CN101885162A - Numeric control micro-nano grinding and polishing machine for optical fiber lens - Google Patents

Numeric control micro-nano grinding and polishing machine for optical fiber lens Download PDF

Info

Publication number
CN101885162A
CN101885162A CN 201010193697 CN201010193697A CN101885162A CN 101885162 A CN101885162 A CN 101885162A CN 201010193697 CN201010193697 CN 201010193697 CN 201010193697 A CN201010193697 A CN 201010193697A CN 101885162 A CN101885162 A CN 101885162A
Authority
CN
China
Prior art keywords
optical fiber
grinding
axle
polishing
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN 201010193697
Other languages
Chinese (zh)
Inventor
吕玉山
王军
孙军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenyang Ligong University
Original Assignee
Shenyang Ligong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenyang Ligong University filed Critical Shenyang Ligong University
Priority to CN 201010193697 priority Critical patent/CN101885162A/en
Publication of CN101885162A publication Critical patent/CN101885162A/en
Pending legal-status Critical Current

Links

Images

Abstract

The invention provides a numeric control micro-nano grinding and polishing machine for an optical fiber lens, which comprises a grinding and polishing disk mechanism for the optical fiber lens, a finishing mechanism for a grinding and polishing disk, a CCD recognition and detection system, a vertical feeding mechanism, a horizontal feeding mechanism, a self-rotating mechanism, an angular adjustment mechanism, an optical fiber fixture, an operating table and a machine tool body. The numeric control micro-nano grinding and polishing machine for the optical fiber lens solves the problems of a separating transmission mode between workpieces and the polishing disk in the traditional grinding and polishing technical equipment by adopting a planetary biaxial composite motion technology and error accumulation of a principal axis of a composite transmission structure by adopting an annular flexibly-hinged ball supporting technology on the structure; and a flexible hinge is used to tightly clamping optical fiber and adopting a CCD micropressure and shape detection technology is adopted, so that the controllability of the machining process is ensured and interpolation movement of the grinding and polishing is completed under the control of an industrial controller. The numeric control micro-nano grinding and polishing machine for the optical fiber lens has convenient and reliable operation and high automation degree, and can realize uniform grinding and polishing of the optical fiber and the grinding and polishing of an inclined plane, a wedge surface, a conical surface, a cold surface and a spherical surface.

Description

Numeric control micro-nano grinding and polishing machine for optical fiber lens
Technical field
Technology of the present invention belongs to the micro-nano manufacturing category in equipment manufacturing technology field, and it serves optical fiber lens micro-fabrication technology direction, particularly a kind of numeric control micro-nano grinding and polishing machine for optical fiber lens.
Background technology
Optical fiber lens is the important devices of optical-fibre communications field, is mainly used in the manufacturing of the joints of optical fibre, coupler, sensor, probe.It plays effects such as conduction to light, focusing, break-in, beam split, coupling, read-write.The manufacturing of optical fiber lens is a technical barrier in micro-fabrication technology field always., optical fiber small mainly due to size has flexibility makes forming process and formed precision be difficult to control.Therefore, the research of its manufacture method and equipment is the difficult point problem in present technique field always.The manufacture method of optical fiber lens mainly contains etch, hot melt and grinding and polishing method, and wherein the grinding and polishing method is economical and practical and to the strongest method of various moulding adaptability during optical fiber lens is made.At present, the optical fiber lens polisher lapper on the market has mainly been continued to use the hand-ground polishing mode of jewelry industry, and more typical polishing machine is the desk-top manual polishing machine of ULTRA TEC company.The disk gyration has been adopted in the main polishing motion of this machine, and each kinematic axis has adopted the manual adjustments mode.Because the grinding and the polishing of optical fiber lens are little manufacture processes, the adjusting of human factor more makes the precision of process be difficult to control, lens for curve form are difficult to obtain continuously shaped, track direction unicity dull and main motion makes the decline of finished surface form accuracy during particularly single gyration, the surface microscopic texture is difficult to reach optimum state, and the reliability that the system that also makes controls of separating of vision and motion control reduces.The finished product rate that optical fiber lens polisher lapper on the open market obtains only can reach 60%~70%.Therefore, a kind of optical fiber lens grinding and polishing technical equipment that can solve the problems of the technologies described above of invention is the technology prerequisite that produces optical fiber lens efficiently, reliably and in high quality.
The present invention is a kind of micro-nano process technology equipment, it has realistic meaning to workmanship and the efficient that improves optical fiber lens, the development that promotes industries such as optical-fibre communications and sensing there is crucial meaning, abundant intension of equipping manufacturing technology is had crucial effect.
Summary of the invention
The objective of the invention is at since fiber size small, have flexibility make forming process and precision be difficult to control, lens for curve form are difficult to obtain continuously shaped, the surface microscopic texture is difficult to reach optimum state, and a kind of numerical control optical fiber lens micro-nano grinding polishing technology equipment that can solve the problems of the technologies described above that provides.
The technical scheme that adopts is: numeric control micro-nano grinding and polishing machine for optical fiber lens comprises optical fiber lens grinding and polishing disc mechanism, grinding and polishing dish burring machine, CCD identification and detection system, vertical feed mechanism, horizontal feed mechanism, free-wheeling system, angle-adjusting mechanism, fiber clamp, operating desk and lathe bed.
Its technical essential is: optical fiber lens grinding and polishing disc mechanism comprises grinding and polishing dish, flexible hinge dish, support ring, outer shaft, ring gear axle, ring gear belt wheel, ring gear, tie-rod axle, tie-rod belt wheel, planetary gear and tie-rod eccentric shaft.Optical fiber lens grinding and polishing dish is installed on the flexible hinge dish, the support ring upper surface offers annular groove, is equiped with a plurality of steel balls in the annular groove, the flexible hinge dish is installed on the upper surface of support ring, steel ball contacts with flexible hinge dish lower surface, guarantees the planar guide effect.The ring gear axle by first entad angular contact bearing, second entad angular contact bearing be installed on the outer shaft.The tie-rod axle is installed on the ring gear axle by first radial ball bearing, second radial ball bearing, planetary gear is installed in tie-rod eccentric shaft place by the 3rd radial ball bearing, four-way heart ball bearing, tie-rod eccentric shaft and tie-rod axle are an overall structure, planetary gear is fixed on flexible hinge dish lower surface, and optical fiber lens grinding and polishing disc mechanism is installed on the lathe bed by the installing hole on the lathe bed.
The motion of above-mentioned ring gear axle and tie-rod axle is by two driven by motor, and a motor-driven ring gear belt wheel drives the ring gear axle and rotates, and the ring gear axle drives ring gear and rotates; Another motor-driven tie-rod belt wheel drives the tie-rod axle and rotates, and the tie-rod axle drives planetary gear and rotates, and forms the planetary compound motion of twin shaft.The power of two motors is 25kw, and tie-rod axle and ring gear axle speed adjustable range be at 5~120rpm, the ring gear rotation speed n 1=0.5~10rpm, the eccentric E=9mm of tie-rod.Grinding and polishing dish diameter phi 125mm, end face run-out is not more than 0.002mm, adjusts the range of speeds 5~125rpm.Optical fiber lens profile errors≤1 μ m.
Grinding and polishing dish burring machine comprises vertically-guided mechanism, crossbeam and vertical mounting rod.Vertically-guided mechanism comprises diamond finishing piece, micrometer, entablature, sill, first axis of guide, second axis of guide, first spring, second spring, first linear bearing and second linear bearing.Micrometer is installed by the installing hole of entablature, and the lower end of micrometer is contacted with the upper surface of entablature.First linear bearing, second linear bearing are installed on the crossbeam, entablature is connected by first axis of guide, second axis of guide respectively with sill, first spring, second spring is coaxial respectively is installed on first axis of guide, second axis of guide, forms downward finishing power.First axis of guide, second axis of guide are supported on the crossbeam by first linear bearing, second linear bearing respectively.Diamond finishing piece is installed in the sill lower surface, and vertically-guided mechanism is installed on the vertical mounting rod by crossbeam, and vertical mounting rod is installed on the lathe bed, with the position of optical fiber lens grinding and polishing disc mechanism cooperating.
During finishing, adjusting diamond finishing piece contacts with grinding and polishing dish upper surface, control the distortion of first spring, second spring by micrometer, determine that finishing power repairs, grinding and polishing dish burring machine is installed on the lathe bed position with optical fiber lens grinding and polishing disc mechanism cooperating.
CCD identification is known product with detection system, is made up of enlarging lens, CCD, image pick-up card and optical fibre illumination lamp.CCD is fixed on the slide block, be installed in by feed screw nut on the slide unit of Z axial adjustment parts, by feed screw nut Z axial adjustment parts are installed on the slide unit with the perpendicular Y-axis adjustment component of Z axial adjustment parts, by feed screw nut the Y-axis adjustment component is installed on the slide unit with the perpendicular X-axis adjustment component of Y-axis adjustment component, the installation end of X-axis adjustment component is installed on the lathe bed position with optical fiber lens grinding and polishing disc mechanism cooperating again.
Above-mentioned three adjustment component make slide unit motion under the guide rail guiding by corresponding knob rotating band movable wire thick stick, and mutual holding position precision is not more than 0.02mm between the axis of the direction of above-mentioned three adjustment component and CCD identification and detection system.Forming process and the physical dimension that can directly observe the minute-pressure force deformation optical fiber lens of optical fiber lapping polishing process by CCD identification and detection system, and can and each kinematic axis between realize closed-loop control and adjusting.Leading screw pitch 1.2~1.5mm.
Vertical feed mechanism comprises Z shaft step motor, leading screw, line slideway, Z axle feeding workbench and Z pillow block body, and the Z pillow block is installed line slideway and leading screw on one's body.Z axle feeding workbench is installed on the line slideway, and Z axle feeding workbench is connected with threads of lead screw by nut, and Z axle feeding workbench and line slideway are slidingly matched, and Z axle feeding workbench moves along the Z axle.The Z shaft step motor is installed in the line slideway upper end.
Drive the leading screw rotation by the Z shaft step motor by shaft coupling, leading screw drives Z axle feeding workbench along line slideway realization vertical feed and load movement by the motion of pair of nut.Z axle feeding workbench drives angle-adjusting mechanism and free-wheeling system realizes that the card of optical fiber and grinding and polishing dish moves both vertically.Vertical feed mechanism, angle-adjusting mechanism and free-wheeling system can independent controlled motions, also can realize the two and three dimensions moving interpolation, finish the grinding and polishing building motion of inclined-plane, wedge surface, the conical surface, huyashi-chuuka (cold chinese-style noodles) and sphere, to realize the processing request of various profile lens.The range of Z axle feeding workbench is 200mm, and repetitive positioning accuracy is not more than 0.001mm, feeding resolution ratio 0.001mm.The perpendicularity on the installation ground of line slideway is not more than 0.005mm, and the resetting error of motion is not more than 0.001mm.
Horizontal feed mechanism comprises X-axis feeding workbench, line slideway and leading screw.Line slideway and leading screw are installed on the lathe bed by first bearing, second bearing, and X-axis feeding workbench is installed on the line slideway, is connected with threads of lead screw by nut.The Z pillow block body of Z axle feed mechanism is installed on the X-axis feeding workbench.
Drive X-axis feeding workbench by the manual adjustments leading screw and be slidingly matched along line slideway, X-axis feeding workbench moves along X-axis.Drive vertical feed mechanism, angle-adjusting mechanism and free-wheeling system motion, make optical fiber lapping polished end and grinding and polishing dish radially keep an appropriate operating position.X-axis feeding workbench range is 100mm.
Free-wheeling system comprises D shaft step motor and D axle pivoting part.Angle-adjusting mechanism comprises B shaft step motor and B axle pivoting part.The output of D shaft step motor is connected with the input of D axle pivoting part, and the link of free-wheeling system is installed on the substrate by connecting plate.The output of B shaft step motor is connected with the input of B axle pivoting part.The link of angle-adjusting mechanism by angle-adjusting mechanism is installed on the reverse side of substrate.Counterweight is installed on the backward end of substrate, and spool is installed on the other end of free-wheeling system, the winding problem of long optical fibers rotation when being used to solve the optical fiber polishing.Substrate is connected with Z axle feeding workbench.
D axle pivoting part is the output of slowing down of 1: 110 worm-and-wheel gear by speed reducing ratio under the driving of D shaft step motor, and B axle pivoting part is the output of slowing down of 1: 110 worm-and-wheel gear by speed reducing ratio under the driving of B shaft step motor.Angular range 0~360 degree of D axle pivoting part, and can turn round continuously, angular range 0~110 degree of B axle pivoting part, corresponding feeding motor resolution ratio is 0.001 degree.D axle pivoting part and B axle pivoting part repetitive positioning accuracy 0.01 degree.
Fiber clamp comprises first jaw, second jaw, and primary importance is adjusted screw, the second place is adjusted screw, adjusts knob, clamps and adjusts mandrel.First jaw, second jaw are two flexible hinges, are positioned at the fiber clamp right-hand member.In first installing hole of the stiff end of first jaw, second jaw, second installing hole, primary importance is installed adjusts screw, second place adjustment screw, between above-mentioned two position adjusting screws, be provided with the steel ball chamber, first steel ball, second steel ball are installed, above-mentioned two steel balls contact with two position adjusting screws respectively, are provided with the passage that passes through for optical fiber between two steel balls.Adjusting has the passage that passes through for optical fiber in the knob, adjust to be provided with in the knob to clamp and adjust mandrel, clamps the front end of adjusting mandrel and is provided with push rod.The push rod front end is arranged with first spherical groove, and second spherical groove contacts with first steel ball, second steel ball respectively.The left end of fiber clamp is provided with the conical surface that is threaded with the free-wheeling system output.Optical fiber is wound on the spool, and optical fiber is by the optical-fibre channel of free-wheeling system, enters fiber clamp from the jack of fiber clamp, adjusts jack, steel ball chamber in the mandrel by jack, the position adjusted in the knob, stretches out between first jaw, second jaw.
The rotation adjusting knob, clamping the adjustment mandrel by screw drive moves forward, clamp to adjust on the front end push rod of mandrel first spherical groove, second spherical groove, promote first steel ball respectively, second steel ball acts on the first inching screw, the second inching screw, make two flexible hinge generation deformation, the symmetry of first jaw, the relative centre of gyration of second jaw is adjusted in above-mentioned deformation, and optical fiber is clamped.After machining, adjust knob to opposite spin first jaw, second jaw are unclamped, take out optical fiber.Distortion hole in end is φ 0.25mm in the fibre diameter φ 125 μ m, two jaws.Fiber clamp revolution rotation speed n 2=0~50rpm, general power is not more than 0.5kw, and tapering is regulated α=0~95 °, circumferentially adjusting angle β=0~360 °.
The present invention works under the unified control and management of Industrial Control Computer, Industrial Control Computer is controlled the motion of each by CNC card, motion controller, obtain view data by image pick-up card simultaneously, understand fiber optics displacement and distortion, geometric profile and progress by calculating the grinding and polishing power that acquisition applies, feed back to kinematic axis simultaneously and carry out the Working position adjustment, operating desk comprises display and control button, and operating desk is installed on the lathe bed by mounting rod.
The invention has the advantages that: the planetary compound motion of twin shaft forms the grinding and polishing dish motion of a complexity, the deficiency that workpiece separates the kind of drive and single mill polishing disk rotation mode in having solved traditional grinding and polishing technology being equipped with polishing disk, make and obtain optimum trajectory when processing non-turning profile lens are made, adopt support of ring-type ball and flexible hinge to be connected the deviation accumulation problem that grinding and polishing disc mechanism spindle end surface jitter produces when solving compound transmission with the grinding and polishing dish, workmanship and the efficient that improves optical fiber lens there is realistic meaning, the development that promotes industries such as optical-fibre communications and sensing there is crucial meaning, abundant intension of equipping manufacturing technology is had crucial effect.
Description of drawings
Fig. 1 is numeric control micro-nano grinding and polishing machine for optical fiber lens organization distribution figure.
Fig. 2 is optical fiber lens micro-nano grinding polishing disk mechanism structure figure.
Fig. 3 is free-wheeling system and mechanism's angle-adjusting mechanism structure chart.
Fig. 4 is a vertical feed axle table mechanism structure chart.
Fig. 5 is the fiber clamp structure chart.
Fig. 6 is CCD identification and detection system and adjustment component structure chart.
Fig. 7 is a grinding and polishing dish burring machine structure chart.
The specific embodiment:
Numeric control micro-nano grinding and polishing machine for optical fiber lens comprises optical fiber lens grinding and polishing disc mechanism, grinding and polishing dish burring machine, CCD identification and detection system 44, vertical feed mechanism, horizontal feed mechanism, free-wheeling system, angle-adjusting mechanism, fiber clamp 34, operating desk 1 and lathe bed 2.
Optical fiber lens grinding and polishing disc mechanism comprises grinding and polishing dish 4, flexible hinge dish 5, support ring 6, outer shaft 7, ring gear axle 8, ring gear belt wheel 9, ring gear 10, tie-rod axle 11, tie-rod belt wheel 12, planetary gear 13 and tie-rod eccentric shaft 69.Optical fiber lens grinding and polishing dish 4 is installed on the flexible hinge dish 5, support ring 6 upper surfaces offer annular groove, are equiped with a plurality of steel balls in the annular groove, flexible hinge dish 5 are installed on the upper surface of support ring 6, steel ball contacts with flexible hinge dish 5 lower surfaces, guarantees the planar guide effect.Ring gear axle 8 by first entad angular contact bearing 14, second entad angular contact bearing 15 be installed on the outer shaft 7.Tie-rod axle 11 is installed on the ring gear axle 8 by first radial ball bearing 16, second radial ball bearing 17, planetary gear 13 is installed in tie-rod eccentric shaft 69 places by the 3rd radial ball bearing 58, four-way heart ball bearing 70, tie-rod eccentric shaft 69 is an overall structure with tie-rod axle 11, planetary gear 13 is fixed on flexible hinge dish 5 lower surfaces, and optical fiber lens grinding and polishing disc mechanism is installed on the lathe bed by the installing hole on the lathe bed 2 18.
The motion of above-mentioned ring gear axle 8 and tie-rod axle 11 is driven by two dc speed-regulating motors, and a dc speed-regulating motor driving gear endless belt wheel 9 drives ring gear axle 8 and rotates, and ring gear axle 8 drives ring gear 10 and rotates; Another dc speed-regulating motor drives tie-rod belt wheel 12 and drives 11 rotations of tie-rod axle, and tie-rod axle 11 drives planetary gear 13 and rotates, and forms the planetary compound motion of twin shaft.The power of two dc speed-regulating motors is 25kw, and tie-rod axle 11 and ring gear axle 8 speed adjustable ranges are at 5~120rpm, the ring gear rotation speed n 1=0.5~10rpm, the eccentric E=9mm of tie-rod.Grinding and polishing dish 1 diameter phi 125mm, end face run-out is not more than 0.002mm, adjusts the range of speeds 5~125rpm.Optical fiber lens profile errors≤1 μ m.
Grinding and polishing dish burring machine comprises vertically-guided mechanism, crossbeam 25 and vertical mounting rod 19.Vertically-guided mechanism comprises diamond finishing piece 23, micrometer 20, entablature 26, sill 27, the first axis of guides 67, second axis of guide 68, first spring 28, second spring 29, first linear bearing 21 and second linear bearing 22.Micrometer 20 is installed by the installing hole 75 of entablature 26, and the lower end of micrometer 20 is contacted with the upper surface of entablature 26.First linear bearing 21, second linear bearing 22 are installed on the crossbeam 25, entablature 26 is connected by first axis of guide 67, second axis of guide 68 respectively with sill 27, first spring 28, second spring 29 is coaxial respectively is installed on first axis of guide 67, second axis of guide 68, forms downward finishing power.First axis of guide 67, second axis of guide 68 are supported on the crossbeam 25 by first linear bearing 21, second linear bearing 22 respectively.Diamond finishing piece 23 is installed in sill 27 lower surfaces, and vertically-guided mechanism is installed on the vertical mounting rod 19 by crossbeam 25, and vertical mounting rod 19 is installed on the lathe bed 2.During finishing, adjusting diamond finishing piece 23 contacts with grinding and polishing dish 4 upper surfaces, distortion by micrometer 20 controls first spring 28, second spring 29, determine that finishing power repairs, grinding and polishing dish burring machine is installed on the lathe bed 2 position with optical fiber lens grinding and polishing disc mechanism cooperating.
CCD identification is known product with detection system, is made up of enlarging lens, CCD44, image pick-up card and optical fibre illumination lamp.CCD44 is fixed on the slide block 24, be installed in by feed screw nut on the slide unit of Z axial adjustment parts 31, by feed screw nut Z axial adjustment parts 31 are installed on the slide unit with the perpendicular Y-axis adjustment component 32 of Z axial adjustment parts 31, by feed screw nut Y-axis adjustment component 32 is installed on the slide unit with the perpendicular X-axis adjustment component 33 of Y-axis adjustment component 32, the installation end 52 of X-axis adjustment component 33 is installed on the lathe bed 2 position with optical fiber lens grinding and polishing disc mechanism cooperating again.
Above-mentioned three adjustment component make slide unit motion under the dovetail slideway guiding by corresponding knob rotating band movable wire thick stick, and mutual holding position precision is not more than 0.02mm between the axis of the direction of above-mentioned three adjustment component and CCD identification and detection system.Forming process and the physical dimension that can directly observe the minute-pressure force deformation optical fiber lens of optical fiber lapping polishing process by CCD identification and detection system, and can and each kinematic axis between realize closed-loop control and adjusting.Leading screw pitch 1.2~1.5mm.
Vertical feed mechanism comprises Z shaft step motor 59, leading screw 61, line slideway 62, Z axle feeding workbench 63 and Z pillow block body 64, and line slideway 62 and leading screw 61 are installed on the Z pillow block body 64.Z axle feeding workbench 63 is installed on the line slideway 62, and Z axle feeding workbench 63 is threaded with leading screw 61 by nut, and Z axle feeding workbench 63 and line slideway 62 are slidingly matched, and Z axle feeding workbench 63 moves along the Z axle.Z shaft step motor 59 is installed in line slideway 62 upper ends.
Drive leading screw 61 rotations by Z shaft step motor 59 by shaft coupling 60, leading screw 61 is realized vertical feed and load movement by the motion driving Z axle feeding workbench 63 of pair of nut along line slideway 62.Z axle feeding workbench 63 drives angle-adjusting mechanism and free-wheeling system realizes that the optical fiber 48 and the card of grinding and polishing dish 4 move both vertically.Vertical feed mechanism, angle-adjusting mechanism and free-wheeling system can independent controlled motions, also can realize the two and three dimensions moving interpolation, finish the grinding and polishing building motion of inclined-plane, wedge surface, the conical surface, huyashi-chuuka (cold chinese-style noodles) and sphere, to realize the processing request of various profile lens.The range of Z axle feeding workbench 63 is 200mm, and repetitive positioning accuracy is not more than 0.001mm, feeding resolution ratio 0.001mm.The perpendicularity on the installation ground of line slideway 62 is not more than 0.005mm, and the resetting error of motion is not more than 0.001mm.
Horizontal feed mechanism comprises X-axis feeding workbench 65, line slideway 66 and leading screw 30.Line slideway 66 and leading screw 30 are installed on the lathe bed 2 by first bearing 71, second bearing 72, and X-axis feeding workbench 65 is installed on the line slideway 66, is threaded with leading screw 30 by nut.The abutment body 64 of Z axle feed mechanism is installed on the X-axis feeding workbench 65.
Drive X-axis feeding workbench 65 by manual adjustments leading screw 30 and be slidingly matched along line slideway 66, X-axis feeding workbench 65 moves along X-axis.Drive vertical feed mechanism, angle-adjusting mechanism and free-wheeling system motion, make optical fiber lapping polished end and grinding and polishing dish radially keep an appropriate operating position.X-axis feeding workbench 65 ranges are 100mm.
Free-wheeling system comprises D shaft step motor 50 and D axle pivoting part 51.Angle-adjusting mechanism is by B shaft step motor 54 and B axle pivoting part 53.The output of D shaft step motor is connected with the input of D axle pivoting part 51, and the link of free-wheeling system is installed on the substrate 49 by connecting plate 57.The output of B shaft step motor 54 is connected with the input of B axle pivoting part 53.The link of angle-adjusting mechanism by angle-adjusting mechanism is installed on the reverse side of substrate 49.Counterweight 55 is installed on the backward end of substrate 49, when being installed on the vertical table 63 with above-mentioned free-wheeling system of balance and angle-adjusting mechanism, and the displacement error that produces owing to gravity.Spool 56 is installed on the other end of free-wheeling system, the winding problem of long optical fibers rotation when being used to solve the optical fiber polishing.Substrate 49 is connected with Z axle feeding workbench 63, makes free-wheeling system and angle-adjusting mechanism drive the fiber clamp arbitrarily angled and calibration of rotation continuously.
D axle pivoting part is the output of slowing down of 1: 110 worm-and-wheel gear by speed reducing ratio under the driving of D shaft step motor 50, and B axle pivoting part is the output of slowing down of 1: 110 worm-and-wheel gear by speed reducing ratio under the driving of B shaft step motor 54.Angular range 0~360 degree of D axle pivoting part, and can turn round continuously, angular range 0~110 degree of B axle pivoting part, corresponding feeding motor resolution ratio is 0.001 degree.D axle pivoting part and B axle pivoting part repetitive positioning accuracy 0.01 degree.
Fiber clamp 34 comprises first jaw 36, second jaw 37, and primary importance is adjusted screw 38, the second place is adjusted screw 39, adjusts knob 40, clamps and adjusts mandrel 41.First jaw 36, second jaw 37 are two flexible hinges, are positioned at the right-hand member of fiber clamp 34, and above-mentioned two jaws play the effect of clamping.In first installing hole 46 of first jaw 36, second jaw, 37 stiff ends, second installing hole 47, primary importance is installed adjusts screw 38, second place adjustment screw 39, between above-mentioned two position adjusting screws, be provided with the steel ball chamber, first steel ball 42, second steel ball 43 are installed, above-mentioned two steel balls contact with two position adjusting screws respectively, are provided with the passage that passes through for optical fiber between two steel balls.Adjust the passage that passes through for optical fiber is arranged in the knob 40, adjust to be provided with in the knob 40 to clamp and adjust mandrel 41, clamp the front end of adjusting mandrel 41 and be provided with push rod, the push rod front end is arranged with first spherical groove 73, second spherical groove 74 contacts with first steel ball 42, second steel ball 43 respectively.The left end of fiber clamp 34 is provided with the conical surface 35 that is threaded with the free-wheeling system output.
Optical fiber 48 is wound on the spool 56, optical fiber 48 is by the optical-fibre channel of free-wheeling system, enter fiber clamp 34 from the jack 45 of fiber clamp, adjust jack, steel ball chamber in the mandrel, between first jaw 36, second jaw 37, stretch out by jack, the position adjusted in the knob 40.Rotation adjusting knob 40, clamping adjustment mandrel 41 by screw drive moves forward, clamp to adjust on the front end push rod of mandrel 41 first spherical groove 73, second spherical groove 74, promote first steel ball 42 respectively, second steel ball 43 acts on the first inching screw 46, the second inching screw 47, make two flexible hinge generation deformation, above-mentioned deformation adjust the symmetry of first jaw 36, second jaw, the 37 relative centres of gyration, optical fiber 48 is clamped.After machining, adjust knob 40 to opposite spin first jaw 36, second jaw 37 are unclamped, take out optical fiber 48.Distortion hole in end is φ 0.25mm in the fibre diameter φ 125 μ m, two jaws.Fiber clamp revolution rotation speed n 2=0~50rpm, general power is not more than 0.5kw, and tapering is regulated α=0~95 °, circumferentially adjusting angle β=0~360 °.
The present invention works under the unified control and management of Industrial Control Computer, Industrial Control Computer is controlled the motion of each by CNC card, motion controller, obtain view data by image pick-up card simultaneously, understand fiber optics displacement and distortion, geometric profile and progress are by calculating the grinding and polishing power that acquisition applies, feed back to kinematic axis simultaneously and carry out the Working position adjustment, operating desk 1 comprises display and control button, and operating desk 1 is installed on the lathe bed 2 by mounting rod 3, and it is mutual to finish man-machine interface.

Claims (7)

1. numeric control micro-nano grinding and polishing machine for optical fiber lens comprises optical fiber lens grinding and polishing disc mechanism, grinding and polishing dish burring machine, CCD identification and detection system (44), vertical feed mechanism, horizontal feed mechanism, free-wheeling system, angle-adjusting mechanism, fiber clamp (34), operating desk (1) and lathe bed (2);
It is characterized in that: optical fiber lens grinding and polishing disc mechanism comprises grinding and polishing dish (4), flexible hinge dish (5), support ring (6), outer shaft (7), ring gear axle (8), ring gear belt wheel (9), ring gear (10), tie-rod axle (11), tie-rod belt wheel (12), planetary gear (13) and tie-rod eccentric shaft (69); Optical fiber lens grinding and polishing dish (4) is installed on the flexible hinge dish (5), support ring (6) upper surface offers annular groove, be equiped with a plurality of steel balls in the annular groove, flexible hinge dish (5) is installed on the upper surface of support ring (6), steel ball contacts with flexible hinge dish (5) lower surface; Ring gear axle (8) by first entad angular contact bearing (14), second entad angular contact bearing (15) be installed on the outer shaft (4); Tie-rod axle (11) is installed on the ring gear axle (8) by first radial ball bearing (16), second radial ball bearing (17), planetary gear (13) is installed in tie-rod eccentric shaft (69) and locates by the 3rd radial ball bearing (58), four-way heart ball bearing (70), tie-rod eccentric shaft (69) is an overall structure with tie-rod axle (11), planetary gear (13) is fixed on flexible hinge dish (5) lower surface, and optical fiber lens grinding and polishing disc mechanism is installed on the lathe bed by the installing hole (18) on the lathe bed (2);
Grinding and polishing dish burring machine comprises vertically-guided mechanism, crossbeam (25) and vertical mounting rod (19); Vertically-guided mechanism comprises a thousand pieces of gold hard rock finishing piece (23), divides chi (20), entablature (26), sill (27), first axis of guide (67), second axis of guide (68), first spring (28), second spring (29), first linear bearing (21) and second linear bearing (22); Micrometer (20) is installed by the installing hole (75) of entablature (26), and the lower end of micrometer (20) is contacted with the upper surface of entablature (26); First linear bearing (21), second linear bearing (22) are installed on the crossbeam (25), entablature (26) is connected by first axis of guide (67), second axis of guide (68) respectively with sill (27), and first spring (28), second spring (29) is coaxial respectively is installed on first axis of guide (67), second axis of guide (68); First axis of guide (67), second axis of guide (68) are supported on the crossbeam (25) by first linear bearing (21), second linear bearing (22) respectively; Diamond finishing piece (23) is installed in sill (27) lower surface, and vertically-guided mechanism is installed on the vertical mounting rod (19) by crossbeam (25), and vertical mounting rod (19) is installed on the lathe bed (2);
CCD identification comprises with detection system: enlarging lens, CCD (44), image pick-up card and optical fibre illumination lamp are formed; CCD (44) is fixed on the slide block (24), be installed in by feed screw nut on the slide unit of Z axial adjustment parts (31), by feed screw nut Z axial adjustment parts (31) are installed on the slide unit with the perpendicular Y-axis adjustment component (32) of Z axial adjustment parts (31), by feed screw nut Y-axis adjustment component (32) is installed on the slide unit with the perpendicular X-axis adjustment component (33) of Y-axis adjustment component (32), the installation end (52) of X-axis adjustment component (33)-1-is installed on the lathe bed (2) again;
Vertical feed mechanism comprises Z shaft step motor (59), leading screw (61), line slideway (62), Z axle feeding workbench (63) and Z pillow block body (64), and Z pillow block body (64) is gone up line slideway (62) and leading screw (61) are installed; Z axle feeding workbench (63) is installed on the line slideway (62), and Z axle feeding workbench (63) is threaded with leading screw (61) by nut, and Z shaft step motor (59) is installed in line slideway (62) upper end;
Horizontal feed mechanism comprises X-axis feeding workbench (65), line slideway (66) and leading screw (30); Line slideway (66) and leading screw (30) are installed on the lathe bed (2) by first bearing (71), second bearing (72), and X-axis feeding workbench (65) is installed on the line slideway (66), are threaded with leading screw (30) by nut; The abutment body (64) of Z axle feed mechanism is installed on the X-axis feeding workbench (65);
Free-wheeling system comprises D shaft step motor (50) and D axle pivoting part (51); Angle-adjusting mechanism is by B shaft step motor (54) and B axle pivoting part (53); The output of D shaft step motor is connected with the input of D axle pivoting part (51), and the link of free-wheeling system is installed on the substrate (49) by connecting plate (57); The output of B shaft step motor (54) is connected with the input of B axle pivoting part (53); The link of angle-adjusting mechanism by angle-adjusting mechanism is installed on the reverse side of substrate (49); Counterweight (55) is installed on the backward end of substrate (49); Spool (56) is installed on the other end of free-wheeling system, and substrate (49) is connected with Z axle feeding workbench (63);
Fiber clamp (34) comprises first jaw (36), second jaw (37), and primary importance is adjusted screw (38), the second place is adjusted screw (39), adjusts knob (40), clamps and adjusts mandrel (41); First jaw (36), second jaw (37) are two flexible hinges, are positioned at the right-hand member of fiber clamp (34); In first installing hole (46) of first jaw (36), second jaw (37) stiff end, second installing hole (47), primary importance is installed adjusts screw (38), second place adjustment screw (39), between above-mentioned two position adjusting screws, be provided with the steel ball chamber, first steel ball (42), second steel ball (43) are installed, above-mentioned two steel balls contact with two position adjusting screws respectively, are provided with the passage that passes through for optical fiber between two steel balls; Adjust the passage that passes through for optical fiber is arranged in the knob (40), adjust to be provided with in the knob (40) to clamp and adjust mandrel (41), clamp the front end of adjusting mandrel (41) and be provided with push rod, the push rod front end is arranged with first spherical groove (73), second spherical groove (74), contact with first steel ball (42), second steel ball (43) respectively, the left end of fiber clamp (34) is provided with the conical surface (35) that is threaded with the free-wheeling system output; Optical fiber (48) is wound on the spool (56), optical fiber (48) is by the optical-fibre channel in the free-wheeling system, enter fiber clamp (34) from the jack (45) of fiber clamp, adjust jack, steel ball chamber in the mandrel by jack, the position adjusted in the knob (40), stretch out between (37) from first jaw (36), second jaw:
Operating desk (1) comprises display and control button, and operating desk (1) is installed on the lathe bed (2) by mounting rod (3).
2. according to the numeric control micro-nano grinding and polishing machine for optical fiber lens described in the claim 1, it is characterized in that: tie-rod axle (11) and ring gear axle (8) speed adjustable range be at 5~120rpm, the ring gear rotation speed n 1=0.5~10rpm, the eccentric E=9mm of tie-rod; Grinding and polishing dish 1 diameter phi 125mm, end face run-out is not more than 0.002mm, adjusts the range of speeds 5~125rpm; Optical fiber lens profile errors≤1 μ m.
3. according to the numeric control micro-nano grinding and polishing machine for optical fiber lens described in the claim 1, it is characterized in that: mutual holding position precision is not more than 0.02mm between the axis of the direction of Z axial adjustment parts (31), Y-axis adjustment component (32) and X-axis adjustment component (33) and CCD identification and detection system; Leading screw pitch 1.2~1.5mm.
4. according to the numeric control micro-nano grinding and polishing machine for optical fiber lens described in the claim 1, it is characterized in that: the range along the Z axle of Z axle feeding workbench (63) is 200mm, and repetitive positioning accuracy is not more than 0.001mm, feeding resolution ratio 0.001mm; The perpendicularity on the installation ground of line slideway (62) is not more than 0.005mm, and the resetting error of motion is not more than 0.001mm.
5. according to the numeric control micro-nano grinding and polishing machine for optical fiber lens described in the claim 1, it is characterized in that: X-axis feeding workbench (65) is 100mm along the range of X-axis.
6. according to the numeric control micro-nano grinding and polishing machine for optical fiber lens described in the claim 1, it is characterized in that: D axle pivoting part (51) slows down by worm-and-wheel gear and exports, speed reducing ratio is 1: 110, and B axle pivoting part (53) slows down by worm-and-wheel gear and exports, and speed reducing ratio is 1: 110; Angular range 0~360 degree of B axle pivoting part (53), angular range 0~110 degree of D axle pivoting part (51); Corresponding feeding motor resolution ratio is 0.001 degree; Axis of rotation mechanism and angle-adjusting mechanism repetitive positioning accuracy 0.01 degree.
7. according to numeric control micro-nano grinding and polishing machine for optical fiber lens described in the claim 1, it is characterized in that: optical fiber (48) diameter is φ 125 μ m, and distortion hole in end is φ 0.25mm in two jaws; Fiber clamp (34) revolution rotation speed n 2=0~50rpm, general power is not more than 0.5kw, and tapering is regulated α=0~95 °, circumferentially adjusting angle β=0~360 °.
CN 201010193697 2010-06-08 2010-06-08 Numeric control micro-nano grinding and polishing machine for optical fiber lens Pending CN101885162A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201010193697 CN101885162A (en) 2010-06-08 2010-06-08 Numeric control micro-nano grinding and polishing machine for optical fiber lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201010193697 CN101885162A (en) 2010-06-08 2010-06-08 Numeric control micro-nano grinding and polishing machine for optical fiber lens

Publications (1)

Publication Number Publication Date
CN101885162A true CN101885162A (en) 2010-11-17

Family

ID=43071339

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201010193697 Pending CN101885162A (en) 2010-06-08 2010-06-08 Numeric control micro-nano grinding and polishing machine for optical fiber lens

Country Status (1)

Country Link
CN (1) CN101885162A (en)

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102259279A (en) * 2011-08-15 2011-11-30 四川欧曼机械有限公司 Novel grinding machine
CN102259303A (en) * 2011-07-16 2011-11-30 龚培生 Full-automatic zirconium-oxide ceramic grinding machine with optical fiber sleeve
CN102554289A (en) * 2011-01-01 2012-07-11 凤凰光学股份有限公司 Machining tool for curved internal groove of lens and machining method for same
CN102756316A (en) * 2012-07-13 2012-10-31 上海交通大学 Ultra-precise processing integrated platform for large caliber optical mirror surface
CN103358190A (en) * 2012-03-31 2013-10-23 上海信鹏印刷器材有限公司 Dynamic cutter belt dimension control device for accurate cutter belt grinding device and control method thereof
CN104776123A (en) * 2015-03-27 2015-07-15 苏州赫瑞特电子专用设备科技有限公司 Planetary polishing machine flexible drive mechanism
CN104896050A (en) * 2015-05-06 2015-09-09 中国科学院上海光学精密机械研究所 Pitch angle adjusting device of picture frame
CN105033839A (en) * 2015-05-26 2015-11-11 北京航空航天大学 Lithium niobate wafer grinding device with grinding pressure adjusting device and grinding method
CN105290958A (en) * 2014-07-01 2016-02-03 惠水县昶达数控有限公司 Polishing method and device for stone or glasswork products
CN106425810A (en) * 2016-10-31 2017-02-22 东港启鑫科技有限公司 Polishing machine for vertical surface of neck part of stainless steel dinnerware
CN106553107A (en) * 2017-01-05 2017-04-05 南通沃特光电科技有限公司 A kind of polishing milling machine and its finishing method
CN107097146A (en) * 2016-02-19 2017-08-29 株式会社荏原制作所 Lapping device and Ginding process
CN107350961A (en) * 2016-12-20 2017-11-17 北京航空航天大学 A kind of adjustable angle polarization maintaining fiber pigtail block grinding clamp
CN107398783A (en) * 2017-08-22 2017-11-28 杭州电子科技大学 A kind of Nano surface of metal material level pattern processing method and device
CN109333235A (en) * 2018-12-04 2019-02-15 莆田市晟熠光电科技有限公司 A kind of twin grinding equipment and its grinding method for the processing of C-lens lens
CN109570976A (en) * 2019-01-30 2019-04-05 广东大唐永恒智能科技有限公司 Torsional spring installing mechanism and the torsional spring automatic assembling machine for applying it
CN109590719A (en) * 2019-01-30 2019-04-09 广东大唐永恒智能科技有限公司 Illuminator production torsional spring automatic assembling machine
CN110480470A (en) * 2019-09-07 2019-11-22 桂林电子科技大学 A kind of optical fiber grinder being completed at the same time the grinding of multiple arcs tapered optical fiber end
CN110587431A (en) * 2019-11-04 2019-12-20 桂林电子科技大学 Optical fiber grinding device capable of simultaneously finishing grinding of multiple cone optical fiber ends
CN110653716A (en) * 2019-08-20 2020-01-07 苏州超徕精工科技有限公司 Method and device for improving processing uniformity in grinding and polishing processing process
CN112338793A (en) * 2019-11-28 2021-02-09 武汉阿格斯科技有限公司 Optical fiber end face grinding device
CN114523413A (en) * 2022-01-28 2022-05-24 华为技术有限公司 Optical fiber grinding device
CN115824752A (en) * 2023-02-14 2023-03-21 沈阳西子航空产业有限公司 Equipment for processing composite material test piece, processing control method and experimental device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4818263A (en) * 1987-06-11 1989-04-04 Tektronix, Inc. Method and apparatus for precisely positioning microlenses on optical fibers
US20030054741A1 (en) * 2001-08-13 2003-03-20 Hermosa Thin Film Co., Ltd. Equipment for grinding optical fiber end
CN1425535A (en) * 2002-12-31 2003-06-25 武汉电信器件公司 Processing method for high precision optical fibre lens
CN1434313A (en) * 2002-01-24 2003-08-06 中国科学院半导体研究所 Method for working optical fibre microlens with center antomatic alignment function

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4818263A (en) * 1987-06-11 1989-04-04 Tektronix, Inc. Method and apparatus for precisely positioning microlenses on optical fibers
US20030054741A1 (en) * 2001-08-13 2003-03-20 Hermosa Thin Film Co., Ltd. Equipment for grinding optical fiber end
CN1434313A (en) * 2002-01-24 2003-08-06 中国科学院半导体研究所 Method for working optical fibre microlens with center antomatic alignment function
CN1425535A (en) * 2002-12-31 2003-06-25 武汉电信器件公司 Processing method for high precision optical fibre lens

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
《制造技术与机床》 20091130 王军等 光纤透镜研磨抛光的轮廓成形控制系统的研究 36-39 1-7 , 第11期 2 *
《机电产品开发与创新》 20070731 王志友等 光纤微透镜成型方法的研究 28-30 1-7 第20卷, 第4期 2 *

Cited By (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102554289A (en) * 2011-01-01 2012-07-11 凤凰光学股份有限公司 Machining tool for curved internal groove of lens and machining method for same
CN102259303A (en) * 2011-07-16 2011-11-30 龚培生 Full-automatic zirconium-oxide ceramic grinding machine with optical fiber sleeve
CN102259303B (en) * 2011-07-16 2013-07-03 龚培生 Full-automatic zirconium-oxide ceramic grinding machine with optical fiber sleeve
CN102259279A (en) * 2011-08-15 2011-11-30 四川欧曼机械有限公司 Novel grinding machine
CN103358190A (en) * 2012-03-31 2013-10-23 上海信鹏印刷器材有限公司 Dynamic cutter belt dimension control device for accurate cutter belt grinding device and control method thereof
CN103358190B (en) * 2012-03-31 2015-07-15 上海信鹏印刷器材有限公司 Dynamic cutter belt dimension control device for accurate cutter belt grinding device and control method thereof
CN102756316A (en) * 2012-07-13 2012-10-31 上海交通大学 Ultra-precise processing integrated platform for large caliber optical mirror surface
CN102756316B (en) * 2012-07-13 2015-01-14 上海交通大学 Ultra-precise processing integrated platform for large caliber optical mirror surface
CN105290958A (en) * 2014-07-01 2016-02-03 惠水县昶达数控有限公司 Polishing method and device for stone or glasswork products
CN104776123A (en) * 2015-03-27 2015-07-15 苏州赫瑞特电子专用设备科技有限公司 Planetary polishing machine flexible drive mechanism
CN104896050A (en) * 2015-05-06 2015-09-09 中国科学院上海光学精密机械研究所 Pitch angle adjusting device of picture frame
CN104896050B (en) * 2015-05-06 2017-05-31 中国科学院上海光学精密机械研究所 Picture frame luffing angle adjusting apparatus
CN105033839A (en) * 2015-05-26 2015-11-11 北京航空航天大学 Lithium niobate wafer grinding device with grinding pressure adjusting device and grinding method
CN107097146A (en) * 2016-02-19 2017-08-29 株式会社荏原制作所 Lapping device and Ginding process
CN106425810A (en) * 2016-10-31 2017-02-22 东港启鑫科技有限公司 Polishing machine for vertical surface of neck part of stainless steel dinnerware
CN106425810B (en) * 2016-10-31 2019-04-23 东港启鑫科技有限公司 A kind of stainless steel tableware neck portion facade grinder
CN107350961A (en) * 2016-12-20 2017-11-17 北京航空航天大学 A kind of adjustable angle polarization maintaining fiber pigtail block grinding clamp
CN107350961B (en) * 2016-12-20 2019-09-13 北京航空航天大学 A kind of adjustable angle polarization maintaining fiber pigtail block grinding clamp
CN106553107A (en) * 2017-01-05 2017-04-05 南通沃特光电科技有限公司 A kind of polishing milling machine and its finishing method
CN107398783A (en) * 2017-08-22 2017-11-28 杭州电子科技大学 A kind of Nano surface of metal material level pattern processing method and device
CN107398783B (en) * 2017-08-22 2019-05-21 杭州电子科技大学 A kind of Nano surface of metal material grade pattern processing method and device
CN109333235A (en) * 2018-12-04 2019-02-15 莆田市晟熠光电科技有限公司 A kind of twin grinding equipment and its grinding method for the processing of C-lens lens
CN109570976A (en) * 2019-01-30 2019-04-05 广东大唐永恒智能科技有限公司 Torsional spring installing mechanism and the torsional spring automatic assembling machine for applying it
CN109590719A (en) * 2019-01-30 2019-04-09 广东大唐永恒智能科技有限公司 Illuminator production torsional spring automatic assembling machine
CN109590719B (en) * 2019-01-30 2024-03-01 广东大唐永恒智能科技有限公司 Torsion spring automatic assembly machine for lighting lamp production
CN109570976B (en) * 2019-01-30 2024-03-01 广东大唐永恒智能科技有限公司 Torsional spring installation mechanism and torsional spring automatic assembly machine applying same
CN110653716B (en) * 2019-08-20 2022-04-29 苏州超徕精工科技有限公司 Method and device for improving processing uniformity in grinding and polishing processing process
CN110653716A (en) * 2019-08-20 2020-01-07 苏州超徕精工科技有限公司 Method and device for improving processing uniformity in grinding and polishing processing process
CN110480470A (en) * 2019-09-07 2019-11-22 桂林电子科技大学 A kind of optical fiber grinder being completed at the same time the grinding of multiple arcs tapered optical fiber end
CN110587431B (en) * 2019-11-04 2021-11-19 桂林电子科技大学 Optical fiber grinding device capable of simultaneously finishing grinding of multiple cone optical fiber ends
CN110587431A (en) * 2019-11-04 2019-12-20 桂林电子科技大学 Optical fiber grinding device capable of simultaneously finishing grinding of multiple cone optical fiber ends
CN112338793A (en) * 2019-11-28 2021-02-09 武汉阿格斯科技有限公司 Optical fiber end face grinding device
CN114523413A (en) * 2022-01-28 2022-05-24 华为技术有限公司 Optical fiber grinding device
CN114523413B (en) * 2022-01-28 2023-11-03 华为技术有限公司 Optical fiber grinding device
CN115824752A (en) * 2023-02-14 2023-03-21 沈阳西子航空产业有限公司 Equipment for processing composite material test piece, processing control method and experimental device

Similar Documents

Publication Publication Date Title
CN101885162A (en) Numeric control micro-nano grinding and polishing machine for optical fiber lens
US9498833B2 (en) Machine tool for the production of profiles
CN201020662Y (en) High precision grinder wheel finishing device for complex section grinding wheel processing
CN105729246B (en) A kind of multi-functional five-axis machine tool
KR20070119557A (en) Precision roll turning lathe
CN101193727A (en) Machine tool with two clamp points on separate carriages
CN106001619B (en) Device for machining spherical surface
CN102554269B (en) Turning and grinding center of machine tool
CN111571231B (en) Automatic groove machining equipment for sliding gear sleeve of automobile synchronizer
CN102059602B (en) Numerically controlled grinder for grinding taper hole and end face of motorized spindle
CN104275632B (en) Thrust ball bearing ring face raceway groove method for grinding and its device
RU2443534C2 (en) Multipurpose nc machine tool with laser optical head and automatic tool change
CN113182992A (en) Screw rod is thrown and is repaiied all-in-one
CN110666695B (en) Even coating device of grinding roller for plane polisher
CN104858720A (en) Main shaft box movement type turn milling machine tool with five-axis structure on positive axis
CN105108614A (en) Bent pipe outer polishing device
JP2006320970A (en) Machining device
CN205538620U (en) Repair vice high -speed friction test machine of friction in advance
CN1406696A (en) Precisive boring machine for irregular holes
CN206215951U (en) Numerical control horizontal boring-milling bed
CN105547996A (en) High-speed friction testing machine for friction pair pre-dressing and application thereof
CN106863043B (en) Diamond grinding intelligent robot
CN112108692B (en) Horizontal numerical control crankshaft machining equipment
CN102729126A (en) Multifunctional forming grinding machine tool
CN109822458B (en) Material bearing and moving mechanism of polishing and grinding machine

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20101117