CN102183214A - Method for optically detecting large-aperture aspherical mirror structure - Google Patents
Method for optically detecting large-aperture aspherical mirror structure Download PDFInfo
- Publication number
- CN102183214A CN102183214A CN 201110050685 CN201110050685A CN102183214A CN 102183214 A CN102183214 A CN 102183214A CN 201110050685 CN201110050685 CN 201110050685 CN 201110050685 A CN201110050685 A CN 201110050685A CN 102183214 A CN102183214 A CN 102183214A
- Authority
- CN
- China
- Prior art keywords
- display screen
- measured lens
- video camera
- aspherical mirror
- feature pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention relates to a method for optically detecting a large-aperture aspherical mirror structure. The method comprises the following steps of: displaying a structure characteristic pattern on a display screen, projecting the structure characteristic pattern on a detected mirror and reflecting the structure characteristic pattern, and shooting by a camera. By performing analysis process on a shot image, surface shape full information of the detected aspheric surface can be obtained. The large-aperture aspherical mirror has a simple structure; the method is convenient in use and high in sensitivity; no special requirement on the environment is needed; the method can be used for detecting in a workshop environment; an effective measure is provided for detection of large-aperture or relevant-large-aperture aspherical mirror; in particular, the method has wide application prospect in accurate grinding and polishing stages during manufacturing.
Description
Technical field
The present invention relates to a kind of optical detective technology, particularly a kind of detection method at heavy caliber aspherical mirror belongs to the advanced optical length of schooling and makes and the detection technique field.
Background technology
So-called aspherical optical element, be meant face shape by the multinomial equation of higher degree determine, the radius optical element all inequality of each point on the face shape.Aspheric surface is used for optical system, can the minimizing system in the quantity of optical element maybe can improve image quality.Along with the development of optical precision processing, aspheric surface is applied in the various optical systems more and more widely.The aspheric high-acruracy survey of the dark type of aspheric measurement especially heavy caliber is become a present hot issue.Aspheric for a long time manufacturing and detection technique are that the detection of two hang-ups, especially aperture aspherical of its widespread use of restriction is all the more so always.As everyone knows, aperture aspherical is the key point of the whole aspherical mirror machining efficient of influence in the detection in correct grinding stage.
Summary of the invention
Technology of the present invention is dealt with problems and is: overcome the deficiencies in the prior art, and the method that provides a kind of structured light to detect heavy caliber aspherical mirror, it is big to have the dynamic range of measurement, can once finish measurement of full field, simple in structure, characteristics such as cost is low, dirigibility height.
Technical solution of the present invention: a kind of heavy caliber aspherical mirror structured light detection method, its characteristics are: the measuring system of employing is made up of video camera, display screen and computing machine; At first carry out system calibrating, comprise that camera calibration, display screen are demarcated and measured lens is demarcated, obtain the spatial relation between video camera in the system, display screen and the measured lens three, just the coordinate transformation relation of camera coordinate system, display screen coordinate system and three space coordinates of measured lens coordinate system; Produce the feature pattern of a fixed structure again by computing machine, be presented on the display screen, and project to tested minute surface, reflection back by video camera record, just video camera is observed display screen by measured lens, can photograph the feature pattern that shows on the display screen; The face shape information that the reflected image that video camera is taken has just carried measured lens can deform and is different from the shown feature pattern of display screen, and deflection depends on the face shape of measured lens; Extract image characteristic point according to the feature pattern, be attached to display screen, video camera, measured lens three's spatial relation, carry out ray tracing and determine the locus of incident ray and reflection ray, calculate the face shape normal direction of tested minute surface by reflection law, rebuild tested minute surface face shape by integration again.
Can once finish measurement of full field, also can in whole of measured lens, scan and finish measurement of full field.
Described display screen is demarcated directly to measure by ruler, laser tracker instrument and is finished, and also can utilize video camera measurement of having demarcated and the reference planes mirror of being with the feature pattern to calculate by coordinate system transformation and finish.
Described measured lens is demarcated directly to measure by instruments such as ruler, laser trackers and is finished, and also can place the feature pattern on measured lens, utilizes the video camera of having demarcated to finish.
The feature pattern of a described fixed structure can be sine or cosine cycle striped, circle spot, closed square, gridiron pattern, rectilinear grid or cross wire.
Described extraction image characteristic point extracts the central point of circle spot for the position of extracting sine or cosine cycle striped distributes mutually, extracts closed square, tessellated angle point, extracts the intersection point of rectilinear grid, cross wire.
The present invention has following advantage to be:
(1) the present invention has bigger measurement dynamic range, can be used for the correct grinding and the detection in polishing stage that the dark type aspheric surface of heavy caliber is made.
(2) the present invention does not have specific (special) requirements to environment, can detect in workshop condition.
(3) need not the special optical element among the present invention, cost is very cheap.
(4) system architecture of the present invention's employing is simple, and system element is placed no special requirement.
(5) detection method of the present invention has very high sensitivity.
(6) structure pattern that is adopted among the present invention and phase-shifting technique have quite high precision, and can suppress the influence to testing result of noise and surrounding environment effectively.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is measuring principle figure of the present invention;
Fig. 3 is based on the schematic diagram of the spatial relation method of reference planes catoptron calibrating camera and display screen;
Fig. 4 is characteristic feature pattern shape and unique point among the present invention, and wherein Fig. 4 a is (surplus) string cycle striped just; Fig. 4 b is the circle spot; Fig. 4 c is a closed square; Fig. 4 d is a gridiron pattern; Fig. 4 e is a rectilinear grid;
Fig. 5 takes the horizontal direction bar graph that obtains for video camera among the present invention and distributes;
Fig. 6 takes the vertical direction bar graph that obtains for video camera among the present invention and distributes;
Fig. 7 is the overlapping synoptic diagram of video camera incident ray among the present invention;
Fig. 8 is sweep type cross wire feature pattern among the present invention.
Embodiment
As shown in Figure 1, detection system mainly is made up of video camera, display screen and computing machine among the present invention.Show the feature pattern that generates by computing machine on the display screen, captured by video camera after the measured lens reflection.Measuring principle as shown in Figure 2, video camera is taken the image obtain and is sent to computing machine and handles, and carries out ray tracing by calculating, obtains the Gradient distribution of tested surface shape according to the light reflection law, the face shape that last integration is rebuild measured lens distributes.To show on the display screen that sine streak feature pattern is that example describes, have similar measuring process when showing other feature patterns below, this example does not comprise all the elements of the present invention.
At first to carrying out camera calibration.Camera marking method is a lot, as the two-step approach of Tsai and Roger proposition, the plane reference method that Zhang Zhengyou proposes etc.Wherein, the flat method standardization of Zhang Zhengyou is used comparatively extensive.This is a kind of under the nonlinear model of camera imaging, adopts the method for several all inside and outside parameter of plane template calibrating camera.Have a plurality of unique points on the plane template that uses in this method, and have a corresponding relation between the corresponding picture point on unique point and its image, this just provides constraint condition for finding the solution of inner parameter.Video camera is the multiple image of camera plane template (more than three width of cloth) from different perspectives, obtain the initial value of partial parameters earlier by linear solution, consider radial distortion (single order and second order) then and obtain external parameter linear result is carried out inner parameter and the plane template mapping matrix that it is good that nonlinear optimization is utilized calculating at last based on maximum likelihood criterion.
Second step, display screen is demarcated, obtain the spatial relation of video camera and display screen, can directly measure by ruler, laser tracker instrument and finish, also can utilize video camera of having demarcated and the reference planes mirror of being with the feature pattern to calculate and finish by coordinate system transformation.Here the reference planes mirror with band feature pattern describes, as Fig. 3.In the camera chain of having demarcated, can determine the locus on this plane by the coplanar characteristic point on single plane.Unique point by on the reference planes mirror of camera shooting can obtain reference planes coordinate system (X
r, Y
r, Z
r) and camera coordinate system (X
c, Y
c, Z
c) between spatial relation.Take the mirror image of reference planes mirror by video camera again, calculate camera coordinate system (X display screen
c, Y
c, Z
c) and this imaging plane (X
s', Y
s', Z
s') spatial relation.According to the mirror imaging characteristic: the mirror image that is become is the virtual image identical with original size, can obtain display screen (X
s, Y
s, Z
s) and its mirror image (X
s', Y
s', Z
s') spatial relation.In conjunction with the spatial relation between reference planes and the camera coordinate system, just can be converted to display screen (X
s, Y
s, Z
s) and camera coordinate system (X
c, Y
c, Z
c) between spatial relation.
In the 3rd step, measured lens is demarcated, and obtains the spatial relation of video camera and measured lens, can directly measure by instruments such as ruler, laser trackers and finish, and also can place the feature pattern on measured lens, utilizes the video camera of having demarcated to finish.After finishing the spatial relation that system calibrating obtains video camera, display screen and three coordinate systems of measured lens, just can the three is unified under the same coordinate system (camera coordinate system or display screen coordinate system or measured lens coordinate system).If the model of measured lens can be expressed as: z
m=f (x
m, y
m), consider to put S (x on the display screen
s, y
s, z
s) light that sends puts M (x on tested minute surface
m, y
m, z
m) after the reflection, incide some P (x on the camera pixel plane by video camera photocentre O point
p, y
p, z
p), the direction vector representation of reflection ray is: r
i=(x
m-x
s, y
m-y
s, z
m-z
s).
In the 4th step, video camera is taken by measured lens and is observed display screen, and takes the sine streak figure that obtains on the display screen.The face shape information that the reflected image that video camera is taken has just carried measured lens, can deform and be different from the shown feature pattern of display screen, deflection depends on the face shape of measured lens, as Fig. 5, Figure 6 shows that the sine streak figure of the level and vertical two vertical direction of shooting, extract by phase shift algorithm and phase-unwrapping algorithm again and obtain PHASE DISTRIBUTION.Can calculate the volume coordinate (x that S is ordered according to PHASE DISTRIBUTION
s, y
s, z
s), the direction vector representation of reflection ray is: r
r=(x
p-x
m, y
p-y
m, z
p-z
m).
The 5th step, as shown in Figure 2, according to the light reflection law, by incident ray direction vector r
iWith reflection ray direction vector r
rCalculate tested minute surface shape normal:
The 6th step obtained face shape Gradient distribution by tested surface shape normal line vector, and integration is rebuild face shape again:
The method of being rebuild face shape by face shape gradient data integration is a lot, as the free routing integral method, and cross integral method, Fourier transform integral method, regional wavefront reconstruction method etc.
Very precipitous or regional area changes when very fast when tested minute surface shape, and the incident ray of video camera may overlap, and as shown in Figure 7, promptly the same point on the display screen can be surveyed by different camera pixel points after the measured lens reflection.At this moment,, will produce phase ambiguity and wrapped phase can not launch, cause on the display screen locus of corresponding point can not determine if use the streak feature pattern.Similarly, other feature patterns in using Fig. 4 also have same problem.At this moment, can adopt cross wire feature pattern shown in Figure 8 to come the position of corresponding point on unique definite display screen, in whole of measured lens, scan and extract its point of crossing, finish the measurement of whole shape.
In sum, the present invention is simple in structure, easy to use, highly sensitive, environment there is not specific (special) requirements, can in workshop condition, detect, for the detection of heavy caliber, big relative aperture aspheric mirror provides a kind of effective means, especially in the correct grinding and the polishing stage of making, have broad application prospects.
The non-elaborated part of the present invention belongs to techniques well known.
Claims (6)
1. heavy caliber aspherical mirror structured light detection method, it is characterized in that: the measuring system of employing is made up of video camera, display screen and computing machine; At first carry out system calibrating, comprise that camera calibration, display screen are demarcated and measured lens is demarcated, obtain the spatial relation between video camera in the system, display screen and the measured lens three, just the coordinate transformation relation of camera coordinate system, display screen coordinate system and three space coordinates of measured lens coordinate system; Produce the feature pattern of a fixed structure again by computing machine, be presented on the display screen, and project to tested minute surface, reflection back by video camera record, just video camera is observed display screen by measured lens, can photograph the feature pattern that shows on the display screen; The face shape information that the reflected image that video camera is taken has just carried measured lens can deform and is different from the shown feature pattern of display screen, and deflection depends on the face shape of measured lens; Extract image characteristic point according to the feature pattern, be attached to display screen, video camera, measured lens three's spatial relation, carry out ray tracing and determine the locus of incident ray and reflection ray, calculate the face shape normal direction of tested minute surface by reflection law, rebuild tested minute surface face shape by integration again.
2. a kind of heavy caliber aspherical mirror structured light detection method according to claim 1 is characterized in that: can once finish measurement of full field, also can scan in whole of measured lens and finish measurement of full field.
3. a kind of heavy caliber aspherical mirror structured light detection method according to claim 1, it is characterized in that: described display screen is demarcated directly to measure by ruler, laser tracker instrument and is finished, and also can utilize video camera of having demarcated and the reference planes mirror of being with the feature pattern to calculate by coordinate system transformation and finish.
4. a kind of heavy caliber aspherical mirror structured light detection method according to claim 1, it is characterized in that: described measured lens is demarcated directly to measure by instruments such as ruler, laser trackers and is finished, also can on measured lens, place the feature pattern, utilize the video camera of having demarcated to finish.
5. a kind of heavy caliber aspherical mirror structured light detection method according to claim 1 is characterized in that: the feature pattern of a described fixed structure can be sine or cosine cycle striped, circle spot, closed square, gridiron pattern, rectilinear grid or cross wire.
6. a kind of heavy caliber aspherical mirror structured light detection method according to claim 1, it is characterized in that: described extraction image characteristic point distributes mutually for the position of extracting sine or cosine cycle striped, extract the central point of circle spot, extract closed square, tessellated angle point, extract the intersection point of rectilinear grid, cross wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110050685.7A CN102183214B (en) | 2011-03-03 | 2011-03-03 | Method for optically detecting large-aperture aspherical mirror structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110050685.7A CN102183214B (en) | 2011-03-03 | 2011-03-03 | Method for optically detecting large-aperture aspherical mirror structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102183214A true CN102183214A (en) | 2011-09-14 |
| CN102183214B CN102183214B (en) | 2014-03-26 |
Family
ID=44569463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110050685.7A Active CN102183214B (en) | 2011-03-03 | 2011-03-03 | Method for optically detecting large-aperture aspherical mirror structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102183214B (en) |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102494634A (en) * | 2011-11-18 | 2012-06-13 | 中国科学院光电技术研究所 | Off-axis aspheric lens detection method based on fringe reflection |
| CN102636130A (en) * | 2012-04-19 | 2012-08-15 | 中国科学院光电技术研究所 | Device for measuring surface profile of aspheric surface optical element in large dynamic range |
| CN102901465A (en) * | 2012-10-29 | 2013-01-30 | 大连宏海新能源发展有限公司 | Equipment and method for measuring slope error of optical lens |
| CN103335613A (en) * | 2013-07-18 | 2013-10-02 | 中国科学院光电技术研究所 | Large-caliber aspheric surface primary mirror detection device and method |
| CN103487441A (en) * | 2013-09-24 | 2014-01-01 | 电子科技大学 | Method for defect detection and surface measurement of silicon wafer |
| CN104180778A (en) * | 2014-09-17 | 2014-12-03 | 中国科学院光电技术研究所 | Structured light method for small-angle measurement |
| CN104251687A (en) * | 2014-10-11 | 2014-12-31 | 盐城工学院 | Part surface evenness detection method based on mirror image processing |
| CN104279980A (en) * | 2014-10-20 | 2015-01-14 | 电子科技大学 | Mirror surface three-dimensional-surface-shape measuring system based on intelligent photographing mobile phone |
| CN105783775A (en) * | 2016-04-21 | 2016-07-20 | 清华大学 | Device and method of measuring surface topographies of mirror and mirror-like objects |
| CN105806257A (en) * | 2016-03-12 | 2016-07-27 | 上海大学 | High reflective object surface light field deflection technique measuring system and method |
| CN105865378A (en) * | 2016-03-30 | 2016-08-17 | 苏州精创光学仪器有限公司 | Flatness detection method |
| CN106017863A (en) * | 2016-05-11 | 2016-10-12 | 上海应用技术学院 | Phase measurement deflection method for aspheric surface detection |
| CN108225737A (en) * | 2017-12-06 | 2018-06-29 | 天津大学 | A kind of novel optical lens measurement method |
| CN108286950A (en) * | 2017-12-27 | 2018-07-17 | 中国科学院长春光学精密机械与物理研究所 | A kind of online test method of reflecting mirror surface shape |
| CN108917649A (en) * | 2018-07-26 | 2018-11-30 | 深圳市智能机器人研究院 | A kind of heavy caliber aspherical mirror structure light detection method |
| CN108917652A (en) * | 2018-07-09 | 2018-11-30 | 中国科学院光电技术研究所 | A kind of pose optimization method of structure light detection off-axis aspheric surface |
| CN110542392A (en) * | 2019-09-06 | 2019-12-06 | 深圳中科飞测科技有限公司 | Detection equipment and detection method |
| CN111121664A (en) * | 2019-12-18 | 2020-05-08 | 南京理工大学 | Method for detecting surface type of interference-like mirror |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101074868A (en) * | 2007-06-18 | 2007-11-21 | 厦门大学 | Method and apparatus for inspection automatically focusing non-spherical surface |
| US20080130016A1 (en) * | 2006-10-11 | 2008-06-05 | Markus Steinbichler | Method and an apparatus for the determination of the 3D coordinates of an object |
| CN101270975A (en) * | 2008-05-16 | 2008-09-24 | 湖南大学 | Combined interference device for aspheric surface measurement |
| US7440590B1 (en) * | 2002-05-21 | 2008-10-21 | University Of Kentucky Research Foundation | System and technique for retrieving depth information about a surface by projecting a composite image of modulated light patterns |
| CN101813460A (en) * | 2009-02-24 | 2010-08-25 | 康宁股份有限公司 | The shape measure of specular reflection surface |
| CN101858735A (en) * | 2010-05-19 | 2010-10-13 | 中国科学院光电技术研究所 | Large-caliber off-axis non-spherical measuring and calibration system |
| US20100315422A1 (en) * | 2009-06-16 | 2010-12-16 | Apple Inc. | Method and apparatus for surface contour mapping |
| CN101957182A (en) * | 2010-08-04 | 2011-01-26 | 中国科学院光电技术研究所 | Large-caliber high-gradient optical mirror surface on-line measuring system |
-
2011
- 2011-03-03 CN CN201110050685.7A patent/CN102183214B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7440590B1 (en) * | 2002-05-21 | 2008-10-21 | University Of Kentucky Research Foundation | System and technique for retrieving depth information about a surface by projecting a composite image of modulated light patterns |
| US20080130016A1 (en) * | 2006-10-11 | 2008-06-05 | Markus Steinbichler | Method and an apparatus for the determination of the 3D coordinates of an object |
| CN101074868A (en) * | 2007-06-18 | 2007-11-21 | 厦门大学 | Method and apparatus for inspection automatically focusing non-spherical surface |
| CN101270975A (en) * | 2008-05-16 | 2008-09-24 | 湖南大学 | Combined interference device for aspheric surface measurement |
| CN101813460A (en) * | 2009-02-24 | 2010-08-25 | 康宁股份有限公司 | The shape measure of specular reflection surface |
| US20100315422A1 (en) * | 2009-06-16 | 2010-12-16 | Apple Inc. | Method and apparatus for surface contour mapping |
| CN101858735A (en) * | 2010-05-19 | 2010-10-13 | 中国科学院光电技术研究所 | Large-caliber off-axis non-spherical measuring and calibration system |
| CN101957182A (en) * | 2010-08-04 | 2011-01-26 | 中国科学院光电技术研究所 | Large-caliber high-gradient optical mirror surface on-line measuring system |
Cited By (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102494634A (en) * | 2011-11-18 | 2012-06-13 | 中国科学院光电技术研究所 | Off-axis aspheric lens detection method based on fringe reflection |
| CN102494634B (en) * | 2011-11-18 | 2014-07-09 | 中国科学院光电技术研究所 | Off-axis aspheric lens detection method based on fringe reflection |
| CN102636130A (en) * | 2012-04-19 | 2012-08-15 | 中国科学院光电技术研究所 | Device for measuring surface profile of aspheric surface optical element in large dynamic range |
| CN102636130B (en) * | 2012-04-19 | 2014-07-09 | 中国科学院光电技术研究所 | Device for measuring surface profile of aspheric surface optical element in large dynamic range |
| CN102901465A (en) * | 2012-10-29 | 2013-01-30 | 大连宏海新能源发展有限公司 | Equipment and method for measuring slope error of optical lens |
| CN103335613A (en) * | 2013-07-18 | 2013-10-02 | 中国科学院光电技术研究所 | Large-caliber aspheric surface primary mirror detection device and method |
| CN103335613B (en) * | 2013-07-18 | 2016-05-18 | 中国科学院光电技术研究所 | A kind of aperture aspherical primary mirror checkout gear and method |
| CN103487441A (en) * | 2013-09-24 | 2014-01-01 | 电子科技大学 | Method for defect detection and surface measurement of silicon wafer |
| CN104180778A (en) * | 2014-09-17 | 2014-12-03 | 中国科学院光电技术研究所 | Structured light method for small-angle measurement |
| CN104180778B (en) * | 2014-09-17 | 2017-01-18 | 中国科学院光电技术研究所 | Structured light method for small-angle measurement |
| CN104251687A (en) * | 2014-10-11 | 2014-12-31 | 盐城工学院 | Part surface evenness detection method based on mirror image processing |
| CN104279980A (en) * | 2014-10-20 | 2015-01-14 | 电子科技大学 | Mirror surface three-dimensional-surface-shape measuring system based on intelligent photographing mobile phone |
| CN105806257A (en) * | 2016-03-12 | 2016-07-27 | 上海大学 | High reflective object surface light field deflection technique measuring system and method |
| CN105806257B (en) * | 2016-03-12 | 2019-02-22 | 上海大学 | A kind of high reflection body surface light field deviation art measuring system and method |
| CN105865378A (en) * | 2016-03-30 | 2016-08-17 | 苏州精创光学仪器有限公司 | Flatness detection method |
| CN105783775A (en) * | 2016-04-21 | 2016-07-20 | 清华大学 | Device and method of measuring surface topographies of mirror and mirror-like objects |
| CN105783775B (en) * | 2016-04-21 | 2018-05-11 | 清华大学 | A kind of minute surface and class minute surface object surface appearance measuring device and method |
| CN106017863A (en) * | 2016-05-11 | 2016-10-12 | 上海应用技术学院 | Phase measurement deflection method for aspheric surface detection |
| CN108225737A (en) * | 2017-12-06 | 2018-06-29 | 天津大学 | A kind of novel optical lens measurement method |
| CN108286950A (en) * | 2017-12-27 | 2018-07-17 | 中国科学院长春光学精密机械与物理研究所 | A kind of online test method of reflecting mirror surface shape |
| CN108917652A (en) * | 2018-07-09 | 2018-11-30 | 中国科学院光电技术研究所 | A kind of pose optimization method of structure light detection off-axis aspheric surface |
| CN108917652B (en) * | 2018-07-09 | 2020-04-10 | 中国科学院光电技术研究所 | Pose optimization method for off-axis aspheric surface of structured light detection |
| CN108917649A (en) * | 2018-07-26 | 2018-11-30 | 深圳市智能机器人研究院 | A kind of heavy caliber aspherical mirror structure light detection method |
| CN110542392A (en) * | 2019-09-06 | 2019-12-06 | 深圳中科飞测科技有限公司 | Detection equipment and detection method |
| CN111121664A (en) * | 2019-12-18 | 2020-05-08 | 南京理工大学 | Method for detecting surface type of interference-like mirror |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102183214B (en) | 2014-03-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102183214B (en) | Method for optically detecting large-aperture aspherical mirror structure | |
| Huang et al. | Review of phase measuring deflectometry | |
| CN106931910B (en) | A kind of efficient acquiring three-dimensional images method based on multi-modal composite coding and epipolar-line constraint | |
| CN105783775B (en) | A kind of minute surface and class minute surface object surface appearance measuring device and method | |
| CN106959078B (en) | A kind of contour measuring method for measuring three-dimensional profile | |
| Zappa et al. | Static and dynamic features of Fourier transform profilometry: A review | |
| CN104006765B (en) | Single width carrier frequency interference fringe phase extraction method and detecting device | |
| CN106092158B (en) | Physical parameter method of estimation, device and electronic equipment | |
| CN203231736U (en) | Specular object measurement device based on binocular vision | |
| CN101419063A (en) | Cylindricity non-contact measurement method and system based on multi-diameter splicing technology | |
| CN104111036A (en) | Mirror object measuring device and method based on binocular vision | |
| CN102997863A (en) | Direct detection system for surface-shape errors in full-aperture optical aspheric surfaces | |
| CN101915559B (en) | Method and system thereof for measuring three-dimensional surface shape of object by electronic speckle phase shift technology | |
| CN104180778B (en) | Structured light method for small-angle measurement | |
| CN105300317A (en) | Three-dimensional measurement method on the basis of projection of sinusoidal stripes and triangular wave stripes | |
| CN103398675A (en) | Three-dimensional measuring method for complex large object based on stripe period correction | |
| CN105865378A (en) | Flatness detection method | |
| CN105526906A (en) | Wide-angle dynamic high-precision laser angle measurement method | |
| CN111537203A (en) | Optical lens wavefront measuring method using phase measurement deflection technology | |
| Bartsch et al. | Improving the calibration of phase measuring deflectometry by a polynomial representation of the display shape | |
| Nguyen et al. | Real-time 3D measurement of freeform surfaces by dynamic deflectometry based on diagonal spatial carrier-frequency pattern projection | |
| CN101504276A (en) | Large diameter optical mirror face Ronchi optical grating quantitative determination instrument | |
| CN105444702A (en) | Object flatness optical detection system | |
| CN104266607A (en) | Mirror plane target contour optical measuring system and method | |
| Maestro-Watson et al. | LCD screen calibration for deflectometric systems considering a single layer refraction model |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |