DE10296379T1 - Bildanpassverfahen, Bildanpassvorrichtung und Waferprozessor - Google Patents

Bildanpassverfahen, Bildanpassvorrichtung und Waferprozessor

Info

Publication number
DE10296379T1
DE10296379T1 DE10296379T DE10296379T DE10296379T1 DE 10296379 T1 DE10296379 T1 DE 10296379T1 DE 10296379 T DE10296379 T DE 10296379T DE 10296379 T DE10296379 T DE 10296379T DE 10296379 T1 DE10296379 T1 DE 10296379T1
Authority
DE
Germany
Prior art keywords
image adjustment
wafer processor
adjustment device
adjustment method
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE10296379T
Other languages
English (en)
Inventor
Masayoshi Ichikawa
Kazuyuki Maruo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of DE10296379T1 publication Critical patent/DE10296379T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/001—Industrial image inspection using an image reference approach
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0006—Industrial image inspection using a design-rule based approach
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/10—Segmentation; Edge detection
    • G06T7/12—Edge-based segmentation
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/30—Determination of transform parameters for the alignment of images, i.e. image registration
    • G06T7/33—Determination of transform parameters for the alignment of images, i.e. image registration using feature-based methods
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer
DE10296379T 2001-02-20 2002-02-19 Bildanpassverfahen, Bildanpassvorrichtung und Waferprozessor Withdrawn DE10296379T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001043235A JP2002245454A (ja) 2001-02-20 2001-02-20 画像マッチング方法、画像マッチング装置及びウェハ処理装置
PCT/JP2002/001430 WO2002067198A1 (fr) 2001-02-20 2002-02-19 Procede d'appariement d'images, appareil d'appariement d'images et dispositif de traitement de tranches

Publications (1)

Publication Number Publication Date
DE10296379T1 true DE10296379T1 (de) 2003-12-24

Family

ID=18905436

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10296379T Withdrawn DE10296379T1 (de) 2001-02-20 2002-02-19 Bildanpassverfahen, Bildanpassvorrichtung und Waferprozessor

Country Status (4)

Country Link
US (1) US20040146194A1 (de)
JP (1) JP2002245454A (de)
DE (1) DE10296379T1 (de)
WO (1) WO2002067198A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4616120B2 (ja) * 2005-08-08 2011-01-19 株式会社日立ハイテクノロジーズ 画像処理装置及び検査装置
JP4834567B2 (ja) * 2006-03-29 2011-12-14 株式会社アドバンテスト パターン測定装置及びパターン測定方法
JP4470930B2 (ja) * 2006-09-21 2010-06-02 ソニー株式会社 画像処理装置、画像処理方法、及び、プログラム
JP5254270B2 (ja) * 2010-04-09 2013-08-07 株式会社ニューフレアテクノロジー 検査方法および検査装置
CN105447845B (zh) * 2014-08-25 2019-01-15 联想(北京)有限公司 一种数据处理方法及电子设备
US9740919B1 (en) * 2015-05-20 2017-08-22 Amazon Technologies, Inc. Detecting objects in multiple images using integral images
US9740918B1 (en) * 2015-05-20 2017-08-22 Amazon Technologies, Inc. Detecting objects in multiple images using integral images

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD158824A1 (de) * 1980-11-03 1983-02-02 Adelbrecht Schorcht Anordnung zur automatischen justierung mindestens eines gegenstandes
JPS6281036A (ja) * 1985-10-04 1987-04-14 Hitachi Ltd パタ−ン認識方法
JP2851023B2 (ja) * 1992-06-29 1999-01-27 株式会社鷹山 Ｉｃの傾き検査方法
US5859923A (en) * 1992-12-29 1999-01-12 Cognex Corporation Mark quality inspection apparatus and method
JPH07152912A (ja) * 1993-12-01 1995-06-16 Matsushita Electric Ind Co Ltd パターンマッチング方法
JP3555230B2 (ja) * 1994-05-18 2004-08-18 株式会社ニコン 投影露光装置
US5661548A (en) * 1994-11-30 1997-08-26 Nikon Corporation Projection exposure method and apparatus including a changing system for changing the reference image-formation position used to generate a focus signal
US5758034A (en) * 1996-09-26 1998-05-26 Xerox Corporation Video path architecture including logic filters for resolution conversion of digital images
US5862305A (en) * 1996-09-26 1999-01-19 Xerox Corporation Logic filters for resolution conversion of digital images
JP3524819B2 (ja) * 1999-07-07 2004-05-10 株式会社日立製作所 画像比較によるパターン検査方法およびその装置

Also Published As

Publication number Publication date
US20040146194A1 (en) 2004-07-29
WO2002067198A1 (fr) 2002-08-29
JP2002245454A (ja) 2002-08-30

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee