CN104049326A - Semiconductor laser array output beam uniformizing and optical fiber coupling system - Google Patents
Semiconductor laser array output beam uniformizing and optical fiber coupling system Download PDFInfo
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- CN104049326A CN104049326A CN201410045319.6A CN201410045319A CN104049326A CN 104049326 A CN104049326 A CN 104049326A CN 201410045319 A CN201410045319 A CN 201410045319A CN 104049326 A CN104049326 A CN 104049326A
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Abstract
The invention discloses a semiconductor laser array output beam uniformizing and optical fiber coupling system which comprises multiple semiconductor lasers parallelly placed to form a one-dimensional array. A fast-axis collimating lens and a slow-axis collimating lens are sequentially arranged at the front end of the semiconductor laser array. Output light of each semiconductor laser unit passes through the fast-axis collimating lens and the slow-axis collimating lens, then passes through a field lens perpendicular to the z direction in the z direction perpendicular to the x direction, is deflected by the field lens and is parallelly arranged in the y direction after passing a certain distance in the z direction. The field lens consists of multiple sub-lenses, wherein the number of the sub-lenses is identical to the number of the semiconductor laser units outputting sub-beams. The output beams of the semiconductor laser units pass through the field lens and then respectively pass through a collimating lens, a redirecting optical device and a focusing device in the z direction. Focused beams are coupled into an output optical fiber.
Description
Technical field
The present invention relates to a kind of semiconductor laser array well-balancedization of output beam and fiber coupling system.
Background technology
Taking the arragement direction of laser instrument as x axle, because semiconductor laser one-dimensional array is at x direction of principal axis width (being generally 10mm) and beam divergence angle (being generally 8-12 °) and very large at y direction of principal axis height (being approximately 1 micron) and beam divergence angle (being generally 30-60 °) difference, light beam coupling is more difficult.Traditional way adopts the optical fiber identical with number of lasers to assemble a fibre bundle.When coupling before semiconductor laser array at collimation lens of the parallel placement of x direction, optical fiber is aimed at one by one with each semiconductor laser beam, the output light of each semiconductor laser is coupled in each optical fiber of fibre bundle one by one.The shortcoming of this method is because the end area of fibre bundle is large, and the output energy in unit area is low.
Conventionally the method adopting for the energy improving on optical fiber output unit area is in x direction, to adopt optical device to cut apart the output beam of semiconductor laser array, make the light beam of cutting apart on y direction of principal axis, produce dislocation simultaneously, by another optical device, each light beam of cutting apart is superposeed on y direction of principal axis, after rearrangement in x-y plane homogenising hot spot, be coupled into an optical fiber by focus device.The shortcoming of this method is to be that non-light-emitting area domain sizes all counts between x direction of principal axis will be the luminous size of all semiconductor lasers and two adjacent semiconductor laser instruments considering that light beam is cut apart number, and the energy on optical fiber output unit area is improved and has certain limitation.
Summary of the invention
For the problems referred to above, the invention provides a kind of semiconductor laser one-dimensional array well-balancedization of output beam and fiber coupling system.
For achieving the above object, semiconductor laser array well-balancedization of output beam of the present invention and fiber coupling system, described system comprises that equidistant parallel arrangement is the semiconductor laser group of one-dimensional array, taking the arragement direction of described laser array as x axle, be z axle perpendicular to described laser array arragement direction, the light beam of described laser instrument output transmits along z direction of principal axis;
Described semiconductor laser group comprises the sub-laser instrument that is arranged in the middle main laser of described one-dimensional array and is arranged in described main laser both sides, and the light beam of described main laser output is main beam, and the light beam of described sub-laser instrument output is beamlet;
Described system also comprises the accurate lens of fast axle, the accurate lens of slow axis, field lens, the collimation lens that described laser array front end sets gradually and again points to the condenser lens that again points to the beam outlet of optical device described in optical device and correspondence, the beam outlet of described condenser lens is provided with optical fiber, wherein
The accurate lens of described fast axle, for carrying out the main beam of described main laser and sub-laser instrument output described in each and beamlet the collimation on y direction of principal axis and described main beam and beamlet exported;
Described slow axis collimation lens, for carrying out the described main beam of described fast axis collimation lens output and described beamlet the collimation on x direction of principal axis and described main beam and beamlet exported;
Described field lens, for described main beam and the described beamlet of the output of described slow axis collimation lens are carried out to deflection, makes described main beam and described beamlet in the output of arranging of y direction of principal axis equal intervals;
Described collimation lens, for the described beamlet of described field lens output is carried out to the collimation on y direction of principal axis, makes to parallel in y-z plane through beamlet and the described main beam of described collimation lens;
The described optical device that again points to, for the described beamlet of described main beam and the output of described field lens is carried out to the axial deflection of x, make in x axle side, to carry out deflection the output of equal angular through described main beam and the described beamlet that again points to optical device;
Described condenser lens, for described described main beam and the described beamlet that again points to optical device output is polymerized to a focus, described focus is inputted described optical fiber.
Further, described fast axis collimation lens comprises into the collimation post lens that one-dimensional array is arranged, and wherein, described main laser is placed with respectively collimation post lens separately with the front end of sub-laser instrument described in each.
Further, described slow axis collimation lens comprises into the post lens that one-dimensional array is arranged, and wherein, described main laser is placed with respectively post lens separately with the front end of sub-laser instrument described in each.
Further, described field lens comprises the first plano-convex sub-post lens identical with the quantity of described sub-laser instrument, the sub-post lens of wherein said the first plano-convex and described sub-laser instrument are corresponding one by one, the sub-post lens of described the first plano-convex are arranged successively on x axle, on y axle, spacing first distance is arranged, and described the first distance makes through the beamlet of described plano-convex lens in the output that is arranged in parallel of y direction of principal axis equal intervals.
Further, described collimation lens comprises the second plano-convex sub-post lens identical with the quantity of described sub-laser instrument, the sub-post lens of wherein said the second plano-convex and described sub-laser instrument are corresponding one by one, the sub-post lens of described the second plano-convex are arranged successively on x axle, on y axle, spacing second distance is arranged, described second distance makes to collimate at y direction of principal axis through the beamlet of described the second plano-convex lens, and described beamlet is parallel in y-z plane with described main beam, described main beam forms stair-stepping parallel beam output with beamlet described in each.
Further, the described optical device that again points to comprises stepped base, on each ladder of described base, be provided with a prism, described prism and described main beam are corresponding one by one with beamlet described in each, described main beam and described beamlet are carried out the deflection on x direction of principal axis by described prism, makes through the described described main beam that again points to optical device and described beamlet at x-z with all parallel in y-z plane.
Further, the described optical device that again points to comprises stepped base, on each ladder of described base, be provided with a catoptron, described catoptron and described main beam are corresponding one by one with beamlet described in each, described main beam and described beamlet are carried out the deflection on x direction of principal axis by described catoptron, makes through the described described main beam that again points to optical device and described beamlet at x-z with all parallel in y-z plane.
Further, the end face of described optical fiber is plane, hemisphere face, circular conical surface.
The beneficial effect of semiconductor laser array well-balancedization of output beam of the present invention and fiber coupling system:
In the present invention, each sub-lens of field lens can be controlled the deflection angle of corresponding Laser Output Beam, can compensate to a certain extent the buckling phenomenon of the output beam being caused by semiconductor laser one-dimensional array paster process and fast axis collimation lens regulating error in x direction by using together with collimation lens, output beam carry out well-balancedization.
The present invention need not consider two non-luminous regions between adjacent semiconductor laser instrument in the time that conductor laser one-dimensional array is carried out to well-balancedization of light beam, by field lens and collimation lens, the position of each independent Laser Output Beam is rearranged, make as far as possible the output beam of laser instrument superpose with high density at y direction of principal axis, energy density and brightness after well-balancedization of raising light beam in unit area, allow light beam coupling to enter in the optical fiber of a little core diameter.
