-50 | ??5 | Fused quartz |
| ??7 | Index plane | ??-100 | ??5 | Air |
| ??8 | Index plane | ??100 | ??5 | Fused quartz |
| ??9 | Index plane | ??-100 | ??5 | Air |
| ??10 | Index plane | ??50 | ??5 | Fused quartz |
| ??11 | Index plane | ??100 | ??20 | Air |
| Image planes | Index plane | Infinitely great | ??- | ??- |
[0029]Table 2 is directly write projection objective structure end value
| The face number | The face type | Radius-of-curvature | Thickness | Material |
| Object plane | Index plane | Infinitely great | ??512.25 | Air |
| ??2 | Index plane | ??759.23 | ??4.65 | Fused quartz |
| ??3 | Index plane | ??-823.25 | ??485.25 | Air |
| Diaphragm | Index plane | Infinitely great | ??56.36 | Air |
| ??4 | Index plane | ??98.54 | ??5.24 | Fused quartz |
| ??5 | Index plane | ??-198.25 | ??4.65 | Air |
| ??6 | Index plane | ??-44.36 | ??6.32 | Fused quartz |
| ??7 | Index plane | ??-105.32 | ??4.54 | Air |
| ??8 | Index plane | ??98.56 | ??5.36 | Fused quartz |
| ??9 | Index plane | ??-99.53 | ??3.65 | Air |
| ??10 | Index plane | ??46.25 | ??5.01 | Fused quartz |
| ??11 | Index plane | ??105.65 | ??15.35 | Air |
| Image planes | Index plane | Infinitely great | ??- | ??- |
[0031]Table 3 is directly write projection objective Saden that coefficient table
| The face number | Spherical aberration | Coma | Astigmatism | The curvature of field | Distortion |
| ??2 | ??0.000087 | ??0.000024 | ??0.000006 | ??0.000003 | ??0.000003 |
| ??3 | ??0.000007 | ??0.000008 | ??0.000009 | ??0.000003 | ??0.000013 |
| Diaphragm | ??-0.000000 | ??0.000000 | ??-0.000000 | ??-0.000000 | ??0.000000 |
| ??4 | ??0.008127 | ??-0.000572 | ??0.000040 | ??0.000034 | ??-0.000005 |
| ??5 | ??0.012948 | ??0.000492 | ??0.000019 | ??0.000009 | ??0.000001 |
| ??6 | ??-0.150544 | ??-0.000053 | ??-0.000000 | ??-0.000062 | ??-0.000000 |
| ??7 | ??0.003980 | ??0.000190 | ??0.000009 | ??0.000023 | ??0.000002 |
| ??8 | ??0.011881 | ??-0.000864 | ??0.000063 | ??0.000045 | ??-0.000008 |
| ??9 | ??0.098305 | ??0.000021 | ??0.000000 | ??0.000028 | ??0.000000 |
| ??10 | ??-0.005133 | ??0.000407 | ??-0.000032 | ??0.000092 | ??-0.000005 |
| ??11 | ??0.021688 | ??0.000760 | ??0.000027 | ??-0.000040 | ??-0.000000 |
| Add up to | ??0.001347 | ??0.000413 | ??0.000140 | ??0.000136 | ??0.000000 |
Claims (1)
1. picture side's heart far away of using of an excimer laser microfabrication is directly write the projection imaging object lens, it is characterized in that: comprise first, second portion and diaphragm, described first is made of first lens, first lens are the lens arrangement form of biconvex, described second portion comprises second lens of from left to right placing successively, the 3rd lens, the 4th lens and the 5th lens, described second lens adopt the lens arrangement form of biconvex, described the 3rd lens adopt the protruding lens arrangement form in the left recessed right side, described the 4th lens adopt the lens arrangement form of biconvex, described the 5th lens adopt the recessed lens arrangement form in the left protruding right side, and diaphragm is placed between first lens and second lens;
Dispersion angle is that the excimer laser of θ is radiated on the mask after shaping is handled, multiply by excimer laser dispersion angle θ by setting the normalization visual field chief ray angle of divergence for corresponding normalized factor, eliminate the actual value of excimer laser chief ray dispersion angle behind mask and the difference of Design Theory value;
After the visual field chief ray passes through second on first on first lens, first lens in the first successively on the axle, meet on the optical axis a bit with the outer visual field of axle chief ray, this point also is the diaphragm position, then successively behind second on first on second on first on second on first on second on first on second lens, second lens, the 3rd lens, the 3rd lens, the 4th lens, the 4th lens, the 5th lens, the 5th lens by second portion, vertical incidence workpiece processing upper surface;
Axle outer visual field chief ray and optical axis are dispersed at angle, the numerical value of setting this angle is that the normalized factor of corresponding normalization visual field multiply by excimer laser dispersion angle θ, axle outer visual field chief ray passes through first on first lens in the first successively, behind second on first lens, meet on the optical axis a bit with visual field chief ray on the axle, this point also is the diaphragm position, first on second lens by second portion successively then, second on second lens, first on the 3rd lens, second on the 3rd lens, first on the 4th lens, second on the 4th lens, first on the 5th lens, behind second on the 5th lens, vertical incidence workpiece processing upper surface;
After each field of view edge light passes through second on first on second on first on second on first on second on first on second on first on first lens, first lens, second lens, second lens, the 3rd lens, the 3rd lens, the 4th lens, the 4th lens, the 5th lens, the 5th lens in the first successively, intersect at the workpiece processing upper surface with separately chief ray.
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| CN 201010166769 CN101846794B (en) | 2010-04-30 | 2010-04-30 | Image space telecentric direct writing projection imaging objective lens for excimer laser microprocessing |
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| CN 201010166769 CN101846794B (en) | 2010-04-30 | 2010-04-30 | Image space telecentric direct writing projection imaging objective lens for excimer laser microprocessing |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108873257A (en) * | 2018-07-11 | 2018-11-23 | 大族激光科技产业集团股份有限公司 | Lens group and laser process equipment |
| CN112904533A (en) * | 2021-02-02 | 2021-06-04 | 南京波长光电科技股份有限公司 | Optical lens inside 360-degree detection hole |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4929066A (en) * | 1987-07-14 | 1990-05-29 | Dainippon Screen Mfg. Co., Ltd. | Telecentric image-forming optical system for large image size |
| CN1213087A (en) * | 1997-09-29 | 1999-04-07 | 松下电器产业株式会社 | Projection lens |
| CN2519295Y (en) * | 2002-01-22 | 2002-10-30 | 北京工业大学 | Projection imaging objective lens for quasi molecule laser fine processing |
| JP2005258336A (en) * | 2004-03-15 | 2005-09-22 | Nikon Corp | Optical system for laser beam machining and laser beam machining device using the same |
| CN100504502C (en) * | 2007-08-15 | 2009-06-24 | 中国科学院西安光学精密机械研究所 | Broad spectral band prepositive aperture telecentric optical system |
| CN201698080U (en) * | 2010-04-30 | 2011-01-05 | 北京工业大学 | Image space telecentric direct-writing project imaging lens for quasi-molecular laser micro processing |
-
2010
- 2010-04-30 CN CN 201010166769 patent/CN101846794B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4929066A (en) * | 1987-07-14 | 1990-05-29 | Dainippon Screen Mfg. Co., Ltd. | Telecentric image-forming optical system for large image size |
| CN1213087A (en) * | 1997-09-29 | 1999-04-07 | 松下电器产业株式会社 | Projection lens |
| CN2519295Y (en) * | 2002-01-22 | 2002-10-30 | 北京工业大学 | Projection imaging objective lens for quasi molecule laser fine processing |
| JP2005258336A (en) * | 2004-03-15 | 2005-09-22 | Nikon Corp | Optical system for laser beam machining and laser beam machining device using the same |
| CN100504502C (en) * | 2007-08-15 | 2009-06-24 | 中国科学院西安光学精密机械研究所 | Broad spectral band prepositive aperture telecentric optical system |
| CN201698080U (en) * | 2010-04-30 | 2011-01-05 | 北京工业大学 | Image space telecentric direct-writing project imaging lens for quasi-molecular laser micro processing |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108873257A (en) * | 2018-07-11 | 2018-11-23 | 大族激光科技产业集团股份有限公司 | Lens group and laser process equipment |
| CN112904533A (en) * | 2021-02-02 | 2021-06-04 | 南京波长光电科技股份有限公司 | Optical lens inside 360-degree detection hole |
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