DE60311459D1 - Elektrostatisch betätigtes ventil - Google Patents
Elektrostatisch betätigtes ventilInfo
- Publication number
- DE60311459D1 DE60311459D1 DE60311459T DE60311459T DE60311459D1 DE 60311459 D1 DE60311459 D1 DE 60311459D1 DE 60311459 T DE60311459 T DE 60311459T DE 60311459 T DE60311459 T DE 60311459T DE 60311459 D1 DE60311459 D1 DE 60311459D1
- Authority
- DE
- Germany
- Prior art keywords
- actuated valve
- electrostatic actuated
- electrostatic
- valve
- actuated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0015—Diaphragm or membrane valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0028—Valves having multiple inlets or outlets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0051—Electric operating means therefor using electrostatic means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86493—Multi-way valve unit
- Y10T137/86879—Reciprocating valve unit
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87788—With valve or movable deflector at junction
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US174851 | 2002-06-19 | ||
US10/174,851 US6837476B2 (en) | 2002-06-19 | 2002-06-19 | Electrostatically actuated valve |
PCT/US2003/019191 WO2004001261A1 (en) | 2002-06-19 | 2003-06-18 | Electrostatically actuated valve |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60311459D1 true DE60311459D1 (de) | 2007-03-15 |
DE60311459T2 DE60311459T2 (de) | 2007-10-31 |
Family
ID=29733702
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE2003611459 Expired - Lifetime DE60311459T2 (de) | 2002-06-19 | 2003-06-18 | Elektrostatisch betätigtes ventil |
Country Status (5)
Country | Link |
---|---|
US (2) | US6837476B2 (de) |
EP (1) | EP1514045B1 (de) |
AU (1) | AU2003256270A1 (de) |
DE (1) | DE60311459T2 (de) |
WO (1) | WO2004001261A1 (de) |
Families Citing this family (66)
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US8218262B2 (en) | 2005-05-09 | 2012-07-10 | The Invention Science Fund I, Llc | Method of manufacturing a limited use data storing device including structured data and primary and secondary read-support information |
US7512959B2 (en) * | 2005-05-09 | 2009-03-31 | Searete Llc | Rotation responsive disk activation and deactivation mechanisms |
US8121016B2 (en) * | 2005-05-09 | 2012-02-21 | The Invention Science Fund I, Llc | Rotation responsive disk activation and deactivation mechanisms |
US8099608B2 (en) * | 2005-05-09 | 2012-01-17 | The Invention Science Fund I, Llc | Limited use data storing device |
US7519980B2 (en) * | 2005-05-09 | 2009-04-14 | Searete Llc | Fluid mediated disk activation and deactivation mechanisms |
US7770028B2 (en) * | 2005-09-09 | 2010-08-03 | Invention Science Fund 1, Llc | Limited use data storing device |
US9396752B2 (en) * | 2005-08-05 | 2016-07-19 | Searete Llc | Memory device activation and deactivation |
US7916615B2 (en) * | 2005-06-09 | 2011-03-29 | The Invention Science Fund I, Llc | Method and system for rotational control of data storage devices |
US7694316B2 (en) * | 2005-05-09 | 2010-04-06 | The Invention Science Fund I, Llc | Fluid mediated disk activation and deactivation mechanisms |
US8462605B2 (en) | 2005-05-09 | 2013-06-11 | The Invention Science Fund I, Llc | Method of manufacturing a limited use data storing device |
US8140745B2 (en) * | 2005-09-09 | 2012-03-20 | The Invention Science Fund I, Llc | Data retrieval methods |
US7565596B2 (en) * | 2005-09-09 | 2009-07-21 | Searete Llc | Data recovery systems |
US7907486B2 (en) * | 2006-06-20 | 2011-03-15 | The Invention Science Fund I, Llc | Rotation responsive disk activation and deactivation mechanisms |
US8220014B2 (en) | 2005-05-09 | 2012-07-10 | The Invention Science Fund I, Llc | Modifiable memory devices having limited expected lifetime |
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US8628055B2 (en) * | 2005-07-27 | 2014-01-14 | The Board Of Trustees Of The University Of Illinois | Bi-direction rapid action electrostatically actuated microvalve |
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US8432777B2 (en) | 2006-06-19 | 2013-04-30 | The Invention Science Fund I, Llc | Method and system for fluid mediated disk activation and deactivation |
US8264928B2 (en) | 2006-06-19 | 2012-09-11 | The Invention Science Fund I, Llc | Method and system for fluid mediated disk activation and deactivation |
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US6179586B1 (en) * | 1999-09-15 | 2001-01-30 | Honeywell International Inc. | Dual diaphragm, single chamber mesopump |
US6240944B1 (en) | 1999-09-23 | 2001-06-05 | Honeywell International Inc. | Addressable valve arrays for proportional pressure or flow control |
-
2002
- 2002-06-19 US US10/174,851 patent/US6837476B2/en not_active Expired - Fee Related
-
2003
- 2003-06-18 AU AU2003256270A patent/AU2003256270A1/en not_active Abandoned
- 2003-06-18 DE DE2003611459 patent/DE60311459T2/de not_active Expired - Lifetime
- 2003-06-18 EP EP20030761102 patent/EP1514045B1/de not_active Expired - Fee Related
- 2003-06-18 WO PCT/US2003/019191 patent/WO2004001261A1/en active IP Right Grant
-
2004
- 2004-11-03 US US10/980,685 patent/US6968862B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US6968862B2 (en) | 2005-11-29 |
EP1514045A1 (de) | 2005-03-16 |
US20050062001A1 (en) | 2005-03-24 |
AU2003256270A1 (en) | 2004-01-06 |
US6837476B2 (en) | 2005-01-04 |
DE60311459T2 (de) | 2007-10-31 |
US20030234376A1 (en) | 2003-12-25 |
WO2004001261A1 (en) | 2003-12-31 |
EP1514045B1 (de) | 2007-01-24 |
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