DE4309056B4 - Method and device for determining the distance and scattering intensity of scattering points - Google Patents

Method and device for determining the distance and scattering intensity of scattering points Download PDF

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DE4309056B4
DE4309056B4 DE19934309056 DE4309056A DE4309056B4 DE 4309056 B4 DE4309056 B4 DE 4309056B4 DE 19934309056 DE19934309056 DE 19934309056 DE 4309056 A DE4309056 A DE 4309056A DE 4309056 B4 DE4309056 B4 DE 4309056B4
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scattering
points
spectrum
distance
interferometer
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DE4309056A1 (en
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Gerd Haeusler
Juergen Herrmann
Jochen Neumann
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Carl Zeiss Meditec AG
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0062—Arrangements for scanning
    • A61B5/0066—Optical coherence imaging

Abstract

Published without abstract.

Description

Gegenstand der Patentanmeldung sind ein optisches Verfahren und eine Vorrichtung mit dem die Entfernung zu einem oder mehreren beleuchteten streuenden Objektpunkten mit hoher Genauigkeit bestimmt werden kann. Solche Verfahren sind wichtig für die automatisierte Vermessung von Objektoberflächen (Form-Messung). Das Verfahren und die Vorrichtung können aber auch eingesetzt werden, um Volumenstreuer zu vermessen, wenn Licht in das zu vermessende Objekt eindringen kann. Dies ist z.B. in der medizinischen Gewebediagnostik wichtig.object The patent application is an optical method and apparatus with the distance to one or more illuminated scattering Object points can be determined with high accuracy. Such Procedures are important for the automated measurement of object surfaces (shape measurement). The procedure and the device can but also used to measure volume spreaders, though Light can penetrate into the object to be measured. This is e.g. important in medical tissue diagnostics.

Es sind in der Literatur viele Abstandssensoren beschrieben (z. B. zusammefassend bei T. Strand, "Optics for Machine Vision", Proc. SPIE 456 (1984). Die meisten beruhen auf Triangulation mit strukturierter Beleuchtung, entweder inkohärent oder kohärent. Diese Methoden haben den Nachteil, daß abgeschattete Bereiche auftreten, durch den Triangulationswinkel. Von kohärenten Verfahren ist bekannt, daß die Tiefengenauigkeit durch die Beobachtungsapertur begrenzt ist (G. Häusler, „Physical Limits of 3D-Sensing" Proc. SPIE 1822 (1992)). Es sind auch einige Verfahren bekannt, die diese Beschränkung nicht haben (A. Fercher, et al "Rough surface interferometry with a tow-wavelength heterodyne speckle interferometer" Appl. Opt. 24 (1985) p. 2181, T. Dresel, G. Häusler, "Three- dimensional sensing of rough surfaces by coherence radar„, Appl. Opt. 31 (1992) p. 919).Many distance sensors are described in the literature (for example, T. Strand, "Optics for Machine Vision," Proc. SPIE 456 (1984).) Most are based on triangulation with structured illumination, either incoherent or coherent have the disadvantage that shaded areas occur due to the triangulation angle. "Coherent methods are known to limit the depth accuracy by the observation aperture (G. Häusler," Physical Limits of 3D Sensing "Proc. SPIE 1822 (1992)) Several methods are also known which do not have this limitation (A. Fercher, et al., "Rough surface interferometry with a tow-wavelength heterodyne speckle interferometer" Appl. Opt. 24 (1985) p.2181, T. Dresel, G. Häusler , "Three-dimensional sensing of rough surfaces by coherence radar " , Appl. Opt. 31 (1992) p. 919).

Eine medizinische Anwendung zur Gewebediagnostik im Volumen wurde beschrieben von D. Huang et al, "Micron resolution ranging of cornea Anterior chamber by optical reflectometry" Lasers in Surgery and medicine Vol 11, (1991) p. 419. Diese Methoden arbeiten nicht mit kohärentem Licht, erfordern aber komplizierte Heterodyn-Technologie oder mechanische Bewegung, um das Objekt in der Tiefe abzutasten.A medical application for tissue diagnostics in volume has been described by D. Huang et al, "Micron resolution ranging of cornea Anterior chamber by optical reflectometry "Lasers in surgery and medicine Vol 11, (1991) p. 419. These methods do not work with coherent Light, but require complicated heterodyne technology or mechanical Movement to scan the object in depth.

