EP0156746A1 - Working heads of polishing machines and the like - Google Patents

Working heads of polishing machines and the like Download PDF

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Publication number
EP0156746A1
EP0156746A1 EP85420047A EP85420047A EP0156746A1 EP 0156746 A1 EP0156746 A1 EP 0156746A1 EP 85420047 A EP85420047 A EP 85420047A EP 85420047 A EP85420047 A EP 85420047A EP 0156746 A1 EP0156746 A1 EP 0156746A1
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EP
European Patent Office
Prior art keywords
flange
spindle
bellows
polishing
working head
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
EP85420047A
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German (de)
French (fr)
Inventor
Pierre Ribard
Gabriel Bouladon
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Individual
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Individual
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Publication date
Application filed by Individual filed Critical Individual
Publication of EP0156746A1 publication Critical patent/EP0156746A1/en
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces

Definitions

  • conventional working heads generally comprise a shaft or spindle, the upper part of which is associated with means (motor and jack) capable of ensuring its drive in rotation and an axial thrust, while its base carries the flange intended to form support for the sample or other workpiece.
  • the lower end of the shaft is established in a semi-spherical profile so as to come to cooperate with the frustoconical wall of a cavity formed in the upper face of the aforementioned flange, which is cut from two diametrically opposite notches forming housings for two projecting fingers integral with the shaft.
  • the workpiece flange can rotate above the polishing turntable against the free face of which it is applied by the jack associated with the shaft, while being free to orient itself correctly with respect to said free face to compensate for the variations in flatness of said plate and the inaccuracies in the geometry of the assembly.
  • the second air cushion with constant inflation aims not to impart a polishing pressure, but to form a pivot in order to allow the adaptation of the hollow part to be polished to the rotating polishing brushes.
  • this prior technique were transposed to the case of polishing thin wafers, localized pressure would be obtained on the polishing pad (or on the rack) only at the points of contact between cushion and pad (or rack) and not a constant pressure distributed over the entire surface.
  • the fact that there are two cushions can not ensure constant flexibility in all directions (360 °), while this is essential to polish plane between two surfaces whose axes of rotation are never exactly parallel.
  • the present invention mainly intends to remedy, which essentially consists in ensuring the drive in rotation of the workpiece flange by means of a deformable bellows which defines, with the faces in screw -with a rotating upper disc and the aforementioned flange, a chamber which once pressurized allows the free orientation of said flange and its application against the polishing plate.
  • this deformable bellows may have a relatively large diameter, in practice equal to that of workpiece flange which is thus driven in rotation by its periphery, which avoids any risk of tipping.
  • the reference 1 designates the lower part of a spindle supported and guided inside a bearing shown diagrammatically at 2; this spindle is driven in a rotational movement using an electric motor, not shown. Its lower end has a development the rounded periphery, engaged with reduced clearance inside a cylindrical housing formed in a tubular boss 3a provided in the central part of a flange 3; it is therefore conceivable that this flange 3 has practically total angular freedom relative to the base of the spindle 1.
  • the flange 3 is driven in rotation by a bellows 4, the lower end of which is secured, for example by welding, to the periphery of said flange.
  • the upper end of this bellows 4 is likewise made angularly integral with a disc 5, perforated in its center to allow passage to the pin 1 to which it is fixed by a sealed weld bead 6.
  • This disc 5 is equipped with a through nozzle 7 to which a pipe 8 is connected connected to a pressure source through a rotating joint (not shown) carried by the upper part of the spindle 1.
  • the lower part of the flange 3 is arranged in the usual manner for fixing the sample to be polished.
  • the pin 1 was hollowed out with a blind axial bore Ib connected to a vacuum source and on the end of which is connected a pipe 9 for the supply of a vacuum plate 10, the sample 11 being held by suction; however, any other arrangement of known type can be provided.
  • the drive of the flange 3 by means of the bellows 4 avoids any risk of inadvertent tilting under the effect of the rotation of the polishing turntable against which the sample 11 is applied.
  • This application is obtained by the pressure maintained by the pipe 8 inside the sealed chamber defined by the bellows 4, the flange 3 and the upper disc 5; the deformability of this chamber ensures, in addition to the aforementioned application pressure, the self-orientation of the sample 11 relative to the upper face of the polishing plate of the machine.
  • the invention is capable of being advantageously applied to running-in, of the one-sided or double-sided type.

Abstract

The connection between the part-carrying plate (3) and the rotating drive spindle (1) is effected by a deformable bellows (4), the inner space of which is maintained under pressure in order to ensure the application of the part (11) against the polishing disc of the machine, whilst at the same time permitting the free orientation of the said part. <IMAGE>

Description

On sait que les têtes de travail classiques comprennent généralement un arbre ou broche dont la partie supérieure est associée à des moyens (moteur et vérin) propres à assurer son entraînement en rotation et une poussée axiale, tandis que sa base porte le flasque destiné à former support pour l'échantillon ou autre pièce à travailler. A cet effet, l'extrémité inférieure de l'arbre est établie à un profil semi-sphérique de manière à venir coopérer avec la paroi tronconique d'une cavité ménagée dans la face supérieure du flasque précité, lequel est découpé de deux entailles diamétralement opposées formant logements pour deux doigts en saillie solidaires de l'arbre. On conçoit dans ces conditions que le flasque porte-pièce peut tourner au-dessus du plateau tournant de polissage contre le face libre duquel il est appliqué par le vérin associé à l'arbre, tout en étant libre de s'orienter correctement par rapport à ladite face libre pour compenser les variations de planéité dudit plateau et les imprécisions de la géométrie de l'ensemble.It is known that conventional working heads generally comprise a shaft or spindle, the upper part of which is associated with means (motor and jack) capable of ensuring its drive in rotation and an axial thrust, while its base carries the flange intended to form support for the sample or other workpiece. For this purpose, the lower end of the shaft is established in a semi-spherical profile so as to come to cooperate with the frustoconical wall of a cavity formed in the upper face of the aforementioned flange, which is cut from two diametrically opposite notches forming housings for two projecting fingers integral with the shaft. It is conceivable under these conditions that the workpiece flange can rotate above the polishing turntable against the free face of which it is applied by the jack associated with the shaft, while being free to orient itself correctly with respect to said free face to compensate for the variations in flatness of said plate and the inaccuracies in the geometry of the assembly.

Cette disposition présente des inconvénients pratiques non négligeables. Elle est relativement coûteuse du fait que l'extrémité sphérique de l'arbre ou broche doit être réalisée en acier dur, recouvert d'un film chromé afin d'éviter les déformations dues aux efforts mécaniques et à la corrosion. On observera par ailleurs que la rotule formée par la partie semi-sphérique et la partie tronconique est soumise à une force verticale (pression axiale) et à une force horizontale (défilement du plateau de polissage) ; or du fait que dans le système classique la force verticale s'applique au centre du flasque, ce dernier risque de se déformer en même temps qu'il est soumis à un effet de basculcment par suite du défilement du plateau, effet de basculement qui est accru par l'entraînement central en rctation à partir d'un point situé au-dessus du plan de contact plateau/flasque.This arrangement has significant practical disadvantages. It is relatively expensive because the spherical end of the shaft or spindle must be made of hard steel, covered with a chromed film in order to avoid deformations due to mechanical forces and to corrosion. It will also be observed that the ball joint formed by the semi-spherical part and the frustoconical part is subjected to a vertical force (axial pressure) and to a horizontal force (movement of the polishing plate); however, because in the conventional system the vertical force is applied to the center of the flange, the latter risks deforming at the same time as it is subjected to a tilting effect as a result of the movement of the plate, the tilting effect which is increased by the central drive in rctation from a point located above the plate / flange contact plane.

Dans le document DE-A-1 677 168 (FRANKE) on a décrit une tête de travail pour machine de polissage dans laquelle la rotule est remplacée par un premier coussin susceptible d'être gonfle avec de l'air et par un second coussin à gonflage constant, ces deux coussins étant disposés entre la table tournante et un portoir destiné à supporter la pièce à travailler.In document DE-A-1 677 168 (FRANKE) a working head for a polishing machine has been described in which the ball joint is replaced by a first cushion capable of being inflated with air and by a second cushion constant inflation, these two cushions being arranged between the turntable and a rack intended to support the workpiece.

Il y a lieu de considérer que cet agencement, conçu pour le polissage de pièces creuses tridimensionnelles et asymétriques, ne peut être adopté pour le polissage de plaquettes symétriques à faible épaisseur, tel que visé dans la présente invention. En effet le second coussin d'air à gonflage constant a pour but, non pas de conférer une pression de polissage, mais de former pivot afin de permettre l'adaptation de la pièce creuse à polir aux brosser tournantes de polissage. Dans ces conditions, si cette technique antérieure était transposée au cas du polissage de plaquettes minces on n'obtiendrait une pression localisée sur la plaquette à polir (ou sur le portoir) qu'aux seuls points de contact entre coussin et plaquette (ou portoir) et non une pression constante répartie sur toute la surface. De plus et en tout état de cause le fait qu'il y ait deux coussins ne peut assurer une flexibilité constante dans toutes les directions (360°), alors que celle-ci est essentielle pour polir plan entre deux surfaces dont les axes de rotation ne sont jamais exactement parallèles.It should be considered that this arrangement, designed for the polishing of three-dimensional and asymmetrical hollow parts, cannot be adopted for the polishing of symmetrical wafers of small thickness, as referred to in the present invention. In fact, the second air cushion with constant inflation aims not to impart a polishing pressure, but to form a pivot in order to allow the adaptation of the hollow part to be polished to the rotating polishing brushes. Under these conditions, if this prior technique were transposed to the case of polishing thin wafers, localized pressure would be obtained on the polishing pad (or on the rack) only at the points of contact between cushion and pad (or rack) and not a constant pressure distributed over the entire surface. In addition and in any event the fact that there are two cushions can not ensure constant flexibility in all directions (360 °), while this is essential to polish plane between two surfaces whose axes of rotation are never exactly parallel.

C'est à l'ensemble de ces inconvénients qu'entend principalement remédier la présente invention, laquelle consiste essentiellement à assurer l'entraînement en rotation du flasque porte-pièce par le moyen d'un soufflet déformable qui définit, avec les faces en vis-à-vis d'un disque supérieur tournant et du flasque précité, une chambre qui une fois mise en pression permet la libre orientation dudit flasque et son application contre le plateau de polissage.It is to all of these drawbacks that the present invention mainly intends to remedy, which essentially consists in ensuring the drive in rotation of the workpiece flange by means of a deformable bellows which defines, with the faces in screw -with a rotating upper disc and the aforementioned flange, a chamber which once pressurized allows the free orientation of said flange and its application against the polishing plate.

On conçoit que ce soufflet déformable peut comporter un diamètre relativement grand, égal en pratique à celui du flasque porte-pièce qui est ainsi entraîné en rotation par sa périphérie, ce qui évite tout risque de basculement.It is understood that this deformable bellows may have a relatively large diameter, in practice equal to that of workpiece flange which is thus driven in rotation by its periphery, which avoids any risk of tipping.

Le dessin annexé, donné à titre d'exemple, permettra de mieux comprendre l'invention, les caractéristiques qu'elle présente et les avantages qu'elle est susceptible de procurer :

  • La figure unique de ce dessin est une coupe axiale schématique illustrant l'agencement général d'une tête de travail établie conformément à l'invention.
The appended drawing, given by way of example, will allow a better understanding of the invention, the characteristics which it presents and the advantages which it is capable of providing:
  • The single figure of this drawing is a schematic axial section illustrating the general arrangement of a working head established in accordance with the invention.

Sur cette figure, la référence 1 désigne la partie inférieure d'une broche supportée et guidée à l'intérieur d'un palier schématisé en 2 ; cette broche est animée d'un mouvement de rotation à l'aide d'un moteur électrique, non représenté. Son extrémité inférieure présente un épanouissement la à périphérie arondie, engagé à jeu réduit à l'intérieur d'un logement cylindrique ménagé dans un bossage tubulaire 3a prévu dans la partie centrale d'un flasque 3 ; on conçoit dans ces conditions que ce flasque 3 dispose d'une liberté angulaire pratiquement totale par rapport à la base de la broche 1.In this figure, the reference 1 designates the lower part of a spindle supported and guided inside a bearing shown diagrammatically at 2; this spindle is driven in a rotational movement using an electric motor, not shown. Its lower end has a development the rounded periphery, engaged with reduced clearance inside a cylindrical housing formed in a tubular boss 3a provided in the central part of a flange 3; it is therefore conceivable that this flange 3 has practically total angular freedom relative to the base of the spindle 1.

L'entraînement en rotation du flasque 3 est assuré par un soufflet 4 dont l'extrémité inférieure est assujettie, par exemple par soudage, à la périphérie dudit flasque. L'extrémité supérieure de ce soufflet 4 est de la même manière rendue angulairement solidaire d'un disque 5, perforé en son centre pour laisser passage à la broche 1 à laquelle il est fixé par un cordon de soudure étanche 6. Ce disque 5 est équipé d'un embout traversant 7 sur lequel est branchée une canalisation 8 reliée à une source de pression à travers un joint tournant (non représenté) porté par la partie supérieure de la broche 1.The flange 3 is driven in rotation by a bellows 4, the lower end of which is secured, for example by welding, to the periphery of said flange. The upper end of this bellows 4 is likewise made angularly integral with a disc 5, perforated in its center to allow passage to the pin 1 to which it is fixed by a sealed weld bead 6. This disc 5 is equipped with a through nozzle 7 to which a pipe 8 is connected connected to a pressure source through a rotating joint (not shown) carried by the upper part of the spindle 1.

La partie inférieure du flasque 3 est agencée à la manière usuelle pour la fixation de l'échantillon à polir. Dans l'exemple de réalisation considéré, on a supposé que la broche 1 était creusée d'un alésage axial borgne Ib relié à une source de vide et sur l'extrémité duquel est branchée une canalisation 9 pour l'alimentation d'une platine à dépression 10, l'échantillon 11 étant maintenu par aspiration ; on peut cependant prévoir tout autre agencement de type connu.The lower part of the flange 3 is arranged in the usual manner for fixing the sample to be polished. In the embodiment considered, it has been assumed that the pin 1 was hollowed out with a blind axial bore Ib connected to a vacuum source and on the end of which is connected a pipe 9 for the supply of a vacuum plate 10, the sample 11 being held by suction; however, any other arrangement of known type can be provided.

On conçoit en tout état de cause que dans la tête de travail représentée, l'entraînement du flasque 3 par l'intermédiaire du soufflet 4 évite tout risque de basculement intempestif sous l'effet de la rotation du plateau tournant de polissage contre lequel l'échantillon 11 est appliqué. Cette application est obtenue par la pression maintenue par la canalisation 8 à l'intérieur de la chambre étanche définie par le soufflet 4, le flasque 3 et le disque supérieur 5 ; la déformabilité de cette chambre assure, outre la pression d'application précitée, l'auto-orientation de l'échantillon 11 par rapport à la face supérieure du plateau de polissage de la machine.In any event, it can be understood that in the working head shown, the drive of the flange 3 by means of the bellows 4 avoids any risk of inadvertent tilting under the effect of the rotation of the polishing turntable against which the sample 11 is applied. This application is obtained by the pressure maintained by the pipe 8 inside the sealed chamber defined by the bellows 4, the flange 3 and the upper disc 5; the deformability of this chamber ensures, in addition to the aforementioned application pressure, the self-orientation of the sample 11 relative to the upper face of the polishing plate of the machine.

On se dispense ainsi du système de rotule classique et du vérin de pression axiale, si bien que la construction est considérablement simplifiée alors que le fonctionnement est amélioré. On observera que la pression d'application de l'échantillon contre le plateau de polissage est susceptible d'être réglée de manière très précise pour chaque travail, ce qui constitue en fait un avantage considérable par rapport aux têtes usuelle à vérin.This eliminates the classic ball system and the axial pressure cylinder, so that the construction is considerably simplified while the operation is improved. It will be observed that the pressure for applying the sample against the polishing plate is capable of being adjusted very precisely for each job, which in fact constitutes a considerable advantage compared with the usual cylinder heads.

Il convient également de remarquer que l'invention est susceptible d'être avantageusement appliquée au rodage, du type une face ou double face.It should also be noted that the invention is capable of being advantageously applied to running-in, of the one-sided or double-sided type.

Claims (4)

1. Tête de travail pour machine de polissage ou analogue, du genre comportant un flasque porte-pièce qui est animé d'un mouvement de rotation à partir d'une broche tournante et qui est appliqué à force contre le plateau de polissage de la machine tout en étant libre de s'orienter par rapport à celui-ci, caractérisée en ce que la liaison entre la broche (1) et le flasque porte-pièce (3) est assurée par un soufflet déformable (4) dont l'espace intérieur est maintenu sous pression.1. Working head for a polishing machine or the like, of the type comprising a work-holding flange which is rotated from a rotating spindle and which is applied by force against the polishing plate of the machine while being free to orient themselves relative to it, characterized in that the connection between the spindle (1) and the workpiece flange (3) is ensured by a deformable bellows (4) whose interior space is kept under pressure. 2. Tête de travail suivant la revendication 1, caractérisée en ce que le soufflet (4) définit, avec les faces en vis-à-vis du flasque (3) et d'un disque (5) solidaire de la broche (1), une chambre déformable reliée à une source de pression.2. Working head according to claim 1, characterized in that the bellows (4) defines, with the faces facing the flange (3) and a disc (5) integral with the spindle (1) , a deformable chamber connected to a pressure source. 3. Tête de travail suivant la revendication 2, caractérisée en ce que le diamètre intérieur du soufflet (4) est égal au diamètre extérieur du flasque (3) et du disque (5).3. Working head according to claim 2, characterized in that the internal diameter of the bellows (4) is equal to the external diameter of the flange (3) and the disc (5). 4. Tête de travail suivant l'une quelconque des revendications 1 à 3,`caractêrisée en ce que la broche (1) est engagée axialement à travers le soufflet (4) de façon à ce que son extrémité libre, convenablement profilée à cet effet, coopère avec un bossage annulaire (3a) ménagé au centre du flasque (3), afin d'assurer le centrage de celui-ci par rapport à la broche sans gêner la liberté d'orientation.4. Work head according to any one of claims 1 to 3, ` characterized in that the spindle (1) is engaged axially through the bellows (4) so that its free end, suitably profiled for this purpose , cooperates with an annular boss (3a) formed in the center of the flange (3), in order to ensure the centering of the latter relative to the spindle without hampering the freedom of orientation.
EP85420047A 1984-03-14 1985-03-13 Working heads of polishing machines and the like Withdrawn EP0156746A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8404175A FR2558095B1 (en) 1984-03-14 1984-03-14 IMPROVEMENTS TO THE WORKING HEADS OF POLISHING MACHINES AND THE LIKE
FR8404175 1984-03-14

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Cited By (24)

* Cited by examiner, † Cited by third party
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EP0264572A1 (en) * 1986-08-19 1988-04-27 Mitsubishi Kinzoku Kabushiki Kaisha Polishing apparatus
EP0589433A1 (en) * 1992-09-24 1994-03-30 Ebara Corporation Polishing apparatus
EP0747167A2 (en) * 1995-06-09 1996-12-11 Applied Materials, Inc. Apparatus for holding a substrate during polishing
WO1999004930A1 (en) * 1997-07-25 1999-02-04 Speedfam-Ipec Corporation Wafer carrier for semiconductor wafer polishing machine
US5957751A (en) * 1997-05-23 1999-09-28 Applied Materials, Inc. Carrier head with a substrate detection mechanism for a chemical mechanical polishing system
US5964653A (en) * 1997-07-11 1999-10-12 Applied Materials, Inc. Carrier head with a flexible membrane for a chemical mechanical polishing system
US5993302A (en) * 1997-12-31 1999-11-30 Applied Materials, Inc. Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus
US6080050A (en) * 1997-12-31 2000-06-27 Applied Materials, Inc. Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus
US6083090A (en) * 1998-03-18 2000-07-04 Rohm Co., Ltd. Polishing apparatus for semiconductor wafers
US6146259A (en) * 1996-11-08 2000-11-14 Applied Materials, Inc. Carrier head with local pressure control for a chemical mechanical polishing apparatus
US6183354B1 (en) 1996-11-08 2001-02-06 Applied Materials, Inc. Carrier head with a flexible membrane for a chemical mechanical polishing system
US6386947B2 (en) 2000-02-29 2002-05-14 Applied Materials, Inc. Method and apparatus for detecting wafer slipouts
US6398621B1 (en) 1997-05-23 2002-06-04 Applied Materials, Inc. Carrier head with a substrate sensor
US6722965B2 (en) 2000-07-11 2004-04-20 Applied Materials Inc. Carrier head with flexible membranes to provide controllable pressure and loading area
US6739958B2 (en) 2002-03-19 2004-05-25 Applied Materials Inc. Carrier head with a vibration reduction feature for a chemical mechanical polishing system
US6848980B2 (en) 2001-10-10 2005-02-01 Applied Materials, Inc. Vibration damping in a carrier head
US6857945B1 (en) 2000-07-25 2005-02-22 Applied Materials, Inc. Multi-chamber carrier head with a flexible membrane
US6872122B2 (en) 1998-12-30 2005-03-29 Applied Materials, Inc. Apparatus and method of detecting a substrate in a carrier head
USRE38878E1 (en) * 1992-09-24 2005-11-15 Ebara Corporation Polishing apparatus
US7014545B2 (en) 2000-09-08 2006-03-21 Applied Materials Inc. Vibration damping in a chemical mechanical polishing system
US7198561B2 (en) 2000-07-25 2007-04-03 Applied Materials, Inc. Flexible membrane for multi-chamber carrier head
US7255771B2 (en) 2004-03-26 2007-08-14 Applied Materials, Inc. Multiple zone carrier head with flexible membrane
US7255637B2 (en) 2000-09-08 2007-08-14 Applied Materials, Inc. Carrier head vibration damping
US7497767B2 (en) 2000-09-08 2009-03-03 Applied Materials, Inc. Vibration damping during chemical mechanical polishing

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US6036587A (en) 1996-10-10 2000-03-14 Applied Materials, Inc. Carrier head with layer of conformable material for a chemical mechanical polishing system
TW371635B (en) * 1996-10-10 1999-10-11 Applied Materials Inc Carrier head with a layer conformable material for a chemical mechanical polishing system

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Cited By (56)

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Publication number Priority date Publication date Assignee Title
US4897966A (en) * 1986-08-19 1990-02-06 Japan Silicon Co., Ltd. Polishing apparatus
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FR2558095A1 (en) 1985-07-19
FR2558095B1 (en) 1988-04-08

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