EP0517929A1 - Irradiation device with a high power radiator - Google Patents
Irradiation device with a high power radiator Download PDFInfo
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- EP0517929A1 EP0517929A1 EP91108988A EP91108988A EP0517929A1 EP 0517929 A1 EP0517929 A1 EP 0517929A1 EP 91108988 A EP91108988 A EP 91108988A EP 91108988 A EP91108988 A EP 91108988A EP 0517929 A1 EP0517929 A1 EP 0517929A1
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- European Patent Office
- Prior art keywords
- coolant
- radiator
- radiation
- power
- coolant bath
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
Definitions
- the invention relates to an irradiation device with a high-power radiator, in particular for ultraviolet light, with a discharge space filled with filling gas emitting radiation under discharge conditions, the walls of which are formed by a first and a second dielectric, which have first metallic grids on its surfaces facing away from the discharge space - Or net-shaped and second electrodes is provided with an alternating current source connected to the first and second electrodes for supplying the discharge.
- the invention relates to a state of the art, as can be seen for example from EP-A 0254 111.
- UV sources The industrial use of photochemical processes depends heavily on the availability of suitable UV sources.
- the classic UV lamps deliver low to medium UV intensities at some discrete wavelengths, such as the low-pressure mercury lamps at 185 nm and especially at 254 nm.
- Really high UV powers can only be obtained from high-pressure lamps (Xe, Hg), which then but distribute their radiation over a larger wavelength range.
- the new excimer lasers have provided some new wavelengths for basic photochemical experiments. for cost reasons for an industrial process probably only suitable in exceptional cases.
- the object of the invention is to create an irradiation device with a radiator, in particular for UV or VUV radiation, the electrodes of which shade the radiation as little as possible and the radiator can be optimally cooled.
- the radiator is immersed in a coolant bath, such that the first dielectric and at least the first electrodes are surrounded by the coolant, and that at least one wall of the coolant bath and the coolant itself are permeable to the radiation generated .
- a first advantageous development of the subject matter of the invention is to provide the walls of the coolant bath with a layer that reflects UV radiation well, or to polish them in the case of walls made of aluminum or an aluminum alloy.
- Another variant consists in providing a part of the outer surface of the outer dielectric tube with a UV-reflecting layer.
- Another variant provides for a separate reflector to be installed in the coolant bath, which is designed in such a way that a considerable part of the UV radiation generated by the radiator leaves the bath without having to pass through the actual radiator again.
- the coolant bath can also be used to cool the electrical and electronic components of the power source for supplying the radiator, e.g. in that the parts to be cooled are mounted directly on the outer walls.
- the irradiation device shown schematically in FIGS. 1 and 2 comprises a UV high-power lamp with an outer dielectric tube 1, for example made of quartz glass, and an inner dielectric tube 2 arranged concentrically therewith, the inner wall of which is provided with an inner electrode 3.
- the annular space between the two tubes 1 and 2 forms the discharge space 4 of the radiator.
- the inner tube 2 is inserted gas-tight in the outer tube 1, which was previously filled with a gas or gas mixture which emits UV or VUV radiation under the influence of silent electrical discharges.
- a wide-meshed metal net is used as the outer electrode 5 or it consists of individual metal wires or metal strips running in the longitudinal direction of the tube, which extends over approximately the upper half circumference of the outer tube 1.
- both the outer electrode 5 and the outer dielectric tube 1 are transparent to the UV radiation generated.
- the lower circumference of the tube 1 is provided with a reflector 6. This can be achieved, for example, with a vapor-deposited aluminum layer. This reflector is at the same electrical potential as the outer electrode 5.
- the radiator just described is immersed in a coolant bath 10 delimited by metallic walls 7, 8, 9, 17, 18, through which coolant, preferably distilled water, flows through coolant inflow 11 or coolant outflow 12.
- coolant preferably distilled water
- a preferred embodiment optionally provides for mirroring the vessel walls to use a separate reflector 14 in the bottom section of the bath, which has a plurality of openings 15 and is at the same electrical potential as the vessel walls.
- the breakthroughs allow a sufficient coolant flow from the inlet 11 to the outlet 12.
- the reflector 14 is shaped in such a way that it reflects a large part of the UV light emitted downwards by the radiator without the radiation again passing through or even the two dielectric tubes 1 and 2 got to.
- the cross section of the reflector 14 can be thought of as being composed of two parabolic sections.
- the electrodes 3 and 5 are led to the two poles of an AC power source 16.
- the AC power source 16 basically corresponds to those used for feeding ozone generators. Typically, it delivers an adjustable alternating voltage in the order of magnitude of several 100 volts to 20,000 volts at frequencies in the range of technical alternating current up to several 1000 kHz - depending on the electrode geometry, pressure in the discharge space 4 and composition of the filling gas.
- the filling gas is, for example, mercury, noble gas, noble gas-metal vapor mixture, noble gas-halogen mixture, optionally under Use of an additional further noble gas, preferably Ar, He, Ne, as a buffer gas.
- a substance / substance mixture according to the following table can be used: Filling gas radiation helium 60-100 nm neon 80 - 90 nm argon 107 - 165 nm Argon + fluorine 180-200 nm Argon + chlorine 165-190 nm Argon + krypton + chlorine 165-190, 200-240 nm xenon 160-190 nm nitrogen 337 - 415 nm krypton 124, 140-160 nm Krypton + fluorine 240 - 255 nm Krypton + chlorine 200-240 nm mercury 185, 254, 320-370, 390-420 nm selenium 196, 204, 206 nm deuterium 150-250 nm Xenon + fluorine 340 - 360 nm, 400 - 550 nm Xenon + chlorine 300-320 nm
- the electron energy distribution can be optimally adjusted by the thickness of the dielectrics 1 and 2 and their properties, pressure and / or temperature in the discharge space 4.
Abstract
Description
Die Erfindung bezieht sich auf eine Bestrahlungseinrichtung mit einem Hochleistungsstrahler, insbesondere für ultraviolettes Licht, mit einem mit unter Entladungsbedingungen Strahlung aussendendem Füllgas gefüllten Entladungsraum, dessen Wandungen durch ein erstes und ein zweites Dielektrikum gebildet sind, welches auf seinen dem Entladungsraum abgewandten Oberflächen mit ersten metallischen gitter- oder netzförmigen und zweiten Elektroden versehen ist, mit einer an die ersten und zweiten Elektroden angeschlossenen Wechselstromquelle zur Speisung der Entladung.The invention relates to an irradiation device with a high-power radiator, in particular for ultraviolet light, with a discharge space filled with filling gas emitting radiation under discharge conditions, the walls of which are formed by a first and a second dielectric, which have first metallic grids on its surfaces facing away from the discharge space - Or net-shaped and second electrodes is provided with an alternating current source connected to the first and second electrodes for supplying the discharge.
Die Erfindung nimmt dabei Bezug auf einen Stand der Technik, wie er sich etwa aus der EP-A 0254 111 ergibt.The invention relates to a state of the art, as can be seen for example from EP-A 0254 111.
Der industrielle Einsatz photochemischer Verfahren hängt stark von der der Verfügbarkeit geeigneter UV-Quellen ab. Die klassischen UV-Strahler liefern niedrige bis mittlere UV-Intensitäten bei einigen diskreten Wellenlängen, wie z.B. die Quecksilber-Niederdrucklampen bei 185 nm und insbesondere bei 254 nm. Wirklich hohe UV-Leistungen erhält man nur aus Hochdrucklampen (Xe, Hg), die dann aber ihre Strahlung über einen grösseren Wellenlängenbereich verteilen. Die neuen Excimer-Laser haben einige neue Wellenlängen für photochemische Grundlagenexperimente bereitgestellt, sind z.Zt. aus Kostengründen für einen industriellen Prozess wohl nur in Ausnahmefällen geeignet.The industrial use of photochemical processes depends heavily on the availability of suitable UV sources. The classic UV lamps deliver low to medium UV intensities at some discrete wavelengths, such as the low-pressure mercury lamps at 185 nm and especially at 254 nm. Really high UV powers can only be obtained from high-pressure lamps (Xe, Hg), which then but distribute their radiation over a larger wavelength range. The new excimer lasers have provided some new wavelengths for basic photochemical experiments. for cost reasons for an industrial process probably only suitable in exceptional cases.
In der eingangs genannten EP-Patentanmeldung oder auch in dem Konferenzdruck "Neue UV- und VUV Excimerstrahler" von U. Kogelschatz und B. Eliasson, verteilt an der 10. Vortragstagung der Gesellschaft Deutscher Chemiker, Fachgruppe Photochemie, in Würzburg (BRD) 18.-20. November 1987, wird ein neuer Excimerstrahler beschrieben. Dieser neue Strahlertyp basiert auf der Grundlage, dass man Excimerstrahlung auch in stillen elektrischen Entladungen erzeugen kann, einem Entladungstyp, der in der Ozonerzeugung grosstechnisch eingesetzt wird. In den nur kurzzeitig (< 1 Mikrosekunde) vorhandenen Stromfilamenten dieser Entladung werden durch Elektronenstoss Edelgasatome angeregt, die zu angeregten Molekülkomplexen (Excimeren) weiterreagieren. Diese Excimere leben nur einige 100 Nanosekunden und geben beim Zerfall ihre Bindungsenergie in Form von UV-Strahlung ab.In the EP patent application mentioned at the beginning or in the conference paper "New UV and VUV excimer emitters" by U. Kogelschatz and B. Eliasson, distributed at the 10th lecture conference of the Society of German Chemists, Photochemistry Group, in Würzburg (FRG) 18. -20. November 1987, a new excimer radiator is described. This new type of emitter is based on the fact that excimer radiation can also be generated in silent electrical discharges, a type of discharge that is used on a large scale in ozone generation. In the current filaments of this discharge, which exist only for a short time (<1 microsecond), noble gas atoms are excited by electron impact, which react further to excited molecular complexes (excimers). These excimers only live for a few 100 nanoseconds and release their binding energy in the form of UV radiation when they decay.
Der Aufbau eines derartigen Excimerstrahlers entspricht bis hin zur Stromversorgung weitgehend dem eines klassichen Ozonerzeugers, mit dem wesentlichen Unterschied, dass mindestens eine der den Entladungsraum begrenzenden Elektroden und/oder Dielektrikumsschichten für die erzeugte Strahlung durchlässig ist. Zumindest eine dieser Elektroden dürfen die erzeugte Strahlung nur wenig abschatten. Eine weitere Anforderung an den Strahler besteht darin, auch er auch bei hohen Leistungsdichten möglichst wenig Wärme abstrahlt. Dies ist insbesondere bei Anwendungen in der grafischen Industrie wichtig, wo häufig Druckfarben auf einem hitzeempfindlichen Untergrund ausgehärtet werden müssen.The construction of such an excimer radiator, up to the power supply, largely corresponds to that of a conventional ozone generator, with the essential difference that at least one of the electrodes and / or dielectric layers delimiting the discharge space is transparent to the radiation generated. At least one of these electrodes may only shade the generated radiation a little. Another requirement for the radiator is that it emits as little heat as possible, even at high power densities. This is particularly important for applications in the graphics industry, where printing inks often have to be cured on a heat-sensitive surface.
Ausgehend vom Stand der Technik liegt der Erfindung die Aufgabe zugrunde, einen Bestrahlungseinrichtung mit einem Strahler, insbesondere für UV- oder VUV-Strahlung, zu schaffen, dessen Elektroden die Strahlung möglichst wenig abschatten und der Strahler optimal gekühlt werden kann.Starting from the prior art, the object of the invention is to create an irradiation device with a radiator, in particular for UV or VUV radiation, the electrodes of which shade the radiation as little as possible and the radiator can be optimally cooled.
Zur Lösung dieser Aufgabe ist erfindungsgemäss vorgesehen, dass der Strahler in ein Kühlmittelbad eingetaucht ist, derart, dass das erste Dielektrikum und zumindest die ersten Elektroden vom Kühlmittel umspült sind, und dass zumindest eine Wandung des Kühlmittelbades und das Kühlmittel selbst für die erzeugte Strahlung durchlässig sind.To achieve this object, it is provided according to the invention that the radiator is immersed in a coolant bath, such that the first dielectric and at least the first electrodes are surrounded by the coolant, and that at least one wall of the coolant bath and the coolant itself are permeable to the radiation generated .
