Referenziert von|
| US7166165 | 6. Apr. 2001 | 23. Jan. 2007 | ASM America, Inc. | Barrier coating for vitreous materials | | US7874726 | 15. Mai 2008 | 25. Jan. 2011 | ASM America, Inc. | Thermocouple | | US7946762 | 17. Juni 2008 | 24. Mai 2011 | ASM America, Inc. | Thermocouple | | US7993057 | 20. Dez. 2007 | 9. Aug. 2011 | ASM America, Inc. | Redundant temperature sensor for semiconductor processing chambers | | US8100583 | 6. Mai 2009 | 24. Jan. 2012 | ASM America, Inc. | Thermocouple |
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