CN105424717A - Optical detection device for detecting multiple defects - Google Patents
Optical detection device for detecting multiple defects Download PDFInfo
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Abstract
An optical detection device for detecting multiple defects comprises a multi-axis mechanical arm, wherein the multi-axis mechanical arm respectively moves an article to be detected to a first optical detection station, a second optical detection station and a third optical detection station for detection. The first optical inspection station includes a first image scanning device and a first auxiliary lighting device for providing uniform light. The second optical inspection station comprises a second image scanning device and a second auxiliary lighting device for providing parallel plane coaxial light. The third optical inspection station includes a line scan camera and a third auxiliary illumination device that provides collimated light for lateral lines. The multi-axis mechanical arm moves the object to be detected to the first optical detection station, the second optical detection station and the third optical detection station, and rotates or overturns the object to be detected to detect one or more visual planes of the object to be detected, so that all defects which are possibly difficult to detect on the surface of the object to be detected can be detected, and the detection rate of defective products can be effectively improved.
Description
Technical field
The present invention has about a kind of optical detection apparatus, espespecially a kind of optical detection apparatus detecting kinds of surface flaw.
Background technology
The development of the automatic control technology of sight, can be talked about by the concept of volume production.Volume production is a large amount of abbreviations of producing (MassProduction), and namely its concept comes across the society of the mankind very early, has low cost, high efficiency advantage.But the implementation of volume production is limited by normalized condition precedent.Before normalization not yet can be reached, the object of volume production is only limitted to the industry of low technical, low precision, as the simple products such as fragment of brick, glass.Along with normalized universal, the division of labor is thinner, the treatable object of volume production also increases simultaneously.But the demand of high standard brought of accurate industry thereupon, the quality for product also needs the standard beginning to meet general supply chain through tight detection.Be with, how product is carried out to the detection of high precision, expecting to provide high-quality product to export, is original equipment manufacturer (OriginalEquipmentManufacturer, OEM) and Original Design Manufacturer (OriginalDesignManufacturer, ODM) common problem.
Precision measurement is a ring very important in automatic production line, and it not only relates to the problem of producing line yield, is also the important indicator that integral device efficiency (OverallEquipmentEffectiveness, OEE) in line is produced in judgement one.Along with the business model of hunger marketing emerges, electronic product develops towards the form of best quality, high unit price.Passing can in detection uncared-for tiny defect, in the product bragging about high rule now can not accept by consumer, for any naked eyes can and flaw (even naked eyes flaw inconspicuous), all must be detected in end point detection.Under high-precision demand, known checkout equipment obviously can not meet the demand of OEM and ODM manufacturer.
In known checkout equipment, used with use multiaxis to move position, angle that microscope carrier adjusts article to be measured, use through optical instrument article capture to be measured.But move microscope carrier through multiaxis and move article to be measured, must when the single direction of this microscope carrier move to fixed point, begin to carry out the adjustment of other direction, have limited more in the efficiency detected, and microscope carrier easily produces vibrations when movement, rotation, is not suitable for Precision measurement.Therefore be the precision of lifting detection, the recall rate of increase surface blemish, in automatically detecting, gradually adopt the Multi-shaft mechanical arm replacement relative to high precision to recall the multiaxis known move microscope carrier.Have the technology about Multi-shaft mechanical arm, such as TaiWan, China M445176 patent, this patent discloses a kind of pick-up unit, includes device of image scanning and Multi-shaft mechanical arm.This Multi-shaft mechanical arm can be picked up within the scope of article to be measured to the viewing area of this device of image scanning and be rotated this article to be measured, makes device of image scanning can carry out multiaspect detection to these article to be measured.Base this, the precision in testing process can be promoted and promote the efficiency of whole detection.In addition, in TaiWan, China M453145 patent, it discloses a kind of automatic optical detector structure, in frame, be provided with one in order to capture the six axis robot arm of object, this six axis robot arm is utilized to carry out movement and the rotation of object, and carry out Surface testing by optical detecting module, use the convenience increasing and detect operation.
And for example China's No. 103728302 patent, discloses a kind of automatic checkout equipment of object appearance.This automatic checkout equipment comprises frame, multi-axis mechanical arm, optical detecting module, articles holding table, elevating mechanism and switching mechanism.Wherein, this optical detecting module can drive by this multi-axis mechanical arm and produce displacement and rotation, uses and detects the outward appearance of object, improve detection efficiency.
More than be example Multi-shaft mechanical arm being applied to Image detection.In addition in TaiWan, China M454539 patent, disclose a kind of Image sensor apparatus for article outward appearance to be measured, include image sensor, plummer and image sensing track.This plummer in order to carry this image sensor, and captures the image of article to be measured in time moving on this image sensing track simultaneously.Wherein, this image sensing track is arranged corresponding to the shape of these article to be measured, for the equidistant capture of this chamfered area, can maintain the identical depth of field (Depthoffield) in time taking this chamfered area, reduce the situation of image distortion when detecting when turning point.
Above front case technology all can promote the efficiency of detection and the recall rate of flaw effectively, only, in fact described front case technology in time detecting, although outstanding recall rate can be possessed for specific flaw, be not enough to deal with likely occur on the surface examining and NF flaw in article to be measured.
Summary of the invention
Object of the present invention, is the optical detection apparatus providing a kind of multiple flaw to detect, and can detect the difficulty inspection flaw that the surface of article to be measured likely occurs, use the recall rate effectively promoting flaw product.
For achieving the above object, the invention provides the optical detection apparatus that a kind of multiple flaw detects, for carrying out the detection of multiaspect to article to be measured, be characterized in, this optical detection apparatus comprises: Multi-shaft mechanical arm, include the pickup section of fixing these article to be measured and be connected to this pickup section to drive the horn of this article movement to be measured, this horn drives these article to be measured to rotate along the direction of various dimensions, and these article to be measured mobile are to detect; First optical detection station, include the first district to be measured, corresponding to this first district to be measured the first device of image scanning and to be arranged between this first device of image scanning and this first district to be measured and to provide even light to first auxiliary lighting apparatus in this first district to be measured, this horn moves these article to be measured to this first district to be measured, and rotates or overturn these article to be measured detect these article to be measured or several visible planar for this first device of image scanning; Second optical detection station, include the second district to be measured, corresponding to this second district to be measured the second device of image scanning and to be arranged between this second device of image scanning and this second district to be measured and to provide parallel surface axis light to second auxiliary lighting apparatus in this second district to be measured, this horn moves these article to be measured to this second district to be measured, and rotates or overturn these article to be measured detect these article to be measured one or several this visible planar for this second device of image scanning; And the 3rd optical detection station, include the 3rd district to be measured, corresponding to the 3rd district to be measured line sweep video camera and correspond to the 3rd side, district to be measured provide side direction line collimated light to the 3rd auxiliary lighting apparatus in the 3rd district to be measured, this horn moves these article to be measured to the 3rd district to be measured, and rotates or overturn these article to be measured detect these article to be measured one or several this visible planar for this line sweep video camera.
Further, this first auxiliary lighting apparatus includes the luminescence unit array providing face light towards a first direction, the spectroscope being arranged at the diffuser plate on this first direction of this luminescence unit array and being arranged on this first direction of this diffuser plate, the face light that this luminescence unit array provides is converted to uniform surface light by this diffuser plate, this spectroscope corresponds between this first district to be measured and this first device of image scanning, in order to this uniform surface light is converted to the second direction parallel with the machine vision direction of this first device of image scanning by this first direction.
Further, this first auxiliary lighting apparatus includes the vaulted lamp be arranged in this this second direction spectroscopical further, this vaulted lamp include there is arc-shaped curved surface diffusion portion, be arranged in this diffusion portion and correspond to this spectroscopical opening and one or several and be located on this arc-shaped curved surface week side the inside luminescence unit irradiated towards this arc-shaped curved surface direction.
Further, this first auxiliary lighting apparatus is for providing the diffused light source of this even light, vaulted lamp (dome), cold-cathode fluorescence lamp (ColdCathodeFluorescentLamp, CCFL) or circline.
Further, this second auxiliary lighting apparatus includes the spectroscope providing the single light source of diverging light towards a first direction, be arranged at the collimation lens on this first direction of this single light source and be arranged on this first direction of this collimation lens, the diverging light that this single light source provides is converted to directional light by this collimation lens, this spectroscope corresponds between this second district to be measured and this second device of image scanning, in order to this uniform surface light is converted to the second direction parallel with the machine vision direction of this second device of image scanning by this first direction.
Further, the 3rd auxiliary lighting apparatus includes provides the line array light source of rectangle diverging light and arranges corresponding to this line array light source and this rectangle diverging light be converted to the collimation lens of this side direction line collimated light.
Further, the visible planar of these article to be measured in described region to be measured sets a Z-axis, angle between the machine vision direction of this line sweep video camera and this Z-axis is between 10 ° to 45 °, and the angle between the direction of this side direction line collimated light that the 3rd auxiliary lighting apparatus exports and this Z-axis is between 10 ° to 45 °.
Further, the visible planar of these article to be measured in described region to be measured sets a Z-axis, and the machine vision direction of this line sweep video camera is identical with the angle between the direction of this side direction line collimated light that the angle between this Z-axis exports with the 3rd auxiliary lighting apparatus and this Z-axis.
Further, 3rd optical detection station includes portable microscope carrier, this portable microscope carrier include corresponding to the 3rd district to be measured rail mechanism and to be arranged on this rail mechanism and to drive to be displaced into the movable microscope carrier on this rail mechanism by drive unit, this movable microscope carrier is placed with described line sweep video camera and described 3rd auxiliary lighting apparatus, and drive to move towards scanning path by this drive unit, to take the image of these article to be measured by this line sweep video camera.
Further, this first device of image scanning is Surface scan video camera.
Further, this second device of image scanning is Surface scan video camera.
Another object of the present invention is to the optical detection apparatus providing a kind of multiple flaw to detect, for carrying out the detection of multiaspect to article to be measured.This optical detection apparatus comprises Multi-shaft mechanical arm, portable device of image scanning, the first optical detection station, the second optical detection station and the 3rd optical detection station.This Multi-shaft mechanical arm includes the pickup section of fixing these article to be measured and is connected to this pickup section to drive the horn of this article movement to be measured.This horn drives these article to be measured to rotate along the direction of various dimensions, and these article to be measured mobile move to detect.This portable device of image scanning includes guide rail, is arranged on this guide rail and drives with the mobile carrier be displaced on this guide rail and the Surface scan video camera be arranged on this mobile carrier by drive unit.What this mobile carrier may correspond to moves to a primary importance and a second place.This first optical detection station include corresponding to this primary importance the first district to be measured and to be arranged between this primary importance and this first district to be measured and to provide even light to first auxiliary lighting apparatus in this first district to be measured.This horn moves these article to be measured to this first district to be measured, and rotates or overturn these article to be measured detect these article to be measured several visible planar for this Surface scan video camera.This second optical detection station include corresponding to this second place the second district to be measured and to be arranged between this second place and this second district to be measured and to provide parallel surface axis light to second auxiliary lighting apparatus in this second district to be measured.This horn moves these article to be measured to this second district to be measured, and rotates or overturn these article to be measured detect these article to be measured several visible planar for this Surface scan video camera.3rd optical detection station include the 3rd district to be measured, corresponding to the 3rd district to be measured line sweep video camera and correspond to the 3rd side, district to be measured provide side direction line collimated light to the 3rd auxiliary lighting apparatus in the 3rd district to be measured.This horn moves these article to be measured to the 3rd district to be measured, and rotates or overturn these article to be measured detect these article to be measured several visible planar for this line sweep video camera.
Further, this first auxiliary lighting apparatus includes the luminescence unit array providing face light towards a first direction, the spectroscope being arranged at the diffuser plate on this first direction of this luminescence unit array and being arranged on this first direction of this diffuser plate, the face light that this luminescence unit array provides is converted to uniform surface light by this diffuser plate, this spectroscope corresponds between this first district to be measured and this Surface scan video camera, in order to this uniform surface light is converted to the second direction parallel with the machine vision direction of this Surface scan video camera by this first direction.
Further, this first auxiliary lighting apparatus includes the vaulted lamp be arranged in this this second direction spectroscopical further, this vaulted lamp include there is arc-shaped curved surface diffusion portion, be arranged in this diffusion portion and correspond to this spectroscopical opening and one or several and be located on this arc-shaped curved surface week side the inside luminescence unit irradiated towards this arc-shaped curved surface direction.
Further, this first auxiliary lighting apparatus is for providing the diffused light source of this even light, vaulted lamp (dome), cold-cathode fluorescence lamp (ColdCathodeFluorescentLamp, CCFL) or circline.
Further, this second auxiliary lighting apparatus includes the spectroscope providing the single light source of diverging light towards a first direction, be arranged at the collimation lens on this first direction of this single light source and be arranged on this first direction of this collimation lens, the diverging light that this single light source provides is converted to directional light by this collimation lens, this spectroscope corresponds between this second district to be measured and this Surface scan video camera, in order to this uniform surface light is converted to the second direction parallel with the machine vision direction of this Surface scan video camera by this first direction.
Further, the 3rd auxiliary lighting apparatus includes provides the line array light source of rectangle diverging light and arranges corresponding to this line array light source and this rectangle diverging light be converted to the collimation lens of side direction line collimated light.
Further, the visible planar of these article to be measured in described 3rd district to be measured sets a Z-axis, angle between the machine vision direction of this line sweep video camera and this Z-axis is between 10 ° to 45 °, and the angle between the direction of this side direction line collimated light that the 3rd auxiliary lighting apparatus exports and this Z-axis is between 10 ° to 45 °.
Further, in described 3rd district to be measured, the visible planar of these article to be measured sets a Z-axis, and the machine vision direction of this line sweep video camera is identical with the angle between the direction of this side direction line collimated light that the angle between this Z-axis exports with the 3rd auxiliary lighting apparatus and this Z-axis.
Further, 3rd optical detection station includes portable microscope carrier, this portable microscope carrier include corresponding to the 3rd district to be measured rail mechanism and to be arranged on this rail mechanism and to drive to be displaced into the movable microscope carrier on this rail mechanism by drive unit, this movable microscope carrier is placed with described line sweep video camera and described 3rd auxiliary lighting apparatus, and drive to move towards scanning path by this drive unit, to take the image of these article to be measured by this line sweep video camera.
Therefore the present invention has following advantage effect compared with known technology:
1. optical detection apparatus of the present invention can detect the difficulty inspection flaw that article to be measured likely occur, effectively promotes the recall rate of flaw product.
2. Surface scan video camera of the present invention can be displaced between the first optical detection station and the second optical detection station by mobile carrier, makes this first optical detection station and this second optical detection station share a smear camera, uses the cost of reduction equipment.
Accompanying drawing explanation
Fig. 1 is the schematic appearance of first embodiment of the invention.
Fig. 2 is the schematic appearance of article to be measured.
Fig. 3 A-Fig. 3 P is for by the various common flaw detected in Image detection.
Fig. 4 is the schematic diagram at the first optical detection station of first embodiment of the invention.
Fig. 5 is the schematic diagram at the second optical detection station of first embodiment of the invention.
Fig. 6 is the schematic diagram at the 3rd optical detection station of first embodiment of the invention.
Fig. 7 A-Fig. 7 H is the operation chart of first embodiment of the invention.
Fig. 8 is the schematic appearance of second embodiment of the invention.
Fig. 9 A-Fig. 9 H is the operation chart of second embodiment of the invention.
Label declaration:
100 optical detection apparatus 10 first optical detection stations
11 first device of image scanning 12 first auxiliary lighting apparatuses
121 luminescence unit array 122 diffuser plates
The vaulted lamp of 123 spectroscope 124
125 diffusion portion 126 arc-shaped curved surfaces
127 opening 128 luminescence units
20 second optical detection station 21 second device of image scanning
22 second auxiliary lighting apparatus 221 single light sources
222 collimation lens 223 spectroscopes
30 the 3rd optical detection station 31 line sweep video cameras
32 the 3rd auxiliary lighting apparatus 321 line array light sources
The portable microscope carrier of 322 collimation lens 33
The movable microscope carrier of 331 rail mechanism 332
40 Multi-shaft mechanical arm 41 pickup section
42 horn 50 frames
It article R to be measured fillet
L bottom surface, S side
A2 second district to be measured of A1 first district to be measured
A3 the 3rd D1 first direction in district to be measured
D2 second direction K1 first direction
K2 second direction Z Z-axis
θ 1angle
θ 2angle
In feed zone W scanning pattern
Arrow A arrow B
Arrow C
The portable device of image scanning of 200 optical detection apparatus 60
61 guide rail 62 mobile carriers
63 Surface scan video camera 70 first optical detection stations
71 first auxiliary lighting apparatus 80 second optical detection stations
81 second auxiliary lighting apparatus T1 first districts to be measured
T3 the 3rd district to be measured of T2 second district to be measured.
Embodiment
Hereby lift part preferred embodiment with regard to the architectural feature of this case and mode of operation, and coordinate and illustrate, after being sincerely set forth in, consult to provide examination.
The present invention is the optical detection apparatus that a kind of multiple flaw detects, in order to carry out the detection of surface blemish respectively to one or several visible planar of article to be measured.These article to be measured can be the polyhedral structure with several visible planar, and these article to be measured can be but are not defined as this common processed finished products of chip, crystal column surface, electronic packing part, electronic product casing, substrate or other class.
Referring to Fig. 1, is the schematic appearance of first embodiment of the invention, as shown in the figure:
This optical detection apparatus 100 consists predominantly of Multi-shaft mechanical arm 40(RoboticArm), the first optical detection station 20, optical detection station 10, second, the 3rd optical detection station 30 and for the said equipment arrange frame 50.
Described Multi-shaft mechanical arm 40 includes the pickup section 41 of fixing article It to be measured and is connected to this pickup section 41 to drive the horn 42 of this article It to be measured movement.This horn 42 can locate this article It to be measured by this pickup section 41, uses and drives this article It to be measured to rotate along the direction of various dimensions.Described Multi-shaft mechanical arm 40 is better can be six shaft mechanical arms (Six-axisRobotic), may correspond in different dimensions X, Y, Z, X
θ, Y
θor the direction of Z θ is moved or rotates.Described pickup section 41 is better can be a vacuum absorption device, in order to adsorb and to fix described article It to be measured.Except vacuum absorption device, this pickup section also can be clamp device, locating platform (PositioningPlatform) or magnetic attracting device (MagneticSuctionDevice) etc., and the present invention is not for being defined in above-mentioned enforcement style.
Refer to shown in Fig. 2, described article to be measured have several fillet R and visible planar, and described visible planar comprises side S and bottom surface L, in the present embodiment, effectively can detect several flaws in this several fillet R and visible planar.Described common flaw kind rear further illustrates graphic for cooperation.
Be below be aided with diagram for various different flaw kind to illustrate respectively, shown in the content referring to Fig. 3 A-Fig. 3 P, be respectively by the various common flaw detected in Image detection:
Fig. 3 A shows the situation that metal dimension does not conform to, the flaw produced when being common in milling machine; Fig. 3 B shows the situation of metal variable color; Fig. 3 C shows the off size situation of materials and parts; Fig. 3 D shows the situation of materials and parts surface discolouration; There is the situation of black line in Fig. 3 E display surface; There is the situation of long-pending ink in Fig. 3 F display surface; Fig. 3 G shows the situation of bottom drain material; There is the situation of bright spot in Fig. 3 H display surface; There is the situation of piebald in Fig. 3 I display surface; There is dirty situation in Fig. 3 J display surface; There is the situation of scratch in Fig. 3 K display surface; Fig. 3 L shows the situation that fillet has some setbacks; The situation that Fig. 3 M display surface is got confused; There is the situation of vertical line in Fig. 3 N display surface; There is the situation of knife mark in Fig. 3 O display surface; There is the situation of sanding line in Fig. 3 P display surface.
This article It to be measured is moved to following measuring station and detects respectively by described horn 42 respectively.
First optical detection station (even light+Surface scan video camera):
Seeing also Fig. 4, is the schematic diagram at the first optical detection station of first embodiment of the invention, as shown in the figure:
The first described optical detection station 10 includes the first district A1 to be measured, corresponding to first device of image scanning 11 of this first district A1 to be measured and the first auxiliary lighting apparatus 12 of being arranged between this first device of image scanning 11 and this first district A1 to be measured.This horn 42 moves this article It to be measured to this first district A1 to be measured, and rotates or overturn this article It to be measured detects this article It to be measured one or several this visible planar for this first device of image scanning 11.
This first device of image scanning 11 is preferably Surface scan video camera (Area-scanCamera), such as use photosensitive coupling component (Charge-coupledDevice, or the camera head of CMOS (Complementary Metal Oxide Semiconductor) (ComplementaryMetal-Oxide-Semiconductor, CMOS) CCD).
See also Fig. 3 A to Fig. 3 K, this first auxiliary lighting apparatus 12 provides even light to this first district A1 to be measured.Described even light is a kind of diffused light, and its light path roughly coaxially exports with the machine vision direction of this first device of image scanning 11, and time in polishing to article It to be measured, in the visible planar of its undetected object product It, the brightness of everywhere is evenly distributed.Base this, in in the image that captures relative to arround the larger region of hue, saturation, intensity contrast will easily via image processing program (as binaryzation method) after be identified, the part of such as metal variable color, materials and parts surface discolouration, black line, long-pending ink, bottom drain material, bright spot, piebald, dirty, scratch, all can by identification clearly.In addition because brightness is uniformly distributed in the visible planar of article It to be measured, the border in image also can clearly be represented, the situation in identification metal dimension, materials and parts size also can obtain excellent effect.
In the present embodiment, this first auxiliary lighting apparatus 12 includes provides the luminescence unit array 121 of face light towards first direction D1, the diffuser plate 122(Diffuser be arranged on this first direction D1 of this luminescence unit array 121), the spectroscope 123(DichroicMirror be arranged on this first direction D1 of this diffuser plate 122) and the vaulted lamp 124 that is arranged on this second direction D2 of this spectroscope 123.Described luminescence unit array 121 can be arranged in the form (common is 3 × 3,4 × 4) of N × N, uses and exports one side light.The face light that this luminescence unit array 121 provides is converted to uniform surface light by this diffuser plate 122, this spectroscope 123 corresponds between this first district A1 to be measured and this first device of image scanning 11, in order to this uniform surface light is converted to the second direction D2 parallel with the machine vision direction of this first device of image scanning 11 by this first direction D1, uses and export uniform surface axis light.This vaulted lamp 124 include there is arc-shaped curved surface 126 diffusion portion 125, be arranged in this diffusion portion 125 and correspond to the opening 127 of this spectroscope 123 and one or several be located on this arc-shaped curved surface 126 weeks sides and the inside luminescence unit 128 irradiated towards this arc-shaped curved surface 126 direction.When the light of this luminescence unit 128 is on this arc-shaped curved surface 126, this arc-shaped curved surface 126 diffusion of light therethrough, in the visible planar of this article It to be measured, makes the surface brightness of article It to be measured distribute more evenly aobvious.
Except the above embodiments, the first auxiliary lighting apparatus described in the present invention also can be provides the diffused light source of this even light, vaulted lamp (dome), cold-cathode fluorescence lamp (ColdCathodeFluorescentLamp, CCFL), circline or other similar lighting device, be not limited to the above embodiments in the present invention.
Second optical detection station (parallel surface axis light+Surface scan video camera):
Seeing also Fig. 5, is the schematic diagram at the second optical detection station of first embodiment of the invention, as shown in the figure:
The second described optical detection station 20 includes the second district A2 to be measured, corresponding to second device of image scanning 21 of this second district A2 to be measured and the second auxiliary lighting apparatus 22 of being arranged between this second device of image scanning 21 and this second district A2 to be measured.This horn 42 moves this article It to be measured to this second district A2 to be measured, and rotates or overturn this article It to be measured detects this article It to be measured one or several this visible planar for this second device of image scanning 21.
See Fig. 4 with above-mentioned first optical detection station 10() the first device of image scanning 11, this second device of image scanning 21 is preferably Surface scan video camera (Area-scanCamera).
See also Fig. 3 L to Fig. 3 M, this second auxiliary lighting apparatus 22 provides parallel surface axis light to this second district A2 to be measured.Described parallel surface axis light is directional light, and its light path is parallel with the machine vision direction of this second device of image scanning 21, and along same angle polishing in the visible planar of this article It to be measured.Because directional light all can roughly maintain identical incident angle, the situation of getting confused corresponding to radius area and surface has and excellent detects effect.
In the present embodiment, the spectroscope 223 that this second auxiliary lighting apparatus 22 includes to be provided the single light source 221 of diverging light towards first direction K1, be arranged at the collimation lens 222 on this first direction K1 of this single light source 221 and be arranged on this first direction K1 of this collimation lens 222.The diverging light that this single light source 221 provides is converted to directional light by this collimation lens 222, this spectroscope 223 corresponds between this second district A2 to be measured and this second device of image scanning 21, in order to this directional light is converted to the second direction K2 parallel with the machine vision direction of this second device of image scanning 21 by this first direction K1, uses and export this parallel surface axis light.
3rd optical detection station (side direction line collimated light+line sweep video camera):
Seeing also Fig. 6, is the schematic diagram at the 3rd optical detection station of first embodiment of the invention, as shown in the figure:
The 3rd described optical detection station 30 includes the 3rd district A3 to be measured, line sweep video camera 31(Line-ScanCamera corresponding to the 3rd district A3 to be measured), corresponding to the 3rd auxiliary lighting apparatus 32 of the 3rd A3 side, district to be measured and the portable microscope carrier 33 in order to load this line sweep video camera 31 and the 3rd auxiliary lighting apparatus 32.This horn 42 moves this article It to be measured to the 3rd district A3 to be measured, and rotates or overturn this article It to be measured, detects one or several this visible planar of this article It to be measured for this line sweep video camera 31.This portable microscope carrier 33 include corresponding to the 3rd district A3 to be measured rail mechanism 331 and to be arranged on this rail mechanism 331 and to drive to be displaced into the movable microscope carrier 332 on this rail mechanism 331 by drive unit (not shown).This movable microscope carrier 332 is placed with described line sweep video camera 31 and described 3rd auxiliary lighting apparatus 32, and drive to move towards scanning path W by this drive unit, to take the image of each visible planar of this article It to be measured by this line sweep video camera 31.
Described line sweep video camera 31 includes single sensing unit, takes by the visual feedback on article It surface to be measured to computer for controlling (such as ProgrammableLogicController, PLC), and form a complete image by continuous print.This line sweep video camera 31 is such as using photosensitive coupling component (Charge-coupledDevice, CCD) or the camera head of CMOS (Complementary Metal Oxide Semiconductor) (ComplementaryMetal-Oxide-Semiconductor, CMOS).
See also Fig. 3 N to Fig. 3 P, the 3rd auxiliary lighting apparatus 32 provides side direction line collimated light to the 3rd district A3 to be measured.Described side direction line collimated light is directional light, the visible planar shape of its light path and this article It to be measured has angle, make the out-of-flatness region in image produce corresponding shade, be suitable for test example such as vertical line, knife mark, sanding line etc. and cause the flaw of article It surface irregularity to be measured.
3rd auxiliary lighting apparatus 32 includes to be provided the line array light source 321 of rectangle diverging light and arranges corresponding to this line array light source 321 and this rectangle diverging light be converted to the collimation lens 322 of side direction line collimated light.In preferred embodiment, this line sweep video camera 31 and the 3rd auxiliary lighting apparatus 32 have a suitable angle with the visible planar in the 3rd district A3 to be measured.Through the result of great many of experiments, set a Z-axis Z, the angle between the machine vision direction of this line sweep video camera 31 and this Z-axis Z by the visible planar of this article It to be measured in the 3rd region A3 to be measured
θ 1time between 10 ° to 45 °, the angle between the direction of the side direction line collimated light that the 3rd auxiliary lighting apparatus 32 exports and this Z-axis Z
θ 2time between 10 ° to 45 °, in image, the recall rate of flaw is higher.For increasing the light-inletting quantity of this line sweep video camera 31, the angle between the machine vision direction of this line sweep video camera 31 and this Z-axis Z
θ 1angle between the direction of the side direction line collimated light exported with the 3rd auxiliary lighting apparatus 32 and this Z-axis Z
θ 2should be roughly the same.
Following control program, can by can program logic controller (ProgrammableLogicController in preferred embodiment, PLC) completed, only, the present invention does not also get rid of other such as central processing unit (CentralProcessingUnit, CPU), programmable controller etc. can complete the impartial example of the following stated control flow.In addition, in following disclosed control program, first, second, third optical detection station 10,20,30 is also not used to the order defining detection, only in order to disclose a preferred embodiment of the present invention, order wherein, step be not used to limit claim of the present invention, this first give chat bright.Seeing also Fig. 7 A-Fig. 7 H, is the operation chart of first embodiment of the invention, as shown in the figure:
Time initial, first Multi-shaft mechanical arm 40 moves to feed zone In, the article It to be measured that selection is corresponding, and by the pickup section 41(vacuum absorption device on this horn 42) pick up this article It to be measured, use this article It to be measured is transferred load to the first optical detection station 10(see Fig. 7 A).
Continue, when this article It to be measured is moved to the first district A1 to be measured at this first optical detection station 10 by this Multi-shaft mechanical arm 40, this article It side S to be measured is right against the front of this first device of image scanning 11 by this Multi-shaft mechanical arm 40, and this article It to be measured is rotated via the direction of arrow A, this first device of image scanning 11 is able to each side S of article It to be measured and fillet R capture (see Fig. 7 B) respectively.
After the equal capture of all visible planar of article It side to be measured completes, this Multi-shaft mechanical arm 40 is upwards overturn by this article It to be measured, the bottom surface L of this article It to be measured is made to be right against the front of this first device of image scanning 11, and this article It to be measured mobile this first device of image scanning 11 relative is via the path displacement of S type, makes this first device of image scanning 11 be able to shooting and obtains this each block subregion image of article It bottom surface to be measured.When capture completes, taking advantage of a situation moves to the second optical detection station 20 by this article It to be measured, uses the detection (Fig. 7 C) carrying out second station.
When this article It to be measured moves to this second optical detection station 20, this Multi-shaft mechanical arm 40 makes the bottom surface L of this article It to be measured be right against the front of this second device of image scanning 21, and this article It to be measured mobile this second device of image scanning 21 relative is via the path displacement of S type, makes this second device of image scanning 21 be able to shooting and obtains each block subregion image (Fig. 7 D) of this article It bottom surface L to be measured.
After the equal capture of each block subregion image of this article It bottom surface L to be measured completes, this article It to be measured overturns downwards by this Multi-shaft mechanical arm 40, this article It side S to be measured is right against the front of this second device of image scanning 21, and these article to be measured are rotated via the direction of arrow B, the second device of image scanning 21 is made to be able to distinguish capture to each side S of article It to be measured, and when capture completes, this article It to be measured is moved to the 3rd optical detection station 30, uses the detection (Fig. 7 E) carrying out the 3rd station.
When this article It to be measured moves to the 3rd optical detection station 30, this article It to be measured is moved to the 3rd and treats lateral areas A3 by this Multi-shaft mechanical arm 40, and the side S of this article It to be measured is roughly right against the plane of the extension confluce of this line sweep video camera 31 and the 3rd auxiliary lighting apparatus 32.Continue, drive this movable microscope carrier 332 by this drive unit, this movable microscope carrier 332 is moved along scanning path W, use the image (Fig. 7 F to Fig. 7 H) scanning this article It side S to be measured through this line sweep video camera 31.Continue, this Multi-shaft mechanical arm 40 drives this article It to be measured to rotate in the direction of arrow C, the another side of this article It to be measured is made roughly to be right against the plane of the extension confluce of this line sweep video camera 31 and the 3rd auxiliary lighting apparatus 32, this movable microscope carrier 332 is again driven by this drive unit, this movable microscope carrier 332 is made to repeat to move along this scanning pattern W, this line sweep video camera 31 is made to scan the image of this article It another side to be measured, and repeat above-mentioned step, until four equal captures in face of article It to be measured complete (Fig. 7 H).Only, 3rd optical detection station 30 is except driving the mode of this line sweep video camera 31 movement by movable microscope carrier 332, also this article It to be measured can be driven by this Multi-shaft mechanical arm 40, make this article It to be measured move the silhouette using this article It to be measured of shooting continuously relative to this line sweep video camera 31, described enforcement style should be contained among impartial style of the present invention.
Below be described for the second embodiment of the present invention.The discrepancy of the present embodiment and the first embodiment is the configuration mode of device of image scanning, and remainder is identical, is no longer repeated:
Referring to Fig. 8, is the schematic appearance of second embodiment of the invention, as shown in the figure:
In the second embodiment, described optical detection apparatus 200 includes Multi-shaft mechanical arm 40, portable device of image scanning 60, first optical detection station 80, optical detection station 70, second and the 3rd optical detection station 30.
Wherein, the function at Multi-shaft mechanical arm 40 and the 3rd optical detection station 30 is identical with the first embodiment, repeats no more in this.Described portable device of image scanning 60 includes guide rail 61, is arranged on this guide rail 61 and drives with the mobile carrier 62 be displaced on this guide rail 61 and the Surface scan video camera 63 be arranged on this mobile carrier 62 by drive unit (not shown).What this mobile carrier 62 may correspond to moves to a primary importance and a second place.
See also Fig. 9 A, this first optical detection station 70 include corresponding to this primary importance the first district T1 to be measured and to be arranged between this primary importance and this first district T1 to be measured and to provide even light to first auxiliary lighting apparatus 71 of this first district T1 to be measured.(the first described auxiliary lighting apparatus 71 is roughly the same with the inner structure of the first auxiliary lighting apparatus 12 in the first embodiment, repeats no more in this).
This second optical detection station 80 include corresponding to this second place the second district T2 to be measured and to be arranged between this second place and this second district T2 to be measured and to provide parallel surface axis light to second auxiliary lighting apparatus 81 of this second district T2 to be measured.(the second described auxiliary lighting apparatus 81 is roughly the same with the inner structure of the second auxiliary lighting apparatus 22 in the first embodiment, repeats no more in this).
Base this, when this Surface scan video camera 63 moves to this primary importance, can pass through the first auxiliary lighting apparatus 71 to article It to be measured polishing, use the image of shooting first group article It to be measured; When this Surface scan video camera 63 moves to the second place, can pass through the second auxiliary lighting apparatus 81 to article It to be measured polishing, use the image of shooting second group article It to be measured, this Surface scan video camera 63 can simultaneously by the first optical detection station 70 and the second optical detection station 80 be shared.
Following control program, can by can program logic controller (ProgrammableLogicController in preferred embodiment, PLC) completed, only, the present invention does not also get rid of other such as central processing unit (CentralProcessingUnit, CPU), programmable controller etc. can complete the impartial form of the following stated control flow.Having the control program about second embodiment of the invention, see also Fig. 9 A-Fig. 9 H, is the operation chart of second embodiment of the invention, as shown in the figure:
Time initial, first Multi-shaft mechanical arm 40 moves to feed zone In, the article It to be measured that selection is corresponding, and by the pickup section 41(vacuum absorption device on this horn 42) pick up this article It to be measured, use and this article It to be measured is transferred load to first optical detection station 70(Fig. 9 A).
Continue, in this program, this Surface scan video camera 63 moves to this primary importance by this mobile carrier 62, the camera lens of this Surface scan video camera 63 is made to be aligned with spectroscope on this first auxiliary lighting apparatus 71, when this article It to be measured is moved to the first district T1 to be measured at this first optical detection station 70 by this Multi-shaft mechanical arm 40, this article It side S to be measured is right against the front of the Surface scan video camera 63 of this primary importance by this Multi-shaft mechanical arm 40, and this article It to be measured is rotated via the direction of arrow A, this Surface scan video camera 63 is able to each side S of article It to be measured and fillet R capture (Fig. 9 B) respectively.
After the equal capture of image of side S and fillet R completes, this article It to be measured upwards overturns by this Multi-shaft mechanical arm 40, the bottom surface L of this article It to be measured is made to be right against the front of this Surface scan video camera 63, and this article It to be measured mobile this Surface scan video camera 63 relative is via the path displacement of S type, make this Surface scan video camera 63 be able to shooting and obtain this each block subregion image of article It bottom surface L to be measured, and when capture completes, this article It to be measured is moved to the second optical detection station 80, uses the detection (Fig. 9 C) carrying out second station.
While this article It to be measured moves to this second optical detection station 80, this Surface scan video camera 63 moves to this second place by mobile carrier 62, makes the camera lens of this Surface scan video camera 63 be right against spectroscope on this second auxiliary lighting apparatus 81.Continue, this Multi-shaft mechanical arm 40 makes the bottom surface L of this article It to be measured be right against the front of this Surface scan video camera 63, and this article It to be measured mobile this Surface scan video camera 63 relative is via the path displacement of S type, makes this Surface scan video camera 63 be able to shooting and obtains each block subregion image (Fig. 9 D) of this article It bottom surface L to be measured.
After the equal capture of each block subregion image of bottom surface L completes, this article It to be measured overturns downwards by this Multi-shaft mechanical arm 40, this article It side S to be measured is right against the front of this Surface scan video camera 63, and this article It to be measured is rotated via the direction of arrow B, Surface scan video camera 63 is made to be able to distinguish capture to each side S of article It to be measured and the visible planar of fillet R, and when capture completes, this article It to be measured is moved to the 3rd optical detection station 30, use the detection carrying out the 3rd station, simultaneously, this Surface scan video camera 63 by mobile carrier 62 involution to primary importance (Fig. 9 E).
When this article It to be measured moves to the 3rd optical detection station 30, this article It to be measured is moved to the 3rd district T3 to be measured by this Multi-shaft mechanical arm 40, and the side S of this article It to be measured is roughly right against the plane of the extension confluce of this line sweep video camera 31 and the 3rd auxiliary lighting apparatus 32.Continue and drive this movable microscope carrier 332 by this drive unit, this movable microscope carrier 332 is moved along scanning path W, to scan the image (Fig. 9 F to Fig. 9 H) of this article It side S to be measured through this line sweep video camera 31.Continue, this Multi-shaft mechanical arm 40 drives this article It to be measured to rotate in the direction of arrow C, the another side of this article It to be measured is made roughly to be right against the plane of the extension confluce of this line sweep video camera 31 and the 3rd auxiliary lighting apparatus 32, this movable microscope carrier 332 is again driven by this drive unit, this movable microscope carrier 332 is made to repeat to move along this scanning pattern W, this line sweep video camera 31 is made to scan the image of this article It another side to be measured, and repeat above-mentioned step, until four equal captures in face of article It to be measured complete (Fig. 9 H).Only, 3rd optical detection station 30 is except driving the mode of this line sweep video camera 31 movement by movable microscope carrier 332, also this article It to be measured can be driven by this Multi-shaft mechanical arm 40, make this article It to be measured move the silhouette using this article It to be measured of shooting continuously relative to this line sweep video camera 31, described enforcement style should be contained among impartial style of the present invention.
In sum, optical detection apparatus of the present invention can detect the difficulty inspection flaw that article to be measured likely occur, effectively promotes the recall rate of flaw product.Surface scan video camera of the present invention can be displaced between the first optical detection station and the second optical detection station by mobile carrier, makes this first optical detection station and this second optical detection station share a smear camera, uses the cost of reduction equipment.
The present invention above-mentioned preferred embodiment of mat is described in more detail, only the present invention is not limited to above-mentioned illustrated embodiment, all within the scope of disclosed technological thought, make various changes these structures and modify, these changes and modification still belong to the scope of this creation.
Claims (20)
1. the optical detection apparatus that detects of multiple flaw, for carrying out the detection of multiaspect to article to be measured, it is characterized in that, this optical detection apparatus comprises:
Multi-shaft mechanical arm, include the pickup section of fixing these article to be measured and be connected to this pickup section to drive the horn of this article movement to be measured, this horn drives these article to be measured to rotate along the direction of various dimensions, and these article to be measured mobile are to detect;
First optical detection station, include the first district to be measured, corresponding to this first district to be measured the first device of image scanning and to be arranged between this first device of image scanning and this first district to be measured and to provide even light to first auxiliary lighting apparatus in this first district to be measured, this horn moves these article to be measured to this first district to be measured, and rotates or overturn these article to be measured detect these article to be measured or several visible planar for this first device of image scanning;
Second optical detection station, include the second district to be measured, corresponding to this second district to be measured the second device of image scanning and to be arranged between this second device of image scanning and this second district to be measured and to provide parallel surface axis light to second auxiliary lighting apparatus in this second district to be measured, this horn moves these article to be measured to this second district to be measured, and rotates or overturn these article to be measured detect these article to be measured one or several this visible planar for this second device of image scanning; And
3rd optical detection station, include the 3rd district to be measured, corresponding to the 3rd district to be measured line sweep video camera and correspond to the 3rd side, district to be measured provide side direction line collimated light to the 3rd auxiliary lighting apparatus in the 3rd district to be measured, this horn moves these article to be measured to the 3rd district to be measured, and rotates or overturn these article to be measured detect these article to be measured one or several this visible planar for this line sweep video camera.
2. the optical detection apparatus that detects of multiple flaw as claimed in claim 1, it is characterized in that, described first auxiliary lighting apparatus includes the luminescence unit array providing face light towards a first direction, be arranged at the diffuser plate on this first direction of this luminescence unit array, and one is arranged at spectroscope on this first direction of this diffuser plate, the face light that this luminescence unit array provides is converted to uniform surface light by this diffuser plate, this spectroscope corresponds between this first district to be measured and this first device of image scanning, in order to this uniform surface light is converted to the second direction parallel with the machine vision direction of this first device of image scanning by this first direction.
3. the optical detection apparatus that detects of multiple flaw as claimed in claim 2, it is characterized in that, described first auxiliary lighting apparatus includes the vaulted lamp be arranged in this this second direction spectroscopical further, this vaulted lamp include there is arc-shaped curved surface diffusion portion, be arranged in this diffusion portion and correspond to this spectroscopical opening and one or several and be located on this arc-shaped curved surface week side the inside luminescence unit irradiated towards this arc-shaped curved surface direction.
4. the optical detection apparatus that detects of multiple flaw as claimed in claim 1, it is characterized in that, described first auxiliary lighting apparatus is for providing the diffused light source of this even light, vaulted lamp, cold-cathode fluorescence lamp or circline.
5. the optical detection apparatus that detects of multiple flaw as claimed in claim 1, it is characterized in that, described second auxiliary lighting apparatus includes the single light source providing diverging light towards a first direction, be arranged at the collimation lens on this first direction of this single light source, and the spectroscope be arranged on this first direction of this collimation lens, the diverging light that this single light source provides is converted to directional light by this collimation lens, this spectroscope corresponds between this second district to be measured and this second device of image scanning, in order to this directional light is converted to the second direction parallel with the machine vision direction of this second device of image scanning by this first direction.
6. the optical detection apparatus that detects of multiple flaw as claimed in claim 1, it is characterized in that, described 3rd auxiliary lighting apparatus includes to be provided the line array light source of rectangle diverging light and arranges corresponding to this line array light source and this rectangle diverging light be converted to the collimation lens of this side direction line collimated light.
7. the optical detection apparatus that detects of multiple flaw as claimed in claim 1, it is characterized in that, the visible planar of these article to be measured in described 3rd district to be measured sets a Z-axis, angle between the machine vision direction of this line sweep video camera and this Z-axis is between 10 ° to 45 °, and the angle between the direction of this side direction line collimated light that the 3rd auxiliary lighting apparatus exports and this Z-axis is between 10 ° to 45 °.
8. the optical detection apparatus that detects of multiple flaw as claimed in claim 1, it is characterized in that, the visible planar of these article to be measured in described 3rd district to be measured sets a Z-axis, and the machine vision direction of this line sweep video camera is identical with the angle between the direction of this side direction line collimated light that the angle between this Z-axis exports with the 3rd auxiliary lighting apparatus and this Z-axis.
9. the optical detection apparatus that detects of multiple flaw as claimed in claim 1, it is characterized in that, described 3rd optical detection station includes portable microscope carrier, this portable microscope carrier includes the rail mechanism corresponding to the 3rd district to be measured, and to be arranged on this rail mechanism and to drive to be displaced into the movable microscope carrier on this rail mechanism by drive unit, this movable microscope carrier is placed with described line sweep video camera and described 3rd auxiliary lighting apparatus, and drive by this drive unit to move towards scanning path, to take the image of these article to be measured by this line sweep video camera.
10. the optical detection apparatus that detects of multiple flaw as claimed in any one of claims 1-9 wherein, it is characterized in that, described first device of image scanning is Surface scan video camera.
The optical detection apparatus that 11. multiple flaws as claimed in any one of claims 1-9 wherein detect, it is characterized in that, described second device of image scanning is Surface scan video camera.
The optical detection apparatus that 12. 1 kinds of multiple flaws detect, for carrying out the detection of multiaspect to article to be measured, it is characterized in that, this optical detection apparatus comprises:
Multi-shaft mechanical arm, include the pickup section of fixing these article to be measured and be connected to this pickup section to drive the horn of this article movement to be measured, this horn drives these article to be measured to rotate along the direction of various dimensions, and these article to be measured mobile are to detect:
Portable device of image scanning, include guide rail, be arranged on this guide rail and drive with the mobile carrier be displaced on this guide rail and the Surface scan video camera be arranged on this mobile carrier by drive unit, this mobile carrier moves to a primary importance and a second place accordingly;
First optical detection station, include corresponding to this primary importance the first district to be measured and to be arranged between this primary importance and this first district to be measured and to provide even light to first auxiliary lighting apparatus in this first district to be measured, this horn moves these article to be measured to this first district to be measured, and rotates or overturn these article to be measured detect these article to be measured several visible planar for this Surface scan video camera;
Second optical detection station, include corresponding to this second place the second district to be measured and to be arranged between this second place and this second district to be measured and to provide parallel surface axis light to second auxiliary lighting apparatus in this second district to be measured, this horn moves these article to be measured to this second district to be measured, and rotates or overturn these article to be measured detect these article to be measured several visible planar for this Surface scan video camera; And
3rd optical detection station, include the 3rd district to be measured, corresponding to the 3rd district to be measured line sweep video camera and correspond to the 3rd side, district to be measured provide side direction line collimated light to the 3rd auxiliary lighting apparatus in the 3rd district to be measured, this horn moves these article to be measured to the 3rd district to be measured, and rotates or overturn these article to be measured detect these article to be measured several visible planar for this line sweep video camera.
The optical detection apparatus that 13. multiple flaws as claimed in claim 12 detect, it is characterized in that, described first auxiliary lighting apparatus includes the luminescence unit array providing face light towards a first direction, be arranged at the diffuser plate on this first direction of this luminescence unit array, and the spectroscope be arranged on this first direction of this diffuser plate, the face light that this luminescence unit array provides is converted to uniform surface light by this diffuser plate, this spectroscope corresponds between this first district to be measured and this Surface scan video camera, in order to this uniform surface light is converted to the second direction parallel with the machine vision direction of this Surface scan video camera by this first direction.
The optical detection apparatus that 14. multiple flaws as claimed in claim 13 detect, it is characterized in that, described first auxiliary lighting apparatus includes the vaulted lamp be arranged in this this second direction spectroscopical further, this vaulted lamp include there is arc-shaped curved surface diffusion portion, be arranged in this diffusion portion and correspond to this spectroscopical opening and one or several and be located on this arc-shaped curved surface week side the inside luminescence unit irradiated towards this arc-shaped curved surface direction.
The optical detection apparatus that 15. multiple flaws as claimed in claim 12 detect, is characterized in that, described first auxiliary lighting apparatus is for providing the diffused light source of this even light, vaulted lamp, cold-cathode fluorescence lamp or circline.
The optical detection apparatus that 16. multiple flaws as claimed in claim 12 detect, it is characterized in that, described second auxiliary lighting apparatus includes the single light source providing diverging light towards a first direction, be arranged at the collimation lens on this first direction of this single light source, and the spectroscope be arranged on this first direction of this collimation lens, the diverging light that this single light source provides is converted to directional light by this collimation lens, this spectroscope corresponds between this second district to be measured and this Surface scan video camera, in order to this directional light is converted to the second direction parallel with the machine vision direction of this Surface scan video camera by this first direction.
The optical detection apparatus that 17. multiple flaws as claimed in claim 12 detect, it is characterized in that, described 3rd auxiliary lighting apparatus includes to be provided the line array light source of rectangle diverging light and arranges corresponding to this line array light source and this rectangle diverging light be converted to the collimation lens of side direction line collimated light.
The optical detection apparatus that 18. multiple flaws as claimed in claim 12 detect, it is characterized in that, the visible planar of these article to be measured in described 3rd district to be measured sets a Z-axis, angle between the machine vision direction of this line sweep video camera and this Z-axis is between 10 ° to 45 °, and the angle between the direction of this side direction line collimated light that the 3rd auxiliary lighting apparatus exports and this Z-axis is between 10 ° to 45 °.
The optical detection apparatus that 19. multiple flaws as claimed in claim 12 detect, it is characterized in that, the visible planar of these article to be measured in described 3rd district to be measured sets a Z-axis, and the machine vision direction of this line sweep video camera is identical with the angle between the direction of this side direction line collimated light that the angle between this Z-axis exports with the 3rd auxiliary lighting apparatus and this Z-axis.
The optical detection apparatus that 20. multiple flaws as claimed in claim 12 detect, it is characterized in that, described 3rd optical detection station includes portable microscope carrier, this portable microscope carrier includes the rail mechanism corresponding to the 3rd district to be measured, and to be arranged on this rail mechanism and to drive to be displaced into the movable microscope carrier on this rail mechanism by drive unit, this movable microscope carrier is placed with described line sweep video camera and described 3rd auxiliary lighting apparatus, and drive by this drive unit to move towards scanning path, to take the image of these article to be measured by this line sweep video camera.
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| TW103130740 | 2014-09-05 | ||
| TW103130740A TWI524064B (en) | 2014-09-05 | 2014-09-05 | An optical inspection apparatus for multi-defect detection |
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| CN105424717A true CN105424717A (en) | 2016-03-23 |
| CN105424717B CN105424717B (en) | 2017-12-15 |
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| CN107782735A (en) * | 2017-11-14 | 2018-03-09 | 伟创力电子技术(苏州)有限公司 | A kind of detection machine for being used to detect product appearance |
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| CN109411396A (en) * | 2018-11-29 | 2019-03-01 | 天津中环领先材料技术有限公司 | A kind of six-joint robot auxiliary visual inspection silicon chip devices and aided detection method |
| CN110596143A (en) * | 2019-10-30 | 2019-12-20 | 东莞市德瑞精密设备有限公司 | Square aluminum shell battery appearance detection device and method |
| CN110596143B (en) * | 2019-10-30 | 2023-04-25 | 东莞市德瑞精密设备有限公司 | Square aluminum shell battery appearance detection device and method thereof |
| CN112051273A (en) * | 2020-07-31 | 2020-12-08 | 中国科学院微电子研究所 | Device and method for detecting and cleaning micro-dust on glass surface and film surface of photomask |
| CN114235684A (en) * | 2020-09-09 | 2022-03-25 | 旺矽科技股份有限公司 | Macroscopic and microscopic detection equipment and detection method |
| CN114859067A (en) * | 2022-04-26 | 2022-08-05 | 厦门微亚智能科技有限公司 | Membrane defect detection equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105424717B (en) | 2017-12-15 |
| TWI524064B (en) | 2016-03-01 |
| TW201610417A (en) | 2016-03-16 |
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