Gegenstand der Anmeldung ein Verfahren und eine Vorrichtung, das ohne mechanische Abtastung und ohne Heterodyn-Technologie auskommt. Es beruht auf der Weißlichtinterferometrie, wie in der Deutschen Patentschrift von G. Häusler "Verfahren und Einrichtung zur berührungslosen Erfassung der Oberflächengestalt von diffus streuenden Objekten" 4108944 (1991) beschrieben. Die Anordnung ist ein Interferometer. Zur Erklärung wird ein Michelson-Interferometer benutzt, aber auch andere Interferometer sind geeignet. Die Anordnung ist in 1 skizziert.The subject of the application is a method and a device which manages without mechanical scanning and without heterodyne technology. It is based on white light interferometry, as described in the German patent specification by G. Häusler "Method and device for non-contact detection of the surface shape of diffuse scattering objects" 4108944 (1991). The arrangement is an interferometer. For explanation, a Michelson interferometer is used, but other interferometers are suitable. The arrangement is in 1 outlined.

Das Objekt 1 steht in einem Interferometerarm. Es wird über den Teilerspiegel 2 und Linsen 7, 8 mit einer breitbandigen Lichtquelle 3, z. B. einer Glühlampe oder einer Superlumineszenzdiode beleuchtet. Gleichzeitig wird der Referenzarm 4 über den Teilerspiegel 2 beleuchtet. Über den Referenzspiegel 5 und den Teilerspiegel 2 kommt das Referenzlicht zurück und vereinigt sich mit dem vom Objekt 1 rückgestreuten Licht am Ausgang 6 des Interferometers. Dort wird das Licht mit Hilfe eines Spektralapparates 9, 10 in Farben zerlegt. Das Spektrum wird mit Hilfe eines ortsempfindlichen Photoempfängers 11, z. B. einer Photodiodenzeile aufgefangen und in einer Auswerteeinheit 12, z. B. einem Computer, ausgewertet.The object 1 is in an interferometer arm. It gets over the splitter mirror 2 and lenses 7 . 8th with a broadband light source 3 , z. B. lit a light bulb or a super-luminescent diode. At the same time, the reference arm 4 over the splitter mirror 2 illuminated. About the reference mirror 5 and the splitter mirror 2 the reference light comes back and unites with that of the object 1 backscattered light at the exit 6 of the interferometer. There is the light with the help of a spectral apparatus 9 . 10 disassembled into colors. The spectrum is determined using a location-sensitive photoreceiver 11 , z. B. a photodiode array and in an evaluation 12 , z. As a computer evaluated.

Aus dem Spektrum läßt sich nun die Entfernung eines oder mehrerer streuender Punkte ermitteln. Es läßt sich sogar die Intensitätsverteilung der Rückstreuung in einem Volumenstreuer ermitteln. Hierzu werden die sog. Müller'schen Streifen ausgewertet.Out the spectrum can be now determine the distance of one or more scattering points. It can be even the intensity distribution the backscatter in a volume spreader. For this purpose, the so-called Müller stripes are evaluated.

Zunächst wird die Auswertung für einen Objektpunkt, der in der Entfernung z gegenüber der Referenzebene 13, mit einer Intensität i(z) streut, erklärt.First, the evaluation for an object point that is at the distance z from the reference plane 13 , with an intensity i (z) scatters, explains.

Das Spektrum für Bliesen Punkt hat eine Intensitätsverteilung I(k,z) = 1 + i(z)cos(2kz + φ). The spectrum for Bliesen Punkt has an intensity distribution I (k, z) = 1 + i (z) cos (2kz + φ).

Dabei ist k die Wellenzahl im Spektrum, φ ist eine Zufallsphase, die darauf beruht, daß man Speckle beobachtet. φ hängt aber nur schwach von k ab und kann deshalb hier vernachlässigt werden.there k is the wavenumber in the spectrum, φ is a random phase, the based on that one speckle observed. φ hangs but only weakly from k and therefore can be neglected here.

Das Spektrum ist also mit der Ortsfrequenz "z„ moduliert. Die entstehenden hellen und dunklen Streifen bezeichnet man als Müller'sche Streifen. Man braucht also nur die Ortsfrequenz zu bestimmen, um die Entfernung des streuenden Punktes zu bestimmen. Dies ist aber bei rauhen Objekten nur möglich, wenn bestimmte Bedingungen eingehalten werden, die in der Deutschen Patentschrift 4108944 von G. Häusler beschrieben werden: es handelt sich hier nicht um ein konventionelles Interferometer mit spiegelnden Oberflächen, sondern in einem Arm befindet sich ein diffus streuendes Objekt. Daraus folgt: die Lichtquelle muß räumlich so kohärent sein, daß im rückgestreuten Licht Speckle entstehen. Denn nur dann ist Interferenz möglich. Denn nur innerhalb eines Speckles ist die Phase annähernd konstant. Weiterhin darf jede Photodiode des Empfängerarrays nicht größer als der Speckledurchmesser sein, da sonst kein oder nur geringer Interferenzkontrast sichtbar ist.The spectrum is thus modulated with the spatial frequency "z". The resulting light and dark stripes are called Muller's stripes. So you need to determine only the spatial frequency to determine the distance of the scattering point. That applies to rough objects only possible if certain conditions are met, which are described in the German patent specification 4108944 by G. Häusler: it is not a conventional interferometer with reflective surfaces, but in one arm there is a diffuse scattering object The light source must be so coherent in space that speckles are formed in the backscattered light, because only within a speckle the phase is approximately constant low interference contrast is visible.

Die Ermittlung der Frequenz "z" der Müller-Streifen erfolgt zweckmäßig durch Fourier-Transformation des Farbspektrums nach der Variablen k. Aber es ist auch eine direkte Bestimmung der Periodenlänge im Photodiodensignal möglich. Dies ist einfacher und schneller, wenn nur wenige Objektpunkte streuen.The determination of the frequency "z" of the Müller stripes is expediently carried out by Fourier transformation of the color spectrum according to the variable k. But it is also a direct determination of the period length in the photodiode signal possible. This is easier and faster if only a few object points sprinkle.

Ein enormer Vorteil des Verfahrens ist, daß die Genauigkeit der Ab standsbestimmung unabhängig von der Beobachtungsapertur ist. Dies ist nicht der Fall, bei rein kohärenten Methoden und bei fast allen kommerziellen Sensoren.One The enormous advantage of the method is that the accuracy of the Ab determination independently from the observation aperture. This is not the case when pure coherent Methods and in almost all commercial sensors.

Das Verfahren kann auch die Entfernung vieler im Volumen liegender Punkte, in verschiedenen Abständen z, bestimmen, die jeweils mit der Intensität i(z) streuen. Auf der Photodiodenzeile in der Spektralebene überlagern sich die Signale aus der gesamten Tiefe. Deshalb sieht die Zeile das Signal I(k) = ∫(1 + i(z) cos(2kz))dz The method may also determine the distance of many points lying in the volume, at different distances z, each scattering with the intensity i (z). On the photodiode line in the spectral plane, the signals are superimposed on the entire depth. That's why the line sees the signal I (k) = ∫ (1 + i (z) cos (2kz)) dz

Die „1„ im Integranden belastet die Dynamik des Empfängers, ist jedoch für die Messung unwesentlich. Im wesentlichen ist das Spektrum I(k) die Fouriertransformierte von i(z). Durch Fourier-Rück-Transformation des Signals nach k läßt sich i(z) rückgewinnen. Damit ist diese Methode eine echte tomographische Methode.The " 1 " in the integrand stresses the dynamics of the receiver, but is immaterial to the measurement. Essentially, the spectrum I (k) is the Fourier transform of i (z). By Fourier-back transformation of the signal to k, i (z) can be recovered. This makes this method a true tomographic method.

Das Signal-Rausch-Verhältnis ist günstig, weil das gesamte Signal der Photodiodenzeile nur nach einzelenen Frequenzen durchsucht wird, mit der Fourier-Transformation. Es sind keine mechanisch bewegten Teile nötig. Die Belichtungszeit kann kurz sein und damit biologische Aktivität oder Bewegung ausblenden.The Signal-to-noise ratio is cheap, because the entire signal of the photodiode array only to individual frequencies is searched with the Fourier transform. They are not mechanical moving parts needed. The exposure time can be short and thus biological activity or movement hide.

Sie ist anwendbar auf industrielle Objekte, z. B. Blick in durch scheinde Keramik, ebenso wie für biologische Objekte, z. B. Untersuchung auf subkutane Hautveränderungen, Brusttumore, etc.she is applicable to industrial objects, eg. B. Look in through Ceramics, as well as for biological objects, e.g. B. Examination for subcutaneous lesions, Breast tumors, etc.

Das Verfahren ist auch erweiterbar, durch "Lichtquellen„ in anderen Spektralbereichen, die das zu untersuchende Material durchdringen können. Z. B. Röntgenquellen, UV-Quellen, Infrarotquellen, Ultraschallquellen.The method can also be extended by "light sources " in other spectral regions that can penetrate the material under investigation, eg X-ray sources, UV sources, infrared sources, ultrasound sources.

Das Verfahren läßt sich sich nicht nur entlang einer Achse 14 anwenden, sondern man kann auch einen Schnitt senkrecht zur Zeichenebene und der Achse 14 der 1 parallel vermessen. Dazu ist nur notwendig, nicht nur einen Punkt des Objektes zu beleuchten, sondern gleichzeitig eine Linie senkrecht zur Zeichenebene. Dann muß als Empfänger statt eines linienhaften Photodiodenarrays ein flächenhaftes Array verwendet werden.The method can not be just along an axis 14 but you can also make a section perpendicular to the drawing plane and the axis 14 of the 1 measured in parallel. For this purpose, it is only necessary to illuminate not only one point of the object, but at the same time a line perpendicular to the plane of the drawing. Then, instead of a line-type photodiode array, a planar array must be used as the receiver.

Eine weitere Modifikation ist in 2 beschrieben. Die 2 ist ähnlich wie 1. Aber es ist zusätzlich in einem Interferometerarm (hier als Beispiel der Referenzarm) ein Dispersion einfahrendes Element, hier beispielsweise eine Planplatte 15, eingefügt. Diese Platte 15 bewirkt, daß das Spektrum am Ausgang des Interferometers eine charakteristische Intensitätsverteilung erhält, die vom Abstand z des Streupunktes abhängt. Die Auswertung der Intensitätsverteilung ergibt mit hoher Genauigkeit den Abstand.Another modification is in 2 described. The 2 is similar to 1 , But it is also in a Interferometerarm (here as an example of the reference) a dispersion einfahrendes element, here for example a plane plate 15 , inserted. This plate 15 causes the spectrum at the output of the interferometer receives a characteristic intensity distribution, which depends on the distance z of the scattering point. The evaluation of the intensity distribution gives the distance with high accuracy.

Die Dispersion bewirkt, daß das Interferometer nur für eine be stimmte Wellenzaha kO abgeglichen ist, nämlich für die Wellenzahl, bei der die optische Weglänge im Referenzarm und im Objektarm gleich ist. Das Spektrum I(k) hat folgenden Verlauf: I(k,kO) = 1 + cos(2da(k2 – k × kO)). The dispersion causes the interferometer to be adjusted only for a certain wavenc hawk O , namely for the wave number at which the optical path length in the reference arm and in the object arm is the same. The spectrum I (k) has the following course: I (k, k O ) = 1 + cos (2da (k 2 - k × k O )).

Der Verlauf des Spektrums I(k,kO) ist in 3 wiedergegeben. Die Wellenzahl, zu der das Spektrum symmetrisch ist, hängt vom Abstand z des Streupunktes ab. Die Symmetrie kann auf einfache Weise, z. B. durch Korrelation mit der gespiegelten Funktion, ermittelt werden.The course of the spectrum I (k, k O ) is in 3 played. The wavenumber to which the spectrum is symmetric depends on the distance z of the scattering point. The symmetry can easily, z. As determined by correlation with the mirrored function.

Claims (8)

Interferometrisches Verfahren mit: Beleuchten von in einem Arm eines Interferometers angeordneten Objektpunkten mit Licht aus einer breitbandigen Quelle, Zerlegen des Lichts am Ausgang des Interferometers in ein Spektrum und Ermitteln von Information über die Entfernung der Objektpunkte aus der Helligkeitsverteilung im Spektrum, dadurch gekennzeichnet, dass die Objektpunkte streuende Punkte sind und mit räumlich kohärentem Licht beleuchtet werden und aus der Helligkeitsverteilung im Spektrum Information über die Entfernung der streuenden Punkte und über die Streuintensität der streuenden Punkte ermittelt wird.Interferometric method comprising: illuminating object points arranged in one arm of an interferometer with light from a broadband source, decomposing the light at the output of the interferometer into a spectrum, and determining information about the distance of the object points from the brightness distribution in the spectrum, characterized in that Object points are scattering points and are illuminated with spatially coherent light and from the brightness distribution in the spectrum information about the distance of the scattering points and on the scattering intensity of the scattering points is determined. Verfahren nach Anspruch 1, dadurch gekennzeichnet, dass die Ermittlung der Entfernung und der lokalen Streuintensität durch Fourier-Tansformation des Spektrums nach der Wellenlänge erfolgt.Method according to claim 1, characterized in that that the determination of the distance and the local scattering intensity by Fourier transformation of the spectrum according to the wavelength. Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass in einem der beiden Interferometerarme zusätzlich ein dispersionerzeugendes Element eingefügt ist.Method according to claim 1 or 2, characterized that in one of the two interferometer arms additionally a dispersion-generating element added is. Verfahren nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass die Ermittlung der Entfernung eines Streupunktes dadurch erfolgt, dass die Symmetrieachse des Spektrums bestimmt wird.Method according to one of claims 1 to 3, characterized that the determination of the removal of a scattering point thereby takes place that the symmetry axis of the spectrum is determined. Vorrichtung zur interferometrischen Bestimmung von Entfernung und Streuintensität eines oder mehrer streuender Punkte (1), mit: einem Interferometer (2, 4, 5, 6), in dessen einem Arm der eine oder die mehreren streuenden Punkte angeordnet sind, einer Einrichtung mit einer Lichtquelle (3, 7, 8), die ausgebildet ist, den einen oder die mehreren streuenden Punkte (1) mit räumlich kohärenten Licht zu beleuchten, einem Spektralapparat (9, 10) zur Zerlegung des Lichts von dem Interferometerausgäng (6), einem ortsempfindlichen Photoempfänger (11), einer Auswerteeinheit (12), die ausgebildet ist, aus der vom Photoempfänger (11) erfassten Helligkeitsverteilung die Streuintensität des einen oder der mehreren streuenden Punkte und die Entfernung des einen oder der mehreren streuenden Punkte auf der Grundlage einer oder mehrerer Ortsfrequenzen zu bestimmen.Device for the interferometric determination of the distance and scattering intensity of one or more scattering points ( 1 ), with: an interferometer ( 2 . 4 . 5 . 6 ), in one arm of which one or more scattering points arranged, a device with a light source ( 3 . 7 . 8th ) which is adapted to the one or more scattering points ( 1 ) with spatially coherent light, a spectral apparatus ( 9 . 10 ) for decomposing the light from the interferometer output ( 6 ), a location-sensitive photoreceiver ( 11 ), an evaluation unit ( 12 ), which is formed from the photoreceiver ( 11 ) determine the scattering intensity of the one or more scattering points and the distance of the one or more scattering points based on one or more spatial frequencies. Vorrichtung nach Anspruch 5, dadurch gekennzeichnet, dass die Auswerteeinheit ausgebildet ist, die lokale Streuintensität des einen oder der mehreren streuenden Punkte durch Fourier-Transformation des Spektrums nach der Wellenlänge zu ermitteln.Device according to claim 5, characterized in that that the evaluation unit is designed, the local scattering intensity of the one or the multiple scattering points through Fourier transformation of the spectrum on the wavelength to investigate. Vorrichtung nach einem der Ansprüche 5 oder 6, dadurch gekennzeichnet, dass in einem der beiden Interferometerarme zusätzlich ein Dispersion erzeugendes Element eingefügt ist.Device according to one of claims 5 or 6, characterized that in one of the two interferometer arms additionally a dispersion-generating Element inserted is. Vorrichtung nach einem der Ansprüche 5 bis 7, dadurch gekennzeichnet, dass die Auswerteeinheit ausgebildet ist, die Entfernung des einen oder der mehreren streuenden Punkte durch Bestimmung der Symmetrieachse des Spektrums zu ermitteln.Device according to one of claims 5 to 7, characterized that the evaluation unit is formed, the removal of the one or the multiple scattering points by determining the axis of symmetry of the spectrum.
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