DE69900628T2 - Verfahren zum Bestimmen interferometrischer Dickenprofile eines bewegten Materials unter Beibehaltung seiner Flachheit - Google Patents
Verfahren zum Bestimmen interferometrischer Dickenprofile eines bewegten Materials unter Beibehaltung seiner FlachheitInfo
- Publication number
- DE69900628T2 DE69900628T2 DE69900628T DE69900628T DE69900628T2 DE 69900628 T2 DE69900628 T2 DE 69900628T2 DE 69900628 T DE69900628 T DE 69900628T DE 69900628 T DE69900628 T DE 69900628T DE 69900628 T2 DE69900628 T2 DE 69900628T2
- Authority
- DE
- Germany
- Prior art keywords
- flatness
- maintaining
- moving material
- thickness profiles
- interferometric thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
- G01B9/02071—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by measuring path difference independently from interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02062—Active error reduction, i.e. varying with time
- G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
- G01B9/02069—Synchronization of light source or manipulator and detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10613198P | 1998-10-29 | 1998-10-29 | |
US09/216,045 US6038027A (en) | 1998-10-29 | 1998-12-18 | Method for measuring material thickness profiles |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69900628D1 DE69900628D1 (de) | 2002-01-31 |
DE69900628T2 true DE69900628T2 (de) | 2002-08-14 |
Family
ID=26803331
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69900628T Expired - Lifetime DE69900628T2 (de) | 1998-10-29 | 1999-10-18 | Verfahren zum Bestimmen interferometrischer Dickenprofile eines bewegten Materials unter Beibehaltung seiner Flachheit |
Country Status (4)
Country | Link |
---|---|
US (1) | US6038027A (de) |
EP (1) | EP0997702B1 (de) |
JP (1) | JP2000131025A (de) |
DE (1) | DE69900628T2 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6522410B1 (en) * | 2000-03-07 | 2003-02-18 | Eastman Kodak Company | Method for processing low coherence interferometric data |
DE50110796D1 (de) * | 2000-07-07 | 2006-10-05 | Bosch Gmbh Robert | Interferometrische messvorrichtung |
US7365860B2 (en) * | 2000-12-21 | 2008-04-29 | Sensory Analytics | System capable of determining applied and anodized coating thickness of a coated-anodized product |
US6674533B2 (en) * | 2000-12-21 | 2004-01-06 | Joseph K. Price | Anodizing system with a coating thickness monitor and an anodized product |
US7274463B2 (en) * | 2003-12-30 | 2007-09-25 | Sensory Analytics | Anodizing system with a coating thickness monitor and an anodized product |
US6805899B2 (en) | 2002-01-30 | 2004-10-19 | Honeywell International Inc. | Multi-measurement/sensor coating consolidation detection method and system |
US6810365B1 (en) | 2002-06-13 | 2004-10-26 | The United States Of America As Represented By The Secretary Of The Navy | Monitoring waste liquid to determine membrane cleansing performance |
US7206076B2 (en) * | 2003-11-04 | 2007-04-17 | Lumetrics, Inc. | Thickness measurement of moving webs and seal integrity system using dual interferometer |
US7636166B2 (en) * | 2006-01-23 | 2009-12-22 | Zygo Corporation | Interferometer system for monitoring an object |
US20090279171A1 (en) * | 2008-05-12 | 2009-11-12 | Raytheon Company | Method and Apparatus for Providing an Adjustable Optical Delay |
US8004688B2 (en) | 2008-11-26 | 2011-08-23 | Zygo Corporation | Scan error correction in low coherence scanning interferometry |
BR112016028987B1 (pt) * | 2014-06-11 | 2022-06-21 | Pkc Wiring Systems Oy | Arranjo de sensor para medir uma conexão de crimpagem, equipamento de medição para uma conexão de crimpagem e método para medir uma conexão de crimpagem |
EP3330677B1 (de) * | 2016-12-05 | 2019-08-28 | Hch. Kündig & Cie. AG | Schutzabdeckung für einen sensor, sowie messeinrichtung mit einem sensor mit schutzabdeckung |
EP3816573B1 (de) * | 2019-11-04 | 2023-07-26 | Hch. Kündig & Cie. AG | Vorrichtung und verfahren zur analyse einer mehrschichtfolie |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3319515A (en) * | 1963-08-27 | 1967-05-16 | Du Pont | Interferometric optical phase discrimination apparatus |
US5473432A (en) * | 1994-09-12 | 1995-12-05 | Hewlett-Packard Company | Apparatus for measuring the thickness of a moving film utilizing an adjustable numerical aperture lens |
US5596409A (en) * | 1995-03-22 | 1997-01-21 | Eastman Kodak Company | Associated dual interferometric measurement method for determining a physical property of an object |
US5659392A (en) * | 1995-03-22 | 1997-08-19 | Eastman Kodak Company | Associated dual interferometric measurement apparatus for determining a physical property of an object |
US5610716A (en) * | 1995-08-28 | 1997-03-11 | Hewlett-Packard Company | Method and apparatus for measuring film thickness utilizing the slope of the phase of the Fourier transform of an autocorrelator signal |
US5731876A (en) * | 1996-09-17 | 1998-03-24 | Hewlett-Packard Company | Method and apparatus for on-line determination of the thickness of a multilayer film using a partially reflecting roller and low coherence reflectometry |
US5850287A (en) * | 1997-07-11 | 1998-12-15 | Hewlett-Packard Company | Roller assembly having pre-aligned for on-line thickness measurements |
-
1998
- 1998-12-18 US US09/216,045 patent/US6038027A/en not_active Expired - Lifetime
-
1999
- 1999-10-18 EP EP99203420A patent/EP0997702B1/de not_active Expired - Lifetime
- 1999-10-18 DE DE69900628T patent/DE69900628T2/de not_active Expired - Lifetime
- 1999-10-28 JP JP11306844A patent/JP2000131025A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
EP0997702B1 (de) | 2001-12-19 |
US6038027A (en) | 2000-03-14 |
EP0997702A1 (de) | 2000-05-03 |
JP2000131025A (ja) | 2000-05-12 |
DE69900628D1 (de) | 2002-01-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69900628T2 (de) | Verfahren zum Bestimmen interferometrischer Dickenprofile eines bewegten Materials unter Beibehaltung seiner Flachheit | |
DE69939633D1 (de) | Verfahren und Apparat zum Messen der Dicke eines beschichteten Materials | |
ATE322830T1 (de) | Verfahren zum kontinuierlichen beschichten von gummiartigem material | |
DE602004010599D1 (de) | Verfahren zum Messen der gewölbten Oberfläche eines Werkstücks | |
ATA140191A (de) | Verfahren zum ermitteln der abweichungen der ist-lage eines gleisabschnittes | |
DE69931253D1 (de) | Verfahren zum Messen der Wanddicke rohrförmiger Objekte | |
DE69922752D1 (de) | Verfahren zum Detektieren eines menschlichen Gesichtes | |
DE69637428D1 (de) | Verfahren zum Messen von Bandprofil und Verfahren zum Steuern von kontinuierlichen Walzen | |
DE69921695D1 (de) | Verfahren zum anbringen eines thermischen phasenveränderlichen verbindungsmaterials | |
DE59911618D1 (de) | Verfahren zum verbessern der messwerte eines inertialen messsystems | |
DE69408608T2 (de) | Verfahren zum Messen der Schichtdicken einer mehrschichtigen Probe | |
ATE300734T1 (de) | Verfahren zum ermitteln der absoluten luftfeuchtigkeit | |
DE69941798D1 (de) | Verfahren zum Bilden einer Rollenlagereinheit mit Geschwindigkeitsmessinstrument | |
DE50012773D1 (de) | Verfahren zum bestimmen der position eines ankers | |
DE69738834D1 (de) | Verfahren zum Erzeugen der Geschwindigkeitsprofile für Türen eines Fahrkorbes | |
DE60335409D1 (de) | Verfahren zur bestimmung derpunktdefektverteilung eines siliciumeinkristallstabs | |
DE69921045D1 (de) | Katalysatorverschlechterungsdetektor und Verfahren zum Feststellen der Verschlechterung eines Katalysators | |
DE10084637T1 (de) | Verfahren zum Bestimmen von Oberflächentextur | |
DE60019207D1 (de) | Verfahren und Anordunug zum Beurteilen der Qualität eines Beschichtungsverfahrens | |
DE60200711D1 (de) | Verfahren zum Auftragen eines Verschlusses senkrecht zur Materialbahnrichtung | |
ATA910999A (de) | Verfahren zum messen von holz | |
DE19781728T1 (de) | Optisches Verfahren zum Bestimmen mechanischer Eigenschaften eines Materials | |
DE69730585D1 (de) | Verfahren zum Verbessern der Selektivität eines eine Polymerschicht aufweisenden Gassensors | |
DE19932324B8 (de) | Verfahren zur Ermittlung der Planheit bzw. der Welligkeit eines bewegten Bandes | |
DE69924601D1 (de) | Verfahren zur beschichtung eines lumineszenten materials |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |