DE3023165A1 - Solarzelle aus amorphem silizium - Google Patents
Solarzelle aus amorphem siliziumInfo
- Publication number
- DE3023165A1 DE3023165A1 DE19803023165 DE3023165A DE3023165A1 DE 3023165 A1 DE3023165 A1 DE 3023165A1 DE 19803023165 DE19803023165 DE 19803023165 DE 3023165 A DE3023165 A DE 3023165A DE 3023165 A1 DE3023165 A1 DE 3023165A1
- Authority
- DE
- Germany
- Prior art keywords
- solar cell
- thin film
- cell according
- amorphous silicon
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052782 aluminium Inorganic materials 0.000 title claims description 20
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims description 20
- 229910021417 amorphous silicon Inorganic materials 0.000 title claims description 9
- 239000010409 thin film Substances 0.000 title claims description 4
- 239000004411 aluminium Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 238000004544 sputter deposition Methods 0.000 claims abstract description 7
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 5
- 229910052751 metal Inorganic materials 0.000 claims abstract description 5
- 239000002184 metal Substances 0.000 claims abstract description 5
- 239000010959 steel Substances 0.000 claims abstract description 5
- 239000011888 foil Substances 0.000 claims abstract description 4
- 239000000919 ceramic Substances 0.000 claims abstract description 3
- 239000011521 glass Substances 0.000 claims abstract description 3
- 239000012300 argon atmosphere Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 239000002985 plastic film Substances 0.000 claims 1
- 229920006255 plastic film Polymers 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 abstract description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 229920000642 polymer Polymers 0.000 abstract 1
- 210000004027 cell Anatomy 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910021418 black silicon Inorganic materials 0.000 description 1
- 210000002858 crystal cell Anatomy 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03921—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including only elements of Group IV of the Periodic System
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/054—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means
- H01L31/056—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means the light-reflecting means being of the back surface reflector [BSR] type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/52—PV systems with concentrators
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Photovoltaic Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19803023165 DE3023165A1 (de) | 1980-06-20 | 1980-06-20 | Solarzelle aus amorphem silizium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19803023165 DE3023165A1 (de) | 1980-06-20 | 1980-06-20 | Solarzelle aus amorphem silizium |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3023165A1 true DE3023165A1 (de) | 1982-01-07 |
DE3023165C2 DE3023165C2 (un) | 1991-05-29 |
Family
ID=6105065
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19803023165 Granted DE3023165A1 (de) | 1980-06-20 | 1980-06-20 | Solarzelle aus amorphem silizium |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3023165A1 (un) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2522880A1 (fr) * | 1982-03-03 | 1983-09-09 | Energy Conversion Devices Inc | Dispositif photovoltaique comprenant des moyens permettant de diriger les radiations incidentes en vue d'une reflexion interne totale |
EP0103168A2 (en) * | 1982-09-10 | 1984-03-21 | Hitachi, Ltd. | Amorphous silicon solar battery |
FR2533755A1 (fr) * | 1982-09-27 | 1984-03-30 | Rca Corp | Photodetecteur et son procede de fabrication |
DE3242831A1 (de) * | 1982-11-19 | 1984-05-24 | Siemens AG, 1000 Berlin und 8000 München | Solarzelle aus amorphem silizium und verfahren zu ihrer herstellung |
US4492813A (en) * | 1982-11-19 | 1985-01-08 | Siemens Aktiengesellschaft | Amorphous silicon solar cell |
US4514583A (en) * | 1983-11-07 | 1985-04-30 | Energy Conversion Devices, Inc. | Substrate for photovoltaic devices |
US4554727A (en) * | 1982-08-04 | 1985-11-26 | Exxon Research & Engineering Company | Method for making optically enhanced thin film photovoltaic device using lithography defined random surfaces |
DE3528087A1 (de) * | 1984-08-06 | 1986-02-13 | Showa Aluminum Corp., Sakai, Osaka | Substrat fuer solarzellen aus amorphem silicium |
US4663188A (en) * | 1982-09-27 | 1987-05-05 | Rca Corporation | Method for making a photodetector with enhanced light absorption |
DE3626450A1 (de) * | 1986-08-05 | 1988-02-11 | Hans Joachim Dipl P Kirschning | Als solarzelle wirkendes bauteil von bauwerken und gebaeuden |
DE102009033771A1 (de) * | 2009-07-17 | 2011-04-07 | Schünemann, Gerhard | Solarreflektor zur Leistungssteigerung von Photovoltaikanlagen und Verwendung eines solchen Solarreflektors |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2631880A1 (de) * | 1975-07-18 | 1977-03-31 | Futaba Denshi Kogyo Kk | Halbleiterbauelement mit schottky- sperrschicht und verfahren zu seiner herstellung |
DE2812547A1 (de) * | 1977-03-28 | 1978-10-05 | Rca Corp | Fotoelement |
DE2715471A1 (de) * | 1977-04-06 | 1978-10-19 | Siemens Ag | Solarzelle |
US4166880A (en) * | 1978-01-18 | 1979-09-04 | Solamat Incorporated | Solar energy device |
DE2854653A1 (de) * | 1978-04-24 | 1979-10-31 | Rca Corp | Solarzelle |
-
1980
- 1980-06-20 DE DE19803023165 patent/DE3023165A1/de active Granted
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2631880A1 (de) * | 1975-07-18 | 1977-03-31 | Futaba Denshi Kogyo Kk | Halbleiterbauelement mit schottky- sperrschicht und verfahren zu seiner herstellung |
DE2812547A1 (de) * | 1977-03-28 | 1978-10-05 | Rca Corp | Fotoelement |
DE2715471A1 (de) * | 1977-04-06 | 1978-10-19 | Siemens Ag | Solarzelle |
US4166880A (en) * | 1978-01-18 | 1979-09-04 | Solamat Incorporated | Solar energy device |
DE2854653A1 (de) * | 1978-04-24 | 1979-10-31 | Rca Corp | Solarzelle |
Non-Patent Citations (1)
Title |
---|
US-Z: IEEE Transactions on Electron Devices, Bd. ED-27, No. 4, April 1980, S. 662-670 * |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3306148A1 (de) * | 1982-03-03 | 1983-09-15 | Energy Conversion Devices, Inc., 48084 Troy, Mich. | Sperrschicht-fotoelement aus halbleitermaterial |
US4419533A (en) * | 1982-03-03 | 1983-12-06 | Energy Conversion Devices, Inc. | Photovoltaic device having incident radiation directing means for total internal reflection |
FR2522880A1 (fr) * | 1982-03-03 | 1983-09-09 | Energy Conversion Devices Inc | Dispositif photovoltaique comprenant des moyens permettant de diriger les radiations incidentes en vue d'une reflexion interne totale |
US4554727A (en) * | 1982-08-04 | 1985-11-26 | Exxon Research & Engineering Company | Method for making optically enhanced thin film photovoltaic device using lithography defined random surfaces |
EP0103168A2 (en) * | 1982-09-10 | 1984-03-21 | Hitachi, Ltd. | Amorphous silicon solar battery |
EP0103168A3 (en) * | 1982-09-10 | 1986-07-02 | Hitachi, Ltd. | Amorphous silicon solar battery |
FR2533755A1 (fr) * | 1982-09-27 | 1984-03-30 | Rca Corp | Photodetecteur et son procede de fabrication |
US4532537A (en) * | 1982-09-27 | 1985-07-30 | Rca Corporation | Photodetector with enhanced light absorption |
US4663188A (en) * | 1982-09-27 | 1987-05-05 | Rca Corporation | Method for making a photodetector with enhanced light absorption |
US4492813A (en) * | 1982-11-19 | 1985-01-08 | Siemens Aktiengesellschaft | Amorphous silicon solar cell |
US4511756A (en) * | 1982-11-19 | 1985-04-16 | Siemens Aktiengesellschaft | Amorphous silicon solar cells and a method of producing the same |
EP0111750A3 (en) * | 1982-11-19 | 1985-10-16 | Siemens Aktiengesellschaft | Amorphous silicium solar cell and method of manufacturing the same |
EP0111750A2 (de) * | 1982-11-19 | 1984-06-27 | Siemens Aktiengesellschaft | Solarzelle aus amorphem Silizium und Verfahren zu ihrer Herstellung |
DE3242831A1 (de) * | 1982-11-19 | 1984-05-24 | Siemens AG, 1000 Berlin und 8000 München | Solarzelle aus amorphem silizium und verfahren zu ihrer herstellung |
US4514583A (en) * | 1983-11-07 | 1985-04-30 | Energy Conversion Devices, Inc. | Substrate for photovoltaic devices |
DE3528087A1 (de) * | 1984-08-06 | 1986-02-13 | Showa Aluminum Corp., Sakai, Osaka | Substrat fuer solarzellen aus amorphem silicium |
US4806436A (en) * | 1984-08-06 | 1989-02-21 | Showa Aluminum Corporation | Substrate for amorphous silicon solar cells |
DE3626450A1 (de) * | 1986-08-05 | 1988-02-11 | Hans Joachim Dipl P Kirschning | Als solarzelle wirkendes bauteil von bauwerken und gebaeuden |
DE102009033771A1 (de) * | 2009-07-17 | 2011-04-07 | Schünemann, Gerhard | Solarreflektor zur Leistungssteigerung von Photovoltaikanlagen und Verwendung eines solchen Solarreflektors |
Also Published As
Publication number | Publication date |
---|---|
DE3023165C2 (un) | 1991-05-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0025872B1 (de) | Halbleiterbauelement für die Umsetzung solarer Strahlung in elektrische Energie | |
US4713518A (en) | Electronic device manufacturing methods | |
DE4415132C2 (de) | Verfahren zur formgebenden Bearbeitung von dünnen Wafern und Solarzellen aus kristallinem Silizium | |
DE69907866T2 (de) | Verfahren zum Herstellen von Dünnschicht-Solarzellen-Modulen | |
DE3244626C2 (un) | ||
US4623751A (en) | Photovoltaic device and its manufacturing method | |
DE3015706A1 (de) | Solarzelle mit schottky-sperrschicht | |
EP0021027A1 (de) | Solarzellen-Anordnung | |
DE3121350A1 (de) | "verfahren zum herstellen einer sonnenbatterie" | |
WO1995009441A1 (de) | Solarzelle mit einer chalkopyritabsorberschicht | |
US4680855A (en) | Electronic device manufacturing methods | |
DE3446807C2 (un) | ||
DE3023165A1 (de) | Solarzelle aus amorphem silizium | |
DE2941908A1 (de) | Halbleiter-schicht-solarzelle | |
DE3508469C2 (un) | ||
DE2711365A1 (de) | Halbleiteranordnung mit schottky- grenzschicht | |
EP0334111A1 (de) | Verfahren zur integrierten Serienverschaltung von Dickschichtsolarzellen sowie Verwendung dieses Verfahrens bei der Herstellung einer Tandem-Solarzelle | |
DE4141083A1 (de) | Saegezahn-tandem-solarzelle | |
DE2715471A1 (de) | Solarzelle | |
JPH0456351U (un) | ||
JPS56100486A (en) | Photoelectric conversion element | |
DE102011015283B4 (de) | Herstellung eines Halbleiter-Bauelements durch Laser-unterstütztes Bonden und damit hergestelltes Halbleiter-Bauelement | |
JPH0645623A (ja) | 光起電力素子 | |
JPS6486567A (en) | Manufacture of amorphous silicon solar cell | |
DE2452263C2 (de) | Photoelektrischer Generator |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8110 | Request for examination paragraph 44 | ||
8120 | Willingness to grant licences paragraph 23 | ||
D2 | Grant after examination | ||
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |