DE69128644T2 - Modular-aufgebautes luminiszenz-messsystem mit schneller digitaler signal-verarbeitung - Google Patents
Modular-aufgebautes luminiszenz-messsystem mit schneller digitaler signal-verarbeitungInfo
- Publication number
- DE69128644T2 DE69128644T2 DE69128644T DE69128644T DE69128644T2 DE 69128644 T2 DE69128644 T2 DE 69128644T2 DE 69128644 T DE69128644 T DE 69128644T DE 69128644 T DE69128644 T DE 69128644T DE 69128644 T2 DE69128644 T2 DE 69128644T2
- Authority
- DE
- Germany
- Prior art keywords
- luminiscence
- modular
- signal processing
- digital signal
- measuring system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
- G01K11/3206—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres at discrete locations in the fibre, e.g. using Bragg scattering
- G01K11/3213—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres at discrete locations in the fibre, e.g. using Bragg scattering using changes in luminescence, e.g. at the distal end of the fibres
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/621,900 US5107445A (en) | 1990-12-04 | 1990-12-04 | Modular luminescence-based measuring system using fast digital signal processing |
PCT/US1991/008511 WO1992010132A1 (en) | 1990-12-04 | 1991-11-14 | Modular luminescence-based measuring system using fast digital signal processing |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69128644D1 DE69128644D1 (de) | 1998-02-12 |
DE69128644T2 true DE69128644T2 (de) | 1998-05-28 |
Family
ID=24492127
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69128644T Expired - Lifetime DE69128644T2 (de) | 1990-12-04 | 1991-11-14 | Modular-aufgebautes luminiszenz-messsystem mit schneller digitaler signal-verarbeitung |
Country Status (5)
Country | Link |
---|---|
US (2) | US5107445A (de) |
EP (1) | EP0560903B1 (de) |
JP (1) | JP3249820B2 (de) |
DE (1) | DE69128644T2 (de) |
WO (1) | WO1992010132A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102017204082A1 (de) | 2017-03-13 | 2018-09-13 | Hamilton Bonaduz Ag | Vorrichtung zur temperaturkompensierten optischen Erfassung eines Sauerstoffgehalts eines Fluids |
Families Citing this family (74)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5223841A (en) * | 1992-06-29 | 1993-06-29 | The United States Of America As Represented By The Secretary Of The Navy | Calibration method and apparatus for collecting the output of an array of detector cells |
US5470155A (en) * | 1993-06-11 | 1995-11-28 | Luxtron Corporation | Apparatus and method for measuring temperatures at a plurality of locations using luminescent-type temperature sensors which are excited in a time sequence |
US5414266A (en) * | 1993-06-11 | 1995-05-09 | Luxtron Corporation | Measuring system employing a luminescent sensor and methods of designing the system |
US5891352A (en) | 1993-09-16 | 1999-04-06 | Luxtron Corporation | Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment |
AU718841B2 (en) * | 1995-10-31 | 2000-04-20 | Indigo Medical, Incorporated | Light-diffusing device for an optical fiber, methods of producing and using same, and apparatus for diffusing light from an optical fiber |
US5870511A (en) * | 1997-01-27 | 1999-02-09 | Sentec Corporation | Fiber optic temperature sensor |
US20040199402A1 (en) * | 1996-09-06 | 2004-10-07 | Walker Jay S. | Method and system for anonymous communication of information about a home |
US6123455A (en) * | 1997-05-02 | 2000-09-26 | American Iron And Steel Institute | Phosphor thermometry system |
US6091563A (en) * | 1997-09-26 | 2000-07-18 | Iomega Corporation | Latent illuminance discrimination marker system for data storage cartridges |
US6181662B1 (en) | 1997-09-26 | 2001-01-30 | Iomega Corporation | Latent irradiance discrimination method and marker system for cartridgeless data storage disks |
US6359745B1 (en) | 1997-09-26 | 2002-03-19 | Iomega Corporation | Latent illuminance discrimination marker system for data storage cartridges |
US6201662B1 (en) | 1998-09-25 | 2001-03-13 | Iomega Corporation | Latent illuminance discrimination marker with reflective layer for data storage cartridges |
US6071009A (en) * | 1997-10-03 | 2000-06-06 | Micron Technology, Inc. | Semiconductor wirebond machine leadframe thermal map system |
GB2330903B (en) * | 1997-11-03 | 2002-05-15 | Cancer Res Campaign Tech | Sensing the concentration of a substance |
US5949539A (en) * | 1997-11-10 | 1999-09-07 | American Iron And Steel Institute | Real-time method and apparatus for measuring the decay-time constant of a fluorescing phosphor |
US6400476B1 (en) * | 1997-12-31 | 2002-06-04 | Cisco Photonics Italy S.R.L. | Method and apparatus for transparent optical communication with two-fiber bidirectional ring with autoprotection and management of low priority traffic |
FR2775774B1 (fr) | 1998-03-06 | 2000-04-14 | Schneider Electric Ind Sa | Sonde de mesure comportant au moins une fibre optique, dispositif de mesure et installation comportant au moins une telle sonde |
US6739947B1 (en) | 1998-11-06 | 2004-05-25 | Beaver Creek Concepts Inc | In situ friction detector method and apparatus |
US6656023B1 (en) * | 1998-11-06 | 2003-12-02 | Beaver Creek Concepts Inc | In situ control with lubricant and tracking |
US6346202B1 (en) | 1999-03-25 | 2002-02-12 | Beaver Creek Concepts Inc | Finishing with partial organic boundary layer |
US6634927B1 (en) | 1998-11-06 | 2003-10-21 | Charles J Molnar | Finishing element using finishing aids |
US6267644B1 (en) | 1998-11-06 | 2001-07-31 | Beaver Creek Concepts Inc | Fixed abrasive finishing element having aids finishing method |
US6568989B1 (en) | 1999-04-01 | 2003-05-27 | Beaver Creek Concepts Inc | Semiconductor wafer finishing control |
US6541381B2 (en) | 1998-11-06 | 2003-04-01 | Beaver Creek Concepts Inc | Finishing method for semiconductor wafers using a lubricating boundary layer |
US7131890B1 (en) | 1998-11-06 | 2006-11-07 | Beaver Creek Concepts, Inc. | In situ finishing control |
US6428388B2 (en) | 1998-11-06 | 2002-08-06 | Beaver Creek Concepts Inc. | Finishing element with finishing aids |
US6291349B1 (en) | 1999-03-25 | 2001-09-18 | Beaver Creek Concepts Inc | Abrasive finishing with partial organic boundary layer |
US6297924B1 (en) | 1998-11-13 | 2001-10-02 | Iomega Corporation | System and method for cartridge detection and verification using signal comparison |
US6551933B1 (en) | 1999-03-25 | 2003-04-22 | Beaver Creek Concepts Inc | Abrasive finishing with lubricant and tracking |
US6402986B1 (en) | 1999-07-16 | 2002-06-11 | The Trustees Of Boston University | Compositions and methods for luminescence lifetime comparison |
AUPQ270599A0 (en) * | 1999-09-08 | 1999-09-30 | Varian Australia Pty Ltd | Spectrophotometer apparatus and phosphorescence measurement |
