DE60039898D1 - Mems digitaler akustischer wandler mit fehlerunterdrückung - Google Patents

Mems digitaler akustischer wandler mit fehlerunterdrückung

Info

Publication number
DE60039898D1
DE60039898D1 DE60039898T DE60039898T DE60039898D1 DE 60039898 D1 DE60039898 D1 DE 60039898D1 DE 60039898 T DE60039898 T DE 60039898T DE 60039898 T DE60039898 T DE 60039898T DE 60039898 D1 DE60039898 D1 DE 60039898D1
Authority
DE
Germany
Prior art keywords
diaphragm
micromachined
depositing
substrate
acoustic transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60039898T
Other languages
English (en)
Inventor
Wayne A Loeb
John J Neumann Jr
Kaigham J Gabriel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carnegie Mellon University
Original Assignee
Carnegie Mellon University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carnegie Mellon University filed Critical Carnegie Mellon University
Application granted granted Critical
Publication of DE60039898D1 publication Critical patent/DE60039898D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Soundproofing, Sound Blocking, And Sound Damping (AREA)
  • Alarm Systems (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Details Of Audible-Bandwidth Transducers (AREA)
  • Micromachines (AREA)
DE60039898T 1999-09-13 2000-09-13 Mems digitaler akustischer wandler mit fehlerunterdrückung Expired - Lifetime DE60039898D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/395,073 US6829131B1 (en) 1999-09-13 1999-09-13 MEMS digital-to-acoustic transducer with error cancellation
PCT/US2000/025062 WO2001020948A2 (en) 1999-09-13 2000-09-13 Mems digital-to-acoustic transducer with error cancellation

Publications (1)

Publication Number Publication Date
DE60039898D1 true DE60039898D1 (de) 2008-09-25

Family

ID=23561585

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60039898T Expired - Lifetime DE60039898D1 (de) 1999-09-13 2000-09-13 Mems digitaler akustischer wandler mit fehlerunterdrückung

Country Status (8)

Country Link
US (3) US6829131B1 (de)
EP (1) EP1216602B1 (de)
JP (1) JP4987201B2 (de)
AT (1) ATE405130T1 (de)
AU (1) AU7376500A (de)
DE (1) DE60039898D1 (de)
DK (1) DK1216602T3 (de)
WO (1) WO2001020948A2 (de)

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Also Published As

Publication number Publication date
JP4987201B2 (ja) 2012-07-25
DK1216602T3 (da) 2008-12-15
JP2003509984A (ja) 2003-03-11
WO2001020948A3 (en) 2002-01-31
US7215527B2 (en) 2007-05-08
AU7376500A (en) 2001-04-17
EP1216602B1 (de) 2008-08-13
WO2001020948A2 (en) 2001-03-22
US20050013455A1 (en) 2005-01-20
ATE405130T1 (de) 2008-08-15
US20050061770A1 (en) 2005-03-24
US7019955B2 (en) 2006-03-28
US6829131B1 (en) 2004-12-07
EP1216602A2 (de) 2002-06-26

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