DE112009000078A5 - Verfahren und Vorrichtung zur Auswertung einer interferometrischen Messgröße - Google Patents

Verfahren und Vorrichtung zur Auswertung einer interferometrischen Messgröße Download PDF

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Publication number
DE112009000078A5
DE112009000078A5 DE112009000078T DE112009000078T DE112009000078A5 DE 112009000078 A5 DE112009000078 A5 DE 112009000078A5 DE 112009000078 T DE112009000078 T DE 112009000078T DE 112009000078 T DE112009000078 T DE 112009000078T DE 112009000078 A5 DE112009000078 A5 DE 112009000078A5
Authority
DE
Germany
Prior art keywords
evaluating
measured variable
interferometric measured
interferometric
variable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE112009000078T
Other languages
English (en)
Inventor
Peter Waegli
Felix Mullis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon Holding AG
Original Assignee
Inficon GmbH Switzerland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Switzerland filed Critical Inficon GmbH Switzerland
Publication of DE112009000078A5 publication Critical patent/DE112009000078A5/de
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
    • G01K11/3206—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres at discrete locations in the fibre, e.g. using Bragg scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
DE112009000078T 2008-02-28 2009-02-05 Verfahren und Vorrichtung zur Auswertung einer interferometrischen Messgröße Withdrawn DE112009000078A5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH294/08 2008-02-28
CH2942008 2008-02-28
PCT/CH2009/000044 WO2009105904A1 (de) 2008-02-28 2009-02-05 Verfahren und vorrichtung zur auswertung einer interferometrischen messgrösse

Publications (1)

Publication Number Publication Date
DE112009000078A5 true DE112009000078A5 (de) 2010-12-30

Family

ID=39381937

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112009000078T Withdrawn DE112009000078A5 (de) 2008-02-28 2009-02-05 Verfahren und Vorrichtung zur Auswertung einer interferometrischen Messgröße

Country Status (6)

Country Link
US (1) US7728984B2 (de)
JP (1) JP5222961B2 (de)
CA (1) CA2713914A1 (de)
DE (1) DE112009000078A5 (de)
TW (1) TWI452271B (de)
WO (1) WO2009105904A1 (de)

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DE102009027592A1 (de) * 2009-07-09 2011-05-12 Endress + Hauser Gmbh + Co. Kg Drucksensor mit interferometrischem Wandler und Druckmessgerät mit einem solchen Drucksensor
US8711361B2 (en) * 2009-11-05 2014-04-29 Qualcomm, Incorporated Methods and devices for detecting and measuring environmental conditions in high performance device packages
US8390916B2 (en) * 2010-06-29 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for false-color sensing and display
JP5654837B2 (ja) * 2010-10-22 2015-01-14 株式会社ミツトヨ 変位測定装置
WO2012092956A1 (en) * 2011-01-03 2012-07-12 Fundació Institut De Recerca De L'energía De Catalunya Optoelectronic device, system and method for obtaining an ambient light spectrum and modifying an emitted light
US9046417B2 (en) * 2011-06-24 2015-06-02 Tokyo Electron Limited Temperature measuring system, substrate processing apparatus and temperature measuring method
JP2013007665A (ja) * 2011-06-24 2013-01-10 Tokyo Electron Ltd 温度計測装置、基板処理装置及び温度計測方法
JP5805498B2 (ja) * 2011-06-24 2015-11-04 東京エレクトロン株式会社 温度計測システム、基板処理装置及び温度計測方法
GB2500255B (en) 2012-03-16 2020-04-15 Oxsensis Ltd Optical sensor
GB2509105B (en) * 2012-12-20 2017-02-22 Oxsensis Ltd Mechanical resonator sensor
US9441947B2 (en) * 2013-01-28 2016-09-13 Woods Hole Oceanographic Institution N-wavelength interrogation system and method for multiple wavelength interferometers
US10078050B2 (en) 2013-01-28 2018-09-18 Woods Hole Oceanographic Institution Submersible N-wavelength interrogation system and method for multiple wavelength interferometers
FI124888B (fi) * 2013-06-04 2015-03-13 Ponsse Oyj Menetelmä ja järjestely punnitusjärjestelmässä sekä vastaava ohjelmistotuote ja materiaalinkäsittelykone
WO2016067268A1 (en) * 2014-10-30 2016-05-06 Swat Arkadiusz Method, system and subsystem for interferometrically determining radius of curvature
US10527502B2 (en) * 2015-05-21 2020-01-07 University Of Limerick Temperature sensor
NL2017595A (en) * 2015-11-10 2017-05-26 Asml Netherlands Bv Proximity sensor, lithographic apparatus and device manufacturing method
CN107192449B (zh) * 2017-04-25 2019-04-19 哈尔滨工程大学 基于法布里珀罗腔干涉测量脉冲激光能量传感器及脉冲光能量测量方法
KR20220062647A (ko) * 2019-09-20 2022-05-17 인피콘 아크티엔게젤샤프트 압력을 결정하는 방법 및 압력 센서
CN112985477A (zh) * 2019-11-29 2021-06-18 梅吉特股份有限公司 用于在恶劣环境中测量物理参数的光学传感器及其制造和使用方法
WO2021212271A1 (zh) * 2020-04-20 2021-10-28 北京佰为深科技发展有限公司 法珀传感器腔长解调系统和法珀传感器腔长解调方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI98094C (fi) 1992-05-19 1997-04-10 Vaisala Technologies Inc Oy Fabry-Perot resonaattoriin perustuva optinen voima-anturi
US6078706A (en) * 1998-09-22 2000-06-20 The United States Of America As Represented By The Secretary Of The Navy Quasi-static fiber pressure sensor
US7324214B2 (en) * 2003-03-06 2008-01-29 Zygo Corporation Interferometer and method for measuring characteristics of optically unresolved surface features
US7099015B2 (en) * 2003-08-25 2006-08-29 Ivan Melnyk Fiber optic sensing device for measuring a physical parameter
US20050151975A1 (en) * 2004-01-14 2005-07-14 Ivan Melnyk Fabry-perot fiber optic sensing device and method
GB0408073D0 (en) * 2004-04-08 2004-05-12 Council Cent Lab Res Councils Optical sensor
US7259862B2 (en) * 2004-09-20 2007-08-21 Opsens Inc. Low-coherence interferometry optical sensor using a single wedge polarization readout interferometer
EP1917510B1 (de) 2005-08-12 2012-12-05 Inficon GmbH Optischer interferometrische drucksensor
US7564562B2 (en) * 2007-02-23 2009-07-21 Ziebel (US), Inc. Method for demodulating signals from a dispersive white light interferometric sensor and its application to remote optical sensing

Also Published As

Publication number Publication date
JP5222961B2 (ja) 2013-06-26
US20090219542A1 (en) 2009-09-03
JP2011515659A (ja) 2011-05-19
WO2009105904A1 (de) 2009-09-03
TWI452271B (zh) 2014-09-11
CA2713914A1 (en) 2009-09-03
TW200938819A (en) 2009-09-16
US7728984B2 (en) 2010-06-01

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Legal Events

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R012 Request for examination validly filed
R079 Amendment of ipc main class

Free format text: PREVIOUS MAIN CLASS: G01L0009000000

Ipc: G01L0011020000

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee