US20010040907A1 - Optical device including carbon-doped contact layers - Google Patents
Optical device including carbon-doped contact layers Download PDFInfo
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- US20010040907A1 US20010040907A1 US09/097,205 US9720598D US2001040907A1 US 20010040907 A1 US20010040907 A1 US 20010040907A1 US 9720598 D US9720598 D US 9720598D US 2001040907 A1 US2001040907 A1 US 2001040907A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
- H01S5/0265—Intensity modulators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0421—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/34—Materials of the light emitting region containing only elements of group IV of the periodic system
- H01L33/343—Materials of the light emitting region containing only elements of group IV of the periodic system characterised by the doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/227—Buried mesa structure ; Striped active layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/305—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
- H01S5/3054—Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure p-doping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/323—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/3235—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength longer than 1000 nm, e.g. InP-based 1300 nm and 1500 nm lasers
- H01S5/32391—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength longer than 1000 nm, e.g. InP-based 1300 nm and 1500 nm lasers based on In(Ga)(As)P
Definitions
- This invention relates to semiconductor optical devices, including lasers and electroabsorption modulators, and detectors.
- Electroabsorption modulated laser (EML) devices have recently received a great deal of attention for use in high speed optical systems. Such devices typically include a semiconductor laser and modulator found in a single substrate. These devices usually include a semiconductor multi quantum well (MQW) active region, a contact layer formed thereover to facilitate electrical contact with the active layer, a current blocking layer for directing current to the active region, and a cladding layer to continue light to the active region.
- MQW semiconductor multi quantum well
- Zn is a commonly used p-type dopant for the blocking, contact and cladding layers, and the performance of the laser and modulator depends critically on the level of Zn in the various layers of the device.
- the invention in accordance with one aspect is an optical device comprising a semiconductor waveguide region (which may include an active region), a cladding region including a dopant comprising in, formed adjacent to the waveguide region, and a semiconductor contact region.
- the contact region is selected from the materials InGaAs and InGaAsP, and is formed over the waveguide region.
- the contact region includes a p-type dopant comprising carbon to provide sufficient conductivity to make low resistance contact to the waveguide region.
- the invention is a method of fabricating an optical device including the steps of epitaxially forming a semiconductor waveguide region over the substrate, and forming a cladding region adjacent to the waveguide region, the cladding region including a dopant comprising Zn.
- a contact region selected from the materials InGaAs and InGaAsP is epitaxially formed over the waveguide region.
- the contact layer includes a p-type dopant comprising carbon to provide sufficient conductivity to make a low resistance contact to the waveguide region.
- FIG. 1 is perspective view of an optical device according to one embodiment of the invention.
- FIGS. 2 - 4 are views of the device of FIG. 1 during various stages of fabrication.
- FIG. 5 is a front view of a device according to a further embodiment of the invention.
- FIG. 1 illustrates a typical electroabsorption modulated laser (EML) device, 10 , which includes features of the invention.
- the device, 10 basically comprises two portions, a laser portion, 11 , and a modulator portion, 12 , formed on a single substrate. 13 .
- the substrate, 13 typically comprises InP.
- Formed on the substrate. 13 is a waveguide region. 14 , which comprises a combination of active layer and optical confinement layer and is typically InGaAsP.
- the region, 14 includes a p-n junction, 26 .
- the properties of the constituents of the waveguide 14 are chosen so that in the laser portion, 11 , the waveguide will function as an active region and in the modulator portion, 12 , the waveguide will absorb a certain amount of the emitted light depending upon the electrical bias supplied thereto.
- Johnson et al “High Speed Integrated Electroabsorption Modulators”, Proceedings of SPIE, Vol. 3038, pp. 30-38 (Feb. 1997).
- a “waveguide” region refers to a region which will confine light to a designated portion of the device, and can include, alone or in combination, an active region, a modulator region, and a detector region (not shown).
- a blocking layer, 25 is formed adjacent to the waveguide 14 .
- This layer typically comprises alternate n, p-type and intrinsic layers of InP, and is used to block current in areas outside the waveguide 14 .
- a cladding layer, 15 is also formed adjacent to the waveguide, 14 , and extending above it.
- the layer, 15 in combination with 14 , provides the necessary structure for proper operation of an optical waveguide.
- the layer, 15 is typically a binary material, e.g., InP.
- the cladding layer typically includes Zn as a p-type dopant in a controlled profile.
- a contact layer, 16 is formed over the waveguide and cladding region. This layer is doped to provide sufficient conductivity to make low resistance contact to the section, 14 .
- the layer, 16 typically comprises InGaAs and includes a p-type dopant to adjust the conductivity.
- the impurity is carbon, and the impurity concentration is within the range 1 ⁇ 10 18 -5 ⁇ 10 19 cm ⁇ 3 .
- Carbon behaves as a p-type dopant in ternary material, although it acts as n-type dopant in other material such as InP.
- the elimination of Zn dopant in the contact layer, 16 effectively eliminates the problems associated with Zn migration during growth and processing, such as an increase in internal loss in the waveguide. 14 , in the laser portion. In addition, it aids in preserving the location of p-n junction. 26 , within section 14 .
- the device, 10 also includes electrodes 17 and 18 formed on the contact layer. 16 , in the laser and modulator portions, 11 and 12 , respectively and an electrode, 19 , formed on the bottom surface of the substrate, 13 . These electrodes provide the bias to produce light emission in the laser portion, 11 , and control the absorption of the emitted light in the modulator portion, 12 .
- FIGS. 2 - 4 A method for fabricating the device of FIG. I is illustrated in FIGS. 2 - 4 .
- the region, 14 is formed on the substrate, 13 , by first forming mask segments, 20 and 21 , which are typically SiO 2 and leaving a central portion of the substrate exposed.
- the region 14 is then grown on the exposed surface typically by metallorganic chemical vapor deposition (MOCVD) or gas source molecular beam epitaxy (GSMBE).
- MOCVD metalorganic chemical vapor deposition
- GSMBE gas source molecular beam epitaxy
- segments 20 and 21 are then removed, another SiO 2 mask (not shown) is formed on the region, 14 , and then the region is etched to form a mesa structure.
- the blocking layer 25 and cladding layer, 15 are then formed by epitaxially growing the semiconductor layers on the exposed surfaces of the substrate, 13 . This is usually done by MOCVD.
- the layer, 15 typically includes a Zn dopant having a desired profile as a function of the layer thickness so as to form the p-n junction.
- the concentration of Zn dopant usually varies from 5 ⁇ 10 17 cm 3 to 3 ⁇ 10 18 cm 3 .
- the contact layer, 16 is formed on the cladding layer, 15 , typically by MOCVD.
- the layer, 16 includes carbon as a p-type dopant to provide the desired conductivity.
- the dopant concentration is in the range 2 ⁇ 10 18 -3 ⁇ 10 19 cm ⁇ 3 .
- the contact layer. 16 is typically InGaAs, but other materials such as InGaAsP might be employed if carbon will act as a p-type dopant therein.
- the layer 16 is typically 0.1 ⁇ m-0.5 ⁇ m micron thick.
- Electrodes 17 , 18 and 19 are typically Ti/Pt/Au or Be-Au and deposited by e-beam evaporation.
- a capped Mesa Buried Heterostructure (CMBH) laser illustrated in FIG. 5, includes a substrate, 30 , typically InP on which is formed a n-type undercladding layer 31 , an active region and waveguide, 32 , for light emission, and blocking regions, 33 and 34 , adjacent to the active region, layer 35 .
- the active region typically comprises MQW or bulk layers of InGaAsP, and the blocking regions, 33 and 34 , typically comprise InP.
- a p-type cladding layer, 35 comprising typically InP was formed over the waveguide and active region. This was followed by the growth of layer 36 as a contact layer.
- the contact layer, 36 was InGaAs and include carbon as the p-type dopant with a concentration in the range 1 ⁇ 10 18 -3 ⁇ 10 19 cm ⁇ 3 .
Abstract
Description
- This invention relates to semiconductor optical devices, including lasers and electroabsorption modulators, and detectors.
- Electroabsorption modulated laser (EML) devices have recently received a great deal of attention for use in high speed optical systems. Such devices typically include a semiconductor laser and modulator found in a single substrate. These devices usually include a semiconductor multi quantum well (MQW) active region, a contact layer formed thereover to facilitate electrical contact with the active layer, a current blocking layer for directing current to the active region, and a cladding layer to continue light to the active region. Zn is a commonly used p-type dopant for the blocking, contact and cladding layers, and the performance of the laser and modulator depends critically on the level of Zn in the various layers of the device.
- It is desired to maintain a certain Zn dopant profile in the device structure for optimum performance. However, the Zn profile in the blocking and cladding layers may get modified during the growth of the contact layer due to the migration of the Zn dopant from the contact layer. One solution to the problem is to reduce the amount of Zn in the cladding, blocking, and contact layers. However, this approach also adversely affects other device properties, such as total device resistance.
- It is desirable, therefore, to provide a process and resulting device which mitigate the problem of Zn migration in optical devices.
- The invention in accordance with one aspect is an optical device comprising a semiconductor waveguide region (which may include an active region), a cladding region including a dopant comprising in, formed adjacent to the waveguide region, and a semiconductor contact region. The contact region is selected from the materials InGaAs and InGaAsP, and is formed over the waveguide region. The contact region includes a p-type dopant comprising carbon to provide sufficient conductivity to make low resistance contact to the waveguide region.
- In accordance with another aspect the invention is a method of fabricating an optical device including the steps of epitaxially forming a semiconductor waveguide region over the substrate, and forming a cladding region adjacent to the waveguide region, the cladding region including a dopant comprising Zn. A contact region selected from the materials InGaAs and InGaAsP is epitaxially formed over the waveguide region. The contact layer includes a p-type dopant comprising carbon to provide sufficient conductivity to make a low resistance contact to the waveguide region.
- These and other features of the invention are delineated in detail in the following description. In the drawing:
- FIG. 1 is perspective view of an optical device according to one embodiment of the invention.
- FIGS.2-4 are views of the device of FIG. 1 during various stages of fabrication; and
- FIG. 5 is a front view of a device according to a further embodiment of the invention.
- It will be appreciated that, for purposes of illustration, these figures are not necessarily drawn to scale.
- FIG. 1 illustrates a typical electroabsorption modulated laser (EML) device,10, which includes features of the invention. The device, 10, basically comprises two portions, a laser portion, 11, and a modulator portion, 12, formed on a single substrate. 13. The substrate, 13, typically comprises InP. Formed on the substrate. 13, is a waveguide region. 14, which comprises a combination of active layer and optical confinement layer and is typically InGaAsP. The region, 14, includes a p-n junction, 26. As known in the art, the properties of the constituents of the
waveguide 14 are chosen so that in the laser portion, 11, the waveguide will function as an active region and in the modulator portion, 12, the waveguide will absorb a certain amount of the emitted light depending upon the electrical bias supplied thereto. (See, e.g., Johnson et al “High Speed Integrated Electroabsorption Modulators”, Proceedings of SPIE, Vol. 3038, pp. 30-38 (Feb. 1997). - Thus, in the context of this application, a “waveguide” region refers to a region which will confine light to a designated portion of the device, and can include, alone or in combination, an active region, a modulator region, and a detector region (not shown).
- A blocking layer,25, is formed adjacent to the
waveguide 14. This layer typically comprises alternate n, p-type and intrinsic layers of InP, and is used to block current in areas outside thewaveguide 14. - A cladding layer,15, is also formed adjacent to the waveguide, 14, and extending above it. The layer, 15, in combination with 14, provides the necessary structure for proper operation of an optical waveguide. The layer, 15, is typically a binary material, e.g., InP. The cladding layer typically includes Zn as a p-type dopant in a controlled profile. A contact layer, 16, is formed over the waveguide and cladding region. This layer is doped to provide sufficient conductivity to make low resistance contact to the section, 14. The layer, 16, typically comprises InGaAs and includes a p-type dopant to adjust the conductivity. In accordance with a preferred embodiment, the impurity is carbon, and the impurity concentration is within the range 1×1018-5×1019 cm−3. Carbon behaves as a p-type dopant in ternary material, although it acts as n-type dopant in other material such as InP. The elimination of Zn dopant in the contact layer, 16, effectively eliminates the problems associated with Zn migration during growth and processing, such as an increase in internal loss in the waveguide. 14, in the laser portion. In addition, it aids in preserving the location of p-n junction. 26, within
section 14. - The device,10, also includes
electrodes - A method for fabricating the device of FIG. I is illustrated in FIGS.2-4. As illustrated in FIG. 2, the region, 14, is formed on the substrate, 13, by first forming mask segments, 20 and 21, which are typically SiO2 and leaving a central portion of the substrate exposed. The
region 14 is then grown on the exposed surface typically by metallorganic chemical vapor deposition (MOCVD) or gas source molecular beam epitaxy (GSMBE). - Typically,
segments - As illustrated in FIG. 3, the
blocking layer 25 and cladding layer, 15, are then formed by epitaxially growing the semiconductor layers on the exposed surfaces of the substrate, 13. This is usually done by MOCVD. The layer, 15, typically includes a Zn dopant having a desired profile as a function of the layer thickness so as to form the p-n junction. For example, the concentration of Zn dopant usually varies from 5×1017cm3 to 3×1018cm3. - As illustrated in FIG. 4, the contact layer,16, is formed on the cladding layer, 15, typically by MOCVD. The layer, 16, includes carbon as a p-type dopant to provide the desired conductivity. Preferably, the dopant concentration is in the range 2×1018-3×1019 cm−3. The contact layer. 16, is typically InGaAs, but other materials such as InGaAsP might be employed if carbon will act as a p-type dopant therein. The
layer 16, is typically 0.1 μm-0.5 μm micron thick. - The structure is completed by depositing
electrodes - While the invention has been described with reference to an EML device, it should be apparent that it is useful for other optical devices requiring a p-type contact layer. For example, a capped Mesa Buried Heterostructure (CMBH) laser, illustrated in FIG. 5, includes a substrate,30, typically InP on which is formed a n-
type undercladding layer 31, an active region and waveguide, 32, for light emission, and blocking regions, 33 and 34, adjacent to the active region,layer 35. The active region typically comprises MQW or bulk layers of InGaAsP, and the blocking regions, 33 and 34, typically comprise InP. A p-type cladding layer, 35, comprising typically InP was formed over the waveguide and active region. This was followed by the growth oflayer 36 as a contact layer. The contact layer, 36, was InGaAs and include carbon as the p-type dopant with a concentration in the range 1×1018-3×1019 cm−3. - This device was tested, and it was discovered that such lasers have lower threshold currents and higher slope efficiency than similar devices made with Zn-doped contact layers. Further, the internal loss in the laser cavity was lower for devices made in accordance with the invention as a result of the absence of Zn diffusion into the active region.
Claims (7)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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US09/097,205 US6317444B1 (en) | 1998-06-12 | 1998-06-12 | Optical device including carbon-doped contact layers |
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US20010040907A1 true US20010040907A1 (en) | 2001-11-15 |
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US09/097,205 Granted US20010040907A1 (en) | 1998-06-12 | 1998-06-12 | Optical device including carbon-doped contact layers |
US09/097,205 Expired - Lifetime US6317444B1 (en) | 1998-06-12 | 1998-06-12 | Optical device including carbon-doped contact layers |
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US09/097,205 Expired - Lifetime US6317444B1 (en) | 1998-06-12 | 1998-06-12 | Optical device including carbon-doped contact layers |
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US (2) | US20010040907A1 (en) |
EP (1) | EP0964489A1 (en) |
JP (1) | JP2000031580A (en) |
CN (1) | CN1239342A (en) |
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- 1998-06-12 US US09/097,205 patent/US20010040907A1/en active Granted
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-
1999
- 1999-06-08 EP EP99304469A patent/EP0964489A1/en not_active Withdrawn
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Also Published As
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JP2000031580A (en) | 2000-01-28 |
CN1239342A (en) | 1999-12-22 |
US6317444B1 (en) | 2001-11-13 |
EP0964489A1 (en) | 1999-12-15 |
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