DE3168641D1 - A method and apparatus for electroplating a metallic film - Google Patents

A method and apparatus for electroplating a metallic film

Info

Publication number
DE3168641D1
DE3168641D1 DE8181106700T DE3168641T DE3168641D1 DE 3168641 D1 DE3168641 D1 DE 3168641D1 DE 8181106700 T DE8181106700 T DE 8181106700T DE 3168641 T DE3168641 T DE 3168641T DE 3168641 D1 DE3168641 D1 DE 3168641D1
Authority
DE
Germany
Prior art keywords
electroplating
metallic film
metallic
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8181106700T
Other languages
English (en)
Inventor
Johannes Grandia
Daniel Francis O'kane
Hugo Alberto Emilio Santini
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3168641D1 publication Critical patent/DE3168641D1/de
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/08—Electroplating with moving electrolyte e.g. jet electroplating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/007—Current directing devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S204/00—Chemistry: electrical and wave energy
    • Y10S204/07—Current distribution within the bath
DE8181106700T 1980-11-24 1981-08-28 A method and apparatus for electroplating a metallic film Expired DE3168641D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/209,779 US4304641A (en) 1980-11-24 1980-11-24 Rotary electroplating cell with controlled current distribution

Publications (1)

Publication Number Publication Date
DE3168641D1 true DE3168641D1 (en) 1985-03-14

Family

ID=22780238

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8181106700T Expired DE3168641D1 (en) 1980-11-24 1981-08-28 A method and apparatus for electroplating a metallic film

Country Status (6)

Country Link
US (1) US4304641A (de)
EP (1) EP0052701B1 (de)
JP (1) JPS593556B2 (de)
AU (1) AU544471B2 (de)
CA (1) CA1206436A (de)
DE (1) DE3168641D1 (de)

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JPS593556B2 (ja) 1984-01-24
EP0052701A1 (de) 1982-06-02
JPS5789495A (en) 1982-06-03
CA1206436A (en) 1986-06-24
US4304641A (en) 1981-12-08
AU7742681A (en) 1982-06-03
EP0052701B1 (de) 1985-01-30
AU544471B2 (en) 1985-05-30

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