DE69426695D1 - Elektronisches modul mit einem stapel von ic-chips - Google Patents

Elektronisches modul mit einem stapel von ic-chips

Info

Publication number
DE69426695D1
DE69426695D1 DE69426695T DE69426695T DE69426695D1 DE 69426695 D1 DE69426695 D1 DE 69426695D1 DE 69426695 T DE69426695 T DE 69426695T DE 69426695 T DE69426695 T DE 69426695T DE 69426695 D1 DE69426695 D1 DE 69426695D1
Authority
DE
Germany
Prior art keywords
chips
stack
electronic module
module
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69426695T
Other languages
English (en)
Other versions
DE69426695T2 (de
Inventor
C Carson
R Some
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nytell Software LLC
Original Assignee
Irvine Sensors Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Irvine Sensors Corp filed Critical Irvine Sensors Corp
Publication of DE69426695D1 publication Critical patent/DE69426695D1/de
Application granted granted Critical
Publication of DE69426695T2 publication Critical patent/DE69426695T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0657—Stacked arrangements of devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/18—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16135—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/16145—Disposition the bump connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503—Stacked arrangements of devices
    • H01L2225/0651—Wire or wire-like electrical connections from device to substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503—Stacked arrangements of devices
    • H01L2225/06517—Bump or bump-like direct electrical connections from device to substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503—Stacked arrangements of devices
    • H01L2225/06527—Special adaptation of electrical connections, e.g. rewiring, engineering changes, pressure contacts, layout
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503—Stacked arrangements of devices
    • H01L2225/06551—Conductive connections on the side of the device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503—Stacked arrangements of devices
    • H01L2225/06555—Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
    • H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
    • H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
    • H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L2225/06503—Stacked arrangements of devices
    • H01L2225/06596—Structural arrangements for testing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/102—Material of the semiconductor or solid state bodies
    • H01L2924/1025—Semiconducting materials
    • H01L2924/10251—Elemental semiconductors, i.e. Group IV
    • H01L2924/10253—Silicon [Si]
DE69426695T 1993-04-23 1994-04-19 Elektronisches modul mit einem stapel von ic-chips Expired - Lifetime DE69426695T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US5247593A 1993-04-23 1993-04-23
PCT/US1994/004322 WO1994026083A1 (en) 1993-04-23 1994-04-19 Electronic module comprising a stack of ic chips

Publications (2)

Publication Number Publication Date
DE69426695D1 true DE69426695D1 (de) 2001-03-22
DE69426695T2 DE69426695T2 (de) 2001-08-09

Family

ID=21977846

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69426695T Expired - Lifetime DE69426695T2 (de) 1993-04-23 1994-04-19 Elektronisches modul mit einem stapel von ic-chips

Country Status (5)

Country Link
US (1) US5432729A (de)
EP (1) EP0695494B1 (de)
JP (1) JP3354937B2 (de)
DE (1) DE69426695T2 (de)
WO (1) WO1994026083A1 (de)

Families Citing this family (201)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5354695A (en) 1992-04-08 1994-10-11 Leedy Glenn J Membrane dielectric isolation IC fabrication
US5985693A (en) * 1994-09-30 1999-11-16 Elm Technology Corporation High density three-dimensional IC interconnection
US5502667A (en) * 1993-09-13 1996-03-26 International Business Machines Corporation Integrated multichip memory module structure
JP2531928B2 (ja) * 1993-11-05 1996-09-04 株式会社東芝 半導体スタック
US5557732A (en) * 1994-08-11 1996-09-17 International Business Machines Corporation Method and apparatus for protecting software executing on a demonstration computer
US5567654A (en) * 1994-09-28 1996-10-22 International Business Machines Corporation Method and workpiece for connecting a thin layer to a monolithic electronic module's surface and associated module packaging
JPH11503569A (ja) * 1995-04-08 1999-03-26 ハイブリッド・メモリー・プロダクツ・リミテッド 集積回路パッケージ
US5714768A (en) * 1995-10-24 1998-02-03 Energy Conversion Devices, Inc. Second-layer phase change memory array on top of a logic device
US5763943A (en) * 1996-01-29 1998-06-09 International Business Machines Corporation Electronic modules with integral sensor arrays
US5835594A (en) * 1996-02-09 1998-11-10 Intel Corporation Methods and apparatus for preventing unauthorized write access to a protected non-volatile storage
US5673218A (en) 1996-03-05 1997-09-30 Shepard; Daniel R. Dual-addressed rectifier storage device
FR2745973B1 (fr) * 1996-03-08 1998-04-03 Thomson Csf Memoire de masse et procede de fabrication de memoire de masse
US5680342A (en) * 1996-04-10 1997-10-21 International Business Machines Corporation Memory module package with address bus buffering
US5903045A (en) * 1996-04-30 1999-05-11 International Business Machines Corporation Self-aligned connector for stacked chip module
US5793116A (en) * 1996-05-29 1998-08-11 Mcnc Microelectronic packaging using arched solder columns
US5892203A (en) * 1996-05-29 1999-04-06 International Business Machines Corporation Apparatus for making laminated integrated circuit devices
US5772815A (en) * 1996-05-29 1998-06-30 International Business Machines Corporation Method for making laminated integrated circuit devices
US5772835A (en) * 1996-05-29 1998-06-30 Ibm Corporation Vacuum oven chamber for making laminated integrated circuit devices
US5735196A (en) * 1996-05-29 1998-04-07 Ibm Corporation Apparatus for applying a force to laminated integrated circuit devices
US5760478A (en) * 1996-08-20 1998-06-02 International Business Machines Corporation Clock skew minimization system and method for integrated circuits
US5815374A (en) * 1996-09-30 1998-09-29 International Business Machines Corporation Method and apparatus for redirecting certain input/output connections of integrated circuit chip configurations
US5781413A (en) * 1996-09-30 1998-07-14 International Business Machines Corporation Method and apparatus for directing the input/output connection of integrated circuit chip cube configurations
US5835396A (en) * 1996-10-17 1998-11-10 Zhang; Guobiao Three-dimensional read-only memory
US5813113A (en) * 1996-12-09 1998-09-29 International Business Machines Corporation Fixture for making laminated integrated circuit devices
US5933712A (en) * 1997-03-19 1999-08-03 The Regents Of The University Of California Attachment method for stacked integrated circuit (IC) chips
US5915167A (en) * 1997-04-04 1999-06-22 Elm Technology Corporation Three dimensional structure memory
US6551857B2 (en) 1997-04-04 2003-04-22 Elm Technology Corporation Three dimensional structure integrated circuits
US5892287A (en) * 1997-08-18 1999-04-06 Texas Instruments Semiconductor device including stacked chips having metal patterned on circuit surface and on edge side of chip
US5990472A (en) * 1997-09-29 1999-11-23 Mcnc Microelectronic radiation detectors for detecting and emitting radiation signals
NO308149B1 (no) * 1998-06-02 2000-07-31 Thin Film Electronics Asa Skalerbar, integrert databehandlingsinnretning
US6191487B1 (en) 1998-04-23 2001-02-20 Minco Technology Labs, Inc. Semiconductor and flip chip packages and method having a back-side connection
US6397349B2 (en) * 1998-10-13 2002-05-28 Agere Systems Guardian Corp. Built-in self-test and self-repair methods and devices for computer memories comprising a reconfiguration memory device
US6483736B2 (en) 1998-11-16 2002-11-19 Matrix Semiconductor, Inc. Vertically stacked field programmable nonvolatile memory and method of fabrication
US6122187A (en) 1998-11-23 2000-09-19 Micron Technology, Inc. Stacked integrated circuits
BR9908393A (pt) * 1998-12-30 2000-10-31 Infineon Technologies Ag Disposição de circuito integrado vertical
US6324071B2 (en) 1999-01-14 2001-11-27 Micron Technology, Inc. Stacked printed circuit board memory module
US6141245A (en) * 1999-04-30 2000-10-31 International Business Machines Corporation Impedance control using fuses
US6567950B1 (en) 1999-04-30 2003-05-20 International Business Machines Corporation Dynamically replacing a failed chip
US6849480B1 (en) 1999-05-07 2005-02-01 Seagate Technology Llc Surface mount IC stacking method and device
JP3575001B2 (ja) 1999-05-07 2004-10-06 アムコー テクノロジー コリア インコーポレーティド 半導体パッケージ及びその製造方法
USRE40112E1 (en) 1999-05-20 2008-02-26 Amkor Technology, Inc. Semiconductor package and method for fabricating the same
JP3398721B2 (ja) 1999-05-20 2003-04-21 アムコー テクノロジー コリア インコーポレーティド 半導体パッケージ及びその製造方法
US7134069B1 (en) * 1999-06-16 2006-11-07 Madrone Solutions, Inc. Method and apparatus for error detection and correction
JP2001077301A (ja) * 1999-08-24 2001-03-23 Amkor Technology Korea Inc 半導体パッケージ及びその製造方法
US6984571B1 (en) * 1999-10-01 2006-01-10 Ziptronix, Inc. Three dimensional device integration method and integrated device
US6500694B1 (en) * 2000-03-22 2002-12-31 Ziptronix, Inc. Three dimensional device integration method and integrated device
KR20010064907A (ko) * 1999-12-20 2001-07-11 마이클 디. 오브라이언 와이어본딩 방법 및 이를 이용한 반도체패키지
TW587252B (en) * 2000-01-18 2004-05-11 Hitachi Ltd Semiconductor memory device and data processing device
US6414396B1 (en) 2000-01-24 2002-07-02 Amkor Technology, Inc. Package for stacked integrated circuits
US6622201B1 (en) * 2000-01-28 2003-09-16 Advanced Micro Devices, Inc. Chained array of sequential access memories enabling continuous read
EP1124332A1 (de) * 2000-02-08 2001-08-16 The Boeing Company Fehlerdetektion und Korrektionsverschachtelungssystem
US6902987B1 (en) 2000-02-16 2005-06-07 Ziptronix, Inc. Method for low temperature bonding and bonded structure
KR100559664B1 (ko) 2000-03-25 2006-03-10 앰코 테크놀로지 코리아 주식회사 반도체패키지
US6531784B1 (en) 2000-06-02 2003-03-11 Amkor Technology, Inc. Semiconductor package with spacer strips
US6956757B2 (en) * 2000-06-22 2005-10-18 Contour Semiconductor, Inc. Low cost high density rectifier matrix memory
US6452278B1 (en) 2000-06-30 2002-09-17 Amkor Technology, Inc. Low profile package for plural semiconductor dies
US6472758B1 (en) 2000-07-20 2002-10-29 Amkor Technology, Inc. Semiconductor package including stacked semiconductor dies and bond wires
US6563133B1 (en) * 2000-08-09 2003-05-13 Ziptronix, Inc. Method of epitaxial-like wafer bonding at low temperature and bonded structure
EP2988331B1 (de) 2000-08-14 2019-01-09 SanDisk Technologies LLC Halbleiterspeicherbauelement
US6577013B1 (en) 2000-09-05 2003-06-10 Amkor Technology, Inc. Chip size semiconductor packages with stacked dies
US6552416B1 (en) 2000-09-08 2003-04-22 Amkor Technology, Inc. Multiple die lead frame package with enhanced die-to-die interconnect routing using internal lead trace wiring
US20030120858A1 (en) 2000-09-15 2003-06-26 Matrix Semiconductor, Inc. Memory devices and methods for use therewith
US7440449B2 (en) * 2000-10-06 2008-10-21 Irvine Sensors Corp. High speed switching module comprised of stacked layers incorporating t-connect structures
US6418033B1 (en) 2000-11-16 2002-07-09 Unitive Electronics, Inc. Microelectronic packages in which second microelectronic substrates are oriented relative to first microelectronic substrates at acute angles
US6340846B1 (en) 2000-12-06 2002-01-22 Amkor Technology, Inc. Making semiconductor packages with stacked dies and reinforced wire bonds
US6591394B2 (en) 2000-12-22 2003-07-08 Matrix Semiconductor, Inc. Three-dimensional memory array and method for storing data bits and ECC bits therein
US7352199B2 (en) 2001-02-20 2008-04-01 Sandisk Corporation Memory card with enhanced testability and methods of making and using the same
US6748994B2 (en) * 2001-04-11 2004-06-15 Avery Dennison Corporation Label applicator, method and label therefor
US6843421B2 (en) 2001-08-13 2005-01-18 Matrix Semiconductor, Inc. Molded memory module and method of making the module absent a substrate support
US20050156322A1 (en) * 2001-08-31 2005-07-21 Smith Lee J. Thin semiconductor package including stacked dies
US6717061B2 (en) 2001-09-07 2004-04-06 Irvine Sensors Corporation Stacking of multilayer modules
US6560109B2 (en) 2001-09-07 2003-05-06 Irvine Sensors Corporation Stack of multilayer modules with heat-focusing metal layer
US6734370B2 (en) * 2001-09-07 2004-05-11 Irvine Sensors Corporation Multilayer modules with flexible substrates
US6928590B2 (en) * 2001-12-14 2005-08-09 Matrix Semiconductor, Inc. Memory device and method for storing bits in non-adjacent storage locations in a memory array
US7219271B2 (en) * 2001-12-14 2007-05-15 Sandisk 3D Llc Memory device and method for redundancy/self-repair
US6901549B2 (en) * 2001-12-14 2005-05-31 Matrix Semiconductor, Inc. Method for altering a word stored in a write-once memory device
WO2003063242A1 (en) * 2002-01-16 2003-07-31 Alfred E. Mann Foundation For Scientific Research Space-saving packaging of electronic circuits
US7547623B2 (en) * 2002-06-25 2009-06-16 Unitive International Limited Methods of forming lead free solder bumps
WO2004001837A2 (en) * 2002-06-25 2003-12-31 Unitive International Limited Methods of forming electronic structures including conductive shunt layers and related structures
AU2003255254A1 (en) 2002-08-08 2004-02-25 Glenn J. Leedy Vertical system integration
US6961807B1 (en) * 2002-08-27 2005-11-01 Cypress Semiconductor Corporation Device, system and method for an integrated circuit adaptable for use in computing systems of differing memory requirements
US7495326B2 (en) 2002-10-22 2009-02-24 Unitive International Limited Stacked electronic structures including offset substrates
US7800932B2 (en) 2005-09-28 2010-09-21 Sandisk 3D Llc Memory cell comprising switchable semiconductor memory element with trimmable resistance
US8008700B2 (en) * 2002-12-19 2011-08-30 Sandisk 3D Llc Non-volatile memory cell with embedded antifuse
US20070164388A1 (en) * 2002-12-19 2007-07-19 Sandisk 3D Llc Memory cell comprising a diode fabricated in a low resistivity, programmed state
US8637366B2 (en) * 2002-12-19 2014-01-28 Sandisk 3D Llc Nonvolatile memory cell without a dielectric antifuse having high- and low-impedance states
US7660181B2 (en) * 2002-12-19 2010-02-09 Sandisk 3D Llc Method of making non-volatile memory cell with embedded antifuse
JP2006511965A (ja) 2002-12-19 2006-04-06 マトリックス セミコンダクター インコーポレイテッド 高密度不揮発性メモリを製作するための改良された方法
US7285464B2 (en) 2002-12-19 2007-10-23 Sandisk 3D Llc Nonvolatile memory cell comprising a reduced height vertical diode
US7800933B2 (en) * 2005-09-28 2010-09-21 Sandisk 3D Llc Method for using a memory cell comprising switchable semiconductor memory element with trimmable resistance
US20050226067A1 (en) 2002-12-19 2005-10-13 Matrix Semiconductor, Inc. Nonvolatile memory cell operating by increasing order in polycrystalline semiconductor material
US7618850B2 (en) * 2002-12-19 2009-11-17 Sandisk 3D Llc Method of making a diode read/write memory cell in a programmed state
TWI225899B (en) 2003-02-18 2005-01-01 Unitive Semiconductor Taiwan C Etching solution and method for manufacturing conductive bump using the etching solution to selectively remove barrier layer
US6868022B2 (en) * 2003-03-28 2005-03-15 Matrix Semiconductor, Inc. Redundant memory structure using bad bit pointers
US7109092B2 (en) 2003-05-19 2006-09-19 Ziptronix, Inc. Method of room temperature covalent bonding
US7511352B2 (en) * 2003-05-19 2009-03-31 Sandisk 3D Llc Rail Schottky device and method of making
US7049216B2 (en) * 2003-10-14 2006-05-23 Unitive International Limited Methods of providing solder structures for out plane connections
US7009296B1 (en) 2004-01-15 2006-03-07 Amkor Technology, Inc. Semiconductor package with substrate coupled to a peripheral side surface of a semiconductor die
WO2005101499A2 (en) 2004-04-13 2005-10-27 Unitive International Limited Methods of forming solder bumps on exposed metal pads and related structures
US8074082B2 (en) * 2004-10-08 2011-12-06 Aprolase Development Co., Llc Anti-tamper module
US7274011B2 (en) * 2004-12-27 2007-09-25 Teledyne Licensing, Llc Spectral imager and fabrication method
US7277336B2 (en) * 2004-12-28 2007-10-02 Sandisk 3D Llc Method and apparatus for improving yield in semiconductor devices by guaranteeing health of redundancy information
US7307268B2 (en) 2005-01-19 2007-12-11 Sandisk Corporation Structure and method for biasing phase change memory array for reliable writing
US20060205170A1 (en) * 2005-03-09 2006-09-14 Rinne Glenn A Methods of forming self-healing metal-insulator-metal (MIM) structures and related devices
US7212454B2 (en) * 2005-06-22 2007-05-01 Sandisk 3D Llc Method and apparatus for programming a memory array
US8077535B2 (en) 2006-07-31 2011-12-13 Google Inc. Memory refresh apparatus and method
US7590796B2 (en) 2006-07-31 2009-09-15 Metaram, Inc. System and method for power management in memory systems
US9171585B2 (en) 2005-06-24 2015-10-27 Google Inc. Configurable memory circuit system and method
US9542352B2 (en) 2006-02-09 2017-01-10 Google Inc. System and method for reducing command scheduling constraints of memory circuits
US7472220B2 (en) 2006-07-31 2008-12-30 Metaram, Inc. Interface circuit system and method for performing power management operations utilizing power management signals
US7386656B2 (en) 2006-07-31 2008-06-10 Metaram, Inc. Interface circuit system and method for performing power management operations in conjunction with only a portion of a memory circuit
US8796830B1 (en) 2006-09-01 2014-08-05 Google Inc. Stackable low-profile lead frame package
US8041881B2 (en) 2006-07-31 2011-10-18 Google Inc. Memory device with emulated characteristics
US20080082763A1 (en) 2006-10-02 2008-04-03 Metaram, Inc. Apparatus and method for power management of memory circuits by a system or component thereof
US8438328B2 (en) 2008-02-21 2013-05-07 Google Inc. Emulation of abstracted DIMMs using abstracted DRAMs
US8081474B1 (en) 2007-12-18 2011-12-20 Google Inc. Embossed heat spreader
US8060774B2 (en) 2005-06-24 2011-11-15 Google Inc. Memory systems and memory modules
US8130560B1 (en) 2006-11-13 2012-03-06 Google Inc. Multi-rank partial width memory modules
US9507739B2 (en) 2005-06-24 2016-11-29 Google Inc. Configurable memory circuit system and method
US20080028136A1 (en) 2006-07-31 2008-01-31 Schakel Keith R Method and apparatus for refresh management of memory modules
US10013371B2 (en) 2005-06-24 2018-07-03 Google Llc Configurable memory circuit system and method
US7392338B2 (en) 2006-07-31 2008-06-24 Metaram, Inc. Interface circuit system and method for autonomously performing power management operations in conjunction with a plurality of memory circuits
US8397013B1 (en) 2006-10-05 2013-03-12 Google Inc. Hybrid memory module
US8090897B2 (en) 2006-07-31 2012-01-03 Google Inc. System and method for simulating an aspect of a memory circuit
US8335894B1 (en) 2008-07-25 2012-12-18 Google Inc. Configurable memory system with interface circuit
US8055833B2 (en) 2006-10-05 2011-11-08 Google Inc. System and method for increasing capacity, performance, and flexibility of flash storage
US7609567B2 (en) 2005-06-24 2009-10-27 Metaram, Inc. System and method for simulating an aspect of a memory circuit
US8089795B2 (en) 2006-02-09 2012-01-03 Google Inc. Memory module with memory stack and interface with enhanced capabilities
US8386722B1 (en) 2008-06-23 2013-02-26 Google Inc. Stacked DIMM memory interface
US7580312B2 (en) 2006-07-31 2009-08-25 Metaram, Inc. Power saving system and method for use with a plurality of memory circuits
WO2007002324A2 (en) 2005-06-24 2007-01-04 Metaram, Inc. An integrated memory core and memory interface circuit
US8111566B1 (en) 2007-11-16 2012-02-07 Google, Inc. Optimal channel design for memory devices for providing a high-speed memory interface
US8327104B2 (en) 2006-07-31 2012-12-04 Google Inc. Adjusting the timing of signals associated with a memory system
US8244971B2 (en) 2006-07-31 2012-08-14 Google Inc. Memory circuit system and method
US8359187B2 (en) 2005-06-24 2013-01-22 Google Inc. Simulating a different number of memory circuit devices
GB2444663B (en) 2005-09-02 2011-12-07 Metaram Inc Methods and apparatus of stacking drams
KR20080067328A (ko) * 2005-09-06 2008-07-18 비욘드 블라데스 리미티드 3ｄｍｃ 아키텍처
US7800934B2 (en) * 2005-09-28 2010-09-21 Sandisk 3D Llc Programming methods to increase window for reverse write 3D cell
FR2893448A1 (fr) * 2005-11-15 2007-05-18 St Microelectronics Sa Dispositif semi-conducteur a plusieurs puces de circuits integres assemblees et procede d'assemblage et de connexion electrique de puces de circuits integres
US7932615B2 (en) 2006-02-08 2011-04-26 Amkor Technology, Inc. Electronic devices including solder bumps on compliant dielectric layers
US7674701B2 (en) 2006-02-08 2010-03-09 Amkor Technology, Inc. Methods of forming metal layers using multi-layer lift-off patterns
US9632929B2 (en) 2006-02-09 2017-04-25 Google Inc. Translating an address associated with a command communicated between a system and memory circuits
US7724589B2 (en) 2006-07-31 2010-05-25 Google Inc. System and method for delaying a signal communicated from a system to at least one of a plurality of memory circuits
US9466545B1 (en) 2007-02-21 2016-10-11 Amkor Technology, Inc. Semiconductor package in package
US7958390B2 (en) * 2007-05-15 2011-06-07 Sandisk Corporation Memory device for repairing a neighborhood of rows in a memory array using a patch table
US7966518B2 (en) * 2007-05-15 2011-06-21 Sandisk Corporation Method for repairing a neighborhood of rows in a memory array using a patch table
FR2917233B1 (fr) 2007-06-07 2009-11-06 Commissariat Energie Atomique Integration 3d de composants verticaux dans des substrats reconstitues.
FR2917236B1 (fr) 2007-06-07 2009-10-23 Commissariat Energie Atomique Procede de realisation de via dans un substrat reconstitue.
US8102694B2 (en) * 2007-06-25 2012-01-24 Sandisk 3D Llc Nonvolatile memory device containing carbon or nitrogen doped diode
US8072791B2 (en) * 2007-06-25 2011-12-06 Sandisk 3D Llc Method of making nonvolatile memory device containing carbon or nitrogen doped diode
US7684226B2 (en) * 2007-06-25 2010-03-23 Sandisk 3D Llc Method of making high forward current diodes for reverse write 3D cell
US7830697B2 (en) * 2007-06-25 2010-11-09 Sandisk 3D Llc High forward current diodes for reverse write 3D cell
US7759666B2 (en) * 2007-06-29 2010-07-20 Sandisk 3D Llc 3D R/W cell with reduced reverse leakage
US7800939B2 (en) * 2007-06-29 2010-09-21 Sandisk 3D Llc Method of making 3D R/W cell with reduced reverse leakage
US8209479B2 (en) 2007-07-18 2012-06-26 Google Inc. Memory circuit system and method
US7623365B2 (en) * 2007-08-29 2009-11-24 Micron Technology, Inc. Memory device interface methods, apparatus, and systems
US8080874B1 (en) 2007-09-14 2011-12-20 Google Inc. Providing additional space between an integrated circuit and a circuit board for positioning a component therebetween
US7846782B2 (en) 2007-09-28 2010-12-07 Sandisk 3D Llc Diode array and method of making thereof
US8397011B2 (en) * 2007-10-05 2013-03-12 Joseph Ashwood Scalable mass data storage device
US7813157B2 (en) * 2007-10-29 2010-10-12 Contour Semiconductor, Inc. Non-linear conductor memory
WO2009061834A1 (en) * 2007-11-05 2009-05-14 Contour Semiconductor, Inc. Low-cost, high-density rectifier matrix memory
US9229887B2 (en) * 2008-02-19 2016-01-05 Micron Technology, Inc. Memory device with network on chip methods, apparatus, and systems
US20090225621A1 (en) * 2008-03-05 2009-09-10 Shepard Daniel R Split decoder storage array and methods of forming the same
US7830698B2 (en) * 2008-04-11 2010-11-09 Sandisk 3D Llc Multilevel nonvolatile memory device containing a carbon storage material and methods of making and using same
US7812335B2 (en) * 2008-04-11 2010-10-12 Sandisk 3D Llc Sidewall structured switchable resistor cell
US8450835B2 (en) * 2008-04-29 2013-05-28 Sandisk 3D Llc Reverse leakage reduction and vertical height shrinking of diode with halo doping
WO2009149061A2 (en) * 2008-06-02 2009-12-10 Contour Semiconductor, Inc. Diode decoder array with non-sequential layout and methods of forming the same
US7978721B2 (en) * 2008-07-02 2011-07-12 Micron Technology Inc. Multi-serial interface stacked-die memory architecture
TWI358120B (en) * 2008-07-04 2012-02-11 Gigno Technology Co Ltd Semiconductor chip module and manufacturing method
US8086913B2 (en) 2008-09-11 2011-12-27 Micron Technology, Inc. Methods, apparatus, and systems to repair memory
US8106520B2 (en) * 2008-09-11 2012-01-31 Micron Technology, Inc. Signal delivery in stacked device
JP2010080752A (ja) * 2008-09-26 2010-04-08 Panasonic Corp 半導体装置の製造方法
US8325556B2 (en) * 2008-10-07 2012-12-04 Contour Semiconductor, Inc. Sequencing decoder circuit
EP2441007A1 (de) 2009-06-09 2012-04-18 Google, Inc. Programmierung von dimm-abschlusswiderstandswerten
US20110031982A1 (en) * 2009-08-06 2011-02-10 Irvine Sensors Corporation Tamper-resistant electronic circuit and module incorporating electrically conductive nano-structures
US20110084212A1 (en) * 2009-09-22 2011-04-14 Irvine Sensors Corporation Multi-layer photon counting electronic module
US20110096511A1 (en) * 2009-10-26 2011-04-28 Christian Krutzik Ultra-low profile multi-chip module
US20110147568A1 (en) * 2009-12-18 2011-06-23 Irvine Sensors Corporation High density array module and connector
US8247895B2 (en) * 2010-01-08 2012-08-21 International Business Machines Corporation 4D device process and structure
US8330262B2 (en) 2010-02-02 2012-12-11 International Business Machines Corporation Processes for enhanced 3D integration and structures generated using the same
US9123552B2 (en) 2010-03-30 2015-09-01 Micron Technology, Inc. Apparatuses enabling concurrent communication between an interface die and a plurality of dice stacks, interleaved conductive paths in stacked devices, and methods for forming and operating the same
US8362602B2 (en) * 2010-08-09 2013-01-29 Headway Technologies, Inc. Layered chip package and method of manufacturing same
KR101774938B1 (ko) 2011-08-31 2017-09-06 삼성전자 주식회사 지지대를 갖는 반도체 패키지 및 그 형성 방법
US9190390B2 (en) 2012-08-22 2015-11-17 Freescale Semiconductor Inc. Stacked microelectronic packages having sidewall conductors and methods for the fabrication thereof
US9093457B2 (en) 2012-08-22 2015-07-28 Freescale Semiconductor Inc. Stacked microelectronic packages having patterned sidewall conductors and methods for the fabrication thereof
US9064977B2 (en) 2012-08-22 2015-06-23 Freescale Semiconductor Inc. Stacked microelectronic packages having sidewall conductors and methods for the fabrication thereof
US9299670B2 (en) 2013-03-14 2016-03-29 Freescale Semiconductor, Inc. Stacked microelectronic packages having sidewall conductors and methods for the fabrication thereof
US9524950B2 (en) 2013-05-31 2016-12-20 Freescale Semiconductor, Inc. Stacked microelectronic packages having sidewall conductors and methods for the fabrication thereof
US9036363B2 (en) 2013-09-30 2015-05-19 Freescale Semiconductor, Inc. Devices and stacked microelectronic packages with parallel conductors and intra-conductor isolator structures and methods of their fabrication
US9025340B2 (en) 2013-09-30 2015-05-05 Freescale Semiconductor, Inc. Devices and stacked microelectronic packages with in-trench package surface conductors and methods of their fabrication
US9263420B2 (en) 2013-12-05 2016-02-16 Freescale Semiconductor, Inc. Devices and stacked microelectronic packages with package surface conductors and methods of their fabrication
US9305911B2 (en) 2013-12-05 2016-04-05 Freescale Semiconductor, Inc. Devices and stacked microelectronic packages with package surface conductors and adjacent trenches and methods of their fabrication
US9984769B2 (en) * 2014-10-30 2018-05-29 Research & Business Foundation Sungkyunkwan University 3D memory with error checking and correction function
US10388607B2 (en) 2014-12-17 2019-08-20 Nxp Usa, Inc. Microelectronic devices with multi-layer package surface conductors and methods of their fabrication
US9478495B1 (en) 2015-10-26 2016-10-25 Sandisk Technologies Llc Three dimensional memory device containing aluminum source contact via structure and method of making thereof
US9994741B2 (en) 2015-12-13 2018-06-12 International Business Machines Corporation Enhanced adhesive materials and processes for 3D applications
US9806256B1 (en) 2016-10-21 2017-10-31 Sandisk Technologies Llc Resistive memory device having sidewall spacer electrode and method of making thereof
US10437557B2 (en) * 2018-01-31 2019-10-08 Micron Technology, Inc. Determination of a match between data values stored by several arrays
US10700028B2 (en) * 2018-02-09 2020-06-30 Sandisk Technologies Llc Vertical chip interposer and method of making a chip assembly containing the vertical chip interposer
US11163486B2 (en) * 2019-11-25 2021-11-02 Micron Technology, Inc. Memory sub-system-bounded memory function
WO2024057707A1 (ja) * 2022-09-12 2024-03-21 先端システム技術研究組合 半導体モジュール及びその製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4754316A (en) * 1982-06-03 1988-06-28 Texas Instruments Incorporated Solid state interconnection system for three dimensional integrated circuit structures
US4983533A (en) * 1987-10-28 1991-01-08 Irvine Sensors Corporation High-density electronic modules - process and product
EP0354708A3 (de) * 1988-08-08 1990-10-31 Texas Instruments Incorporated Allgemeine dreidimensionale Packung
US5019943A (en) * 1990-02-14 1991-05-28 Unisys Corporation High density chip stack having a zigzag-shaped face which accommodates connections between chips
US5311401A (en) * 1991-07-09 1994-05-10 Hughes Aircraft Company Stacked chip assembly and manufacturing method therefor
US5313096A (en) * 1992-03-16 1994-05-17 Dense-Pac Microsystems, Inc. IC chip package having chip attached to and wire bonded within an overlying substrate

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EP0695494A1 (de) 1996-02-07
JPH08509579A (ja) 1996-10-08
EP0695494B1 (de) 2001-02-14
EP0695494A4 (de) 1997-04-16
WO1994026083A1 (en) 1994-11-10
DE69426695T2 (de) 2001-08-09
JP3354937B2 (ja) 2002-12-09

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