DE3879187D1 - Integrierte halbleiterschaltung mit einem magnetfeldsensor aus halbleitermaterial. - Google Patents

Integrierte halbleiterschaltung mit einem magnetfeldsensor aus halbleitermaterial.

Info

Publication number
DE3879187D1
DE3879187D1 DE8888119272T DE3879187T DE3879187D1 DE 3879187 D1 DE3879187 D1 DE 3879187D1 DE 8888119272 T DE8888119272 T DE 8888119272T DE 3879187 T DE3879187 T DE 3879187T DE 3879187 D1 DE3879187 D1 DE 3879187D1
Authority
DE
Germany
Prior art keywords
magnetic field
field sensor
amplifier
carrier concentration
charge carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888119272T
Other languages
English (en)
Inventor
Beat Haelg
Vries Jacob De
Beat Furrer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electrowatt Technology Innovation AG
Original Assignee
Landis and Gyr Betriebs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Landis and Gyr Betriebs AG filed Critical Landis and Gyr Betriebs AG
Application granted granted Critical
Publication of DE3879187D1 publication Critical patent/DE3879187D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N59/00—Integrated devices, or assemblies of multiple devices, comprising at least one galvanomagnetic or Hall-effect element covered by groups H10N50/00 - H10N52/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
DE8888119272T 1988-04-21 1988-11-19 Integrierte halbleiterschaltung mit einem magnetfeldsensor aus halbleitermaterial. Expired - Fee Related DE3879187D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH150488 1988-04-21

Publications (1)

Publication Number Publication Date
DE3879187D1 true DE3879187D1 (de) 1993-04-15

Family

ID=4211993

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888119272T Expired - Fee Related DE3879187D1 (de) 1988-04-21 1988-11-19 Integrierte halbleiterschaltung mit einem magnetfeldsensor aus halbleitermaterial.

Country Status (8)

Country Link
US (1) US4970411A (de)
EP (1) EP0338122B1 (de)
JP (1) JPH0213869A (de)
AT (1) ATE86800T1 (de)
DE (1) DE3879187D1 (de)
ES (1) ES2039019T3 (de)
FI (1) FI891890A (de)
YU (1) YU68689A (de)

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US5532584A (en) * 1993-08-31 1996-07-02 Eastman Kodak Company MR sensor including calibration circuit wherein signals are averaged for determining a correction factor and pole pieces are shaped to reduce field in gap therebetween
DE10224747B4 (de) * 2002-06-04 2004-05-13 Infineon Technologies Ag Sensorschaltung und Verfahren zur Herstellung derselben
JP4496907B2 (ja) * 2004-09-30 2010-07-07 ヤマハ株式会社 磁気測定回路
EP1746426B1 (de) * 2005-07-22 2019-03-06 Melexis Technologies NV Stromsensor
US9823090B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a target object
US7923996B2 (en) * 2008-02-26 2011-04-12 Allegro Microsystems, Inc. Magnetic field sensor with automatic sensitivity adjustment
DE102009000363A1 (de) 2009-01-21 2010-07-22 Hilti Aktiengesellschaft Schlagwerk und Handwerkzeugmaschine
WO2010096367A1 (en) 2009-02-17 2010-08-26 Allegro Microsystems, Inc. Circuits and methods for generating a self-test of a magnetic field sensor
KR101673185B1 (ko) 2009-07-22 2016-11-07 알레그로 마이크로시스템스, 엘엘씨 자기장 센서의 진단 동작 모드 생성 회로 및 방법
US8680846B2 (en) 2011-04-27 2014-03-25 Allegro Microsystems, Llc Circuits and methods for self-calibrating or self-testing a magnetic field sensor
US8604777B2 (en) 2011-07-13 2013-12-10 Allegro Microsystems, Llc Current sensor with calibration for a current divider configuration
US9201122B2 (en) 2012-02-16 2015-12-01 Allegro Microsystems, Llc Circuits and methods using adjustable feedback for self-calibrating or self-testing a magnetic field sensor with an adjustable time constant
US9817078B2 (en) 2012-05-10 2017-11-14 Allegro Microsystems Llc Methods and apparatus for magnetic sensor having integrated coil
US9383425B2 (en) 2012-12-28 2016-07-05 Allegro Microsystems, Llc Methods and apparatus for a current sensor having fault detection and self test functionality
US9548443B2 (en) 2013-01-29 2017-01-17 Allegro Microsystems, Llc Vertical Hall Effect element with improved sensitivity
US10725100B2 (en) 2013-03-15 2020-07-28 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having an externally accessible coil
US10495699B2 (en) 2013-07-19 2019-12-03 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having an integrated coil or magnet to detect a non-ferromagnetic target
US9810519B2 (en) 2013-07-19 2017-11-07 Allegro Microsystems, Llc Arrangements for magnetic field sensors that act as tooth detectors
US10145908B2 (en) 2013-07-19 2018-12-04 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US9312473B2 (en) * 2013-09-30 2016-04-12 Allegro Microsystems, Llc Vertical hall effect sensor
WO2015100214A2 (en) 2013-12-26 2015-07-02 Allegro Microsystems, Llc Methods and apparatus for sensor diagnostics
US9645220B2 (en) 2014-04-17 2017-05-09 Allegro Microsystems, Llc Circuits and methods for self-calibrating or self-testing a magnetic field sensor using phase discrimination
US9735773B2 (en) 2014-04-29 2017-08-15 Allegro Microsystems, Llc Systems and methods for sensing current through a low-side field effect transistor
US9739846B2 (en) 2014-10-03 2017-08-22 Allegro Microsystems, Llc Magnetic field sensors with self test
US9719806B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor for sensing a movement of a ferromagnetic target object
US10712403B2 (en) 2014-10-31 2020-07-14 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US9720054B2 (en) 2014-10-31 2017-08-01 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US9823092B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US9841485B2 (en) 2014-11-14 2017-12-12 Allegro Microsystems, Llc Magnetic field sensor having calibration circuitry and techniques
US10466298B2 (en) 2014-11-14 2019-11-05 Allegro Microsystems, Llc Magnetic field sensor with shared path amplifier and analog-to-digital-converter
US9804249B2 (en) 2014-11-14 2017-10-31 Allegro Microsystems, Llc Dual-path analog to digital converter
US9638764B2 (en) 2015-04-08 2017-05-02 Allegro Microsystems, Llc Electronic circuit for driving a hall effect element with a current compensated for substrate stress
US9851417B2 (en) 2015-07-28 2017-12-26 Allegro Microsystems, Llc Structure and system for simultaneous sensing a magnetic field and mechanical stress
US10107873B2 (en) 2016-03-10 2018-10-23 Allegro Microsystems, Llc Electronic circuit for compensating a sensitivity drift of a hall effect element due to stress
US10132879B2 (en) 2016-05-23 2018-11-20 Allegro Microsystems, Llc Gain equalization for multiple axis magnetic field sensing
US10260905B2 (en) 2016-06-08 2019-04-16 Allegro Microsystems, Llc Arrangements for magnetic field sensors to cancel offset variations
US10041810B2 (en) 2016-06-08 2018-08-07 Allegro Microsystems, Llc Arrangements for magnetic field sensors that act as movement detectors
US10012518B2 (en) 2016-06-08 2018-07-03 Allegro Microsystems, Llc Magnetic field sensor for sensing a proximity of an object
US10162017B2 (en) 2016-07-12 2018-12-25 Allegro Microsystems, Llc Systems and methods for reducing high order hall plate sensitivity temperature coefficients
US9628101B1 (en) * 2016-09-27 2017-04-18 Semiconductor Components Industries, Llc Methods and apparatus for an analog-to-digital converter
US11428755B2 (en) 2017-05-26 2022-08-30 Allegro Microsystems, Llc Coil actuated sensor with sensitivity detection
US10837943B2 (en) 2017-05-26 2020-11-17 Allegro Microsystems, Llc Magnetic field sensor with error calculation
US10641842B2 (en) 2017-05-26 2020-05-05 Allegro Microsystems, Llc Targets for coil actuated position sensors
US10324141B2 (en) 2017-05-26 2019-06-18 Allegro Microsystems, Llc Packages for coil actuated position sensors
US10310028B2 (en) 2017-05-26 2019-06-04 Allegro Microsystems, Llc Coil actuated pressure sensor
US10996289B2 (en) 2017-05-26 2021-05-04 Allegro Microsystems, Llc Coil actuated position sensor with reflected magnetic field
US10520559B2 (en) 2017-08-14 2019-12-31 Allegro Microsystems, Llc Arrangements for Hall effect elements and vertical epi resistors upon a substrate
US10866117B2 (en) 2018-03-01 2020-12-15 Allegro Microsystems, Llc Magnetic field influence during rotation movement of magnetic target
US10424616B1 (en) * 2018-06-20 2019-09-24 Globalfoundries Singapore Pte. Ltd. Integrated circuit devices including vertical and lateral hall elements, and methods for fabricating the same
US11255700B2 (en) 2018-08-06 2022-02-22 Allegro Microsystems, Llc Magnetic field sensor
US10823586B2 (en) 2018-12-26 2020-11-03 Allegro Microsystems, Llc Magnetic field sensor having unequally spaced magnetic field sensing elements
US11061084B2 (en) 2019-03-07 2021-07-13 Allegro Microsystems, Llc Coil actuated pressure sensor and deflectable substrate
US10955306B2 (en) 2019-04-22 2021-03-23 Allegro Microsystems, Llc Coil actuated pressure sensor and deformable substrate
US11280637B2 (en) 2019-11-14 2022-03-22 Allegro Microsystems, Llc High performance magnetic angle sensor
US11237020B2 (en) 2019-11-14 2022-02-01 Allegro Microsystems, Llc Magnetic field sensor having two rows of magnetic field sensing elements for measuring an angle of rotation of a magnet
US11194004B2 (en) 2020-02-12 2021-12-07 Allegro Microsystems, Llc Diagnostic circuits and methods for sensor test circuits
US11169223B2 (en) 2020-03-23 2021-11-09 Allegro Microsystems, Llc Hall element signal calibrating in angle sensor
US11262422B2 (en) 2020-05-08 2022-03-01 Allegro Microsystems, Llc Stray-field-immune coil-activated position sensor
US11493361B2 (en) 2021-02-26 2022-11-08 Allegro Microsystems, Llc Stray field immune coil-activated sensor
US11630130B2 (en) 2021-03-31 2023-04-18 Allegro Microsystems, Llc Channel sensitivity matching
US11578997B1 (en) 2021-08-24 2023-02-14 Allegro Microsystems, Llc Angle sensor using eddy currents

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3816766A (en) * 1973-01-29 1974-06-11 Sprague Electric Co Integrated circuit with hall cell
US4292582A (en) * 1977-06-22 1981-09-29 Nippon Klingage Kabushiki Kaisha Residual voltage regulating circuit for hall element
DE2844420A1 (de) * 1978-10-12 1980-04-24 Itt Ind Gmbh Deutsche Integriertes hall-bauelement
DE3061485D1 (en) * 1979-05-04 1983-02-03 Gen Electric Co Plc Carrier-domain magnetometers
CH664632A5 (de) * 1984-08-16 1988-03-15 Landis & Gyr Ag Schaltungsanordnung zur kompensation von schwankungen des uebertragungsfaktors eines magnetfeldsensors.
US4760285A (en) * 1987-03-30 1988-07-26 Honeywell Inc. Hall effect device with epitaxal layer resistive means for providing temperature independent sensitivity

Also Published As

Publication number Publication date
EP0338122A1 (de) 1989-10-25
FI891890A0 (fi) 1989-04-20
US4970411A (en) 1990-11-13
ATE86800T1 (de) 1993-03-15
FI891890A (fi) 1989-10-22
YU68689A (sh) 1992-07-20
ES2039019T3 (es) 1993-08-16
EP0338122B1 (de) 1993-03-10
JPH0213869A (ja) 1990-01-18

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Legal Events

Date Code Title Description
8380 Miscellaneous part iii

Free format text: DER PATENTINHABER LAUTET RICHTIG: LANDIS & GYR BUSINESS SUPPORT AG, ZUG, CH

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee