EP0285020A3 - Arrangement for coupling microwave energy to a leaky microwave line - Google Patents

Arrangement for coupling microwave energy to a leaky microwave line Download PDF

Info

Publication number
EP0285020A3
EP0285020A3 EP88104822A EP88104822A EP0285020A3 EP 0285020 A3 EP0285020 A3 EP 0285020A3 EP 88104822 A EP88104822 A EP 88104822A EP 88104822 A EP88104822 A EP 88104822A EP 0285020 A3 EP0285020 A3 EP 0285020A3
Authority
EP
European Patent Office
Prior art keywords
microwave
energy
arrangement
leaky
coupling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP88104822A
Other languages
German (de)
French (fr)
Other versions
EP0285020A2 (en
Inventor
Jörg Dr. Kieser
Hans-Georg Dr. Lotz
Gonde Dr. Dittmer
Michael Dr. Sellschopp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0285020A2 publication Critical patent/EP0285020A2/en
Publication of EP0285020A3 publication Critical patent/EP0285020A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/78—Arrangements for continuous movement of material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/12—Coupling devices having more than two ports
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/70—Feed lines

Abstract

Vorrichtung zur Einbringung von Mikrowellenenergie in einen mindestens teilweise für Mikrowellenenergie durchlässigen Behälter. Mindestens ein Mikrowellen­ sender (21, 22) und ein an den Mikrowellensender ange­ schlossener offener Mikrowellenleiter (1) befinden sich in unmittelbarer Nachbarschaft des Behälters. Um die Längenausdehnung des durch die Mikrowellen­ energie erzeugten Plasmas zu vergrößern und die Energieverteilung zu vergleichmäßigen, ist der offene Mikrowellenleiter (1) mindestens an seinen beiden Enden mit einer Mikrowellenzuleitung (17, 18; 24, 25) versehen. Device for introducing microwave energy in an at least partially for microwave energy permeable container. At least one microwave transmitter (21, 22) and a to the microwave transmitter closed open microwave conductor (1) itself in the immediate vicinity of the container. To the linear expansion of the microwaves to increase energy generated plasma and To even out energy distribution is that open microwave conductor (1) at least on its both ends with a microwave feed (17, 18; 24, 25).

EP88104822A 1987-04-02 1988-03-25 Arrangement for coupling microwave energy to a leaky microwave line Withdrawn EP0285020A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3711184 1987-04-02
DE19873711184 DE3711184A1 (en) 1987-04-02 1987-04-02 DEVICE FOR THE APPLICATION OF MICROWAVE ENERGY WITH AN OPEN MICROWAVE LEAD

Publications (2)

Publication Number Publication Date
EP0285020A2 EP0285020A2 (en) 1988-10-05
EP0285020A3 true EP0285020A3 (en) 1990-04-04

Family

ID=6324755

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88104822A Withdrawn EP0285020A3 (en) 1987-04-02 1988-03-25 Arrangement for coupling microwave energy to a leaky microwave line

Country Status (3)

Country Link
US (1) US4847460A (en)
EP (1) EP0285020A3 (en)
DE (1) DE3711184A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4037091C2 (en) * 1990-11-22 1996-06-20 Leybold Ag Device for generating a homogeneous microwave field
US5146058A (en) * 1990-12-27 1992-09-08 E. I. Du Pont De Nemours And Company Microwave resonant cavity applicator for heating articles of indefinite length
EP0502269A1 (en) * 1991-03-06 1992-09-09 Hitachi, Ltd. Method of and system for microwave plasma treatments
FR2685821B1 (en) * 1991-12-31 1994-03-25 Thomson Tubes Electroniques CIRCUIT OF HYPERFREQUENCY ENERGY DISTRIBUTION AND COUPLING.
DE69412419T2 (en) * 1993-11-01 1998-12-24 Unilever Nv Process for the thermal fixation of the coating of a coated food by dielectric heating
US5714009A (en) 1995-01-11 1998-02-03 Deposition Sciences, Inc. Apparatus for generating large distributed plasmas by means of plasma-guided microwave power
FR2798552B1 (en) * 1999-09-13 2001-11-30 Centre Nat Rech Scient DEVICE FOR PROVIDING A PREDETERMINED MICROWAVE POWER DIVISION ON A PLURALITY OF LOADS, PARTICULARLY FOR THE PRODUCTION OF PLASMA
DE10138693A1 (en) * 2001-08-07 2003-07-10 Schott Glas Device for coating objects
US7326872B2 (en) * 2004-04-28 2008-02-05 Applied Materials, Inc. Multi-frequency dynamic dummy load and method for testing plasma reactor multi-frequency impedance match networks
US20120241445A1 (en) * 2009-09-01 2012-09-27 Lg Electronics Inc. Cooking appliance employing microwaves
EP2815405B1 (en) * 2012-02-14 2018-01-10 Goji Limited A device for applying rf energy to a cavity
DE102014204105B3 (en) * 2014-03-06 2015-08-06 Karlsruher Institut für Technologie Device for recording a material to be loaded into a reactor and its use

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1029963B (en) * 1956-12-24 1958-05-14 Mikrowellen Ges M B H Deutsche Device for irradiating microwave energy into dielectric bodies
EP0027471A1 (en) * 1979-03-31 1981-04-29 Osaka Gas Co., Ltd High-frequency heating device
EP0036040A1 (en) * 1980-03-18 1981-09-23 Robert Bosch Gmbh Microwave direct contact radiator for diathermy applications
FR2520160A1 (en) * 1982-01-20 1983-07-22 Sairem Sarl Homogeneous thermal treatment of materials by microwaves - transmitted by pairs of aerials penetrating the waveguides
EP0085110A1 (en) * 1981-08-07 1983-08-10 Matsushita Electric Industrial Co., Ltd. High frequency heater
FR2525063A1 (en) * 1982-04-10 1983-10-14 Toyoda Gosei Kk
US4688009A (en) * 1985-05-13 1987-08-18 Varian Associates, Inc. Triple-pane waveguide window

Family Cites Families (17)

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Publication number Priority date Publication date Assignee Title
US2921174A (en) * 1959-02-13 1960-01-12 Gen Electric Electric surface heating unit system
DE6606894U (en) * 1962-11-07 1970-12-10 Siemens Ag PRESSURE-RESISTANT REFLECTION-COMPENSATED ENCLOSURE WINDOW FOR HOLLOW PIPES
US3472200A (en) * 1964-05-15 1969-10-14 Litton Industries Inc Striping apparatus for highways
US3496571A (en) * 1967-01-09 1970-02-17 Univ Ohio State Res Found Low profile feedback slot antenna
BE758571A (en) * 1969-11-06 1971-04-16 Euratom HIGH FREQUENCY PLASMA GENERATOR
US3611582A (en) * 1969-11-07 1971-10-12 Canadian Patents Dev Microwave package for control of moisture content and insect infestations of grain
FR2076405A5 (en) * 1970-01-14 1971-10-15 Materiel Telephonique
US3715551A (en) * 1971-07-01 1973-02-06 Raytheon Co Twisted waveguide applicator
US3814983A (en) * 1972-02-07 1974-06-04 C Weissfloch Apparatus and method for plasma generation and material treatment with electromagnetic radiation
US3851132A (en) * 1973-12-10 1974-11-26 Canadian Patents Dev Parallel plate microwave applicator
GB2040103B (en) * 1978-12-08 1983-03-02 Raytheon Co Slow wave coupling circuit
US4266162A (en) * 1979-03-16 1981-05-05 Gte Laboratories Incorporated Electromagnetic discharge apparatus with double-ended power coupling
US4314128A (en) * 1980-01-28 1982-02-02 Photowatt International, Inc. Silicon growth technique and apparatus using controlled microwave heating
DE3147986C2 (en) * 1981-12-04 1992-02-27 Leybold-Heraeus GmbH, 5000 Köln Device for generating a microwave plasma for the treatment of substrates, in particular for the plasma polymerization of monomers
JPS58120303A (en) * 1982-01-12 1983-07-18 Sanyo Electric Co Ltd Oscillator and heater of microwave
EP0086558A1 (en) * 1982-02-08 1983-08-24 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Improvements in or relating to antenna array circuits
US4629847A (en) * 1985-11-07 1986-12-16 Gics Paul W Resonator device for a microwave heat applicator

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1029963B (en) * 1956-12-24 1958-05-14 Mikrowellen Ges M B H Deutsche Device for irradiating microwave energy into dielectric bodies
EP0027471A1 (en) * 1979-03-31 1981-04-29 Osaka Gas Co., Ltd High-frequency heating device
EP0036040A1 (en) * 1980-03-18 1981-09-23 Robert Bosch Gmbh Microwave direct contact radiator for diathermy applications
EP0085110A1 (en) * 1981-08-07 1983-08-10 Matsushita Electric Industrial Co., Ltd. High frequency heater
FR2520160A1 (en) * 1982-01-20 1983-07-22 Sairem Sarl Homogeneous thermal treatment of materials by microwaves - transmitted by pairs of aerials penetrating the waveguides
FR2525063A1 (en) * 1982-04-10 1983-10-14 Toyoda Gosei Kk
US4688009A (en) * 1985-05-13 1987-08-18 Varian Associates, Inc. Triple-pane waveguide window

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, Band 7, Nr. 229 (E-203)[1374], 12. Oktober 1983; & JP-A-58 120 303 (SANYO DENKI K.K.) 18-07-1983 *

Also Published As

Publication number Publication date
US4847460A (en) 1989-07-11
DE3711184A1 (en) 1988-10-20
EP0285020A2 (en) 1988-10-05

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