Eine derart aufgebaute Bestrahlungseinrichtung erfüllt alle Anforderungen der Praxis:
- Die Erfindung ermöglicht den Aufbau eines absolut kalten Strahlers, was insbesondere im Zusammenhang mit der Aushärtung von Druckfarben auf hitzeempfindlichem Untergrund wichtig ist.
- Die Aussenelektroden können von einfacher Konstruktion sein - es genügen einige wenige in Strahlerlängsrichtung verlaufende Metallstreifen oder Metalldrähte, die nicht notwenig auf dem äusseren Dielektrikum aufliegen müssen. Auf diese Weise können die Dielektrika leicht ausgewechselt werden.
- Das Kühlmittel, bevorzugt Wasser, verhindert Aussenentladungen zwischen Aussenelektroden und Aussenwand des Strahlers. Dies verhindert die Ozonbildung.
- Weil sich keine Aussenenladungen mehr ausbilden können, wird auch Metallabscheidung durch Sputtern verhindert, d.h. die UV-Durchlässigkeit wird auch nach längerer Betriebszeit nicht beeinträchtigt.
- Falls die jeweilige Anwendung einen Betrieb nur mit einem allseitig abgeschlossenen Kühlmittelbad erlaubt und die UV-Strahlung dieses nur durch ein Fenster verlassen kann, ist dieses leicht zu reinigen oder auszuwechseln. Dies ist für die Verwendung des Strahlers in der grafischen Industrie bedeutsam, wo häufig Farbrückstände entfernt werden müssen.
- Die Erfindung ermöglicht neben einem streng modularem Aufbau auch die Integration mehrerer Strahler im selben Bad.
- The invention enables the construction of an absolutely cold radiator, which is particularly important in connection with the curing of printing inks on a heat-sensitive surface.
- The outer electrodes can be of simple construction - a few metal strips or metal wires running in the longitudinal direction of the radiator are sufficient, which do not necessarily have to rest on the outer dielectric. In this way, the dielectrics can be easily replaced.
- The coolant, preferably water, prevents external discharges between the outer electrodes and the outer wall of the radiator. This prevents ozone formation.
- Because external charges can no longer form, metal deposition by sputtering is also prevented, ie the UV transmission is not impaired even after a long period of operation.
- If the respective application only allows operation with a coolant bath sealed on all sides and the UV radiation can only leave it through a window, it is easy to clean or replace. This is important for the use of the spotlight in the graphics industry, where color residues often have to be removed.
- In addition to a strictly modular structure, the invention also enables the integration of several radiators in the same bathroom.
Eine erste vorteilhafte Weiterbildung des Erfindungsgegenstandes besteht darin, die Wände des Kühlmittelbades mit einer die UV-Strahlung gut reflektierenden Schicht zu versehen, oder bei Wänden aus Aluminium oder einer Aluminium-Legierung diese zu polieren. Eine andere Variante besteht darin, einen Teil des Aussenfläche des äusseren Dielektrikumsrohrs mit einer UV-reflektierenden Schicht zu versehen. Wieder eine andere Variante sieht vor, in das Kühlmittelbad einen separaten Reflektor einzubauen, der so gestaltet ist, dass ein beträchtlicher Teil des vom Strahler erzeugten UV-Strahlung das Bad verlässt, ohne dass diese den eigentlichen Strahler nochmals passieren muss.A first advantageous development of the subject matter of the invention is to provide the walls of the coolant bath with a layer that reflects UV radiation well, or to polish them in the case of walls made of aluminum or an aluminum alloy. Another variant consists in providing a part of the outer surface of the outer dielectric tube with a UV-reflecting layer. Another variant provides for a separate reflector to be installed in the coolant bath, which is designed in such a way that a considerable part of the UV radiation generated by the radiator leaves the bath without having to pass through the actual radiator again.
Bei all diesen Varianten kann das Kühlmittelbad auch zur Kühlung der elektrischen und elektronischen Komponenten der Stromquelle für die Speisung des Strahler herangezogen werden, z.B. dadurch, dass die zu kühlenden Teile direkt auf die Aussenwände montiert sind.In all these variants, the coolant bath can also be used to cool the electrical and electronic components of the power source for supplying the radiator, e.g. in that the parts to be cooled are mounted directly on the outer walls.
Besondere Ausgestaltungen der Erfindung und die damit erzielbaren weiteren Vorteile werden nachstehend unter Bezugnahme auf die Zeichnungen näher erläutert.Particular embodiments of the invention and the further advantages which can be achieved thereby are explained in more detail below with reference to the drawings.
In der Zeichnung sind Ausführungsformen von Hochleistungs-Bestrahlungseinrichtung in stark vereinfachter Form dargestellt; dabei zeigt
- Fig.1
- eine Bestrahlungseinrichtung mit einem UV-Zylinderstrahler, der in ein Kühlmittelbad eingetaucht ist, und bei dem die UV-Strahlung durch ein Fenster nach aussen dringen kann;
- Fig.2
- Einen Längsschnitt durch die Einrichtung nach Fig.1 längs deren Linie AA;
- Fig.3
- eine Abwandlung der Einrichtung gemäss Fig.1 mit einem separaten Reflektor im Kühlmittelbad.
- Fig. 1
- an irradiation device with a UV cylinder emitter which is immersed in a coolant bath and in which the UV radiation can penetrate outward through a window;
- Fig. 2
- A longitudinal section through the device of Figure 1 along the line AA;
- Fig. 3
- a modification of the device according to Figure 1 with a separate reflector in the coolant bath.
Die in Fig. 1 und 2 schematisch dargestellte Bestrahlungseinrichtung umfasst einen UV-Hochleistungsstrahler mit einem einem äusseren Dielektrikumsrohr 1, z.B. aus Quarzglas, einem dazu konzentrisch angeordneten inneren Dielelektrikumsrohr 2, dessen Innenwand mit einer Innenelektrode 3 versehen ist. Der Ringraum zwischen den beiden Rohren 1 und 2 bildet den Entladungsraum 4 des Strahlers. Das innere Rohr 2 ist gasdicht in das äussere Rohr 1 eingesetzt, das vorgängig mit einem Gas oder Gasgemisch gefüllt wurde, das unter Einfluss stiller elektrischer Entladungen UV oder VUV-Strahlung aussendet. Als äussere Elektrode 5 dient ein weitmaschiges Metallnetz oder es besteht aus einzelnen in Rohrlängsrichtung verlaufenden Metalldrähten oder Metallstreifen, das sich über etwa den oberen halben Umfang des äusseren Rohres 1 erstreckt. Bei einer streifenförmigen Elektrodenanordnung sind die einzelnen Streifen an mehreren axial verteilten Stellen untereinander verbunden. Sowohl die äussere Elektrode 5 als auch das äussere Dielektrikumsrohr 1 sind für die erzeugte UV-Strahlung durchlässig. Der untere Umfang des Rohres 1 ist mit einem Reflektor 6 versehen. Diese kann z.B. durch eine aufgedampfte Alumniumschicht realisiert werden. Diese Reflektor liegt auf dem selben elektrischen Potential wie die äussere Elektrode 5.The irradiation device shown schematically in FIGS. 1 and 2 comprises a UV high-power lamp with an outer
Der soeben beschriebene Strahler ist in ein von metallischen Wänden 7, 8, 9, 17, 18 begrenztes Kühlmittelbad 10 eingetaucht, das via Kühlmittelzufluss 11 bzw. Kühlmittelabfluss 12 von Kühlmittel, vorzugsweise destilliertem Wasser, durchströmt wird. Im oberen Teil ist ein UV-durchlässiges Fenster 13, z.B. aus Quarzglas, vorgesehen.The radiator just described is immersed in a
Eine andere Möglichkeit, die entstehende Strahlung bevorzugt durch das Fenster 13 in den Aussenraum zu leiten besteht darin, die Innenseite der Wände 7, 8 und 9 zu verspiegeln, was bei Aluminiumwänden durch Polieren der Oberflächen erfolgen kann. Eine bevorzugte Ausführungsform sieht optional zur Verspiegelung der Gefässwände vor, im Bodenabschnitt des Bades einen separaten Reflektor 14 einzusetzen, der eine Vielzahl von Durchbrüchen 15 aufweist und auf dem selben elektrischen Potential wie die Gefässwände liegt. Die Durchbrüche ermöglichen einen ausreichenden Kühlmittelfluss vom Einlauf 11 zum Abfluss 12. Der Reflektor 14 ist so geformt, dass er einen Grossteil des vom Strahler nach unten ausgesandten UV-Lichtes reflektiert, ohne dass die Strahlung nochmals das oder gar die beiden Dielektrikumsrohre 1 und 2 passieren muss. Der Querschnitt des Reflektors 14 kann man sich aus zwei Parabelabschnitten zusammengesetzt denken.Another possibility of guiding the resulting radiation through the
Die Elektroden 3 und 5 sind an die beiden Pole einer Wechselstromquelle 16 geführt. Die Wechselstromquelle 16 entspricht grundsätzlich jenen, wie sie zur Anspeisung von Ozonerzeugern verwendet werden. Typisch liefert sie eine einstellbare Wechselspannung in der Grössenordnung von mehreren 100 Volt bis 20000 Volt bei Frequenzen im Bereich des technischen Wechselstroms bis hin zu einigen 1000 kHz - abhängig von der Elektrodengeometrie, Druck im Entladungsraum 4 und Zusammensetzung des Füllgases.The
Das Füllgas ist, z.B. Quecksilber, Edelgas, Edelgas-Metalldampf-Gemisch, Edelgas-Halogen-Gemisch, gegebenenfalls unter Verwendung eines zusätzlichen weiteren Edelgases, vorzugsweise Ar, He, Ne, als Puffergas.The filling gas is, for example, mercury, noble gas, noble gas-metal vapor mixture, noble gas-halogen mixture, optionally under Use of an additional further noble gas, preferably Ar, He, Ne, as a buffer gas.
Je nach gewünschter spektraler Zusammensetzung der Strahlung kann dabei eine Substanz/Substanzgemisch gemäss nachfolgender Tabelle Verwendung finden:
Daneben kommen eine ganze Reihe weiterer Füllgase in Frage:
- Ein Edelgas (Ar, He, Kr, Ne, Xe) oder Hg mit einem Gas bzw. Dampf aus F₂, J₂, Br₂, Cl₂ oder eine Verbindung die in der Entladung ein oder mehrere Atome F, J, Br oder Cl abspaltet;
- ein Edelgas (Ar, He, Kr, Ne, Xe) oder Hg mit O₂ oder einer Verbindung, die in der Entladung ein oder mehrere O-Atome abspaltet;
- ein Edelgas (Ar, He, Kr, Ne, Xe) mit Hg.
- A noble gas (Ar, He, Kr, Ne, Xe) or Hg with a gas or vapor from F₂, J₂, Br₂, Cl₂ or a compound that splits off one or more atoms F, J, Br or Cl in the discharge;
- a noble gas (Ar, He, Kr, Ne, Xe) or Hg with O₂ or a compound that releases one or more O atoms in the discharge;
- an inert gas (Ar, He, Kr, Ne, Xe) with Hg.
In der sich bildenden stillen elektrischen Entladung (silent discharge) kann die Elektronenenergieverteilung durch Dicke der Dielektrika 1 und 2 und deren Eigenschaften Druck und/oder Temperatur im Entladungsraum 4 optimal eingestellt werden.In the silent discharge that forms, the electron energy distribution can be optimally adjusted by the thickness of the
Bei Anliegen einer Wechselspannung zwischen den Elektroden 3, 5 bildet sich eine Vielzahl von Entladungskanälen (Teilentladungen) im Entladungsraum 4 aus. Diese treten mit den Atomen/Molekülen des Füllgases in Wechselwirkung, was schlussendlich zur UV oder VUV-Strahlung führt.When an alternating voltage is applied between the
Claims (5)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE59104972T DE59104972D1 (en) | 1991-06-01 | 1991-06-01 | Irradiation device with a high-performance lamp. |
| EP19910108988 EP0517929B1 (en) | 1991-06-01 | 1991-06-01 | Irradiation device with a high power radiator |
| CA 2068574 CA2068574A1 (en) | 1991-06-01 | 1992-05-13 | Irradiation device having a high-power radiator |
| JP4140219A JP2540415B2 (en) | 1991-06-01 | 1992-06-01 | Irradiation device with high-power beam generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP19910108988 EP0517929B1 (en) | 1991-06-01 | 1991-06-01 | Irradiation device with a high power radiator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP0517929A1 true EP0517929A1 (en) | 1992-12-16 |
| EP0517929B1 EP0517929B1 (en) | 1995-03-15 |
Family
ID=8206793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP19910108988 Expired - Lifetime EP0517929B1 (en) | 1991-06-01 | 1991-06-01 | Irradiation device with a high power radiator |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0517929B1 (en) |
| JP (1) | JP2540415B2 (en) |
| CA (1) | CA2068574A1 (en) |
| DE (1) | DE59104972D1 (en) |
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| WO1996033872A1 (en) * | 1995-04-27 | 1996-10-31 | Metronic-Gerätebau Gmbh & Co. | Process and device for curing u/v printing inks |
| EP1024085A2 (en) * | 1999-01-29 | 2000-08-02 | SIG Pack Systems AG | Apparatus for sealing sheets, especially for sealing packaging sheets in a packaging machine |
| DE10112900C1 (en) * | 2001-03-15 | 2002-07-11 | Heraeus Noblelight Gmbh | Excimer UV light source has elongate electrode carrier fixed between tapered end of discharge envelope and socket incorporating current feed |
| US6567023B1 (en) | 1999-09-17 | 2003-05-20 | Kabushiki Kaisha Toshiba | Analog to digital to analog converter for multi-valued current data using internal binary voltage |
| FR2871290A1 (en) * | 2004-06-03 | 2005-12-09 | Dermoptics Soc Par Actions Sim | Ultraviolet radiation emitting method for barrier excimer lamp, involves preparing bulb by configuring its wall to place working fluid in two paths that permit heating and cooling of fluid for leading to convection circulation of fluid |
| WO2006000697A2 (en) * | 2004-06-03 | 2006-01-05 | Dermoptics | Barrier discharge lamp |
| EP1643538A2 (en) * | 2004-09-29 | 2006-04-05 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Dielectric barrier discharge lamp with electrical screening |
| EP1705690A1 (en) * | 2004-01-14 | 2006-09-27 | Matsushita Electric Industries Co., Ltd. | Discharge lamp device |
| US7573201B2 (en) | 2004-09-29 | 2009-08-11 | Osram Gesellschaft Mit Beschraenkter Haftung | Dielectric barrier discharge lamp having pluggable electrodes |
| US7778532B2 (en) | 2004-08-26 | 2010-08-17 | Brevetix | Device for heating grounds, in particular sports ground |
| GB2474032A (en) * | 2009-10-01 | 2011-04-06 | Heraeus Noblelight Gmbh | Flash lamp or gas discharge lamp with integrated reflector |
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|---|---|---|---|---|
| WO2000041215A1 (en) * | 1998-12-28 | 2000-07-13 | Japan Storage Battery Co., Ltd. | Silent discharge tube and its use method |
| JP2004087270A (en) * | 2002-08-26 | 2004-03-18 | Orc Mfg Co Ltd | Excimer lamp and excimer lamp device |
| US20070210713A1 (en) * | 2004-04-08 | 2007-09-13 | Sen Engineering Co., Ltd. | Dielectric Barrier Discharge Excimer Light Source |
| WO2005104184A1 (en) * | 2004-04-22 | 2005-11-03 | Futaba Technology Corporation | Ultraviolet ray irradiation device |
| EP1843981B1 (en) * | 2005-01-28 | 2012-09-05 | Philips Intellectual Property & Standards GmbH | Treatment system comprising a dielectric barrier discharge lamp |
| JP2006331903A (en) * | 2005-05-27 | 2006-12-07 | Sen Engineering Kk | Vacuum ultraviolet light source |
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| EP0254111B1 (en) * | 1986-07-22 | 1992-01-02 | BBC Brown Boveri AG | Ultraviolett radiation device |
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- 1991-06-01 DE DE59104972T patent/DE59104972D1/en not_active Expired - Fee Related
- 1991-06-01 EP EP19910108988 patent/EP0517929B1/en not_active Expired - Lifetime
-
1992
- 1992-05-13 CA CA 2068574 patent/CA2068574A1/en not_active Abandoned
- 1992-06-01 JP JP4140219A patent/JP2540415B2/en not_active Expired - Lifetime
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| US3911318A (en) * | 1972-03-29 | 1975-10-07 | Fusion Systems Corp | Method and apparatus for generating electromagnetic radiation |
| US4503360A (en) * | 1982-07-26 | 1985-03-05 | North American Philips Lighting Corporation | Compact fluorescent lamp unit having segregated air-cooling means |
| EP0254111B1 (en) * | 1986-07-22 | 1992-01-02 | BBC Brown Boveri AG | Ultraviolett radiation device |
| DE3842993A1 (en) * | 1988-12-21 | 1990-07-05 | Beerwald Hans | Ignition device for water-cooled ring (toroidal, electrodeless) discharge tubes |
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| US6280801B1 (en) | 1995-04-27 | 2001-08-28 | Metronic Geratebau Gmbh | Process and device for curing U/V printing inks |
| WO1996033872A1 (en) * | 1995-04-27 | 1996-10-31 | Metronic-Gerätebau Gmbh & Co. | Process and device for curing u/v printing inks |
| EP1024085A2 (en) * | 1999-01-29 | 2000-08-02 | SIG Pack Systems AG | Apparatus for sealing sheets, especially for sealing packaging sheets in a packaging machine |
| EP1024085A3 (en) * | 1999-01-29 | 2002-01-23 | SIG Pack Systems AG | Apparatus for sealing sheets, especially for sealing packaging sheets in a packaging machine |
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| DE10112900C1 (en) * | 2001-03-15 | 2002-07-11 | Heraeus Noblelight Gmbh | Excimer UV light source has elongate electrode carrier fixed between tapered end of discharge envelope and socket incorporating current feed |
| EP1705690A1 (en) * | 2004-01-14 | 2006-09-27 | Matsushita Electric Industries Co., Ltd. | Discharge lamp device |
| EP1705690A4 (en) * | 2004-01-14 | 2009-11-18 | Panasonic Corp | Discharge lamp device |
| WO2006000697A2 (en) * | 2004-06-03 | 2006-01-05 | Dermoptics | Barrier discharge lamp |
| WO2006000697A3 (en) * | 2004-06-03 | 2007-03-15 | Dermoptics | Barrier discharge lamp |
| FR2871290A1 (en) * | 2004-06-03 | 2005-12-09 | Dermoptics Soc Par Actions Sim | Ultraviolet radiation emitting method for barrier excimer lamp, involves preparing bulb by configuring its wall to place working fluid in two paths that permit heating and cooling of fluid for leading to convection circulation of fluid |
| US7778532B2 (en) | 2004-08-26 | 2010-08-17 | Brevetix | Device for heating grounds, in particular sports ground |
| EP1643538A2 (en) * | 2004-09-29 | 2006-04-05 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Dielectric barrier discharge lamp with electrical screening |
| EP1643538A3 (en) * | 2004-09-29 | 2008-02-13 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Dielectric barrier discharge lamp with electrical screening |
| US7573201B2 (en) | 2004-09-29 | 2009-08-11 | Osram Gesellschaft Mit Beschraenkter Haftung | Dielectric barrier discharge lamp having pluggable electrodes |
| GB2474032A (en) * | 2009-10-01 | 2011-04-06 | Heraeus Noblelight Gmbh | Flash lamp or gas discharge lamp with integrated reflector |
| GB2474032B (en) * | 2009-10-01 | 2016-07-27 | Heraeus Noblelight Gmbh | Flash lamp or gas discharge lamp with integrated reflector |
Also Published As
| Publication number | Publication date |
|---|---|
| DE59104972D1 (en) | 1995-04-20 |
| EP0517929B1 (en) | 1995-03-15 |
| CA2068574A1 (en) | 1992-12-02 |
| JP2540415B2 (en) | 1996-10-02 |
| JPH05174793A (en) | 1993-07-13 |
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