AU771340B2 (en) * | 1999-09-08 | 2004-03-18 | Varian Australia Pty Ltd | Spectrometer attachments and phosphorescence decay measurement |
US6481886B1 (en) | 2000-02-24 | 2002-11-19 | Applied Materials Inc. | Apparatus for measuring pedestal and substrate temperature in a semiconductor wafer processing system |
US6932517B2 (en) | 2000-10-27 | 2005-08-23 | Ethicon Endo-Surgery, Inc. | Connector incorporating a contact pad surface on a plane parallel to a longitudinal axis |
US6796883B1 (en) | 2001-03-15 | 2004-09-28 | Beaver Creek Concepts Inc | Controlled lubricated finishing |
US7080940B2 (en) * | 2001-04-20 | 2006-07-25 | Luxtron Corporation | In situ optical surface temperature measuring techniques and devices |
US6663296B1 (en) * | 2001-04-23 | 2003-12-16 | Thomas H. Blair | Optoelectric module |
US6796710B2 (en) * | 2001-06-08 | 2004-09-28 | Ethicon Endo-Surgery, Inc. | System and method of measuring and controlling temperature of optical fiber tip in a laser system |
KR100454248B1 (ko) * | 2001-08-23 | 2004-10-26 | 주식회사 비전과학 | 신형 루미노미터 및 그 제어방법 |
US7156717B2 (en) * | 2001-09-20 | 2007-01-02 | Molnar Charles J | situ finishing aid control |
CA2372637A1 (en) * | 2002-02-20 | 2003-08-20 | Institut National D'optique | Packaged optical sensors on the side of optical fibres |
GB0302489D0 (en) * | 2003-02-04 | 2003-03-05 | Bae Systems Plc | Improvements relating to pressure sensitive paint |
US7633033B2 (en) | 2004-01-09 | 2009-12-15 | General Lasertronics Corporation | Color sensing for laser decoating |
US7336168B2 (en) * | 2005-06-06 | 2008-02-26 | Lawrence Kates | System and method for variable threshold sensor |
US7578616B2 (en) * | 2005-09-22 | 2009-08-25 | Lam Research Corporation | Apparatus for determining a temperature of a substrate and methods therefor |
US7357326B2 (en) * | 2005-11-30 | 2008-04-15 | Industrial Data Entry Automation Systems Incorporated | Fluorescent or luminescent optical symbol scanner |
US20070171958A1 (en) * | 2006-01-23 | 2007-07-26 | Anh Hoang | Electrical device measurement probes |
US20080033300A1 (en) * | 2006-08-04 | 2008-02-07 | Anh Hoang | Systems and methods for monitoring temperature during electrosurgery or laser therapy |
US8277119B2 (en) * | 2006-12-19 | 2012-10-02 | Vibrosystm, Inc. | Fiber optic temperature sensor |
WO2008118365A1 (en) | 2007-03-22 | 2008-10-02 | General Lasertronics Corporation | Methods for stripping and modifying surfaces with laser-induced ablation |
US20080267257A1 (en) * | 2007-04-27 | 2008-10-30 | Sokudo Co., Ltd. | Method and System for Detecting Substrate Temperature in a Track Lithography Tool |
US20080281305A1 (en) * | 2007-05-10 | 2008-11-13 | Cardiac Pacemakers, Inc. | Method and apparatus for relieving angina symptoms using light |
US20090008827A1 (en) * | 2007-07-05 | 2009-01-08 | General Lasertronics Corporation, A Corporation Of The State Of California | Aperture adapters for laser-based coating removal end-effector |
JP5001119B2 (ja) * | 2007-11-22 | 2012-08-15 | アズビル株式会社 | 温度センサプローブ、及びその製造方法 |
JP5299812B2 (ja) * | 2008-03-31 | 2013-09-25 | アズビル株式会社 | 蛍光温度センサ |
JP5340628B2 (ja) * | 2008-04-21 | 2013-11-13 | アズビル株式会社 | 蛍光温度センサ |
JP5676852B2 (ja) * | 2009-03-10 | 2015-02-25 | アズビル株式会社 | 蛍光温度センサ |
JP5430191B2 (ja) * | 2009-03-18 | 2014-02-26 | アズビル株式会社 | 蛍光温度センサ及びその故障判定方法 |
CA2786919C (en) | 2010-04-17 | 2015-06-23 | Powell Canada Inc. | Photoluminescent temperature sensor utilizing a singular element for excitation and photodetection |
US10112257B1 (en) | 2010-07-09 | 2018-10-30 | General Lasertronics Corporation | Coating ablating apparatus with coating removal detection |
US9335211B2 (en) * | 2011-06-06 | 2016-05-10 | Sicpa Holding Sa | In-line decay-time scanner |
US8695430B1 (en) | 2011-11-23 | 2014-04-15 | The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration | Temperature and pressure sensors based on spin-allowed broadband luminescence of doped orthorhombic perovskite structures |
US9895771B2 (en) | 2012-02-28 | 2018-02-20 | General Lasertronics Corporation | Laser ablation for the environmentally beneficial removal of surface coatings |
US9291564B2 (en) * | 2013-04-05 | 2016-03-22 | Datacolor Holding Ag | Method and apparatus for aligning measured spectral radiance factors among different instruments |
CN103674916B (zh) * | 2013-12-11 | 2016-01-13 | 王兵 | 新型荧光信号解调装置以及荧光信号解调方法 |
US10086597B2 (en) | 2014-01-21 | 2018-10-02 | General Lasertronics Corporation | Laser film debonding method |
JP6363680B2 (ja) * | 2016-11-16 | 2018-07-25 | ファナック株式会社 | レーザ装置 |
US11129679B2 (en) | 2017-11-14 | 2021-09-28 | Mako Surgical Corp. | Fiber optic tracking system |
CN111504496B (zh) * | 2019-01-31 | 2021-11-12 | 西安和其光电科技股份有限公司 | 一种用于荧光解调温度的信号处理方法 |
US10862502B2 (en) | 2019-03-04 | 2020-12-08 | Analog Devices International Unlimited Company | ADC output drift correction techniques |
EP3875929A1 (de) * | 2020-03-03 | 2021-09-08 | Vitesco Technologies GmbH | Verfahren und elektronische verarbeitungseinheit zur messung und verarbeitung von optischen signalen zur temperaturmessung |
US10793772B1 (en) | 2020-03-13 | 2020-10-06 | Accelovant Technologies Corporation | Monolithic phosphor composite for sensing systems |
US11359976B2 (en) | 2020-10-23 | 2022-06-14 | Accelovant Technologies Corporation | Multipoint surface temperature measurement system and method thereof |
CA3137183C (en) | 2020-11-05 | 2024-02-20 | Accelovant Technologies Corporation | Optoelectronic transducer module for thermographic temperature measurements |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4215275A (en) * | 1977-12-07 | 1980-07-29 | Luxtron Corporation | Optical temperature measurement technique utilizing phosphors |
US4223226A (en) * | 1978-07-26 | 1980-09-16 | Rockwell International Corporation | Fiber optic temperature sensor |
IT1159115B (it) * | 1978-09-22 | 1987-02-25 | Cise Spa | Strumento opto-elettronico per misure a distanza di temperature |
USRE31832E (en) * | 1979-09-10 | 1985-02-12 | Temperature probe | |
US4437772A (en) * | 1979-09-10 | 1984-03-20 | Samulski Thaddeus V | Luminescent decay time techniques for temperature measurement |
US4577109A (en) * | 1980-10-06 | 1986-03-18 | Regents Of The University Of California | Remote multi-position information gathering system and method |
US4459044A (en) * | 1981-02-09 | 1984-07-10 | Luxtron Corporation | Optical system for an instrument to detect the temperature of an optical fiber phosphor probe |
DE3202089C2 (de) * | 1982-01-23 | 1985-01-17 | Fa. Carl Zeiss, 7920 Heidenheim | Faseroptischer Temperatursensor |
SE435967B (sv) * | 1982-04-01 | 1984-10-29 | Asea Ab | Fiberoptiskt luminiscensmetdon |
US4490822A (en) * | 1982-06-17 | 1984-12-25 | Allied Corporation | Cr-Doped yttrium gallium garnet laser |
US4708494A (en) * | 1982-08-06 | 1987-11-24 | Marcos Kleinerman | Methods and devices for the optical measurement of temperature with luminescent materials |
US5004913A (en) * | 1982-08-06 | 1991-04-02 | Marcos Kleinerman | Remote measurement of physical variables with fiber optic systems - methods, materials and devices |
JPS60164225A (ja) * | 1984-02-06 | 1985-08-27 | Nec Corp | 温度検知装置 |
JPS60164227A (ja) * | 1984-02-06 | 1985-08-27 | Nec Corp | 温度検知方法 |
US4564289A (en) * | 1984-07-31 | 1986-01-14 | Geo-Centers, Inc. | Single mode optical fiber polarimetric stress sensor having optical common mode rejection |
DE3431997A1 (de) * | 1984-08-31 | 1986-03-13 | Fa. Carl Zeiss, 7920 Heidenheim | Faseroptischer sensor mit einer fluoreszierenden substanz |
US4652143A (en) * | 1984-11-29 | 1987-03-24 | Luxtron Corporation | Optical temperature measurement techniques |
DE3510704A1 (de) * | 1985-03-23 | 1986-09-25 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Optisches messgeraet |
US4789992A (en) * | 1985-10-15 | 1988-12-06 | Luxtron Corporation | Optical temperature measurement techniques |
US4988212A (en) * | 1985-10-25 | 1991-01-29 | Luxtron Corporation | Fiberoptic sensing of temperature and/or other physical parameters |
DE3770501D1 (de) * | 1986-02-21 | 1991-07-11 | Degussa | Verfahren und vorrichtung zur messung der fluoreszenz-abklingdauer einer fluoreszierenden substanz. |
US4895156A (en) * | 1986-07-02 | 1990-01-23 | Schulze John E | Sensor system using fluorometric decay measurements |
GB8621077D0 (en) * | 1986-09-01 | 1986-10-08 | Gen Electric Co Plc | Temperature sensing system |
GB8706507D0 (en) * | 1987-03-19 | 1987-04-23 | Land Infrared Ltd | Radiation thermometer |
US4716363A (en) * | 1987-05-08 | 1987-12-29 | Hewlett-Packard Company | Exponential decay time constant measurement using frequency of offset phase-locked loop: system and method |
DE8808168U1 (de) * | 1988-05-12 | 1988-09-15 | Degussa Ag, 6000 Frankfurt, De | |
KR960013995B1 (ko) * | 1988-07-15 | 1996-10-11 | 도오교오 에레구토론 가부시끼가이샤 | 반도체 웨이퍼 기판의 표면온도 측정 방법 및 열처리 장치 |
-
1990
- 1990-12-04 US US07/621,900 patent/US5107445A/en not_active Expired - Lifetime
-
1991
- 1991-10-08 US US07/773,039 patent/US5351268A/en not_active Expired - Lifetime
- 1991-11-14 EP EP92901955A patent/EP0560903B1/de not_active Expired - Lifetime
- 1991-11-14 WO PCT/US1991/008511 patent/WO1992010132A1/en active IP Right Grant
- 1991-11-14 JP JP50108392A patent/JP3249820B2/ja not_active Expired - Fee Related
- 1991-11-14 DE DE69128644T patent/DE69128644T2/de not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102017204082A1 (de) | 2017-03-13 | 2018-09-13 | Hamilton Bonaduz Ag | Vorrichtung zur temperaturkompensierten optischen Erfassung eines Sauerstoffgehalts eines Fluids |
US11119036B2 (en) | 2017-03-13 | 2021-09-14 | Hamilton Bonaduz Ag | Device for the temperature-compensated optical detection of an oxygen content of a fluid |
US11668649B2 (en) | 2017-03-13 | 2023-06-06 | Hamilton Bonaduz Ag | Device for the temperature-compensated optical detection of an oxygen content of a fluid |
Also Published As
Publication number | Publication date |
---|---|
WO1992010132A1 (en) | 1992-06-25 |
JP3249820B2 (ja) | 2002-01-21 |
DE69128644D1 (de) | 1998-02-12 |
JPH11508352A (ja) | 1999-07-21 |
EP0560903A1 (de) | 1993-09-22 |
US5351268A (en) | 1994-09-27 |
US5107445A (en) | 1992-04-21 |
EP0560903B1 (de) | 1998-01-07 |
EP0560903A4 (en) | 1993-12-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |