DE69930863D1 - Ladungsgesteuerter spiegel mit membran-ansteuerung - Google Patents
Ladungsgesteuerter spiegel mit membran-ansteuerungInfo
- Publication number
- DE69930863D1 DE69930863D1 DE69930863T DE69930863T DE69930863D1 DE 69930863 D1 DE69930863 D1 DE 69930863D1 DE 69930863 T DE69930863 T DE 69930863T DE 69930863 T DE69930863 T DE 69930863T DE 69930863 D1 DE69930863 D1 DE 69930863D1
- Authority
- DE
- Germany
- Prior art keywords
- mirror
- light modulator
- membrane
- load
- micromirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US172613 | 1998-10-15 | ||
| US09/172,613 US5991066A (en) | 1998-10-15 | 1998-10-15 | Membrane-actuated charge controlled mirror |
| PCT/US1999/021457 WO2000022473A1 (en) | 1998-10-15 | 1999-10-14 | Membrane-actuated charge controlled mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69930863D1 true DE69930863D1 (de) | 2006-05-24 |
| DE69930863T2 DE69930863T2 (de) | 2007-03-01 |
Family
ID=22628443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69930863T Expired - Lifetime DE69930863T2 (de) | 1998-10-15 | 1999-10-14 | Ladungsgesteuerter spiegel mit membran-ansteuerung |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US5991066A (de) |
| EP (1) | EP1121619B1 (de) |
| JP (1) | JP4394287B2 (de) |
| KR (1) | KR100585545B1 (de) |
| AT (1) | ATE323295T1 (de) |
| AU (1) | AU6498099A (de) |
| CA (1) | CA2348606C (de) |
| DE (1) | DE69930863T2 (de) |
| WO (1) | WO2000022473A1 (de) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69909972T2 (de) * | 1998-02-11 | 2004-05-13 | University Of Houston, Houston | Vorrichtung zur durchführung chemischer und biochemischer reaktionen unter anwendung von photoerzeugten reagenzien |
| US6123985A (en) * | 1998-10-28 | 2000-09-26 | Solus Micro Technologies, Inc. | Method of fabricating a membrane-actuated charge controlled mirror (CCM) |
| US6343178B1 (en) | 2000-11-07 | 2002-01-29 | Integrated Micromachines, Inc. | Micromachined voltage controlled optical attenuator |
| JP2003005101A (ja) * | 2001-06-26 | 2003-01-08 | Seiko Epson Corp | 光変調装置及びその製造方法 |
| US6625342B2 (en) * | 2001-07-03 | 2003-09-23 | Network Photonics, Inc. | Systems and methods for overcoming stiction using a lever |
| US6614581B2 (en) * | 2001-07-03 | 2003-09-02 | Network Photonics, Inc. | Methods and apparatus for providing a multi-stop micromirror |
| US6791742B2 (en) * | 2001-07-30 | 2004-09-14 | Glimmerglass Networks, Inc. | MEMS structure with raised electrodes |
| US6693735B1 (en) * | 2001-07-30 | 2004-02-17 | Glimmerglass Networks, Inc. | MEMS structure with surface potential control |
| US6639710B2 (en) * | 2001-09-19 | 2003-10-28 | Lucent Technologies Inc. | Method and apparatus for the correction of optical signal wave front distortion using adaptive optics |
| US6825968B2 (en) * | 2002-10-11 | 2004-11-30 | Exajoule, Llc | Micromirror systems with electrodes configured for sequential mirror attraction |
| US6798560B2 (en) * | 2002-10-11 | 2004-09-28 | Exajoula, Llc | Micromirror systems with open support structures |
| US6870659B2 (en) * | 2002-10-11 | 2005-03-22 | Exajoule, Llc | Micromirror systems with side-supported mirrors and concealed flexure members |
| US6900922B2 (en) * | 2003-02-24 | 2005-05-31 | Exajoule, Llc | Multi-tilt micromirror systems with concealed hinge structures |
| US6906848B2 (en) * | 2003-02-24 | 2005-06-14 | Exajoule, Llc | Micromirror systems with concealed multi-piece hinge structures |
| US6853476B2 (en) * | 2003-04-30 | 2005-02-08 | Hewlett-Packard Development Company, L.P. | Charge control circuit for a micro-electromechanical device |
| JP4852835B2 (ja) * | 2004-09-02 | 2012-01-11 | ソニー株式会社 | 回折格子−光変調装置集合体 |
| US20060189023A1 (en) * | 2005-02-23 | 2006-08-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Three dimensional structure formed by using an adhesive silicon wafer process |
| US20070097476A1 (en) * | 2005-10-28 | 2007-05-03 | Truninger Martha A | Display system having a charge-controlled spatial light-modulator |
| KR100814390B1 (ko) | 2007-02-15 | 2008-03-18 | 삼성전자주식회사 | 메모리 소자 및 그 제조 방법. |
| KR100850273B1 (ko) | 2007-03-08 | 2008-08-04 | 삼성전자주식회사 | 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법 |
| KR100876948B1 (ko) | 2007-05-23 | 2009-01-09 | 삼성전자주식회사 | 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법 |
| KR100876088B1 (ko) | 2007-05-23 | 2008-12-26 | 삼성전자주식회사 | 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법 |
| KR100938994B1 (ko) * | 2007-10-15 | 2010-01-28 | 한국과학기술원 | 마이크로 미러 및 이를 이용한 마이크로 미러 어레이 |
| KR101499231B1 (ko) | 2008-12-10 | 2015-03-05 | 삼성디스플레이 주식회사 | 표시 장치 |
| US9323041B2 (en) | 2011-11-30 | 2016-04-26 | Pixtronix, Inc. | Electromechanical systems display apparatus incorporating charge dissipation surfaces |
| JP6246907B2 (ja) * | 2013-05-22 | 2017-12-13 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 光学素子及び当該光学素子に対する放射の影響を低減する手段を備えた光学コンポーネント |
Family Cites Families (55)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2733501A (en) * | 1956-02-07 | Electrostatic shutter mosaic and method of manufacture | ||
| US2682010A (en) * | 1951-08-07 | 1954-06-22 | Us Air Force | Cathode-ray projection tube |
| US2681380A (en) * | 1951-09-26 | 1954-06-15 | Us Air Force | Color television projection system |
| US3517126A (en) * | 1966-11-17 | 1970-06-23 | Tokyo Shibaura Electric Co | Light value image projection system with deformable membrane and thin film target electrode |
| US3600798A (en) * | 1969-02-25 | 1971-08-24 | Texas Instruments Inc | Process for fabricating a panel array of electromechanical light valves |
| US3678196A (en) * | 1970-10-20 | 1972-07-18 | Solo S Roth | Means for projecting an enlarged television image |
| US3746911A (en) * | 1971-04-13 | 1973-07-17 | Westinghouse Electric Corp | Electrostatically deflectable light valves for projection displays |
| US3746785A (en) * | 1971-11-26 | 1973-07-17 | Bendix Corp | Deflectable membrane optical modulator |
| US3886310A (en) * | 1973-08-22 | 1975-05-27 | Westinghouse Electric Corp | Electrostatically deflectable light valve with improved diffraction properties |
| US3896338A (en) * | 1973-11-01 | 1975-07-22 | Westinghouse Electric Corp | Color video display system comprising electrostatically deflectable light valves |
| US4229732A (en) * | 1978-12-11 | 1980-10-21 | International Business Machines Corporation | Micromechanical display logic and array |
| US4441791A (en) * | 1980-09-02 | 1984-04-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
| US4387964A (en) * | 1980-10-21 | 1983-06-14 | Mcdonnell Douglas Corporation | Electron addressed liquid crystal light valve |
| US4592628A (en) * | 1981-07-01 | 1986-06-03 | International Business Machines | Mirror array light valve |
| US4680579A (en) * | 1983-09-08 | 1987-07-14 | Texas Instruments Incorporated | Optical system for projection display using spatial light modulator device |
| US4710732A (en) * | 1984-07-31 | 1987-12-01 | Texas Instruments Incorporated | Spatial light modulator and method |
| US4615595A (en) * | 1984-10-10 | 1986-10-07 | Texas Instruments Incorporated | Frame addressed spatial light modulator |
| US4698602A (en) * | 1985-10-09 | 1987-10-06 | The United States Of America As Represented By The Secretary Of The Air Force | Micromirror spatial light modulator |
| US5172262A (en) * | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
| EP0246547A3 (de) * | 1986-05-22 | 1990-06-13 | Siemens Aktiengesellschaft | Anordnung zur optischen Bildverarbeitung |
| US4728174A (en) * | 1986-11-06 | 1988-03-01 | Hughes Aircraft Company | Electron beam addressed liquid crystal light valve |
| US4826293A (en) * | 1987-03-03 | 1989-05-02 | Hughes Aircraft Company | Electron beam addressed liquid crystal light valve with input sheet conductor |
| US4784883A (en) * | 1987-05-05 | 1988-11-15 | Tektronix, Inc. | Liquid crystal cell and method of assembly of same |
| US4884874A (en) * | 1987-05-05 | 1989-12-05 | Tektronix, Inc. | Method of addressing display regions in an electron beam-addressed liquid crystal light valve |
| US4744636A (en) * | 1987-05-05 | 1988-05-17 | Tektronix, Inc. | Electron beam-addressed liquid crystal cell having coating layer for secondary electron emission |
| US4765717A (en) * | 1987-05-05 | 1988-08-23 | Tektronix, Inc. | Liquid crystal light valve with electrically switchable secondary electron collector electrode |
| US4805038A (en) * | 1987-07-30 | 1989-02-14 | Eastman Kodak Company | Imaging apparatus which includes a light-valve array having electrostatically deflectable elements |
| US4956619A (en) * | 1988-02-19 | 1990-09-11 | Texas Instruments Incorporated | Spatial light modulator |
| US5085497A (en) * | 1990-03-16 | 1992-02-04 | Aura Systems, Inc. | Method for fabricating mirror array for optical projection system |
| US5142405A (en) * | 1990-06-29 | 1992-08-25 | Texas Instruments Incorporated | Bistable dmd addressing circuit and method |
| EP0467048B1 (de) * | 1990-06-29 | 1995-09-20 | Texas Instruments Incorporated | Deformierbare Spiegelvorrichtung mit aktualisiertem Raster |
| US5083857A (en) * | 1990-06-29 | 1992-01-28 | Texas Instruments Incorporated | Multi-level deformable mirror device |
| US5416514A (en) * | 1990-12-27 | 1995-05-16 | North American Philips Corporation | Single panel color projection video display having control circuitry for synchronizing the color illumination system with reading/writing of the light valve |
| US5196767A (en) * | 1991-01-04 | 1993-03-23 | Optron Systems, Inc. | Spatial light modulator assembly |
| US5287215A (en) * | 1991-07-17 | 1994-02-15 | Optron Systems, Inc. | Membrane light modulation systems |
| US5493439A (en) * | 1992-09-29 | 1996-02-20 | Engle; Craig D. | Enhanced surface deformation light modulator |
| US5552925A (en) * | 1993-09-07 | 1996-09-03 | John M. Baker | Electro-micro-mechanical shutters on transparent substrates |
| US5452024A (en) * | 1993-11-01 | 1995-09-19 | Texas Instruments Incorporated | DMD display system |
| US5448314A (en) * | 1994-01-07 | 1995-09-05 | Texas Instruments | Method and apparatus for sequential color imaging |
| US5557177A (en) * | 1994-01-18 | 1996-09-17 | Engle; Craig D. | Enhanced electron beam addressed storage target |
| US5444566A (en) * | 1994-03-07 | 1995-08-22 | Texas Instruments Incorporated | Optimized electronic operation of digital micromirror devices |
| CN1064135C (zh) * | 1994-04-30 | 2001-04-04 | 大宇电子株式会社 | 薄膜可驱动反射镜阵列 |
| US5442414A (en) * | 1994-05-10 | 1995-08-15 | U. S. Philips Corporation | High contrast illumination system for video projector |
| PT778982E (pt) * | 1994-09-02 | 2000-12-29 | Dabbaj Rad Hassan | Modulador de valvula de luz reflectora |
| US5650881A (en) * | 1994-11-02 | 1997-07-22 | Texas Instruments Incorporated | Support post architecture for micromechanical devices |
| KR100220675B1 (ko) * | 1994-10-31 | 1999-09-15 | 전주범 | 투사형 화상표시장치 |
| US5703728A (en) * | 1994-11-02 | 1997-12-30 | Texas Instruments Incorporated | Support post architecture for micromechanical devices |
| US5504614A (en) * | 1995-01-31 | 1996-04-02 | Texas Instruments Incorporated | Method for fabricating a DMD spatial light modulator with a hardened hinge |
| US5579151A (en) * | 1995-02-17 | 1996-11-26 | Texas Instruments Incorporated | Spatial light modulator |
| US5567334A (en) * | 1995-02-27 | 1996-10-22 | Texas Instruments Incorporated | Method for creating a digital micromirror device using an aluminum hard mask |
| US5706061A (en) * | 1995-03-31 | 1998-01-06 | Texas Instruments Incorporated | Spatial light image display system with synchronized and modulated light source |
| US5535047A (en) * | 1995-04-18 | 1996-07-09 | Texas Instruments Incorporated | Active yoke hidden hinge digital micromirror device |
| US5677784A (en) * | 1995-07-24 | 1997-10-14 | Ellis D. Harris Sr. Family Trust | Array of pellicle optical gates |
| US5774196A (en) * | 1996-06-13 | 1998-06-30 | Texas Instruments Incorporated | Method and apparatus of aligning color modulation data to color wheel filter segments |
| US5768009A (en) * | 1997-04-18 | 1998-06-16 | E-Beam | Light valve target comprising electrostatically-repelled micro-mirrors |
-
1998
- 1998-10-15 US US09/172,613 patent/US5991066A/en not_active Expired - Lifetime
-
1999
- 1999-10-14 CA CA002348606A patent/CA2348606C/en not_active Expired - Fee Related
- 1999-10-14 WO PCT/US1999/021457 patent/WO2000022473A1/en active IP Right Grant
- 1999-10-14 JP JP2000576313A patent/JP4394287B2/ja not_active Expired - Fee Related
- 1999-10-14 EP EP99952925A patent/EP1121619B1/de not_active Expired - Lifetime
- 1999-10-14 KR KR1020017004752A patent/KR100585545B1/ko not_active IP Right Cessation
- 1999-10-14 AU AU64980/99A patent/AU6498099A/en not_active Abandoned
- 1999-10-14 AT AT99952925T patent/ATE323295T1/de not_active IP Right Cessation
- 1999-10-14 DE DE69930863T patent/DE69930863T2/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CA2348606A1 (en) | 2000-04-20 |
| AU6498099A (en) | 2000-05-01 |
| JP2002527791A (ja) | 2002-08-27 |
| KR100585545B1 (ko) | 2006-05-30 |
| WO2000022473A1 (en) | 2000-04-20 |
| CA2348606C (en) | 2009-09-08 |
| KR20010107918A (ko) | 2001-12-07 |
| US5991066A (en) | 1999-11-23 |
| DE69930863T2 (de) | 2007-03-01 |
| EP1121619A4 (de) | 2005-05-11 |
| ATE323295T1 (de) | 2006-04-15 |
| EP1121619A1 (de) | 2001-08-08 |
| EP1121619B1 (de) | 2006-04-12 |
| JP4394287B2 (ja) | 2010-01-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69930863D1 (de) | Ladungsgesteuerter spiegel mit membran-ansteuerung | |
| US5768009A (en) | Light valve target comprising electrostatically-repelled micro-mirrors | |
| JP2002527791A5 (de) | ||
| AU661501B2 (en) | Membrane light modulating systems | |
| US6123985A (en) | Method of fabricating a membrane-actuated charge controlled mirror (CCM) | |
| US5959763A (en) | Spatial light modulator | |
| US3746911A (en) | Electrostatically deflectable light valves for projection displays | |
| US4954789A (en) | Spatial light modulator | |
| AU686874B2 (en) | Reflective light valve modulator | |
| US7158278B2 (en) | Display device based on bistable electrostatic shutter | |
| US4695837A (en) | Electrostatic display device with improved fixed electrode | |
| US3796480A (en) | Membrane light modulator | |
| JP2002527790A5 (de) | ||
| CN101284643A (zh) | 一种制造微机电系统(mems)器件结构的方法 | |
| US6038058A (en) | Grid-actuated charge controlled mirror and method of addressing the same | |
| EP0779160A3 (de) | An der Oberseite lichtemittierende Leuchtdiodenanordnung | |
| CN105572860B (zh) | 用于扭转空间光调制器的倾斜电极元件 | |
| CA2163981C (en) | Spatial light modulator | |
| US6028696A (en) | Charge controlled mirror with improved frame time utilization and method of addressing the same | |
| KR20010109866A (ko) | 마이크로미러 디바이스 | |
| IT1259792B (it) | Modulatore spaziale di luce al silicio. |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |