CN1324334C - Motion platform mechanism suitable for optical waveguide automatic-packaging robot system - Google Patents
Motion platform mechanism suitable for optical waveguide automatic-packaging robot system Download PDFInfo
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- CN1324334C CN1324334C CNB2005101275074A CN200510127507A CN1324334C CN 1324334 C CN1324334 C CN 1324334C CN B2005101275074 A CNB2005101275074 A CN B2005101275074A CN 200510127507 A CN200510127507 A CN 200510127507A CN 1324334 C CN1324334 C CN 1324334C
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Abstract
The present invention discloses a motion platform mechanism which is suitable for an optical waveguide automatic-packaging robot system, which is composed of a macromotion platform mechanism, a micromotion circular disc, a micromotion arm, six piezoelectric ceramics and three motors, wherein the micromotion circular disc is provided with the three piezoelectric ceramics, and the micromotion arm is provided with the three residual piezoelectric ceramics. The macromotion platform mechanism is provided with the three motors, the micromotion circular disc is arranged on a motion platform of a Z shaft of the macromotion platform mechanism by a counter bore, and a wedge pin of the micromotion circular disc is arranged in a pin hole of the micromotion arm. The motion platform mechanism of the present invention adopts macro and micro mechanism form combined with one macromotion platform and two micromotion platforms, and the present invention solves the contradiction between high precision and long travel. The three-freedom macromotion platform adopts the structure design of modularization so as to reduce the processing cost, and the reconstruction of a system is favorably carried out. A six-degree-of-freedom micromotion platform composed of the micromotion circular disc and the micromotion arm uses a flexible hinge to replace the traditional moving pair, a parallel mechanism form is adopted to realize the purpose of submicron order positioning accuracy.
Description
Technical field
The present invention relates to a kind of motion platform mechanism, more particularly, be meant a kind of motion platform mechanism that is applicable to optical waveguide automatic-packaging robot system.
Background technology
The arriving in communication epoch makes the demand of optoelectronic device increase greatly, but the bigger encapsulation technology of difficulty becomes the bottleneck that limits its application.The encapsulation of optical waveguide relates to the sextuple fine registration of fiber array and waveguide device, and difficulty is bigger.Because the logical optical channel in the waveguide device has only several microns sizes, the coupling packaging robot system that therefore is used for this type of device butt joint must have that other bearing accuracy of submicron order just can realize accurately, reliable docking operation.
At present, the platform mechanism of most package system adopts leading screw (lead screw or ball-screw) drive mechanism, motor (stepper motor or AC servo motor) to drive.Owing to limit by level of processing and processing cost, during lead screw transmission the existence in its gap inevitable, motion platform is difficult to reach the submicron order positioning accuracy request; Also some adopts the micromotion platform that little driver part (as drivers such as piezoelectric ceramics, magnetostriction) constitutes, but the stroke of this class mechanism is less, range of movement is very limited, very harsh to the requirement of anchor clamps and initial position in actual use, be difficult to sometimes satisfy.Thereby how solving big stroke and high-precision contradiction is an important difficult problem that will solve in the process of design optical waveguide automatic-packaging robot system motion platform.
Summary of the invention
The purpose of this invention is to provide a kind of motion platform mechanism that is applicable to optical waveguide automatic-packaging robot system, the parallel-connection structure that described motion platform mechanism adopts Three Degree Of Freedom macro-moving stage and six-freedom micro displacement platform to combine had so not only guaranteed the grand movement of the terminal output of motion platform mechanism but also had guaranteed its accurate location; Macro-moving stage is designed to modular construction, helps mechanism's reconstruct and processing request; The six-freedom micro displacement platform is made up of Three Degree Of Freedom fine motion disk and Three Degree Of Freedom fine motion arm, the fine motion disk is designed to flexible flat 3-RRR parallel institution pattern, adopt to rely on the flexible hinge of elastic properties of materials distortion to replace traditional kinematic pair to eliminate defectives such as the intrinsic gap of kinematic pair, friction, utilize wire-electrode cutting and processing method to manufacture integrated component, and adopt the piezoelectric ceramics with nanometer resolution as three compliant motion branched structures of driver drives, thereby terminal output is that the taper pin central point has high kinematic accuracy; The fine motion arm is designed to 3-RPS parallel-connection structure form based on flexible hinge, each movement branched chain is made of the moving sets of integrated processing, by the precision assembling, and adopt the piezoelectric ceramics with nanometer resolution as driver, the end of mechanism can be realized high precision output.So just guarantee the accurate aligning between waveguide to be packaged effectively, thereby realized the optimum coupling effect of waveguide device.
The present invention is a kind of motion platform mechanism that is applicable to optical waveguide automatic-packaging robot system, constitute by macro-moving stage mechanism, fine motion disk, fine motion arm, six piezoelectric ceramics and three motors, three piezoelectric ceramics are installed on the fine motion disk, other three piezoelectric ceramics are installed on the fine motion arm, three motors are installed in the macro-moving stage mechanism, the fine motion disk is installed on the Z axle motion platform of macro-moving stage mechanism by counter sink, and the taper pin of fine motion disk is installed in the pin-and-hole of fine motion arm.
Described macro-moving stage mechanism is by base, X-axis motion platform, Y-axis motion platform, Z axle motion platform, X-axis drive motor, Y-axis drive motor, Z axis drive motor and be connected bent plate and constitute; The X-axis motion platform is installed on the base, and the X-axis drive motor is installed on the X-axis motion platform; The Y-axis motion platform is installed on the X-axis motion platform, and the Y-axis drive motor is installed on the Y-axis motion platform; The parallel surface that connects bent plate is installed on the Y-axis motion platform, on the vertical plane of connection bent plate Z axle motion platform is installed, and the Z axis drive motor is installed on the Z axle motion platform, and the top of Z axle motion platform is provided with lead screw hole;
Described fine motion disk is the thick thin type copper material disk of 8～15mm, and the core position of its disk body upper surface is provided with taper pin, and is central point with the taper pin and is laid with the identical movement branched chain A of structure, movement branched chain B and movement branched chain C by 120 °; Be provided with counter sink between elongated chamber on each movement branched chain and the dish edge; The dish edge of disk body is provided with otch A, otch B, otch C, and the cut sides of each otch is provided with threaded hole;
Described movement branched chain A is the integral member that adopts the line cutting mode to be processed into, and movement branched chain A is provided with for the elongated chamber that piezoelectric ceramics is installed, five ditch seams and nine through holes, and five ditch seams constitute the pivot point lever structure that displacement is amplified with nine through holes;
Described fine motion arm, by base plate, top board, moving sets A, moving sets B, moving sets C, piezoelectric ceramics A, piezoelectric ceramics B, piezoelectric ceramics C be respectively applied for the mounting disc that three piezoelectric ceramics are installed and constitute, top board is provided with three notches and mounting hole;
Described moving sets A is the integral member that adopts the line cutting mode to be processed into, and the bottom of moving sets A is a web joint, is connected with the support rectangle frame by a flexible hinge on the web joint; The end of supporting the top of rectangle frame cuts into two semicircle left cut groove and right cut grooves of forming up and down respectively, and the lower central that supports the top of rectangle frame is provided with ball-and-socket; The following center position that supports rectangle frame is provided with for the threaded hole that piezoelectric ceramics A is installed; The end of supporting the base of rectangle frame cuts into two semicircle left cut groove and right cut grooves of forming up and down respectively, and the base of supporting rectangle frame is provided with and the corresponding hole of the fabrication hole of web joint; The fitting surface that supports the top, upper end, the left side of rectangle frame is provided with mounting hole, and the top, the left side of support rectangle frame is equivalent flexible ball pivot with the joint of the top left end that supports rectangle frame.
The advantage of motion platform mechanism of the present invention is: " grand-little " mechanism that (1) adopts a macro-moving stage and two micromotion platforms to combine has solved the contradiction of high precision and big stroke; (2) macro-moving stage of Three Degree Of Freedom adopts the modular construction design, has reduced processing cost, helps the reconstruct of system; (3) fine motion disk and fine motion arm adopt the parallel institution model to realize the submicron order bearing accuracy; (4) " grand-little " mechanism has the yardstick of striding functipnal capability, can carry out operation under macro-scale and micro-scale; (5) can realize alignment function fast, accurately during the packaging multiple-pass chip of light waveguide; (6) thus micromotion platform adopts Piezoelectric Ceramic to realize the rapidity and the accuracy of motion.
Description of drawings
Fig. 1 is the macro-moving stage mechanism structure figure of motion platform mechanism of the present invention.
Fig. 2 A is the fine motion disc structure figure of motion platform mechanism of the present invention.
Fig. 2 B is the lever construction synoptic diagram of movement branched chain.
Fig. 2 C is structure and the lever synoptic diagram of movement branched chain A.
Fig. 3 A is the fine motion arm configuration figure of motion platform mechanism of the present invention.
Fig. 3 B is the moving sets A structural drawing of motion platform mechanism of the present invention.
Among the figure: 1. macro-moving stage mechanism 101. bases 102. threaded hole 103.X axis drive motors
104.X axle motion platform 105. lead screw hole 106.Y axis drive motors
107.Y axle motion platform 108. parallel surfaces 109. connect bent plate
110.Z axis drive motor 111. mounting hole 112.Z axle motion platforms 113. vertical planes
2. fine motion disk 201. upper surfaces 202. taper pins, 203. counter sinks 204. coil edge
205. ball-and-socket 206. ball-and-sockets 210. movement branched chain A 211. elongated chamber 212. threaded holes
213. first rigid rod, 214. otch A 215. the 3rd rigid rod, 219. second rigid rods
220. movement branched chain B 224. otch B 230. movement branched chain C 234. otch C 235. side cut faces
236. threaded hole 241. ditches stitch 242. ditches and stitch 243. ditches and stitch 244. ditches seams
245. ditch stitches 251. through holes, 252. through holes, 253. through holes, 254. through holes
255. through hole 256. through holes 257. through holes 258. through holes 259. through holes
260. through hole 3. fine motion arms 301. base plates 302. pin-and-holes 303. flanges
304. top board 305. mounting holes 306. notch A 310. moving sets A
311. piezoelectric ceramics A 312. mounting discs 316. notch B 320. moving sets B
321. piezoelectric ceramics B 322. mounting discs 326. notch C 330. moving sets C
331. piezoelectric ceramics C 332. mounting discs 401. web joints 402. mounting holes
403. pin-and-hole 404. fabrication holes 405. flexible hinges 408. threaded holes 410. support rectangle frame
411. 412. left cut grooves, 413. right cut grooves, 414. following 415. bases, top
416. left cut groove 417. right cut grooves 418. left sides 419. mounting holes, 420. fitting surfaces
421. equivalent flexible ball pivot 422. the right 423. ball-and-sockets
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
General optical waveguide automatic-packaging robot system comprises kinetic control system (containing motion platform mechanism), high-precision vision system, LASER Light Source, light power meter and some adhesive curing system.Packaging robot in working order down, at first the operator utilizes the high-precision vision system to obtain the position of input optical fibre array, packed waveguide and output optical fibre array, and regulate the spatial pose of packed waveguide by kinetic control system, the pose deviation of itself and input optical fibre array and output optical fibre array is dwindled gradually, detect certain luminous flux output until light power meter; Then, control waveguide chip to be packaged by Computer Control Technology establishment optimum power searching algorithm and combined high precision motion platform and move to the optimum power coupling position, and the controlled motion platform makes it arrive this position.Then, utilize some adhesive curing system, become final product to be packaged some glue, curing after aiming at.
The present invention is a kind of motion platform mechanism that is applicable to optical waveguide automatic-packaging robot system, it is the parallel-connection structure that adopts Three Degree Of Freedom macro-moving stage mechanism 1 and six-freedom micro displacement platform (forming) to combine by Three Degree Of Freedom fine motion disk 2 and Three Degree Of Freedom fine motion arm 3, guarantee the grand movement of terminal output effectively, also guaranteed its accurate location simultaneously.Motion platform mechanism is made of macro-moving stage mechanism 1, fine motion disk 2, fine motion arm 3, six piezoelectric ceramics and three motors, three piezoelectric ceramics wherein are installed on the fine motion disk 2, other three piezoelectric ceramics are installed on the fine motion arm 3, three motors are installed in the macro-moving stage mechanism 1, fine motion disk 2 is installed on the Z axle motion platform 112 of macro-moving stage mechanism 1 by counter sink 203, and the taper pin 202 of fine motion disk 2 is installed in the pin-and-hole 302 of fine motion arm 3.The interference of the taper pin 202 by fine motion disk 2 and the pin-and-hole 302 of fine motion arm 3 is connected to cooperate and has realized flexibly connecting of fine motion disk 2 and fine motion arm 3.
In the present invention, macro-moving stage mechanism 1 adopts the modular construction design, helps mechanism's reconstruct and processing request.Fine motion disk 2 is designed to have the thin type disk of flexible flat 3-RRR parallel institution, its thickness is 8～15mm, about preferred thickness 10mm, and utilize the copper product elastic deformation, realized that flexible hinge replaces traditional kinematic pair to eliminate defectives such as the intrinsic gap of kinematic pair, friction, adopts the pivot point lever structure that the identical movement branched chain of incorporate three structures (being movement branched chain A 210, movement branched chain B220 and movement branched chain C 230) has realized that displacement is amplified that designs and produces of wire-electrode cutting and processing method cutting ditch seam, through hole.Owing to adopted piezoelectric ceramics with nanometer resolution (selecting Pst 150/7/40 VS12 that produces by German Piezomechanik company for use), to make taper pin 202 central points have high kinematic accuracy as three compliant motion branched structures of driver drives.Fine motion arm 2 is designed to based on the 3-RPS parallel-connection structure form of flexible hinge and modular construction design, and each moving sets structure is an integral member, can realize that by the precision assembling high precision output has guaranteed the accurate aligning between waveguide to be packaged, thereby realize the optimum coupling effect of waveguide device.
Referring to shown in Figure 1, described macro-moving stage mechanism 1 is by base 101, X-axis motion platform 104, Y-axis motion platform 107, Z axle motion platform 112, X-axis drive motor 103, Y-axis drive motor 106, Z axis drive motor 110 and be connected bent plate 109 and constitute; X-axis motion platform 104 is installed on the base 101, and X-axis drive motor 103 is installed on the X-axis motion platform 104; Y-axis motion platform 107 is installed on the X-axis motion platform 104, and Y-axis drive motor 106 is installed on the Y-axis motion platform 107; The parallel surface 108 that connects bent plate 109 is installed on the Y-axis motion platform 107, on the vertical plane 113 of connection bent plate 109 Z axle motion platform 112 is installed, Z axis drive motor 110 is installed on the Z axle motion platform 112, and the top of Z axle motion platform 112 is provided with lead screw hole 105.Be respectively equipped with on X-axis motion platform 104, Y-axis motion platform 107 and the Z axle motion platform 112 be used to install, fixedly mounting hole 111, the threaded hole 102 of usefulness.Lead screw hole is provided with on X-axis motion platform 104 and Y-axis motion platform 107 equally, and is not shown.
Shown in Fig. 2 A, described fine motion disk 2 is thin type copper material disks, the core position of its disk body upper surface 201 is provided with taper pin 202, and be central point and be laid with the identical movement branched chain A of structure 210, movement branched chain B 220 and movement branched chain C 230 by 120 ° with taper pin 202, be provided with between each movement branched chain and the dish edge 204 and be used for the counter sink 203 that the Z axle motion platform 112 of fine motion disk 2 and macro-moving stage mechanism 1 is fixing; The dish edge 204 of disk body is provided with otch A 214, otch B 224, otch C 234, the cut sides of each otch is provided with threaded hole, as, the cut sides 235 of otch C 234 is provided with threaded hole 236, this threaded hole 236 is to pass and piezoelectric ceramics is held out against for screw, plays the purpose that piezoelectric ceramics is installed.Three movement branched chain of on the fine motion disk 2 this adopt modular design, and its structure, size are identical.Central point with taper pin 202 is the center of circle, arrange a movement branched chain with per 120 °, three movement branched chain are designed on disk with the movement branched chain that wire cutting method cutting ditch seam and through hole form uniformly, its formation has flexible flat 3-RRR parallel institution, make these three movement branched chain not have the gap motion, solved the friction defective (referring to Fig. 2 B shown in) of movement branched chain in motion process.
Shown in Fig. 2 C, described movement branched chain A 210 adopts the line cutting mode to be processed into integral member, movement branched chain A 210 is provided with for the elongated chamber 211 that piezoelectric ceramics is installed, five ditch seams and ten through holes, and five ditches seams constitute the pivot point lever structure that displacement is amplified with ten through holes.Ditch seam 241, through hole 251, through hole 252, ditch seam 242, through hole 259 constitute the 3rd rigid rod 215 with through hole 260, and the thick thin-walled of one 0.3～0.5mm is arranged between through hole 251 and the through hole 252, and its thin-walled central point is fulcrum A
1, the thick thin-walled of one 0.3～0.5mm is arranged between through hole 259 and the through hole 260, its thin-walled central point is fulcrum A
2Through hole 260, through hole 259, ditch seam 242, through hole 253, through hole 254, through hole 255, through hole 256, ditch seam 243 constitute second rigid rod 219, ditch seam 243 is provided with ball-and-socket 206 with the coplane of elongated chamber 211, the thick thin-walled of one 0.3～0.5mm is arranged between through hole 253 and the through hole 254, and its thin-walled central point is fulcrum A
3, the thick thin-walled of one 0.3～0.5mm is arranged between through hole 255 and the through hole 256, its thin-walled central point is fulcrum A
4Ditch seam 243, through hole 256, through hole 255, ditch seam 245, through hole 257, through hole 258, ditch seam 244 constitute first rigid rod 213, and the thick thin-walled of one 0.3～0.5mm is arranged between through hole 257 and the through hole 258, and its thin-walled central point is fulcrum A
5When to after the piezoelectric ceramics power supply, piezoelectric ceramics will produce certain displacement under the effect in magnetic field, make the take-off lever of piezoelectric ceramics hold out against ball-and-socket 206, thereby for first rigid rod 213 provides a power, this power can allow the fulcrum A on the movement branched chain A 210
1With fulcrum A
2The lever A that forms
1A
2With fulcrum A
3With fulcrum A
2The lever A that forms
2A
3Press parallel institution kinematics regular movement, so just formed the seamless motion of fine motion dish 2, overcome fricative defective.
In the present invention, the movement branched chain A 210 on the fine motion disk 2, movement branched chain B 220 and movement branched chain C230 are that 120 ° of corners of central point are symmetrically distributed with taper pin 202; Fulcrum A on the movement branched chain A 210
5Be the flexible hinge point in the lever construction, be used for the displacement that the amplification piezoelectric pottery applies; Fulcrum A
4Be the output point in the lever construction, be used to realize fulcrum A
3The input corner, and then by lever A
2A
3, lever A1A
2Make fulcrum A
2, fulcrum A
1With the kinematic regular movement of parallel institution.When being installed on after piezoelectric ceramics on each movement branched chain powers on, closely contacting by the take-off lever of its piezoelectric ceramics and separately ball-and-socket and to drive each movement branched chain, thereby make the terminal output point taper pin 202 of platform have the planar three freedom locomitivity.
In the present invention, the kinematics mechanism sketch drawing corresponding with full compliant mechanism (movement branched chain A 210, movement branched chain B 220 and movement branched chain C 230) on the fine motion disk 2 shown in Fig. 2 B, the promptly common plane-parallel type 3-RRR structural shape of being familiar with.Among the figure, movement branched chain A 210, movement branched chain B 220 and movement branched chain C 230 distribute with the central point of taper pin 202, and this full compliant mechanism can be finished two and moves and the planar three freedoms motion of a rotation at grade.
Shown in Fig. 3 A, described fine motion arm 3, the mounting disc 312,322,332 that piezoelectric ceramics is installed by base plate 301, top board 304, moving sets A 310, moving sets B 320, moving sets C 330, piezoelectric ceramics A 311, piezoelectric ceramics B 321, piezoelectric ceramics C 331 and confession constitutes, and top board 304 is provided with three notches and mounting hole 305; The central point of notch A 306 on the top board 304, notch B 316 and notch C 326 constitutes an equilateral triangle.When applying different displacements for three notches, the fine motion campaign of three spatial degrees of freedom can be realized in the center of top board 304.
Shown in Fig. 3 B, described moving sets A 310 adopts the line cutting mode to be processed into integral member, the bottom of moving sets A310 is a web joint 401, the rectangle frame 410 of support is arranged on the web joint 401, the end of supporting the top 411 of rectangle frame 410 cuts into two semicircle left cut groove 412 and right cut grooves of forming 413 up and down respectively, and the lower central that supports the top 411 of rectangle frame 410 is provided with ball-and-socket 423; Bottom's 414 center positions that support rectangle frame 410 are provided with for the threaded hole 408 that piezoelectric ceramics A 311 is installed; The end of supporting the base 415 of rectangle frame 410 cuts into two semicircle left cut grooves 416 and right cut grooves 417 formed up and down respectively, the base 415 of supporting rectangle frame 410 be provided with web joint 401 on fabrication hole 404 corresponding holes (draw among the figure and illustrate); The fitting surface 420 that supports the top, 418 upper end, the left side of rectangle frame 410 is provided with mounting hole 419, and 418 tops, the left side of support rectangle frame 410 are provided with equivalent flexible ball pivot 421 with the joint of top 411 left ends that support rectangle frame 410.Ball-and-socket on each moving sets all is that the take-off lever of voltage supply electroceramics holds out against usefulness, and then provides driving for moving sets.
In the present invention, the top board 304 of fine motion arm 3, base plate 301 and moving sets A 310, moving sets B 320, moving sets C 330 constitute the geometric relationship form of 3-RPS mechanism.After piezoelectric ceramics powers on, take-off lever by piezoelectric ceramics holds out against the power (being the telescopicing performance of take-off lever) that ball-and-socket produces and controls moving up and down of moving sets, rotates a mobile space three-freedom locomitivity thereby make packed of being fixedly mounted on the top board 304 have two.
Claims (3)
1, a kind of motion platform mechanism that is applicable to optical waveguide automatic-packaging robot system, it is characterized in that: by macro-moving stage mechanism (1), fine motion disk (2), fine motion arm (3), six piezoelectric ceramics and three motors constitute, three piezoelectric ceramics are installed on the fine motion disk (2), other three piezoelectric ceramics are installed on the fine motion arm (3), three motors are installed in the macro-moving stage mechanism (1), fine motion disk (2) is installed in by counter sink (203) on the Z axle motion platform (112) of macro-moving stage mechanism (1), and the taper pin (202) of fine motion disk (2) is installed in the pin-and-hole (302) of fine motion arm (3);
Described macro-moving stage mechanism (1) is by base (101), X-axis motion platform (104), Y-axis motion platform (107), Z axle motion platform (112), X-axis drive motor (103), Y-axis drive motor (106), Z axis drive motor (110) and be connected bent plate (109) formation; X-axis motion platform (104) is installed on the base (101), and X-axis drive motor (103) is installed on the X-axis motion platform (104); Y-axis motion platform (107) is installed on the X-axis motion platform (104), and Y-axis drive motor (106) is installed on the Y-axis motion platform (107); The parallel surface (108) that connects bent plate (109) is installed on the Y-axis motion platform (107), on the vertical plane (113) of connection bent plate (109) Z axle motion platform (112) is installed, Z axis drive motor (110) is installed on the Z axle motion platform (112), and the top of Z axle motion platform (112) is provided with lead screw hole (105);
Described fine motion disk (2) is the thick thin type copper material disk of 8～15mm, the core position of its disk body upper surface (201) is provided with taper pin (202), and is central point and is laid with the identical movement branched chain A of structure (210), movement branched chain B (220) and movement branched chain C (230) by 120 ° with taper pin (202); Be provided with counter sink (203) between elongated chamber on each movement branched chain and the dish edge; The dish edge (204) of disk body is provided with otch A (214), otch B (224), otch C (234), and the cut sides of each otch is provided with threaded hole;
Described movement branched chain A (210) is the integral member that adopts the line cutting mode to be processed into, movement branched chain A (210) is provided with for the elongated chamber (211) that piezoelectric ceramics is installed, five ditch seams and ten through holes, and five ditch seams constitute the pivot point lever structure that displacement is amplified with ten through holes;
Described fine motion arm (3), by base plate (301), top board (304), moving sets A (310), moving sets B (320), moving sets C (330), piezoelectric ceramics A (311), piezoelectric ceramics B (321), piezoelectric ceramics C (331) be respectively applied for the mounting disc that three piezoelectric ceramics are installed and constitute, top board (304) is provided with three notches and mounting hole (305);
Described moving sets A (310) is the integral member that adopts the line cutting mode to be processed into, and the bottom of moving sets A (310) is web joint (401), and web joint (401) is gone up by a flexible hinge (405) and is connected with support rectangle frame (410); The end of supporting the top (411) of rectangle frame (410) cuts into two semicircle left cut groove (412) and right cut grooves of forming (413) up and down respectively, and the lower central that supports the top (411) of rectangle frame (410) is provided with ball-and-socket (423); Bottom (414) center position that supports rectangle frame (410) is provided with for the threaded hole (408) that piezoelectric ceramics A (311) is installed; The end of supporting the base (415) of rectangle frame (410) cuts into two semicircle left cut groove (416) and right cut grooves of forming (417) up and down respectively, the base (415) of supporting rectangle frame (410) be provided with and web joint (401) on the corresponding hole of fabrication hole (404); The fitting surface (420) that supports the top, upper end, the left side (418) of rectangle frame (410) is provided with mounting hole (419), and the top, the left side (418) of support rectangle frame (410) is equivalent flexible ball pivot (421) with the joint of top (411) left end that supports rectangle frame (410).
2, motion platform mechanism according to claim 1 is characterized in that: the central point of the notch A (306) on the top board (304), notch B (316) and notch C (326) constitutes an equilateral triangle.
3, motion platform mechanism according to claim 1 is characterized in that: described motor is selected stepper motor for use, power of motor 36W～72W.
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| CN103552061B (en) * | 2013-11-18 | 2015-07-15 | 山东理工大学 | Parallel micro-motion platform with one translational degree of freedom and two rotational degrees of freedom |
| CN103884373B (en) * | 2014-02-26 | 2016-11-23 | 北京航空航天大学 | A kind of composite load simulator realizing multidimensional Based on Pure Bending Moment and pressure |
| CN103883849A (en) * | 2014-03-28 | 2014-06-25 | 苏州大学 | Large-stoke nanometer positioning platform |
| CN105291090B (en) * | 2015-10-30 | 2017-03-22 | 清华大学 | Parallel type macro-micro high-precision movement platform |
| CN105404316A (en) * | 2015-12-21 | 2016-03-16 | 四川大学 | Array type position attitude fine tuning method |
| CN111421523A (en) * | 2020-04-03 | 2020-07-17 | 清华大学 | Micro-motion platform |
| CN113416628A (en) * | 2021-08-12 | 2021-09-21 | 天津大学 | Macro-micro combined cell clamping platform based on modularization |
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| 波导器件耦合对接设备USB接口的设计与开发 胡一达等，仪器仪表学报，第24卷第4期 2003;光波导封装机器人系统研究现状 晁代宏等，仪器仪表学报，第25卷第4期 2004 * |
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