DE69900628D1 - Interferometrische Dickenprofile mit einem Erhalt der Flachheit des sich bewegenden Materials - Google Patents

Interferometrische Dickenprofile mit einem Erhalt der Flachheit des sich bewegenden Materials

Info

Publication number
DE69900628D1
DE69900628D1 DE69900628T DE69900628T DE69900628D1 DE 69900628 D1 DE69900628 D1 DE 69900628D1 DE 69900628 T DE69900628 T DE 69900628T DE 69900628 T DE69900628 T DE 69900628T DE 69900628 D1 DE69900628 D1 DE 69900628D1
Authority
DE
Germany
Prior art keywords
flatness
preservation
moving material
thickness profiles
interferometric thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69900628T
Other languages
English (en)
Other versions
DE69900628T2 (de
Inventor
Michael A Marcus
Jiann-Rong Lee
Stanley Gross
Harry Wayne Harris
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eastman Kodak Co
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Publication of DE69900628D1 publication Critical patent/DE69900628D1/de
Application granted granted Critical
Publication of DE69900628T2 publication Critical patent/DE69900628T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02071—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by measuring path difference independently from interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02069—Synchronization of light source or manipulator and detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
DE69900628T 1998-10-29 1999-10-18 Verfahren zum Bestimmen interferometrischer Dickenprofile eines bewegten Materials unter Beibehaltung seiner Flachheit Expired - Lifetime DE69900628T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10613198P 1998-10-29 1998-10-29
US09/216,045 US6038027A (en) 1998-10-29 1998-12-18 Method for measuring material thickness profiles

Publications (2)

Publication Number Publication Date
DE69900628D1 true DE69900628D1 (de) 2002-01-31
DE69900628T2 DE69900628T2 (de) 2002-08-14

Family

ID=26803331

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69900628T Expired - Lifetime DE69900628T2 (de) 1998-10-29 1999-10-18 Verfahren zum Bestimmen interferometrischer Dickenprofile eines bewegten Materials unter Beibehaltung seiner Flachheit

Country Status (4)

Country Link
US (1) US6038027A (de)
EP (1) EP0997702B1 (de)
JP (1) JP2000131025A (de)
DE (1) DE69900628T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6522410B1 (en) * 2000-03-07 2003-02-18 Eastman Kodak Company Method for processing low coherence interferometric data
WO2002004888A1 (de) * 2000-07-07 2002-01-17 Robert Bosch Gmbh Interferometrische, kurzkohärente formmessvorrichtung für mehrere flächen (ventilsitz) durch multifokaloptik, optiksegmente oder hohe schärfentiefe
US6674533B2 (en) * 2000-12-21 2004-01-06 Joseph K. Price Anodizing system with a coating thickness monitor and an anodized product
US7274463B2 (en) * 2003-12-30 2007-09-25 Sensory Analytics Anodizing system with a coating thickness monitor and an anodized product
US7365860B2 (en) * 2000-12-21 2008-04-29 Sensory Analytics System capable of determining applied and anodized coating thickness of a coated-anodized product
US6805899B2 (en) 2002-01-30 2004-10-19 Honeywell International Inc. Multi-measurement/sensor coating consolidation detection method and system
US6810365B1 (en) 2002-06-13 2004-10-26 The United States Of America As Represented By The Secretary Of The Navy Monitoring waste liquid to determine membrane cleansing performance
US7206076B2 (en) * 2003-11-04 2007-04-17 Lumetrics, Inc. Thickness measurement of moving webs and seal integrity system using dual interferometer
US7636166B2 (en) * 2006-01-23 2009-12-22 Zygo Corporation Interferometer system for monitoring an object
US20090279171A1 (en) * 2008-05-12 2009-11-12 Raytheon Company Method and Apparatus for Providing an Adjustable Optical Delay
US8004688B2 (en) * 2008-11-26 2011-08-23 Zygo Corporation Scan error correction in low coherence scanning interferometry
RS61478B1 (sr) * 2014-06-11 2021-03-31 Pkc Wiring Systems Oy Raspored senzora, merni uredjaj i metoda merenja
EP3330677B1 (de) * 2016-12-05 2019-08-28 Hch. Kündig & Cie. AG Schutzabdeckung für einen sensor, sowie messeinrichtung mit einem sensor mit schutzabdeckung
EP3816573B1 (de) * 2019-11-04 2023-07-26 Hch. Kündig & Cie. AG Vorrichtung und verfahren zur analyse einer mehrschichtfolie

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3319515A (en) * 1963-08-27 1967-05-16 Du Pont Interferometric optical phase discrimination apparatus
US5473432A (en) * 1994-09-12 1995-12-05 Hewlett-Packard Company Apparatus for measuring the thickness of a moving film utilizing an adjustable numerical aperture lens
US5596409A (en) * 1995-03-22 1997-01-21 Eastman Kodak Company Associated dual interferometric measurement method for determining a physical property of an object
US5659392A (en) * 1995-03-22 1997-08-19 Eastman Kodak Company Associated dual interferometric measurement apparatus for determining a physical property of an object
US5610716A (en) * 1995-08-28 1997-03-11 Hewlett-Packard Company Method and apparatus for measuring film thickness utilizing the slope of the phase of the Fourier transform of an autocorrelator signal
US5731876A (en) * 1996-09-17 1998-03-24 Hewlett-Packard Company Method and apparatus for on-line determination of the thickness of a multilayer film using a partially reflecting roller and low coherence reflectometry
US5850287A (en) * 1997-07-11 1998-12-15 Hewlett-Packard Company Roller assembly having pre-aligned for on-line thickness measurements

Also Published As

Publication number Publication date
US6038027A (en) 2000-03-14
JP2000131025A (ja) 2000-05-12
EP0997702A1 (de) 2000-05-03
EP0997702B1 (de) 2001-12-19
DE69900628T2 (de) 2002-08-14

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