EP1195523A3 - Microfabricated elastomeric valve and pump systems - Google Patents

Microfabricated elastomeric valve and pump systems Download PDF

Info

Publication number
EP1195523A3
EP1195523A3 EP01128819A EP01128819A EP1195523A3 EP 1195523 A3 EP1195523 A3 EP 1195523A3 EP 01128819 A EP01128819 A EP 01128819A EP 01128819 A EP01128819 A EP 01128819A EP 1195523 A3 EP1195523 A3 EP 1195523A3
Authority
EP
European Patent Office
Prior art keywords
elastomeric layer
elastomeric
pump systems
elastomeric valve
micromachined mold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01128819A
Other languages
German (de)
French (fr)
Other versions
EP1195523A2 (en
EP1195523B1 (en
Inventor
Marc A. Unger
Axel Scherer
Stephen R. Quake
Hou-Pu Chou
Todd A. Thorsen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
California Institute of Technology CalTech
Original Assignee
California Institute of Technology CalTech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by California Institute of Technology CalTech filed Critical California Institute of Technology CalTech
Priority to EP05075473.8A priority Critical patent/EP1557565B1/en
Priority to EP10180441.7A priority patent/EP2309130B1/en
Priority claimed from EP20000305389 external-priority patent/EP1065378B1/en
Publication of EP1195523A2 publication Critical patent/EP1195523A2/en
Publication of EP1195523A3 publication Critical patent/EP1195523A3/en
Application granted granted Critical
Publication of EP1195523B1 publication Critical patent/EP1195523B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members

Abstract

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
EP01128819A 1999-06-28 2000-06-27 Microfabricated elastomeric valve and pump systems Expired - Lifetime EP1195523B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP05075473.8A EP1557565B1 (en) 1999-06-28 2000-06-27 Microfabricated elastomeric valve and pump systems
EP10180441.7A EP2309130B1 (en) 1999-06-28 2000-06-27 Microfabricated elastomeric valve and pump systems

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US14150399P 1999-06-28 1999-06-28
US141503P 1999-06-28
US14719999P 1999-08-03 1999-08-03
US147199P 1999-08-03
US18685600P 2000-03-03 2000-03-03
US186856P 2000-03-03
EP20000305389 EP1065378B1 (en) 1999-06-28 2000-06-27 Microfabricated elastomeric valve and pump systems

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP20000305389 Division EP1065378B1 (en) 1999-06-28 2000-06-27 Microfabricated elastomeric valve and pump systems

Related Child Applications (2)

Application Number Title Priority Date Filing Date
EP05075473.8A Division EP1557565B1 (en) 1999-06-28 2000-06-27 Microfabricated elastomeric valve and pump systems
EP10180441.7A Division EP2309130B1 (en) 1999-06-28 2000-06-27 Microfabricated elastomeric valve and pump systems

Publications (3)

Publication Number Publication Date
EP1195523A2 EP1195523A2 (en) 2002-04-10
EP1195523A3 true EP1195523A3 (en) 2003-01-08
EP1195523B1 EP1195523B1 (en) 2005-03-02

Family

ID=27440044

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01128819A Expired - Lifetime EP1195523B1 (en) 1999-06-28 2000-06-27 Microfabricated elastomeric valve and pump systems

Country Status (1)

Country Link
EP (1) EP1195523B1 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7411331B2 (en) 2002-05-10 2008-08-12 Massachusetts Institute Of Technology Dielectric elastomer actuated systems and methods
US7362889B2 (en) 2002-05-10 2008-04-22 Massachusetts Institute Of Technology Elastomeric actuator devices for magnetic resonance imaging
US7621317B2 (en) 2006-05-11 2009-11-24 Modine Manufacturing Company Self-breaking radiator side plates
US20090279158A1 (en) * 2008-05-08 2009-11-12 Palo Alto Research Center Incorporated Fluid Actuator For Digitally Controllable Microfluidic Display
US8257295B2 (en) 2009-09-21 2012-09-04 Alcon Research, Ltd. Intraocular pressure sensor with external pressure compensation
US8419673B2 (en) * 2009-09-21 2013-04-16 Alcon Research, Ltd. Glaucoma drainage device with pump
AU2015224385B2 (en) * 2009-09-21 2016-12-01 Alcon Inc. Glaucoma drainage device with pump
US9125721B2 (en) 2011-12-13 2015-09-08 Alcon Research, Ltd. Active drainage systems with dual-input pressure-driven valves
US9339187B2 (en) 2011-12-15 2016-05-17 Alcon Research, Ltd. External pressure measurement system and method for an intraocular implant
US9528633B2 (en) 2012-12-17 2016-12-27 Novartis Ag MEMS check valve
US9572712B2 (en) 2012-12-17 2017-02-21 Novartis Ag Osmotically actuated fluidic valve
US9295389B2 (en) 2012-12-17 2016-03-29 Novartis Ag Systems and methods for priming an intraocular pressure sensor in an intraocular implant
US9039993B2 (en) 2013-03-14 2015-05-26 Formulatrix, Inc. Microfluidic device
US9163277B2 (en) 2013-03-14 2015-10-20 Formulatrix, Inc. Microfluidic device
US9226851B2 (en) 2013-08-24 2016-01-05 Novartis Ag MEMS check valve chip and methods
KR101850307B1 (en) 2016-03-03 2018-04-20 한국과학기술연구원 Apparatus and method for manufacturing channel-bonding type scaffold
US11154864B2 (en) 2018-01-17 2021-10-26 Qiagen Sciences, Llc Microfluidic device with vented microchambers

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5088515A (en) * 1989-05-01 1992-02-18 Kamen Dean L Valve system with removable fluid interface
US5346372A (en) * 1991-07-18 1994-09-13 Aisin Seiki Kabushiki Kaisha Fluid flow regulating device
EP0703364A1 (en) * 1994-09-22 1996-03-27 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Method and device for driving a micropump
EP0779436A2 (en) * 1995-12-13 1997-06-18 Frank T. Hartley Micromachined peristaltic pump
US5660370A (en) * 1996-03-07 1997-08-26 Integrated Fludics, Inc. Valve with flexible sheet member and two port non-flexing backer member
US5836750A (en) * 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
EP0999055A2 (en) * 1998-11-03 2000-05-10 Samsung Electronics Co., Ltd. Micro injecting device and method of manufacturing the same

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5088515A (en) * 1989-05-01 1992-02-18 Kamen Dean L Valve system with removable fluid interface
US5346372A (en) * 1991-07-18 1994-09-13 Aisin Seiki Kabushiki Kaisha Fluid flow regulating device
EP0703364A1 (en) * 1994-09-22 1996-03-27 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Method and device for driving a micropump
EP0779436A2 (en) * 1995-12-13 1997-06-18 Frank T. Hartley Micromachined peristaltic pump
US5660370A (en) * 1996-03-07 1997-08-26 Integrated Fludics, Inc. Valve with flexible sheet member and two port non-flexing backer member
US5836750A (en) * 1997-10-09 1998-11-17 Honeywell Inc. Electrostatically actuated mesopump having a plurality of elementary cells
EP0999055A2 (en) * 1998-11-03 2000-05-10 Samsung Electronics Co., Ltd. Micro injecting device and method of manufacturing the same

Non-Patent Citations (7)

* Cited by examiner, † Cited by third party
Title
BRYZEK J ET AL: "MICROMACHINES ON THE MARCH", IEEE SPECTRUM,US,IEEE INC. NEW YORK, vol. 31, no. 5, 1 May 1994 (1994-05-01), pages 20 - 31, XP000456261, ISSN: 0018-9235 *
DUFFY D C ET AL: "PATTERNING ELECTROLUMINESCENT MATERIALS WITH FEATURE SIZES AS SMALL AS 5 MUM USING ELASTOMERIC MEMBRANES AS MASKS FOR DRY LIFT-OFF", ADVANCED MATERIALS,DE,VCH VERLAGSGESELLSCHAFT, WEINHEIM, vol. 11, no. 7, 7 May 1999 (1999-05-07), pages 546 - 552, XP000849014, ISSN: 0935-9648 *
DUFFY, D. C. ET AL.: "Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)", ANAL. CHEM., vol. 70, 1998, pages 4974 - 4984, XP002149044 *
POL VAN DE F C M ET AL: "A THERMO-PNEUMATIC ACTUATION PRINCIPLE FOR A MICROMINIATURE PUMP AND OTHER MICROMECHANICAL DEVICES", SENSORS AND ACTUATORS, ELSEVIER SEQUOIA S.A. LAUSANNE, CH, vol. 17, no. 1/2, 3 May 1989 (1989-05-03), pages 139 - 143, XP000038020 *
QIN D ET AL: "ELASTOMERIC LIGHT VALVES", ADVANCED MATERIALS,DE,VCH VERLAGSGESELLSCHAFT, WEINHEIM, vol. 9, no. 5, 1 April 1997 (1997-04-01), pages 407 - 410, XP000683891, ISSN: 0935-9648 *
RAPP R ET AL: "LIGA MICROPUMP FOR GASES AND LIQUIDS", SENSORS AND ACTUATORS A,CH,ELSEVIER SEQUOIA S.A., LAUSANNE, vol. A40, no. 1, 1994, pages 57 - 61, XP000434539, ISSN: 0924-4247 *
XIA, Y., WHITESIDES, G. M.: "Soft Lithography", ANGEW. CHEM. INT. ED., vol. 37, 1998, pages 550 - 575, XP002149045 *

Also Published As

Publication number Publication date
EP1195523A2 (en) 2002-04-10
EP1195523B1 (en) 2005-03-02

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