CN104204717A - Method for determining correction value for monitoring fluid bearing and machine having at least one fluid bearing - Google Patents
Method for determining correction value for monitoring fluid bearing and machine having at least one fluid bearing Download PDFInfo
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- CN104204717A CN104204717A CN201280071799.2A CN201280071799A CN104204717A CN 104204717 A CN104204717 A CN 104204717A CN 201280071799 A CN201280071799 A CN 201280071799A CN 104204717 A CN104204717 A CN 104204717A
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- fluid bearing
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- bearing
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
- G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
- F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
- F16C32/0692—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for axial load only
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
- G01B5/0009—Guiding surfaces; Arrangements compensating for non-linearity there-of
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2370/00—Apparatus relating to physics, e.g. instruments
Abstract
The invention relates to a method (90) for determining a correction value. The correction value is used for monitoring a fluid bearing (35) of a machine (10) for machining or measuring a workpiece (32), in particular a coordinate measuring device. The method comprises the following steps of providing (94) the machine (10) for machining or measuring the workpiece (32), wherein the machine comprises a first element (56) and a second element (58), the first element (56) and the second element (58) being supported against each other by means of at least one fluid bearing (35), and a control device (38) for controlling the machine (10); ascertaining (96) a quantity representing a pressure in the at least one fluid bearing (35) as a function of a position and/or orientation of the first element (56) relative to the second element (58); determining (98) a correction value for a pressure in the at least one fluid bearing (35) for the position and/or orientation of the first element (56) relative to the second element (58); and storing (100) the correction value in the control device (38).
Description
Technical field
The present invention relates to be identified for the method for monitoring for the corrected value of the fluid bearing of the machine of machine work or measuring workpieces, particularly coordinate measuring machine, comprise the step of the machine that is provided for machine work or measuring workpieces, this machine has the first element and the second element, this first element and the second element mutually support by means of at least one fluid bearing or can mutually support by means of at least one fluid bearing, and this machine has the control device for controlling this machine.
And, the present invention relates to the machine for machine work and/or measuring workpieces, particularly coordinate measuring machine, this machine has: the first element and the second element, and this first element and the second element mutually support by means of at least one fluid bearing or can mutually support by means of at least one fluid bearing; Pressure determining device, for determining the amount that represents this at least one fluid bearing pressure; And control device, for controlling this machine.
Background technology
For example can know the method for monitoring fluid bearing and there is the machine of monitored fluid bearing, particularly coordinate measuring machine by file WO2010/054767A1.
Coordinate measuring machine is widely used in prior art.Coordinate measuring machine is a kind of machine with measuring head, and this measuring head can move with respect to object to be measured in measurement space.This measuring head is introduced in the defined position with respect to measurement point on object to be measured.The in the situation that of sense of touch coordinate measuring machine, for example, use the contact pilotage being arranged on measuring head to contact this measurement point.Can use subsequently the known location of this measuring head in measurement space to decide the volume coordinate of this measurement point.If determined the volume coordinate of the multiple defined measurement points on object to be measured, even can additionally determine the physical dimension spatial form of this object to be measured.They are used to for example in the environment of quality guarantee, check the object of workpiece, or for the object determine the geometrical property of workpiece completely in being called as the environment of " reverse-engineering ".In addition, can dream up multiple other may apply.
In this class coordinate measuring machine, can obtain with dissimilar sensor the coordinate of workpiece to be measured.For example, be known that the sensor of measuring with tactile manner is for this purpose, such as those sensors of for example being sold with name of product " VAST ", " VAST XT " or " VAST XXT " by applicant.Herein, by the surface of contact pilotage contact measured amount workpiece, the coordinate of this contact pilotage in measurement space is always known.This contact pilotage also can move along the surface of workpiece, like this, by using this measurement operation under the environment being called as " scan method ", can obtain a large amount of measurement points with the time interval limiting.
In addition, be known that and utilize optical sensor, it allows to obtain the coordinate of workpiece in discontiguous situation.An example of this optical sensor is the optical sensor of being sold with name of product " ViScan " by applicant.
Then, these sensors can be used in dissimilar measurement structure.An example of this measurement structure is the product " O-INSPECT " from applicant.In such device, used optical sensor and touch sensor simultaneously, to carry out different test assignments on machine, and only clamp ideally this workpiece to be measured once.By this way, can carry out a large amount of test assignments in for example engineering in medicine, plastic engineering and accurate electromechanical engineering in short and sweet mode.Certainly, in addition, also can dream up other different structures.
Typically, sensor head is connected to and supports also support system or the frame of movable sensor system.In prior art, known various support system, for example gantry system, straight-arm system, transverse arm system and mechanical arm system, all types of arm-and-hand system and also have the self-tolerant CT system in the case of the sensing system with X ray operation.And this support system can have the system unit that can allow sensor head to locate the most neatly.This one of them example is the swivel coupling of being sold with title " RDS " by applicant.In addition, thus can provide various adapters that the different system parts of this support system are connected to each other and are connected to sensing system.
Although the present invention is preferred for coordinate measuring machine, it also can be used in lathe and other machines, and in these machines, head machine will move with respect to objects such as workpiece with high precision.
The two all has movably working head (working head) lathe and coordinate measuring machine.As in the coordinate measuring machine on following exemplary basis, working head is fixed to the bottom free end of vertically arranged quill (quill) conventionally.This quill is movably, and measuring head can vertically be moved with respect to test desk.This test desk is for fixing object to be measured.This quill is disposed in again on the crossbeam of gantry, and can on this crossbeam, move along the first horizontal direction by means of bracket.This gantry can move along the second horizontal direction together with this quill, and this measuring head can be moved altogether on three mutually perpendicular direction in spaces.Herein, this quill, this bracket and this gantry form frame.This measuring head has determined measurement space along the maximum shift motion of these three moving directions, can determine the volume coordinate of object to be measured in this measurement space.
Can form in a similar fashion lathe.These lathes typically have as working head, with the main shaft (spindle) of tool rack, thereby this main axle moving machine workpieces.Except air bearing, known also have so-called fluid bearing, and it uses liquid instead of air as fluid.Then, form lubricating film by means of this liquid, two elements can move relative to each other with sliding type on this lubricating film.Under the application's background, term " fluid bearing " be understood to imply air bearing (, aerodynamic force or aerostatic bearing) and fluid bearing (, hydrostatic or fluid dynamic bearing) both.
Certainly be not only that frame in that side of sensor head of machine can be provided with this bearing.For example, on workpiece is arranged in as the rotating disk of Work piece fixing platform time, the Work piece fixing platform of machine can for example have air bearing.This rotating disk be used to for example measurement mechanism from applicant "
ultra with RT-AB " in.
In addition, file DE3637410A1 discloses a kind of for determining the method for skew of coordinate measuring machine top rotary table and desirable rotation Y.According to the method, the fc-specific test FC body with a large amount of defined measurement points is placed on this rotating disk, then in the position of auxiliary lower position, the various angle form of determining this defined measurement point of this coordinate measuring machine.Then, by calculating, determining that by organizing measurement point coordinate the radially runout of this rotation Y and position, angle are offset more.By this way, can determine the skew (tumbling deviation) of toppling of what is called in the motion of axial dipole field, radial deflection and this rotating disk of rotating disk.
File DE3419546A1 discloses a kind of for determining the method for centre of gravity place of test body, thereby this test body can form and can have many parts separately with different specific weight in very complicated mode and cannot easily calculate this centre of gravity place.According to the method, this test body can be motor vehicles and for example can be arranged on fixed head, and this fixed head is placed on the defined supporting-point on the rotating disk of coordinate measuring machine.Measuring cell is positioned at the strong point place of this plate.By using position distribution and each relevant anchorage force of this strong point, can calculate the centre of gravity place of this test body, this test body is determined with this coordinate measuring machine with respect to the initial undefined relative position of this fixed head.
File EP0866233A2 shows a kind of functional monitoring for air bearing and the device of braking, and its working pressure between area supported and substrate is measured.Pressure monitor or pressure transducer are connected to electric switch, and this electric switch is connected to again the controller of machine.
In the case of the air bearing of being monitored, in bearing clearance or the space between pressure regulator and escape hole, directly measure the air pressure in air bearing.Thereby the object of bearing monitoring is normally monitored the overload of air bearing gap detection air bearing.Herein, the width in air bearing pressure and air bearing gap or be highly relative to each other.And, by using bearing pressure, for example, can draw the conclusion relevant to the workpiece moving by air cushion platform.For this reason, conventionally use the combination of the air bearing that multiple quilts monitor separately, thereby for example calculate center of gravity or calculate the current heeling moment being caused by workpiece.In the file DE10006876C1 that this quotes in beginning or file WO2010/054767A1, carried out description.
In the ideal case, the air bearing that is loaded with a fixed load is slided on completely smooth mating surface.In this case, the air bearing pressure recording is by the constant value providing corresponding to this stress state.But in fact, all bearings that relate to all have manufacturing tolerance.Air-cushion rotating disc is equipped with the panel with Different Weight, and this weight can be changed by user.If only obtain the information about this workpiece, the fluctuation that the deviation of the pressure measuring value being caused by panel weight and the manufacturing tolerance by area supported cause is disruptive.
In by sensor measurement air bearing, during with respect to the pressure of atmospheric pressure, the fluctuation that depends on weather of this atmospheric pressure can additionally form amount of interference, and this amount of interference only has and can be eliminated by means of extra pressure sensor apparatus.But, consequently again increase the cost of this structure.
Summary of the invention
Therefore, the object of the invention is to eliminate at least one above-mentioned defect, particularly eliminate the pressure surge irrelevant with workpiece, and specify a kind of improved machine that allows to improve the method for fluid bearing monitoring and there is this fluid bearing.
Therefore, according to a first aspect of the invention, proposed the method for definite corrected value that exploitation is mentioned in beginning, this corrected value is for monitoring the fluid bearing for the machine of machine work or measuring workpieces, particularly coordinate measuring machine, and the method comprises the following steps:
-by the first elements relative in the position of the second element and/or the function of orientation determine the amount that represents pressure at least one fluid bearing,
-determine the corrected value of pressure in described at least one fluid bearing for described the first elements relative in the position of described the second element and/or orientation, and
-described corrected value is stored in control device.
According to a further aspect in the invention, machine that exploitation mentions in beginning has been proposed so that it functions as follows: this pressure determining device be designed to determine pressure in described at least one fluid bearing of representative amount its for described the first elements relative is in the position of described the second element and/or the function of orientation, and be designed to export to described amount as corrected value described control device.
Under the application's background, term " fluid bearing " be interpreted as meaning air bearing (, aerodynamic force or aerostatic bearing) and fluid bearing (, hydrostatic or fluid dynamic bearing) both.Especially, fluid bearing can be air bearing.If two real surfaces move relative to each other in fluid bearing, can on pressure transducer, record different pressures, although loading in this moving process of this fluid bearing do not change.Therefore the fluid bearing pressure, recording has relevant to position and/or relevant with orientation component.But, by means of proposed the present invention, by being called as " area of computer aided accuracy correction " correction (CAA), can eliminate this relevant to position and/or relevant with orientation component.
For this purpose, in this at least one fluid bearing, the first area supported of the first element and the second area supported of the second element move relative to each other, and record consequent pressure.Then can be with relevant to position and/or determine the fluctuation of pressure and the corrected value of measured pressure with the relevant mode of orientation by these pressure, and be stored in control device.Herein, this decision process can be carried out in control device, also can be independently carrying out in data processing unit.Then, can in measurement operation subsequently, use these corrected values.
After having guaranteed by this way, be only to be caused by the clamping of workpiece and workpiece measuring the pressure reduction recording in operation.
Therefore the CAA, proposing proofreaies and correct can eliminate all deviations that exist in the system of this machine, the fluctuation relevant to position and the aerodynamic force deviation of the electrical bias of the sensor that particularly used, the magnetic preload force that may exist.In addition, eliminated all not caused by workpiece but the pressure surge that for example, caused by the variation in the variation in structure (, another panel of rotating disk) or frame.
Especially, this determining step can immediately be carried out in measurement or the first being processed of workpiece.Then, by this way, even can eliminate the interference being caused by the fluctuation relevant to weather of ambient pressure.
In some cases, can ignore the dynamic effect in fluid bearing.But, can be by fluid bearing be calibrated and is proofreaied and correct for different loads and movement velocity even change also based on the pressure of dynamic effect.For example, be to exist the mode of heeling moment is loaded at rotating disk, bearing load moves with disk position.The propagation that in fluid bearing, pressure changes typically needs tens of seconds, but depends on rotational speed.Thus, in some cases, in fluid bearing, can there is again the pressure relevant with rotational speed by the existing pressure relevant to load.In this case, carry out calibration by having to different loading conditions and by the different translational speed of every kind of loading condition.These results are stored in control device equally.
The first element and the second element can support mutually by means of being introduced into the fluid between the first area supported of the first element and the second area supported of the second element.This fluid bearing itself is to provide by the first area supported opposite each other and the second area supported, between these two surfaces, can introduce fluid.Particularly air of this fluid, but also other gases.This fluid is placed in or injects between this first area supported and the second area supported under certain pressure.Therefore, generate or produced bearing clearance.Then, this fluid can flow through this bearing clearance.By this way, provide the hydraulic support between the first element and the second element.Thus, in the operating process of machine, provide this hydraulic pressure support by the bearing clearance between the first area supported and the second area supported, fluid or air flow through this bearing clearance.Thus, this fluid bearing there is the first area supported of this first element and the second area supported of this second element and can introduce the first area supported and the second area supported between fluid or air stream, the air that the fluid that maybe can introduce maybe can be introduced, this fluid or air support this first area supported and the second area supported mutually.Thus, the pressure in this fluid bearing can be understood to imply the static pressure of the air between the first area supported and the second area supported especially.
Can be completely achieved thus the target of mentioning in beginning.
In an embodiment of the invention, can make following setting: for this first elements relative in multiple positions of this second element and/or orientation carry out this determining step.
Especially, this determining step and deciding step and especially also have this storing step can be used for this first elements relative in multiple positions and/or the orientation of this second element.
Especially, then can make following setting: the plurality of position and/or orientation cover the gamut of the relative motion of the discrete progressive step between this first element and this second element.
Therefore, the whole range of movement that the first area supported of the first element and the second area supported of the second element can relative to each other be carried out is progressively traveled through or is traveled through stage by stage, and determines pressure and determine corrected value for each step or each stage.Herein, these steps or stage can selectedly obtain meticulous as much as possible.Self-evidently, the in the situation that of linear movement, the concrete distance between each step can pre-determine, for example, can be 5mm, 1cm or 5cm.In the situation that rotatablely moving, for example, can pre-determine angle, be for example 0.5 degree, 1 degree, 2 degree.Especially, in the case of again arriving after rotating disk completes turn over this first area supported and the second area supported same relative position relative to each other, high-resolution corrected value can be selected and keep in whole range of movement.Scope between each corrected value determining in discontinuous step can be determined by means of interpolation.For example, can carry out linear interpolation.Likely for example select fitting of a polynomial in addition, thereby the multiple corrected values based on determining are set up corrected value function in discontinuous step.
In principle, replace the motion of discrete progressive step, also can carry out continuous motion.Therefore, the first area supported and the second area supported will at least motions continuously toward each other in determining step.Thus, in this determining step, provide a kind of " scanning process ".Error likely occurs in this process, and this is because aerodynamic balance process has insufficient time to and sets up stable state.Can make for this purpose following setting: for example, according to the speed of continuous motion, provide the corrected value definite by experience.By using this corrected value, can proofread and correct amount that determine, representative pressure in continuous motion process.The degree of accuracy of the amount of representative pressure is corresponding to the definite amount of the motion by discrete progressive step.In addition, also likely form mean value by multiple measured values or by definite amount in concrete scope.
Can make following setting: first to the first elements relative in each position of the second element and/or orientation carry out this determining step.Then, can carry out a deciding step to established data collection by this way, for determining whole corrected values, can in storing step, store afterwards described corrected value.But, also can make following setting: first to the first elements relative in each position of the second element and/or orientation carry out this determining step and these two steps of this deciding step.Thus, after each determining step, determine immediately corresponding corrected value.Then, in storing step, store together all corrected values.Finally, also can arrange as follows: to the first elements relative in each position of the second element and/or orientation carry out this determining step, deciding step and storing step.In this case, in each position of the second element and/or orientation, carry out the corrected value of storing in steps and successively at the first elements relative.
In an embodiment of the invention, can make following setting: each is respectively the element for the Work piece fixing platform of fixation workpiece the first element and the second element.Especially, can arrange as follows: the first element is rotating disk or the rotor for rotating disk, and the second element is to support the base of this rotating disk or the stator for rotating disk.
Certainly, the first element and the second element are possible the element of rotating disk.For example, the first element can be the rotor of rotating disk, and the second element can be the stator of rotating disk.This base can form the element of frame equally, and the working head of machine is arranged in this frame.
By this way, can be by means of proposed the present invention, monitor and be arranged in workpiece side, particularly such as fluid bearing or air bearing on the support (mounting) of rotating disk in improved mode.
In an embodiment of the invention, can make following setting: this machine has multiple fluid bearings, each fluid bearing is carried out to this determining step, deciding step and storing step.
By this way, can provide improved monitoring to multiple fluid bearings.This makes to utilize the possible advantage being produced by the multiple fluid bearings of monitoring.For example, the heeling moment being caused by workpiece can be monitored better or the centre of gravity place that is arranged in the workpiece on Work piece fixing platform can be determined.
In another embodiment, can make following setting: the first element and the second element are respectively the element of machine or machine frame, in this frame, be furnished with the working head of this machine.
For example, the in the situation that of coordinate measuring machine, this working head can be sensor head, and this sensor head for example has optical sensor and/or the touch sensor for measuring this workpiece.In addition, for example, the in the situation that of lathe, this working head also can be the tool rack carrying such as instruments such as lathe tool, milling cutter or cutting tools.
Therefore,, by means of proposed the present invention, also likely monitor better fluid support (fluid mounting) or the airmount of the frame that carries working head of this machine.Especially, can accurately determine thus the bearing load of fluid bearing and possible overload, under overload situations, this first area supported and the second area supported contact with each other.Thereby this is avoided damaging this fluid bearing for the emergency stopper starting the machine as early as possible in the situation that fluid bearing transships and is even more important.
In another embodiment of the invention, can make following setting: before each determining step, the step that execution moves relative to each other the first element and the second element, to make this first elements relative change in position and/or the orientation of this second element.
By this way, can travel through the relative motion scope of the first area supported of the first element and the second area supported of the second element, especially, travel through successively or continuously this scope.Thus, first this first area supported and the second area supported can move relative to each other a certain amount of, then in this position short stay.Determine the relative position of this first area supported with respect to the second area supported, this position represents the pressure in bearing equally.Then carry out this deciding step and storing step.Then, this first area supported and the second area supported move relative to each other a certain amount of again, and again carry out this determining step, deciding step and storing step.
Especially, thus, can repeat by this way this determining step and deciding step, also have especially this storing step and this movement step, until traveled through the gamut that this first element and the second element move relative to each other.
Can make following setting: this first area supported is progressively carried out with respect to the motion of this second area supported; In this determining step, also in this deciding step and/or this storing step, the first element and the second elements relative change in position and/or orientation each other especially.
In addition, can make following setting: the first elements relative is to carry out continuously in the motion of the second element; In this determining step, also in this deciding step and/or this storing step, the first element and the second elements relative change in position and/or orientation each other especially.
In an embodiment of the invention, can make following setting: in the situation that workpiece is not arranged on Work piece fixing platform, carry out this determining step, deciding step and storing step.
By this way, can guarantee to detect the pressure reduction being caused by workpiece in observation process.This is particularly conducive to further assessment, for example, and the heeling moment working or the centre of gravity place of workpiece.
In another embodiment of the method, the method can be set to further comprising the steps of:
-workpiece is arranged on the Work piece fixing platform of machine, and
-when corrected value is taken into account, this workpiece is carried out to machine work or measurement.
By this way, can carry out machine work or measurement to this workpiece with improved fluid bearing monitoring.Workpiece is arranged in this step on the Work piece fixing platform of machine can be immediately after this provides step and carry out, but also can immediately after this storing step, carry out.
In an embodiment of the invention, can make following setting: can by by means of pressure transducer directly determine this pressure carry out this determining step.
Especially, can make following setting: directly determine the pressure in fluid bearing, " in fluid bearing " means " in fluid bearing gap ".But, also can make following setting: determine the pressure in the arbitrary supply air line that leads to fluid bearing.
By means of directly determining of pressure, can directly determine pressure in fluid bearing and without carrying out conversion, definite precision of pressure can reduce in transfer process.
Especially, can in the short time interval after this storing step, carry out the step of this workpiece being carried out machine work or measurement when corrected value is taken into account.
By this way, also provide the advantage that can calibrate the air pressure fluctuation relevant to weather.
In another embodiment of the invention, can make following setting: this determining step be by the distortion via the first and/or second element indirectly determine this pressure carry out, this distortion detects by means of at least one strainmeter or at least one measuring cell; Or, this determining step be by the fluid bearing gap width via between the first element and the second element indirectly determine this pressure carry out, this gap width detects by means of range sensor.
By means of the indirect detection of pressure, for example, can avoid carrying out and the necessity of the correction of temperature correlation because of the relative measurement of pressure transducer.Thus, compared with directly determining, indirectly determining of pressure can be more sane.In addition, it is very favorable that service range sensor replaces pressure transducer, and this is because pressure reduction to be measured may be very little.Range sensor can carry out much accurate measurement and have higher resolution, and this makes to carry out more accurately indirectly determining of pressure differential pressure.
In another embodiment of the invention, this determining step can be set to following execution: by using about the predetermined geometric data of the first element and the second element, by the first elements relative in the position of the second element and/or the function of orientation calculates or definite fluid bearing in expecting pressure differential pressure.
For example, this determining step can be carried out in data processing equipment.This data processing equipment can be arranged in the control device of this machine.
For example, can quality control (having measured this first element and the second element in this process) during fabrication obtain afterwards the necessary geometric data about the first element and the second element.Therefore, the actual geometric properties of each parts is known, and therefore can know the deviation between itself and its geometric configuration desirable, predetermined, that expect.Then,, by using these known shape defects, can carry out the pressure fluctuation of expecting in Fluid Computation bearing via mathematical model known to a person of ordinary skill in the art.Thus, can only in data processing equipment, carry out this determining step.Therefore, can reduce proposed CAA deviation and calibrate required duration.
Also can make following setting: in experiment test, pre-determine the relation between this geometric data and this expecting pressure differential pressure by experience.By using this relation obtaining by this way, also can determine the parameter of mathematic correction model.Then, can be by the result store of this experiment test or mathematic correction model in data processing equipment or control device.In operating process, can read out in this pressure differential pressure of determining under experiment test environment based on this geometric data.By using described pressure differential pressure, can determine corrected value.For example, also can be at auxiliary lower definite this corrected value of mathematical model, wherein the parameter of this mathematical model is determined with the experiment test of previously carrying out based on this geometric data.
In all embodiments of this method, can be set to air bearing by this fluid bearing.
Correspondingly, in an embodiment of this machine, can be set to rotating disk by this first element, and this second element is set to support the base of this rotating disk thereon.
At this, similarly, can monitor better thus the fluid bearing or the air bearing that are arranged in workpiece side.
Therefore, especially, this machine can be set to have multiple fluid bearings, these fluid bearings especially with ring arranged in form and have equidistantly with adjacent fluid bearing respectively.
For example, rotating disk can be set to be arranged on 6 fluid bearings, and these fluid bearings are arranged to relative to each other have the skew at 60 degree angles.
In addition, this pressure determining device can be set to have at least one sensor device, and these sensor devices are assigned to respectively a fluid bearing; This sensor device detects the amount of pressure in representative fluid bearing separately.
Under different situations, this at least one sensor device can be pressure transducer or at least one strainmeter or at least one measuring cell or range sensor, for detecting the fluid bearing gap between the first element and the second element.
As above explained, according to circumstances required, advantageously the pressure in convection cell bearing carries out directly or determines immediately, also can carry out it indirect or roundabout definite.Certainly, also can make following setting: the different embodiment of all types of sensor proposing can combine mutually, for example, a kind of combination in direct-detection bearing in the sensor of the pressure transducer of pressure and the indirect type that proposes, the sensor of these indirect type is strainmeter, measuring cell and/or range sensor.By this way, the pressure in can redundant fashion test fluid bearing and can improve accuracy.
In another embodiment, this pressure determining device can be set to be data processing equipment, and it configures as follows: by using geometric data, it determines that expecting pressure or expecting pressure in fluid bearing change.
Thus, can make following setting to this machine: can by with know in advance about the geometric data of the first element and the second element, fluctuate by carry out expecting pressure in Fluid Computation bearing with mathematical model known to a person of ordinary skill in the art.
In all embodiments, what propose can be the range sensor of any desired for detection of this range sensor of fluid bearing gap width.What for example, can be susceptible to is the sensor of measuring optically.
In all embodiments of this machine, fluid bearing can be set to be air bearing.
Self-evidently, above-mentioned each feature and below by describe each feature not only can use in the mode of its particular combinations separately, but also can under the prerequisite not departing from the scope of the present invention, use in the mode of other combinations or separately use.
Brief description of the drawings
In the accompanying drawings exemplified with exemplary embodiment of the present invention, and will these exemplary embodiment be described in explanation subsequently in more detail.In accompanying drawing:
Fig. 1 shows according to the rough schematic view of the machine of exemplary embodiment of the present invention;
Fig. 2 shows the coordinate measuring machine in Fig. 2 to be parallel to the view of Y-axis line;
Fig. 3 is the schematic diagram that can be used for the possible embodiment of the air bearing in machine shown in Fig. 1 and Fig. 2;
Fig. 4 is a kind of schematic flow sheet of exemplary embodiment of method.
Embodiment
Fig. 1 is exemplified with the exemplary embodiment of the novel device of machine 10 forms, and this machine 10 is configured to coordinate measuring machine.But, strictly say, the invention is not restricted to coordinate measuring machine; That is to say, the invention is not restricted to the measurement mechanism for the volume coordinate of measurement point on auxiliary lower definite workpiece of the sensor device suitable.The present invention can be equally for other types, workpiece is arranged in the measurement mechanism on Work piece fixing platform, and wherein, the Work piece fixing platform of this machine or frame are arranged at least one independently in fluid bearing.
This coordinate measuring machine 10 has base 12, and gantry 14 is arranged on this base 12.This gantry 14 can move on the first longitudinal direction that is conventionally designated as Y-axis line.Bracket 16 is arranged in the upper beam of this gantry 14, and this bracket 16 can move along the second longitudinal axis.This second longitudinal axis is designated as X-axis line conventionally.Quill 18 is arranged on bracket 16, and this quill 18 can move along the 3rd longitudinal axis.The 3rd longitudinal axis is designated as z axis conventionally.Conventionally, these three longitudinal axis X, Y are mutually vertical with Z.This gantry 14, bracket 16 and quill 18 form frame 17.
The sensor head 20 with contact pilotage 22 is arranged in the bottom free end of quill 18.This sensor head 20 can move along X, Y, tri-axis of Z under gantry 14, bracket 16 and quill 18 auxiliary in measurement space.This sensor head 20 forms the first sensor device under concept of the present invention together with this contact pilotage 22.Under first sensor device auxiliary, carry out the measurement point on sensing workpiece by the free tip with contact pilotage 22, can identify this measurement point.Reference marker 24,26,28 represents three scales, by using this three scales, can determine the measurement point that senses locus or the volume coordinate along X, Y, tri-directions of Z.By the multiple measurement points of sensing and definite corresponding volume coordinate, can determine that even the size (edge length, aperture etc.) of workpiece is spatial form.
In Fig. 1, illustrative coordinate measuring machine has touch sensor head, and this is preferred exemplary embodiment.But, the invention is not restricted to this, but can be equally for the measurement mechanism of post and beam structure and/or there is the measurement mechanism of non-contact sensor device, non-contact sensor device is for example for having the measurement mechanism of optical sensor.
In addition, machine 10 has Work piece fixing platform 29.Reference marker 30 represents rotating disk, and workpiece 32 is arranged on this rotating disk.This rotating disk 30 is supported on base 12 via fluid bearing system 34.This fluid bearing system 34 has multiple fluid bearings 35, and each fluid bearing 35 is formed as at base 12 with by the air cushion between the rotating disk 30 of fluid support.In particularly preferred exemplary embodiment, this rotating disk 30 is round turntable (referring to Fig. 2), and it is supported on base 12 via 7 fluid bearings 35, and these 7 fluid bearings are uniformly distributed along the periphery on the bottom side of rotating disk 30.Especially, fluid bearing system 34 can be air bearing system.Especially, fluid bearing 35 can be air bearing.Now this fluid is gas.This gas is air.The in the situation that of fluid bearing or fluid bearing system, this fluid is liquid, for example oil.
Reference marker 36 representation space positions, this locus representative is herein furnished with the center of gravity of workpiece 32 rotating disk 30 thereon.As seen from Figure 1, this center of gravity can be positioned at away from the center of circle of rotating disk 30 or the position at center because of the existence of workpiece 32, especially true in the case of outside the barycenter of workpiece 32 is radially positioned at the center of circle of rotating disk 30.
Reference marker 38 represents control device, and it comprises the movement via driver (not shown at this) of sensor head 20 and rotating disk 30 first for controlling the movement of coordinate measuring machine 10.Secondly, assessment and control module 38 are for determining by using from the measured value of scale 24,26,28 and the measuring amount such as edge length, hole depth or aperture etc. that obtains thus the volume coordinate that uses the measurement point that contact pilotage 22 senses on workpiece 32.
Control device 38 has data processing equipment 40, operation assessment and control program (not shown at this) on this data processing equipment.In preferred exemplary embodiment, this control device 38 also has and is used to the display device 41 of user's display measurement result and/or for managing the pattern manipulation interface of this machine.Operating means 42 is provided for this purpose, and user can be passed to user in machine via this operating means, thereby configures as required and/or control this machine.This operating means 42 can provide or provide as a part for control device 38 independently.Certainly, especially, also can set up the radio communication between operating means 42 and control device 38 and machine 10.
Except the fluid bearing 35 of the fluid bearing system 34 for supporting workpiece fixed station 29, certainly also can in machine 10, provide extraly or alternatively other positions of arranging the fluid bearing 35 with improved monitoring characteristic.For example, this class fluid bearing also can be used in frame 17, and this frame 17 carries working head 20.Thus, for example, can be by means of fluid bearing 44 with respect to bracket 16 support set tubular axis 18, as shown in schematic diagram.In addition, certainly also can be by means of fluid bearing 45 with respect to gantry 18 Support brackets 16, as shown in schematic diagram.In addition certainly also can gantry 18 be supported on base 12 by means of fluid bearing 46, as shown in schematic diagram.
At the rotation 48 that there is shown rotatable turntable 30 according to the side-looking of Fig. 2.This rotating disk 30 can be around this rotation 48 along arrow 49 direction rotation, this rotating disk 30 is comprising the auxiliary lower slider of fluid bearing system 34 of multiple fluid bearings 35.Reference marker 50 represents pressure determining device, and it for example can be formed as pressure transducer.This machine 10 has multiple pressure determining devices 50, to determine on each fluid bearing 35 hydrodynamic pressure separately.Under this pressure determining device 50 auxiliary, be able to definite hydrodynamic pressure and represent respectively on relevant fluid bearing 35 bearing load separately.
Especially, in illustrated embodiment, can provide 6 or 7 fluid bearings 35, it forms fluid bearing system 34.This fluid bearing 35 especially with ring arranged in form between rotating disk 30 and base 12.In this case, 35 of each fluid bearings have equal intervals.Especially, they can be arranged with the phase equi-angularly space with respect to rotation 48 separately.The in the situation that of 6 fluid bearings altogether 35, between each bearing, can form 60 degree angles.
Fig. 3 shows the embodiment that can be used for the fluid bearing 35 in machine shown in Fig. 1.In this case, the first element 56 and the second element 58 can support mutually by means of fluid bearing 35.
For this purpose, in illustrated embodiment, can in the second element 58, form recess 62, in this recess 62, be furnished with magnet, this magnet is formed as permanent magnet.This magnet 64 can be for example permanent magnet or electromagnet.At this, recess 62 is formed in the area supported 59 of the second element 58.By this way, likely set up so-called prestrain fluid bearing 35.But this fluid bearing 35 needn't necessarily be designed to prestrain.Certainly, recess 62 and magnet 64 also can be arranged in the first element 56.Layout in the second element 58 should be understood to it is only exemplary layout.
In fluid bearing 35, the first area supported 57 of the first element 56 and the second area supported 59 of the second element 58 are opposite each other and form betwixt the fluid bearing gap 70 being represented by reference marker 70.If fluid bearing 35 is air bearing, correspondingly form the air bearing gap between this first area supported 57 and the second area supported 59 at mobile air between the first area supported 57 and the second area supported 59.This first element 56 schematically shows by a dotted line.In addition, the size at the interval of the first area supported 57 and the second area supported 59 should be understood to it is only exemplary size, and selects this size only for illustrative object.This first element 56 and the second element 58 can support mutually by means of introducing the fluid 81 of for example air between the first area supported 57 and the second area supported 59.Thus, this fluid bearing 35 itself can by opposite each other, therebetween can introduce fluid 81, the first area supported 57 and the second area supported 59 provide.This fluid 81 can be placed in or inject between the first area supported 57 and the second area supported 59 under certain pressure.Then, fluid 81 flows through this fluid bearing gap 70.By this way, can between the first element 56 and the second element 58, provide fluid bearing 35.In the operation of machine 10, fluid bearing 35 is to provide by the fluid bearing gap 70 between the first area supported 57 or the first element 56 and the second area supported 59 or the second element 58 thus, and fluid 81 flows through this gap.
Fluid inlet 66,66 ' can be provided in the first area supported 57 and/or the second area supported 59, and first fluid 81 is injected or is introduced in fluid bearing gap 70 by this fluid inlet 66,66 '.
By this way, the first element 56 and the second element 58 are carried out relative sliding motion likely as indicated in double-head arrow 68.At this, this motion can realize without wearing and tearing in the situation that, and element 56,58 supports safely each other and guides.
In the time carrying out this motion, the second element 58 can be set to keep static, that is, do not move completely; And that the first element 56 can be set to is mobile, that is, not only definitely mobile but also move with respect to the second element 58.Certainly, this can also realize by other means, that is, the second element 58 moves and the first element 56 keeps static.Certainly, also the first element 56 and the second element 58 all can be set in absolute coordinate system, move and relative to each other move in addition.
In Fig. 1,2 and 3 by reference to mark 50,50 ' and 50 " and 50 " ' distinguish different pressure determining devices.In principle, can make following setting: the pressure in fluid bearing 35 is directly determined by means of pressure transducer 78.At this, pressure transducer 78 can be determined absolute pressure in fluid bearing 35 or the pressure with respect to its environmental pressure.This can directly complete in the fluid bearing gap 70 between the first area supported 57 and the second area supported 59, but for example also can in feeding pipe, realize, and this feeding pipe is by one in the fluid of certain pressure 81 pilot fluid imports 66,66 '.
In addition, can make following setting: by detect active pressure or pressure variation in fluid bearing 35 with the distortion of the first element 56 and/or the second element 58.Especially, this can in the case of the distortion not detecting, utilize active expecting pressure in convection cell bearing 35 know carry out.Then, likely draw the conclusion about the variation of expecting pressure by distortion.For this purpose, for example, can provide the measuring cell 72 and/or at least one strainmeter 74 that are assembled to this first element 56.Certainly, alternatively or extraly, they also can be connected to the second element 58.Also likely provide range sensor 76, its test fluid bearing clearance width 70.This sensor for example can be configured to optical sensor.Sensor 72,74,76,78 can be arranged in for example the first element 56 and/or the second element 58.
Finally, also likely carry out the expecting pressure in Fluid Computation bearing 35 by data processing equipment 40.This can be by using mathematical model known to a person of ordinary skill in the art, based on completing about the geometric data of the first element 56 and the second element 58.Thus, for example, can measure practically and directly the pressure in fluid bearing 35 by means of pressure transducer 78; Again for example, can measure practically and indirectly the pressure in fluid bearing 35 by means of at least one measuring cell 72, at least one strainmeter 74 and/or range sensor 76.But, the geometric data about the first element 56 and the second element 5 that also can be by knowing in advance, utilize mathematical model in data processing equipment 40, determine this pressure based on theory.
In Fig. 4 exemplified with the schematic flow sheet of an embodiment of method 90.
The method is from step 92.First, in step 94, show the setting for the machine 10 of machine work or measuring workpieces 32, it comprises the first element 56 and the second element 58, and wherein, the first element 56 has the first area supported 57, the second elements 58 and has the second area supported 59.This first area supported 57 or the first element 56 and the second area supported 59 or the second element 58 support mutually by means of at least one fluid bearing 35.In addition, provide the control device 38 for controlling machine 10.
Then, can first make following setting: in step 95, make the first element 56 and the second element 58 move relative to each other.But, in the first step in the time that the method starts, not must carry out this step.
Especially, make following setting: under the environment of step 95 (it can repeatedly be carried out), the whole range of movement of the first element 56 and the second element 58 is that (successively) travels through (run through) successively.Alternatively, can make following setting: whole range of movement is continuously traversal, and the pressure in fluid bearing 35 is to determine continuously.
Then,, in step 96, determine with respect to second position of element 58 and/or the function of orientation the amount that represents pressure in this at least one fluid bearing 35 by the first element 56.
This determining step in fact can be by carrying out with sensing data, and this sensing data is determined the amount that represents this pressure.At this, this not only can be pressure itself but also can be the amount that indirectly represents this pressure, such as the width in fluid bearing gap 70.
Also can make following setting: in step 97, detect the geometric data about the first element 56 and the second element 58.Then, in step 96, can based on this about the geometric data of the first element 56 and the second element 58,, first element 56 corresponding by determining by mathematical model with respect to the expecting pressure in relative position and/or the orientation of the second element 58.This geometric data can pre-determine under the environment of step 97, for example, and under the environment of quality guarantee.In this case, there is no need in one or more steps 95, to travel through, particularly travel through successively above-mentioned range of movement.
In step 98, now determine the corrected value at least one fluid bearing 35, for the first element 56 with respect to second position of element 58 and/or the pressure of orientation.
Then,, in step 100, this corrected value is stored in control device with respect to position and/or the orientation of the second element 58 together with relevant, the first element 56.
Then, can continue to carry out this movement step 95, until traveled through the whole range of movement of the first element 56 with respect to the second element 58.In principle, can make following setting: storing step 100 and/or deciding step 98 are only carried out once, and the movement step 95 of having carried out is immediately following after this deciding step 98 or this determining step 96.
Then, the method can end at step 106.
But, also can make following setting: in step 102, workpiece 32 is arranged on the Work piece fixing platform 29 of machine 10; And afterwards in step 104, above-mentioned corrected value or at least one corrected value are taken into account this workpiece 32 is carried out to machine work or measurement.For in step 95, under the environment of motion, carried out, the first element 56 is with respect to each position and/or the orientation of the second element 58, under the environment of step 100, corrected value is stored in control device, then can in the process of step 104, fetch this corrected value, and the monitoring of recoverable bearing thus.
Then, the method ends at step 106 again.
Claims (23)
1. the method (90) for definite corrected value, described corrected value is the fluid bearing (35) for machine (10), the particularly coordinate measuring machine of machine work or measuring workpieces (32) for monitoring, said method comprising the steps of:
(94) be provided for the machine (10) of machine work or measuring workpieces (32), described machine (10) has the first element (56) and the second element (58), described the first element (56) and the second element (58) support mutually by means of at least one fluid bearing (35), and described machine (10) has the control device (38) for controlling described machine (10), and
It is characterized in that following steps:
(96) press described the first element (56) with respect to the position of described the second element (58) and/or the function of orientation, determine the amount of pressure in described at least one fluid bearing (35) of representative,
(98) position and/or the orientation with respect to described the second element (58) for described the first element (56), determines the corrected value for the pressure of described at least one fluid bearing (35), and
(100) described corrected value is stored in described control device (38).
2. the method for claim 1, is characterized in that, carries out described determining step (96) for described the first element (56) with respect to multiple positions of described the second element (58) and/or orientation.
3. method as claimed in claim 2, is characterized in that, described multiple positions and/or orientation cover the gamut of the relative motion of the discrete progressive step between described the first element (56) and described the second element (58).
4. the method as described in any one in claim 1-3, it is characterized in that, each is the element for the Work piece fixing platform (29) of fixation workpiece (32) described the first element (56) and described the second element (58).
5. method as claimed in claim 4, it is characterized in that, described the first element (56) is the rotor of rotating disk (30) or rotating disk (30), and described the second element (58) is for supporting the base (12) of described rotating disk (30) or the stator of described rotating disk (30) thereon.
6. the method as described in any one in claim 1-5, it is characterized in that, described machine (10) has multiple fluid bearings (35), carries out determining step, deciding step and storing step for each described fluid bearing (35).
7. the method as described in any one in claim 1-6, it is characterized in that, each is the element of the frame (29) of described machine (10) described the first element (56) and described the second element (58), and the working head (20) of described machine (10) is arranged in described frame (29).
8. the method as described in any one in claim 1-7, it is characterized in that, in each determining step (96) before, execution makes the move relative to each other step of (95) of described the first element (56) and described the second element (58), and its mode makes position and/or the change in orientation of described the first element (56) with respect to described the second element (58).
9. method as claimed in claim 8, it is characterized in that, described the first element (56) is progressively carried out with respect to the motion of described the second element (58), in position relative to each other of the first element described in the process of described determining step (96) (56) and described the second element (58) and/or be orientated constant.
10. method as claimed in claim 8, it is characterized in that, described the first element (56) is to carry out continuously with respect to the motion (95) of described the second element (58), in the first element described in the process of described determining step (96) (56) and described the second element (58) position and/or change in orientation relative to each other.
11. methods as described in any one in claim 4-10, it is characterized in that, described determining step (96), deciding step (98) and storing step (100) are carried out in the situation that described workpiece (32) is not arranged on described Work piece fixing platform (29).
12. methods as described in any one in claim 1-11, is characterized in that, described method (90) is further comprising the steps of:
Described workpiece (32) is arranged to (102) are on the Work piece fixing platform of described machine (10), and
When described corrected value is taken into account, described workpiece (32) is carried out to machine work or measurement (104).
13. methods as described in any one in claim 1-12, is characterized in that, described determining step (96) is carried out by directly determine described pressure by means of pressure transducer (78).
14. methods as described in any one in claim 1-12, it is characterized in that, the described pressure that described determining step (96) is determined indirectly by the distortion via the described first and/or second element (58) is carried out, and described distortion detects by means of at least one strainmeter (74) or at least one measuring cell (72); Or, the described pressure that described determining step (96) is determined indirectly by the fluid bearing gap width (70) via between described the first element (56) and described the second element (58) is carried out, and described fluid bearing gap width detects by means of range sensor (76).
15. methods as described in any one in claim 1-12, it is characterized in that, described determining step (96) is carried out as follows: by using the predetermined geometric data about described the first element (56) and described the second element (58), calculate the expecting pressure in described fluid bearing (35) by described the first element (56) with respect to the position of described the second element (58) and/or the function of orientation.
16. methods as described in any one in claim 1-15, is characterized in that, described fluid bearing (35) is air bearing.
17. 1 kinds of machine (10), particularly coordinate measuring machine for machine work and/or measuring workpieces (32), it has:
The first element (56) and the second element (58), described the first element (56) and described the second element (58) support mutually by means of at least one fluid bearing (35),
Pressure determining device (50), for determining the amount of described at least one fluid bearing (35) pressure of representative, and
Control device (38), for controlling described machine (10),
It is characterized in that, described pressure determining device (50) is designed to, determine the amount of pressure in described at least one fluid bearing (35) of representative with respect to the position of described the second element (58) and/or the function of orientation by described the first element (56), and be designed to, export to described control device (38) using described amount as corrected value.
18. machines as claimed in claim 17, is characterized in that, described the first element (56) is rotating disk (30), and described the second element (58) is the base that supports described rotating disk (30) thereon.
19. machines as described in claim 17 or 18, it is characterized in that, described machine (10) has multiple fluid bearings (35), described fluid bearing (35) with the arranged in form of ring, has equidistantly with adjacent fluid bearing (35) respectively especially.
20. machines as described in any one in claim 17-19, it is characterized in that, described pressure determining device (50) has at least one sensor device (72,74,76,78) that is assigned to respectively a fluid bearing (35), and described sensor device (72,74,76,78) detects the amount that represents pressure in each fluid bearing (35).
21. machines as described in any one in claim 17-20, it is characterized in that, under different situations, described at least one sensor device (72,74,76,78) is pressure transducer (78) or at least one strainmeter (74) or at least one measuring cell (72) or range sensor (76), and described range sensor is for detection of the fluid bearing gap width (70) between described the first element (56) and described the second element (58).
22. machines as described in any one in claim 17-21, it is characterized in that, described pressure determining device (50) is data processing equipment (40), it assembles in the following manner: by using geometric data, this data processing equipment determines that the expecting pressure in described fluid sensor (35) changes.
23. machines as described in any one in claim 17-22, is characterized in that, described fluid bearing (35) is air bearing.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2012/051269 WO2013110338A1 (en) | 2012-01-26 | 2012-01-26 | Method for determining a correction value for the monitoring of a fluid bearing and machine having at least one fluid bearing |
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| Publication Number | Publication Date |
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| CN104204717A true CN104204717A (en) | 2014-12-10 |
| CN104204717B CN104204717B (en) | 2017-07-04 |
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| CN201280071799.2A Active CN104204717B (en) | 2012-01-26 | 2012-01-26 | It is determined that the method for the corrected value for monitoring FDB and machine with least one FDB |
Country Status (4)
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| US (1) | US9671210B2 (en) |
| EP (1) | EP2807447B1 (en) |
| CN (1) | CN104204717B (en) |
| WO (1) | WO2013110338A1 (en) |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108691895A (en) * | 2017-03-31 | 2018-10-23 | 卡尔蔡司工业测量技术有限公司 | Air bearing with variable air delivering |
| US10683894B2 (en) | 2017-03-31 | 2020-06-16 | Carl Zeiss Industrielle Messtechnik Gmbh | Air bearing with variable air delivery |
| CN109405786A (en) * | 2017-08-18 | 2019-03-01 | 卡尔蔡司工业测量技术有限公司 | Air bearing device, coordinate measuring machine and manufacturing method for coordinate measuring machine |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2807447A1 (en) | 2014-12-03 |
| WO2013110338A1 (en) | 2013-08-01 |
| US9671210B2 (en) | 2017-06-06 |
| CN104204717B (en) | 2017-07-04 |
| EP2807447B1 (en) | 2017-11-08 |
| US20140317942A1 (en) | 2014-10-30 |
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