DE69130163D1 - Verfahren zur Herstellung einer MOS-EEPROM-Transistorzelle mit schwebendem Gate - Google Patents
Verfahren zur Herstellung einer MOS-EEPROM-Transistorzelle mit schwebendem GateInfo
- Publication number
- DE69130163D1 DE69130163D1 DE69130163T DE69130163T DE69130163D1 DE 69130163 D1 DE69130163 D1 DE 69130163D1 DE 69130163 T DE69130163 T DE 69130163T DE 69130163 T DE69130163 T DE 69130163T DE 69130163 D1 DE69130163 D1 DE 69130163D1
- Authority
- DE
- Germany
- Prior art keywords
- field oxide
- floating gate
- drain
- walls
- design
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000004888 barrier function Effects 0.000 abstract 3
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- 239000007943 implant Substances 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
- H01L29/7883—Programmable transistors with only two possible levels of programmation charging by tunnelling of carriers, e.g. Fowler-Nordheim tunnelling
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/616,460 US5086325A (en) | 1990-11-21 | 1990-11-21 | Narrow width EEPROM with single diffusion electrode formation |
PCT/US1991/008508 WO1992010002A1 (en) | 1990-11-21 | 1991-11-13 | Narrow width eeprom with single diffusion electrode formation |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69130163D1 true DE69130163D1 (de) | 1998-10-15 |
DE69130163T2 DE69130163T2 (de) | 1999-05-20 |
Family
ID=24469563
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69130163T Expired - Fee Related DE69130163T2 (de) | 1990-11-21 | 1991-11-13 | Verfahren zur Herstellung einer MOS-EEPROM-Transistorzelle mit schwebendem Gate |
Country Status (7)
Country | Link |
---|---|
US (1) | US5086325A (de) |
EP (1) | EP0511370B1 (de) |
JP (1) | JP3129438B2 (de) |
KR (1) | KR100193551B1 (de) |
AT (1) | ATE171011T1 (de) |
DE (1) | DE69130163T2 (de) |
WO (1) | WO1992010002A1 (de) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3344598B2 (ja) * | 1993-11-25 | 2002-11-11 | 株式会社デンソー | 半導体不揮発メモリ装置 |
WO1995030226A1 (en) * | 1994-04-29 | 1995-11-09 | Atmel Corporation | High-speed, non-volatile electrically programmable and erasable cell and method |
DE19526012C2 (de) * | 1995-07-17 | 1997-09-11 | Siemens Ag | Elektrisch lösch- und programmierbare nicht-flüchtige Speicherzelle |
US6768165B1 (en) * | 1997-08-01 | 2004-07-27 | Saifun Semiconductors Ltd. | Two bit non-volatile electrically erasable and programmable semiconductor memory cell utilizing asymmetrical charge trapping |
US6614692B2 (en) * | 2001-01-18 | 2003-09-02 | Saifun Semiconductors Ltd. | EEPROM array and method for operation thereof |
US6584017B2 (en) | 2001-04-05 | 2003-06-24 | Saifun Semiconductors Ltd. | Method for programming a reference cell |
US6369422B1 (en) | 2001-05-01 | 2002-04-09 | Atmel Corporation | Eeprom cell with asymmetric thin window |
US7098107B2 (en) * | 2001-11-19 | 2006-08-29 | Saifun Semiconductor Ltd. | Protective layer in memory device and method therefor |
US6583007B1 (en) * | 2001-12-20 | 2003-06-24 | Saifun Semiconductors Ltd. | Reducing secondary injection effects |
US6700818B2 (en) * | 2002-01-31 | 2004-03-02 | Saifun Semiconductors Ltd. | Method for operating a memory device |
US6917544B2 (en) * | 2002-07-10 | 2005-07-12 | Saifun Semiconductors Ltd. | Multiple use memory chip |
US7136304B2 (en) | 2002-10-29 | 2006-11-14 | Saifun Semiconductor Ltd | Method, system and circuit for programming a non-volatile memory array |
US7178004B2 (en) * | 2003-01-31 | 2007-02-13 | Yan Polansky | Memory array programming circuit and a method for using the circuit |
US7142464B2 (en) | 2003-04-29 | 2006-11-28 | Saifun Semiconductors Ltd. | Apparatus and methods for multi-level sensing in a memory array |
US7123532B2 (en) * | 2003-09-16 | 2006-10-17 | Saifun Semiconductors Ltd. | Operating array cells with matched reference cells |
US7484329B2 (en) | 2003-11-20 | 2009-02-03 | Seaweed Bio-Technology Inc. | Technology for cultivation of Porphyra and other seaweeds in land-based sea water ponds |
US7317633B2 (en) | 2004-07-06 | 2008-01-08 | Saifun Semiconductors Ltd | Protection of NROM devices from charge damage |
US7095655B2 (en) * | 2004-08-12 | 2006-08-22 | Saifun Semiconductors Ltd. | Dynamic matching of signal path and reference path for sensing |
US20060068551A1 (en) * | 2004-09-27 | 2006-03-30 | Saifun Semiconductors, Ltd. | Method for embedding NROM |
US7638850B2 (en) * | 2004-10-14 | 2009-12-29 | Saifun Semiconductors Ltd. | Non-volatile memory structure and method of fabrication |
US20060146624A1 (en) * | 2004-12-02 | 2006-07-06 | Saifun Semiconductors, Ltd. | Current folding sense amplifier |
US7535765B2 (en) | 2004-12-09 | 2009-05-19 | Saifun Semiconductors Ltd. | Non-volatile memory device and method for reading cells |
EP1684307A1 (de) | 2005-01-19 | 2006-07-26 | Saifun Semiconductors Ltd. | Verfahren, Schaltung und System zum Löschen einer oder mehrerer nichtflüchtiger Speicherzellen |
US8053812B2 (en) | 2005-03-17 | 2011-11-08 | Spansion Israel Ltd | Contact in planar NROM technology |
US20070141788A1 (en) * | 2005-05-25 | 2007-06-21 | Ilan Bloom | Method for embedding non-volatile memory with logic circuitry |
US7804126B2 (en) * | 2005-07-18 | 2010-09-28 | Saifun Semiconductors Ltd. | Dense non-volatile memory array and method of fabrication |
US7668017B2 (en) | 2005-08-17 | 2010-02-23 | Saifun Semiconductors Ltd. | Method of erasing non-volatile memory cells |
US20070096199A1 (en) * | 2005-09-08 | 2007-05-03 | Eli Lusky | Method of manufacturing symmetric arrays |
US7221138B2 (en) | 2005-09-27 | 2007-05-22 | Saifun Semiconductors Ltd | Method and apparatus for measuring charge pump output current |
US20070087503A1 (en) * | 2005-10-17 | 2007-04-19 | Saifun Semiconductors, Ltd. | Improving NROM device characteristics using adjusted gate work function |
US20070120180A1 (en) * | 2005-11-25 | 2007-05-31 | Boaz Eitan | Transition areas for dense memory arrays |
US7352627B2 (en) * | 2006-01-03 | 2008-04-01 | Saifon Semiconductors Ltd. | Method, system, and circuit for operating a non-volatile memory array |
US7808818B2 (en) * | 2006-01-12 | 2010-10-05 | Saifun Semiconductors Ltd. | Secondary injection for NROM |
US20070173017A1 (en) * | 2006-01-20 | 2007-07-26 | Saifun Semiconductors, Ltd. | Advanced non-volatile memory array and method of fabrication thereof |
US7760554B2 (en) * | 2006-02-21 | 2010-07-20 | Saifun Semiconductors Ltd. | NROM non-volatile memory and mode of operation |
US8253452B2 (en) | 2006-02-21 | 2012-08-28 | Spansion Israel Ltd | Circuit and method for powering up an integrated circuit and an integrated circuit utilizing same |
US7692961B2 (en) * | 2006-02-21 | 2010-04-06 | Saifun Semiconductors Ltd. | Method, circuit and device for disturb-control of programming nonvolatile memory cells by hot-hole injection (HHI) and by channel hot-electron (CHE) injection |
US7638835B2 (en) | 2006-02-28 | 2009-12-29 | Saifun Semiconductors Ltd. | Double density NROM with nitride strips (DDNS) |
US7701779B2 (en) * | 2006-04-27 | 2010-04-20 | Sajfun Semiconductors Ltd. | Method for programming a reference cell |
US7605579B2 (en) * | 2006-09-18 | 2009-10-20 | Saifun Semiconductors Ltd. | Measuring and controlling current consumption and output current of charge pumps |
KR101648542B1 (ko) | 2010-06-04 | 2016-08-16 | 가부시키가이샤 씽크. 라보라토리 | 레이저 노광 방법 및 제품 |
IN2014CN04042A (de) | 2012-02-07 | 2015-10-23 | Think Labs Kk |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4132904A (en) * | 1977-07-28 | 1979-01-02 | Hughes Aircraft Company | Volatile/non-volatile logic latch circuit |
US4203158A (en) * | 1978-02-24 | 1980-05-13 | Intel Corporation | Electrically programmable and erasable MOS floating gate memory device employing tunneling and method of fabricating same |
US4377818A (en) * | 1978-11-02 | 1983-03-22 | Texas Instruments Incorporated | High density electrically programmable ROM |
US4375087C1 (en) * | 1980-04-09 | 2002-01-01 | Hughes Aircraft Co | Electrically erasable programmable read-only memory |
US4477825A (en) * | 1981-12-28 | 1984-10-16 | National Semiconductor Corporation | Electrically programmable and erasable memory cell |
JPS58147154A (ja) * | 1982-02-26 | 1983-09-01 | Toshiba Corp | 不揮発性半導体メモリ装置 |
EP0160003B1 (de) * | 1983-08-29 | 1990-03-14 | Seeq Technology, Incorporated | Mos-speicherzelle mit schwimmendem gate und verfahren zu ihrer verfertigung |
US4822750A (en) * | 1983-08-29 | 1989-04-18 | Seeq Technology, Inc. | MOS floating gate memory cell containing tunneling diffusion region in contact with drain and extending under edges of field oxide |
JPS60161673A (ja) * | 1984-02-02 | 1985-08-23 | Toshiba Corp | 不揮発性半導体メモリ |
EP0164605B1 (de) * | 1984-05-17 | 1990-02-28 | Kabushiki Kaisha Toshiba | Verfahren zur Herstellung eines nichtflüchtigen Halbleiter-EEPROM-Elementes |
JPS6415985A (en) * | 1987-07-09 | 1989-01-19 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS6437876A (en) * | 1987-08-03 | 1989-02-08 | Fujitsu Ltd | Manufacture of semiconductor device |
JP2672530B2 (ja) * | 1987-10-30 | 1997-11-05 | 松下電子工業株式会社 | 半導体記憶装置の製造方法 |
US4851361A (en) * | 1988-02-04 | 1989-07-25 | Atmel Corporation | Fabrication process for EEPROMS with high voltage transistors |
US5008721A (en) * | 1988-07-15 | 1991-04-16 | Texas Instruments Incorporated | Electrically-erasable, electrically-programmable read-only memory cell with self-aligned tunnel |
FR2638285B1 (fr) * | 1988-10-25 | 1992-06-19 | Commissariat Energie Atomique | Circuit integre a haute densite d'integration tel que memoire eprom et procede d'obtention correspondant |
JPH081933B2 (ja) * | 1989-12-11 | 1996-01-10 | 株式会社東芝 | 不揮発性半導体記憶装置 |
-
1990
- 1990-11-21 US US07/616,460 patent/US5086325A/en not_active Expired - Lifetime
-
1991
- 1991-11-13 EP EP92900715A patent/EP0511370B1/de not_active Expired - Lifetime
- 1991-11-13 JP JP04501941A patent/JP3129438B2/ja not_active Expired - Fee Related
- 1991-11-13 DE DE69130163T patent/DE69130163T2/de not_active Expired - Fee Related
- 1991-11-13 KR KR1019920701715A patent/KR100193551B1/ko not_active IP Right Cessation
- 1991-11-13 AT AT92900715T patent/ATE171011T1/de not_active IP Right Cessation
- 1991-11-13 WO PCT/US1991/008508 patent/WO1992010002A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP0511370A1 (de) | 1992-11-04 |
EP0511370B1 (de) | 1998-09-09 |
JPH05508262A (ja) | 1993-11-18 |
US5086325A (en) | 1992-02-04 |
JP3129438B2 (ja) | 2001-01-29 |
DE69130163T2 (de) | 1999-05-20 |
WO1992010002A1 (en) | 1992-06-11 |
ATE171011T1 (de) | 1998-09-15 |
KR100193551B1 (ko) | 1999-07-01 |
KR920704358A (ko) | 1992-12-19 |
EP0511370A4 (en) | 1993-04-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |