CN105976888A - X-ray irradiation method for ionization irradiation of components - Google Patents
X-ray irradiation method for ionization irradiation of components Download PDFInfo
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- CN105976888A CN105976888A CN201610516217.7A CN201610516217A CN105976888A CN 105976888 A CN105976888 A CN 105976888A CN 201610516217 A CN201610516217 A CN 201610516217A CN 105976888 A CN105976888 A CN 105976888A
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- Prior art keywords
- irradiation
- ray tube
- ray
- platform
- bundle plate
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Classifications
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/10—Scattering devices; Absorbing devices; Ionising radiation filters
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/04—Irradiation devices with beam-forming means
Abstract
The invention relates to an X-ray irradiation method for ionization irradiation of components. The method relates to an irradiation device composed of an X-ray tube, a collimator, a beam limiting plate, a low-energy scattering filter, an electric three-dimensional platform, an irradiation platform, a laser indicator and a water circulating inlet/outlet; and the method realizes continuous adjustment of energy and dose of X-rays and continuous adjustment of irradiation beam spots, can eliminate the influence of low-energy scattering on the irradiation result, and provides a relatively ideal condition for ionization irradiation of components. The method provides a convenient, fast and low-cost ionization irradiation condition for ionization total dose irradiation effect research and test evaluation of components, and is significant for promoting the basic supporting capability of radiation reinforcement of electronic components.
Description
Technical field
The invention belongs to nuclear electronics and Detection Techniques field, relate to a kind of x-ray irradiation side for components and parts ionizing radiation
Method, is mainly used in irradiation test and the test of the ionization total-dose radiation effect of electronic devices and components.
Background technology
Tatal ionizing dose effects is the CRE that radiation environment acts on that electronic devices and components produce, and can cause components and parts forever
Damage, is different from single particle effect for a long time, it is impossible to eliminated by measures such as power-off, system reset, backups, therefore ionization total-dose
Effect is always the emphasis of electronic devices and components radiation hardening.
Being proved by substantial amounts of Theoretical Calculation and scientific practice in the world, 60Co-γ-source, x-ray source are the research total agent of components and parts
The radiation source that graded effect is ideal.60Co-γ-source is the irradiation devices that current ionizing radiation is commonly used, the U.S., Europe,
China has all formulated relevant irradiation test standard.But 60Co-γ-source is difficult to protection as isotopic source, its device and relevant
The construction cost of infrastructure is high, and the requirement to environment, safety measure is high.Owing to 60Co-γ-source exists as isotopic source
Send high-energy ray to all directions incessantly, when carrying out the test of components and parts ionizing radiation, generally use frequently lifting source with from
The method of line remote-site testing, the annealing effect of device irradiation damage may bring large effect to test result in the process.
And the ray energy of 60Co-γ-source is fixed value, the region limiting irradiation is carried out alpha ray shield mainly by materials such as lead bricks,
The regulation of close rate is mainly by the regulation of components and parts sample Yu the spacing in source, owing to radioactive source is in constantly decline, at different distance
Close rate be also required to repeatedly demarcate.
For x-ray source irradiation, the U.S. has formulated standard ASTM F1467-2011: " semiconductor device and integrated circuit ionization
The standard guide for use of radiation effect X ray test instrument ", to the energy of irradiation ray, close rate, all make respective specified;
And while the X-ray of x-ray irradiation source output carries out irradiation to tested components and parts sample, also can be produced by surrounding structure
Raw a large amount of Low energy scattering.These scatterings will cause the uncertainty of radiation dose measurement, irradiation and the ginseng to tested components and parts sample
Number test introduces deviation.Protect accordingly, it would be desirable to the scattering produced during irradiation is adopted an effective measure.But, go back nothing at present
Method directly buys the standard X-ray radiation source meeting above-mentioned requirements.
Summary of the invention
Present invention aim at, it is provided that a kind of x-ray irradiation method for components and parts ionizing radiation, the method relates to irradiation dress
Put be by X-ray tube, collimator, limit bundle plate, Low energy scattering filter disc, electric three-dimensional platform, irradiation platform, laser designator,
Water is cycling in and out mouth composition, the method achieves X-ray energy, close rate continuously adjustabe, irradiation beam spot continuously adjustabe, and
The Low energy scattering impact on irradiation results can be removed, provide comparatively ideal condition for components and parts ionizing radiation.The method will be for unit
Device ionization total-dose irradiation effects and test assessment provide convenient and swift, the ionizing radiation condition of low cost, to promoting electricity
The base support ability of sub-components and parts radiation hardening is significant.
A kind of x-ray irradiation method for components and parts ionizing radiation of the present invention, it is by X that the method relates to irradiation devices
Light pipe, collimator, limit bundle plate, Low energy scattering filter disc, electric three-dimensional platform, irradiation platform, laser designator, water circulate into
Outlet composition, at the upper fixing electric three-dimensional platform (5) of irradiation platform (6), fixes X on the top of electric three-dimensional platform (5)
Light pipe (1), collimator (2) one end is connected with X-ray tube (1) by screw thread, and the delivery outlet of collimator (2) is circular,
And have hickey, and connecting limit bundle plate (3) by hickey, limit bundle plate (3) is patty, in the middle of limit bundle plate (3)
Having a circular clear opening, Low energy scattering filter disc (4) is arranged on limit bundle plate (3) and X-ray tube (1) goes out to restraint between mouth, at X
Light pipe (1) one end is provided with water and is cycling in and out mouth (8), fixes X-ray tube control respectively in the side of electric three-dimensional platform (5)
Device (10) and high pressure programmable power supply (9), high pressure programmable power supply (9) input is controlled by X-ray tube controller (10) by cable
System instruction, high pressure programmable power supply (9) is that X-ray tube (1) provides power supply by high tension cable, and irradiation platform (6) is positioned at limit
Bundle plate (3) lower section, is accurately positioned by laser designator (7), and concrete operations follow these steps to carry out:
A, according to irradiation beam spot area, determine the aperture of limit bundle plate (3), and will determine that limit bundle plate (3) is arranged on collimator
(2) on;
B, determine Low energy scattering filter disc (4) thickness according to X-ray energy, and Low energy scattering filter disc (4) is arranged on limit bundle
Plate (3) and light pipe go out to restraint between mouth;
C, regulation electric three-dimensional platform (5) vertical height, control the height of X-ray tube (1), it is achieved predetermined beam spot area;
D, open laser designator (7), and regulate electric three-dimensional platform (5) horizontal level, be accurately positioned by instruction point and treat
Test sample product;
E, X-ray energy, line, exposure time are set by X-ray tube controller (10), components and parts are carried out irradiation.
A kind of x-ray irradiation method for components and parts ionizing radiation of the present invention, the method relates to the function of each several part
It is:
X-ray tube (1), by voltage, the regulation of electric current and control, radiates certain energy, the X-ray of certain line.
Collimator (2) for limiting the radiation direction of X-ray, and provide by irradiation components and parts location be directed at.
Limit bundle plate (3) is for limiting the rotation angle of X-ray, and controls the size of the irradiation beam spot to sample.
Low energy scattering filter disc (4) is for filtering the Low energy scattering that irradiation produces.
Electric three-dimensional platform (5) is regulated with the spacing by irradiation components and parts for X-ray tube.
Irradiation platform (6) is for placing tested components and parts sample.
Laser designator (7) is for indicating the position of x-ray irradiation.
Water is cycling in and out mouth (8) for carrying out cooling down the circulation of water.
High pressure programmable power supply (9) is for providing power supply for X-ray tube (1).
X-ray tube controller (10) is used for controlling high tension generator (9) and X-ray tube (1).
The lead machining that collimator (2) main body 12mm is thick forms semicircle, lead structural outer surface one layer of 2mm of parcel
Thick steel plate, is used for supporting and connecting, and lead inner surface posts one layer of cushion, can prevent plowing from light pipe surface, and play regulation
Installing the effect of tightness, collimator (2) is fixed by screws in one end of X-ray tube (1), collimator (2) defeated
Outlet is circle, and has hickey, can be installed by hickey, change limit bundle plate (3);
Collimator (2) two vertical axials of outlet separately design two circular cavities structure, have been used for laser designator (7) is installed,
When laser designator (7) is opened, two cross lines can be penetrated for indicating X-ray to penetrate from collimator (2) delivery outlet
The center of hot spot, the intersection point of reticule is the geometric center of X-ray irradiation zone, arranges in one end of X-ray tube (1)
The water having X-ray tube is cycling in and out mouth (8), the temperature of X-ray tube is controlled within operating temperature by water cooling plant;
Limit bundle plate (3) is made up of the lead that 10mm is thick, is shaped as cake, and there are a circular clear opening in central authorities, cake periphery be with
The screw thread that collimator (2) is connected, the X that its thickness be enough to block completely, through calculating, the highest energy that X-ray tube can radiate penetrates
Line.Limit bundle plate (3) is installed on collimator delivery outlet, and the X-ray that X-ray tube (1) radiates exports via collimator (2)
After mouth and limit bundle plate (3), the only ray in clear opening region can pass through, and the ray in remaining region is all hidden by limit bundle plate (3)
Gear.According to the beam spot size requirements on irradiation to components and parts sample, design limit bundle plate (3) from little to different clear opening aperture;
Low energy scattering filter disc (4) is made of aluminum, for the Low energy scattering composition produced under different-energy x-ray irradiation, design
The Low energy scattering filter disc (4) of a series of different-thickness, Low energy scattering filter disc (4) is arranged on limit bundle plate (3) and X-ray tube (1)
Go out to restraint between mouth;
X-ray tube (1), collimator (2), limit bundle plate (3) are arranged on electric three-dimensional by two dimension (around) adjustable platform
On platform (5), by the regulation of electric three-dimensional platform (5), it is accurately controlled limit bundle plate (3) to tested components and parts sample
Between distance.
A kind of x-ray irradiation method for components and parts ionizing radiation of the present invention, compared with the prior art the method has
Following innovative point:
1. can realize continuously adjusting of close rate in irradiation process;
2. achieve accurately alignment and the continuously adjustabe of beam spot of tested components and parts sample, make irradiation to be accurately positioned, and can be real
The local irradiation of existing tested components and parts sample;
3. the X-ray for different-energy will produce the Low energy scattering of different-energy, uses the aluminum scattering filter disc of different-thickness,
Can effectively eliminate the impact that Low energy scattering brings.
A kind of x-ray irradiation method for components and parts ionizing radiation of the present invention, compared with the prior art the method has
Following remarkable advantage:
1. the application of these irradiation devices and method is compared to 60Co-γ-source irradiation test, it is easy to protection, convenient to operation,
Experimentation cost can be greatly reduced, significantly improve test efficiency.
2. it is easy to carry out the parameter real-time testing of tested components and parts sample, on-line monitoring, off-line remote-site testing can be eliminated to test
The impact that result is brought.
3. compared with 60Co-γ-source irradiation, it is more convenient for being combined with other device, test equipment, builds the test system of complexity,
To meet the test of various components and parts population parameter, its scope of application and extensibility are strong.
Accompanying drawing explanation
Fig. 1 is the block diagram of X-ray wafer irradiation of the present invention test equipment;
Fig. 2 is collimator design plane graph of the present invention;
Fig. 3 is collimator design schematic three dimensional views of the present invention;
Fig. 4 is collimator fundamental diagram of the present invention;
Fig. 5 is ionizing radiation test method flow chart of the present invention;
Fig. 6 is the embodiment schematic diagram of X-ray wafer irradiation of the present invention test equipment.
Detailed description of the invention
Below in conjunction with embodiment, the invention will be further described.
Embodiment
Select the X-ray tube 1 of high-power water-cooling formula 160kV, match 165kV high pressure programmable power supply 9, in conjunction with X-ray tube controller
10 constitute x ray generator, as shown in Figure 6, the tube voltage continuously adjustabe of X-ray tube 1, and the highest 160kV, on a 70kV left side
Right tube current is maximum, can reach more than 85mA, and now radiation dose rate is maximum, for 300rad/s;Select the repetition of customization
Positioning precision is the electric three-dimensional platform 5 of 0.1mm, is arranged on crane by three-dimensional adjustable platform 5 by X-ray tube 1, rises
Distance irradiation platform 600mm at the range of fall frame;The semicircle collimator 2 of design is fixed on X-ray tube 1 emergent ray
One end, a diameter of 35.3mm of collimator 2 delivery outlet, design clear opening aperture from 1mm to 35mm a series of limit bundle plates 3,
The a series of aluminums scattering filter disc 4 different with 0.05mm to 1mm thickness, irradiation platform 6 selects semi-automatic probe station, spoke
Product are fixed on irradiation platform 6 in the same old way;
Irradiation platform 6 is fixed electric three-dimensional platform 5, fixes X-ray tube 1, collimator on the top of electric three-dimensional platform 5
2 one end are connected with X-ray tube 1 by screw thread, and the delivery outlet of collimator 2 is circular, and has hickey, passes through hickey
Connecting limit bundle plate 3, limit bundle plate 3 is patty, has a circular clear opening in the middle of limit bundle plate 3, and Low energy scattering filter disc 4 is installed
Go out to restraint between mouth at limit bundle plate 3 and X-ray tube 1, X-ray tube 1 one end is provided with water and is cycling in and out mouth 8, put down at electric three-dimensional
The side of platform 5 fixes X-ray tube controller 10 and high pressure programmable power supply 9 respectively, and X-ray tube controller 10 passes through cable to high pressure
Programmable power supply 9 inputs control instruction, and high pressure programmable power supply 9 provides power supply, irradiation platform 6 by high tension cable for X-ray tube 1
Being positioned at below limit bundle plate 3, be accurately positioned by laser designator 7, concrete operations follow these steps to carry out:
A, predose, according to irradiation beam spot area requirements, select to determine the aperture of limit bundle plate 3, and will determine that limit bundle plate 3 is pacified
It is contained on collimator 2;
B, determine Low energy scattering filter disc 4 thickness according to X-ray energy, and Low energy scattering filter disc 4 is arranged on limit bundle plate 3 with
Light pipe goes out to restraint between mouth;
C, then send instruction regulation electric three-dimensional platform 5 vertical height, control X-ray tube 1 height, it is achieved predetermined bundle
Speckle area;
D, the laser designator 7 opened on collimator 2, the position demarcated according to laser designator 7, regulation electric three-dimensional is put down
Platform 5 horizontal level, is accurately positioned testing sample by instruction point so that it is be in immediately below X-ray tube 1;
E, regulation by X-ray tube 1 tube voltage, arrange ray energy between 8keV-20keV, then by X-ray tube 1
The regulation of tube current, makes radiation dose rate be in 0.5-100rad/s, after above step completes, can start components and parts
Irradiation.
Claims (1)
- null1. the x-ray irradiation method for components and parts ionizing radiation,It is characterized in that the method relates to irradiation devices is by X-ray tube、Collimator、Limit bundle plate、Low energy scattering filter disc、Electric three-dimensional platform、Irradiation platform、Laser designator、Water is cycling in and out mouth composition,At the upper fixing electric three-dimensional platform (5) of irradiation platform (6),X-ray tube (1) is fixed on the top of electric three-dimensional platform (5),Collimator (2) one end is connected with X-ray tube (1) by screw thread,The delivery outlet of collimator (2) is circular,And have hickey,Limit bundle plate (3) is connected by hickey,Limit bundle plate (3) is patty,A circular clear opening is had in the middle of limit bundle plate (3),Low energy scattering filter disc (4) is arranged on limit bundle plate (3) and X-ray tube (1) goes out to restraint between mouth,X-ray tube (1) one end is provided with water and is cycling in and out mouth (8),X-ray tube controller (10) and high pressure programmable power supply (9) is fixed respectively in the side of electric three-dimensional platform (5),X-ray tube controller (10) inputs control instruction by cable to high pressure programmable power supply (9),High pressure programmable power supply (9) is that X-ray tube (1) provides power supply by high tension cable,Irradiation platform (6) is positioned at limit bundle plate (3) lower section,It is accurately positioned by laser designator (7),Concrete operations follow these steps to carry out:A, according to irradiation beam spot area, determine the aperture of limit bundle plate (3), and will determine that limit bundle plate (3) is arranged on collimator (2);B, determine Low energy scattering filter disc (4) thickness according to X-ray energy, and Low energy scattering filter disc (4) is arranged on limit bundle plate (3) and light pipe goes out to restraint between mouth;C, regulation electric three-dimensional platform (5) vertical height, control the height of X-ray tube (1), it is achieved predetermined beam spot area;D, open laser designator (7), and regulate electric three-dimensional platform (5) horizontal level, be accurately positioned testing sample by instruction point;E, X-ray energy, line, exposure time are set by X-ray tube controller (10), components and parts are carried out irradiation.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109745061A (en) * | 2019-01-28 | 2019-05-14 | 深圳市纳诺艾医疗科技有限公司 | A kind of image documentation equipment with light beam limiting device out |
CN109786193A (en) * | 2018-12-29 | 2019-05-21 | 同方威视技术股份有限公司 | A kind of x-ray source |
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