EP2359177A4 - Digital micro-mirror device - Google Patents

Digital micro-mirror device

Info

Publication number
EP2359177A4
EP2359177A4 EP08878822A EP08878822A EP2359177A4 EP 2359177 A4 EP2359177 A4 EP 2359177A4 EP 08878822 A EP08878822 A EP 08878822A EP 08878822 A EP08878822 A EP 08878822A EP 2359177 A4 EP2359177 A4 EP 2359177A4
Authority
EP
European Patent Office
Prior art keywords
mirror device
digital micro
micro
digital
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08878822A
Other languages
German (de)
French (fr)
Other versions
EP2359177A1 (en
Inventor
Gregory John Mcavoy
Ronan Padraig Sean O'reilly
Vincent Patrick Lawlor
Kia Silverbrook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silverbrook Research Pty Ltd
Original Assignee
Silverbrook Research Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Publication of EP2359177A1 publication Critical patent/EP2359177A1/en
Publication of EP2359177A4 publication Critical patent/EP2359177A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/28—Reflectors in projection beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
EP08878822A 2008-12-17 2008-12-17 Digital micro-mirror device Withdrawn EP2359177A4 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/AU2008/001849 WO2010068962A1 (en) 2008-12-17 2008-12-17 Digital micro-mirror device

Publications (2)

Publication Number Publication Date
EP2359177A1 EP2359177A1 (en) 2011-08-24
EP2359177A4 true EP2359177A4 (en) 2012-06-06

Family

ID=42268154

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08878822A Withdrawn EP2359177A4 (en) 2008-12-17 2008-12-17 Digital micro-mirror device

Country Status (7)

Country Link
EP (1) EP2359177A4 (en)
JP (1) JP2012511163A (en)
KR (1) KR20110070925A (en)
CN (1) CN102239436A (en)
AU (1) AU2008365366B2 (en)
CA (1) CA2742310A1 (en)
WO (1) WO2010068962A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011104843B4 (en) * 2011-05-05 2013-02-07 Technische Universität Darmstadt Micromirror component with linear bending spring and method for its production
CN102608875A (en) * 2012-03-27 2012-07-25 深圳市华星光电技术有限公司 Glass substrate carved number repairing method and glass substrate carved number repairing device based on repairing cabinet
CN103543526B (en) * 2013-09-29 2016-04-13 华中科技大学 A kind of array laser scanner
JP6492893B2 (en) * 2015-04-01 2019-04-03 セイコーエプソン株式会社 Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus
CN109991730B (en) * 2019-03-12 2021-06-15 上海集成电路研发中心有限公司 Micro-mirror structure
CN112711163A (en) * 2019-10-25 2021-04-27 台达电子工业股份有限公司 Projection device
CN111338076B (en) * 2020-03-31 2022-06-14 吉林省广播电视研究所(吉林省广播电视局科技信息中心) Micro-electro-mechanical deep imaging integrated circuit and imaging method
CN114660880A (en) * 2022-04-11 2022-06-24 长沙沃默科技有限公司 Reflective projection imaging device and design method thereof

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5382961A (en) * 1992-10-15 1995-01-17 Texas Instruments Incorporated Bistable DMD addressing method
US6198180B1 (en) * 1999-06-30 2001-03-06 Sandia Corporation Micromechanisms with floating pivot
US6735008B2 (en) * 2000-07-31 2004-05-11 Corning Incorporated MEMS mirror and method of fabrication
US20060044519A1 (en) * 2004-08-25 2006-03-02 Andrew Huibers Micromirrors and hinge structures for micromirror arrays in projection displays
US20070114883A1 (en) * 2005-11-23 2007-05-24 Dongmin Chen Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US20070206266A1 (en) * 2006-03-01 2007-09-06 Vlad Novotny Micro mirrors with piezoelectric release mechanism
JP2007256557A (en) * 2006-03-23 2007-10-04 Sumitomo Precision Prod Co Ltd Mems actuator and scanner

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
GB0323903D0 (en) * 2003-10-11 2003-11-12 Koninkl Philips Electronics Nv Elastomeric stamp,patterning method using such a stamp and method for producing such a stamp
JP4247254B2 (en) * 2006-08-08 2009-04-02 マイクロプレシジョン株式会社 Electromagnetic drive type optical deflection element
US7488082B2 (en) * 2006-12-12 2009-02-10 Angstrom, Inc. Discretely controlled micromirror array device with segmented electrodes

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5382961A (en) * 1992-10-15 1995-01-17 Texas Instruments Incorporated Bistable DMD addressing method
US6198180B1 (en) * 1999-06-30 2001-03-06 Sandia Corporation Micromechanisms with floating pivot
US6735008B2 (en) * 2000-07-31 2004-05-11 Corning Incorporated MEMS mirror and method of fabrication
US20060044519A1 (en) * 2004-08-25 2006-03-02 Andrew Huibers Micromirrors and hinge structures for micromirror arrays in projection displays
US20070114883A1 (en) * 2005-11-23 2007-05-24 Dongmin Chen Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
US20070206266A1 (en) * 2006-03-01 2007-09-06 Vlad Novotny Micro mirrors with piezoelectric release mechanism
JP2007256557A (en) * 2006-03-23 2007-10-04 Sumitomo Precision Prod Co Ltd Mems actuator and scanner

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2010068962A1 *

Also Published As

Publication number Publication date
EP2359177A1 (en) 2011-08-24
CN102239436A (en) 2011-11-09
JP2012511163A (en) 2012-05-17
AU2008365366A1 (en) 2010-06-24
CA2742310A1 (en) 2010-06-24
AU2008365366B2 (en) 2012-04-19
WO2010068962A1 (en) 2010-06-24
KR20110070925A (en) 2011-06-24

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 20110511

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DAX Request for extension of the european patent (deleted)
A4 Supplementary search report drawn up and despatched

Effective date: 20120509

RIC1 Information provided on ipc code assigned before grant

Ipc: B81B 7/04 20060101ALI20120503BHEP

Ipc: G03B 21/28 20060101ALI20120503BHEP

Ipc: G02B 26/08 20060101AFI20120503BHEP

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Effective date: 20121211