Brief description of the drawings
Fig. 1 is semiconductor laser one-dimensional array well-balancedization of light beam in x-z plane and the coupling fiber schematic diagram of semiconductor laser array well-balancedization of output beam of the present invention and fiber coupling system;
Fig. 2 is semiconductor laser one-dimensional array well-balancedization of light beam in y-z plane and the coupling fiber schematic diagram of semiconductor laser array well-balancedization of output beam of the present invention and fiber coupling system;
Fig. 3 is the front elevation of the field lens of semiconductor laser array well-balancedization of output beam of the present invention and fiber coupling system;
Fig. 4 is the vertical view of the field lens of semiconductor laser array well-balancedization of output beam of the present invention and fiber coupling system;
Fig. 5 is the vertical view that again points to optical device based on reflecting prism of semiconductor laser array well-balancedization of output beam of the present invention and fiber coupling system;
Fig. 6 is the side view that again points to optical device based on reflecting prism of the embodiment of semiconductor laser array well-balancedization of output beam of the present invention and fiber coupling system;
Fig. 7 is the vertical view that again points to optical device based on catoptron of semiconductor laser array well-balancedization of output beam of the present invention and fiber coupling system;
Fig. 8 is the side view that again points to optical device based on catoptron of semiconductor laser array well-balancedization of output beam of the present invention and fiber coupling system.
Embodiment
Below in conjunction with Figure of description, the present invention will be further described.
Semiconductor laser array well-balancedization of output beam of the present invention and fiber coupling system, described system comprises that equidistant parallel arrangement is the semiconductor laser group of one-dimensional array, taking the arragement direction of described laser array as x axle, be z axle perpendicular to described laser array arragement direction, the light beam of described laser instrument output transmits along z direction of principal axis;
Described semiconductor laser group comprises the sub-laser instrument that is arranged in the middle main laser of described one-dimensional array and is arranged in described main laser both sides, and the light beam of described main laser output is main beam, and the light beam of described sub-laser instrument output is beamlet;
Described system also comprises the accurate lens of fast axle, the accurate lens of slow axis, field lens, the collimation lens that described laser array front end sets gradually and again points to the condenser lens that again points to the beam outlet of optical device described in optical device and correspondence, the beam outlet of described condenser lens is provided with optical fiber, wherein
The accurate lens of described fast axle, for carrying out the main beam of described main laser and sub-laser instrument output described in each and beamlet the collimation on y direction of principal axis and described main beam and beamlet exported;
Described slow axis collimation lens, for carrying out the described main beam of straight described fast fiducial axis lens output and described beamlet the collimation on x direction of principal axis and described main beam and beamlet exported;
Described field lens, for described main beam and the described beamlet of the output of described slow axis collimation lens are carried out to deflection, makes described main beam and described beamlet in the output of arranging of y direction of principal axis equal intervals;
Described collimation lens, for the described beamlet of described field lens output is carried out to the collimation on y direction of principal axis, makes to parallel in y-z plane through beamlet and the described main beam of described collimation lens;
The described optical device that again points to, for the described beamlet of described main beam and the output of described field lens is carried out to the axial deflection of x, make in x axle side, to carry out deflection the output of equal angular through described main beam and the described beamlet that again points to optical device;
Described condenser lens, for described described main beam and the described beamlet that again points to optical device output is polymerized to a focus, described focus is inputted described optical fiber.
Further, described fast axis collimation lens comprises into the collimation post lens that one-dimensional array is arranged, and wherein, described main laser is placed with respectively collimation post lens separately with the front end of sub-laser instrument described in each.
Further, described slow axis collimation lens comprises into the post lens that one-dimensional array is arranged, and wherein, described main laser is placed with respectively post lens separately with the front end of sub-laser instrument described in each.
Further, described field lens comprises the first plano-convex sub-post lens identical with the quantity of described sub-laser instrument, the sub-post lens of wherein said plano-convex and described sub-laser instrument are corresponding one by one, the sub-post lens of described the first plano-convex are arranged successively on x axle, on y axle, spacing the first distance is arranged, and described the first distance makes in z direction, after transmission, to arrange output in y direction of principal axis equal intervals through the beamlet of described plano-convex lens.
Further, described collimation lens comprises the second plano-convex sub-post lens identical with the quantity of described sub-laser instrument, the sub-post lens of wherein said the second plano-convex and described sub-laser instrument are corresponding one by one, the sub-post lens of described the second plano-convex are arranged successively on x axle, on y axle, spacing second distance is arranged, described second distance makes to collimate at y direction of principal axis through the beamlet of described the second plano-convex lens, and described beamlet is parallel in y-z plane with described main beam, described main beam forms stair-stepping light beam output with beamlet described in each.
Further, the described optical device that again points to comprises stepped base, on each ladder of described base, be provided with a prism, described prism and described main beam are corresponding one by one with beamlet described in each, described main beam and described beamlet are carried out the deflection on x direction of principal axis by described prism, makes through the described described main beam that again points to optical device and described beamlet at x-z with all parallel in y-z plane.
Further, the described optical device that again points to comprises stepped base, on each ladder of described base, be provided with a catoptron, described catoptron and described main beam are corresponding one by one with beamlet described in each, described main beam and described beamlet are carried out the deflection on x direction of principal axis by described catoptron, makes through the described described main beam that again points to optical device and described beamlet at x-z with all parallel in y-z plane.
Further, the end face of described optical fiber is plane, hemisphere face, circular conical surface.
As shown in Fig. 1 to 8, multiple semiconductor laser elements 2, here only drawn for convenience of description 7 semiconductor laser elements with a determining deviation in the x-direction in a plane parallel being placed on heat sink 1, form one dimension semiconductor laser array.Each semiconductor laser element output beam 3 is propagated along the z direction vertical with x direction.Wherein light beam 4 is positioned in the middle of the light beam boundling being made up of light beam 3, is called main beam, and the direction of propagation of main beam is optical axis.The fast axis collimation lens 5 of placing a high numerical aperture before each semiconductor laser, noise spectra of semiconductor lasers array output beam 3 collimates in y direction.After fast axis collimation lens 5, place in the z-direction a slow axis collimation lens 6, every sub-post lens of slow axis collimation lens are corresponding one by one with each semiconductor laser element, compress the angle of divergence of each conductor laser unit output beam 3 in x-z plane.
After slow axis collimation lens, in z direction, place a field lens 7 vertical with optical axis, this field lens noise spectra of semiconductor lasers unit output beamlet 3 carries out deflection in y-z plane, but not deflection main beam 4.
Field lens 7 is made up of the sub-post lens 12 of multiple the first plano-convex.The number of the sub-post lens 12 of plano-convex is consistent with the semiconductor laser element number of output beamlet, the corresponding beamlet 3 of the sub-post lens of each the first plano-convex.The sub-post lens 12 of the plurality of plano-convex are at x direction main beam 4 both sides close-packed arrays, in y direction, stagger and highly place, the beam deflection angle that different height is corresponding different, the height staggering ensures the beamlet 3 that is deflected in the z-direction after certain distance transmits in y direction with certain same intervals parallel arranged.The focal length difference of the sub-post lens 12 of each plano-convex, make each focus that is deflected light beam in z direction in same position.Main beam 4, by the sub-post lens of plano-convex, does not change beam direction after field lens 7.
This field lens is made up of monolithic glass body, and a surface is plane, and there are the sub-post lens 12 of multiple the first plano-convex on another surface, and its manufacture method is identical with slow axis collimation lens 6 with fast axis collimation lens 5.There are sub-post lens 12 one sides of the first plano-convex towards semiconductor laser array.
In z direction, field lens 7 is placed a collimation lens 8 in the direction vertical with optical axis below.These collimation lens 8 structures are identical with field lens 7 to be made up of the sub-post lens of multiple the second plano-convex, and plane is towards semiconductor laser array.The corresponding deflected sub-beams of the sub-post lens 12 of each plano-convex, the sub-post lens of the plurality of the second plano-convex are at x direction main beam 4 both sides close-packed arrays, in y direction, stagger and highly guarantee every deflected beam 3 to collimate in y direction, parallel in y-z plane with main beam 4, reduce the beam divergence angle in y-z plane simultaneously.Beamlet 3 and main beam 4 leave the ladder light beam bar being formed on after collimation lens in y direction at certain intervals side by side.
In z direction, after collimation lens, place one and again point to optical device 9.This again points to optical device 9 all light beams after collimation lens is carried out to deflection in x-z plane.This again points to optical device 9 and is made up of stair-stepping base 13 and prism 14.On base, the stagger height of adjacent ladder in y direction is with consistent by the interval of ladder light beam bar after collimation lens.On each ladder, place a prism 14, prism 14 can be the reflecting prism of right-angle prism or other shape.The corresponding incident beam of each reflecting prism 14 carries out the deflection of equal angular in x direction to incident beam, all light beams are overlapped leaving after again pointing to optical device 9 in x direction, at x-z with all parallel in y-z plane.Light beam boundling and z direction after overshoot are angled, and this angle can be 90 °.
This again points to optical device 9 and also can be made up of stair-stepping base 15 and catoptron 16.On base, the stagger height of adjacent ladder in y direction is with consistent by the interval of ladder light beam bar after collimation lens.On each ladder, place a catoptron 16.
In the direction vertical with optical axis, place a condenser lens 10 below again pointing to optical device 9.This condenser lens can be a non-spherical lens, and non-ball surface is towards again pointing to optical device.This condenser lens is focused into a focus the light beam of well-balancedization, and focus is positioned at before the end face of coupled fiber 11, after end face surface or end face.
Finally it should be noted that: above embodiment is only for illustrating technical scheme of the present invention, not for limitation of the present invention, although the present invention is had been described in detail with reference to above-described embodiment, it will be understood by those skilled in the art that: still can modify or be equal to replacement the specific embodiment of the present invention, and do not depart from any amendment of spirit and scope of the invention or be equal to replacement, it all should be encompassed within the scope of claim of the present invention.
Claims (8)
1. semiconductor laser array well-balancedization of output beam and fiber coupling system, it is characterized in that: described system comprises that equidistant parallel arrangement is the semiconductor laser group of one-dimensional array, taking the arragement direction of described laser array as x axle, be z axle perpendicular to described laser array arragement direction, the light beam of described laser instrument output transmits along z direction of principal axis;
Described semiconductor laser group comprises the sub-laser instrument that is arranged in the middle main laser of described one-dimensional array and is arranged in described main laser both sides, and the light beam of described main laser output is main beam, and the light beam of described sub-laser instrument output is beamlet;
Described system also comprises the accurate lens of fast axle, the accurate lens of slow axis, field lens, the collimation lens that described laser array front end sets gradually and again points to the condenser lens that again points to the beam outlet of optical device described in optical device and correspondence, the beam outlet of described condenser lens is provided with optical fiber, wherein
The accurate lens of described fast axle, for carrying out the main beam of described main laser and sub-laser instrument output described in each and beamlet the collimation on y direction of principal axis and described main beam and beamlet exported;
The accurate lens of described slow axis, for carrying out the described main beam of accurate described fast axle lens output and described beamlet the collimation on x direction of principal axis and described main beam and beamlet exported;
Described field lens, for described main beam and the described beamlet of the output of the accurate lens of described slow axis are carried out to deflection, makes described main beam and described beamlet in the output of arranging of y direction of principal axis equal intervals;
Described collimation lens, for the described beamlet of described field lens output is carried out to the collimation on y direction of principal axis, makes to parallel in y-z plane through beamlet and the described main beam of described collimation lens;
The described optical device that again points to, for the described beamlet of described main beam and the output of described field lens is carried out to the axial deflection of x, make in x axle side, to carry out deflection the output of equal angular through described main beam and the described beamlet that again points to optical device;
Described condenser lens, for described described main beam and the described beamlet that again points to optical device output is polymerized to a focus, described focus is inputted described optical fiber.
2. semiconductor laser array well-balancedization of output beam according to claim 1 and fiber coupling system, it is characterized in that: described fast axis collimation lens comprises into the collimation post lens that one-dimensional array is arranged, wherein, described main laser is placed with respectively collimation post lens separately with the front end of sub-laser instrument described in each.
3. semiconductor laser array well-balancedization of output beam according to claim 1 and fiber coupling system, it is characterized in that: described slow axis collimation lens comprises into the post lens that one-dimensional array is arranged, wherein, described main laser is placed with respectively post lens separately with the front end of sub-laser instrument described in each.
4. semiconductor laser array well-balancedization of output beam according to claim 1 and fiber coupling system, it is characterized in that: described field lens comprises the first plano-convex sub-post lens identical with the quantity of described sub-laser instrument, the sub-post lens of wherein said the first plano-convex and described sub-laser instrument are corresponding one by one, the sub-post lens of described the first plano-convex are arranged successively on x axle, on y axle, spacing first distance is arranged, and described the first distance makes through the beamlet of described plano-convex lens in the output that is arranged in parallel of y direction of principal axis equal intervals.
5. semiconductor laser array well-balancedization of output beam according to claim 1 and fiber coupling system, it is characterized in that: described collimation lens comprises the second plano-convex sub-post lens identical with the quantity of described sub-laser instrument, the sub-post lens of wherein said the second plano-convex and described sub-laser instrument are corresponding one by one, the sub-post lens of described the second plano-convex are arranged successively on x axle, on y axle, spacing second distance is arranged, described second distance makes to collimate at y direction of principal axis through the beamlet of described the second plano-convex lens, and described beamlet is parallel in y-z plane with described main beam, described main beam forms stair-stepping light beam output with beamlet described in each.
6. semiconductor laser array well-balancedization of output beam according to claim 1 and fiber coupling system, it is characterized in that: the described optical device that again points to comprises stepped base, on each ladder of described base, be provided with a prism, described prism and described main beam are corresponding one by one with beamlet described in each, described main beam and described beamlet are carried out the deflection on x direction of principal axis by described prism, makes through the described described main beam that again points to optical device and described beamlet at x-z with all parallel in y-z plane.
7. semiconductor laser array well-balancedization of output beam according to claim 1 and fiber coupling system, it is characterized in that: the described optical device that again points to comprises stepped base, on each ladder of described base, be provided with a catoptron, described catoptron and described main beam are corresponding one by one with beamlet described in each, described main beam and described beamlet are carried out the deflection on x direction of principal axis by described catoptron, makes through the described described main beam that again points to optical device and described beamlet at x-z with all parallel in y-z plane.
8. semiconductor laser array well-balancedization of output beam according to claim 1 and fiber coupling system, is characterized in that: the end face of described optical fiber is plane, hemisphere face, circular conical surface.
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| CN201410045319.6A CN104049326B (en) | 2014-02-08 | 2014-02-08 | Semiconductor laser array output beam well-balancedization and fiber coupling system |
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| CN106443906A (en) * | 2016-09-22 | 2017-02-22 | 苏州长光华芯光电技术有限公司 | Laser array fiber coupling device based on macro channel cooling and coupling method thereof |
| CN107121781A (en) * | 2017-06-19 | 2017-09-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | Light-beam forming unit |
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| US5521748A (en) * | 1994-06-16 | 1996-05-28 | Eastman Kodak Company | Light modulator with a laser or laser array for exposing image data |
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| CN107121781A (en) * | 2017-06-19 | 2017-09-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | Light-beam forming unit |
| CN107121781B (en) * | 2017-06-19 | 2023-12-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | Beam shaping device |
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| CN104049326B (en) | 2015-12-09 |
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