US20020121886A1 - Methods to make DRAM fully compatible with SRAM - Google Patents
Methods to make DRAM fully compatible with SRAM Download PDFInfo
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- US20020121886A1 US20020121886A1 US09/790,356 US79035601A US2002121886A1 US 20020121886 A1 US20020121886 A1 US 20020121886A1 US 79035601 A US79035601 A US 79035601A US 2002121886 A1 US2002121886 A1 US 2002121886A1
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- G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
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- G11C11/406—Management or control of the refreshing or charge-regeneration cycles
- G11C11/40615—Internal triggering or timing of refresh, e.g. hidden refresh, self refresh, pseudo-SRAMs
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- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
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- G11C11/4063—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing
- G11C11/407—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing for memory cells of the field-effect type
- G11C11/409—Read-write [R-W] circuits
- G11C11/4091—Sense or sense/refresh amplifiers, or associated sense circuitry, e.g. for coupled bit-line precharging, equalising or isolating
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- G11C11/4063—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing
- G11C11/407—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing for memory cells of the field-effect type
- G11C11/409—Read-write [R-W] circuits
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- G11C11/407—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing for memory cells of the field-effect type
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- G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
- G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
- G11C11/4063—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing
- G11C11/407—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing for memory cells of the field-effect type
- G11C11/409—Read-write [R-W] circuits
- G11C11/4097—Bit-line organisation, e.g. bit-line layout, folded bit lines
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- G11C29/02—Detection or location of defective auxiliary circuits, e.g. defective refresh counters
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
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- H10B—ELECTRONIC MEMORY DEVICES
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- G—PHYSICS
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- G11C7/00—Arrangements for writing information into, or reading information out from, a digital store
- G11C7/12—Bit line control circuits, e.g. drivers, boosters, pull-up circuits, pull-down circuits, precharging circuits, equalising circuits, for bit lines
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
- H10B10/12—Static random access memory [SRAM] devices comprising a MOSFET load element
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
Definitions
- the present invention relates to methods to make a dynamic random access memory (DRAM) fully compatible with a static random access memory (SRAM).
- DRAM dynamic random access memory
- SRAM static random access memory
- DRAM and SRAM are two major types of memory devices in the Integrated Circuit (IC) industry.
- DRAM of current art always has lower performance relative to SRAM, while SRAM is more expensive. Therefore, DRAM of current art is used for cost-sensitive applications, while SRAM is used for applications that require performance, power efficiency, or user-friendliness.
- memory access operations are often the performance bottleneck for computers.
- a typical solution for this performance bottleneck is to use a large number of low cost DRAM's as the main memory, while using a smaller number of high performance SRAM's as cache memory.
- This multiple level memory structure provides necessary compromises to balance cost efficiency and performance requirements.
- complex logic circuits are needed to assure data consistency of this memory structure. In many cases, memory operations are still the performance bottleneck for computer systems. It is therefore highly desirable to be able to manufacture high performance and cost efficient memories to remove multiple level memory structures in computer systems.
- DRAM's are typically manufactured by 4 layer poly, double layer metal (4P2M) technology; SRAM's are typically manufactured by 2 layer poly, double layer metal (2P2M) technology; logic circuits require technologies with many metal layers such as a single layer poly, 4 layer metal (1P4M) technology. Details of transistor manufacture procedures are also different between memory and logic. DRAM technologies emphasize on leakage current reduction and high voltage tolerance, so it needs to use thick gate, long channel transistors with higher threshold voltage. Logic circuits emphasize on performance, so they prefer thin gate, short channel transistors with lower threshold voltage. An SRAM technology needs to have special modules to build poly resistors. Due to these conflicting requirements, researchers in the IC industry must develop different manufacturing technologies to build DRAM's, SRAM's, and logic circuits separately. It is therefore highly desirable to simplify those conflicting needs from different types of products.
- One approach to solve the above long-existing problem is to improve the data access rate of DRAM using parallel processing and pipeline concepts in DRAM design.
- Well-known products using such approaches are the synchronized DRAM (SDRAM), the RAMBUS system approach, and the multiple-bank DRAM (MDRAM).
- SDRAM synchronized DRAM
- MDRAM multiple-bank DRAM
- the major problem for those products is that they are not compatible with existing products.
- the computer industry does not want to change existing designs to adapt for those new memory structures.
- the other problem is that these approaches improve data access rate without improving memory latency.
- Another approach is to make a DRAM device behaves as an SRAM device using self-refresh circuits.
- This type of memory device is user-friendly because it has the same interface as conventional SRAM devices.
- they are not very useful because performance of such self-refresh DRAM is as low as conventional DRAM, while it requires high standby power to support self-refresh operations.
- the first issue is the standby power problem.
- An SRAM consumes almost no power when it is not used.
- a DRAM consumes power even when the user is not using the memory.
- the most well-known source comes from the memory refresh operations.
- the self-refresh mechanism described in U.S. Pat. No. 8,653,620 improved energy efficiency for memory refresh, and solved the problem effectively.
- the other major source comes from the DRAM pre-charge circuits. Bit lines of DARM are usually pre-charged to a voltage near half of its power supply voltage. In order to make the product fully compatible with SRAM, we must have an internal reference voltage generator to maintain this pre-charge voltage. Reference voltage generators of current art consume standby powers.
- alpha particle problem Another important issue is a reliability problem known as “alpha particle problem”—high energy particles hit an integrated circuit, and change the contents of its memory elements.
- the memory cells used in our previous inventions are more sensitive to the alpha particle problem than conventional SRAM devices. It is therefore desirable to develop an error correction mechanism to correct errors caused by the alpha particle problem.
- the primary objective of this invention is, therefore, to provide practical methods to make a DRAM fully compatible with existing SRAM products.
- This and other objects are accomplished by design and manufacture methods according to the invention, which includes a method to reduce standby power of reference voltage generators and a method to avoid the alpha particle problem using a novel error correction code (ECC) mechanism.
- ECC error correction code
- the reference voltage generator of the present invention can adjust the values of output voltage and driving power separately following simple procedures. It has very strong driving power to maintain the reference voltage, which is necessary to support high speed operation of memory devices of the present invention. In the mean time, its standby power can be reduced by orders of magnitudes using simple control mechanism, which is necessary to make our memory device compatible with the properties of existing SRAM products. There is no need to use feedback circuits or operation amplifiers, so the circuit is extremely stable and reliable. It is an ideal reference voltage generator to generate the bit line pre-charge voltage for a DRAM designed to emulate an SRAM device. The unique features of the ECC protection of the present invention avoid RC delay problems in prior art ECC circuits, which is necessary to support high speed operation of our products.
- the alpha particle problem is no longer an issue. All the supporting circuits can use repeated layouts, which is very important for memory design.
- the manufacture technology for embedded IC is simplified dramatically, which allow us to have high performance logic circuits.
- the memory devices of the present invention is therefore compatible in every detailed feature with existing SRAM products.
- FIG. 1( a ) is a schematic diagram for a reference voltage generator of the present invention
- FIG. 1( b ) illustrates detailed structures of the circuit in FIG. 1( a );
- FIG. 1( c ) shows the output current versus output voltage of the voltage generator in FIG. 1( a );
- FIG. 2( a ) is a high level block diagram of an error correction mechanism of the present invention
- FIG. 2( b ) is the schematic diagram of a DRAM cell
- FIG. 2( c ) is a block diagram of an error correction parity circuits of the present invention.
- FIG. 2( d ) shows details of the circuit block in FIG. 2( c );
- FIG. 2( e ) is a block diagram of an error decoder of the present invention.
- FIG. 2( f ) shows details of the decoder in FIG. 2( e );
- FIG. 3 shows a typical distribution of memory refresh time for all memory cells in a DARM array
- FIGS. 4 ( a - g ) illustrate the manufacture procedures for a prior art high performance IC technology that has both high speed transistor for its logic circuits and low leakage transistors for its DRAM memory cells on the same chip;
- FIGS. 5 ( a - d ) show the manufacture procedures for the high performance integrated circuits of the present invention.
- memory bit lines are typically pre-charged to a voltage around half of the power supplier voltage Vcc.
- this bit line pre- charge voltage must be generated internally. It is therefore necessary to have a reference voltage generator that is invisible to external users. Because our emulated “SRAM” is much faster than conventional DRAM, this internal reference generator must have a driving power much stronger than that of reference voltage generators of current art. To emulate an SRAM which has very small standby power, the voltage generator also need to consume very little standby power.
- FIG. 1( a ) is a symbolic diagram of a reference voltage generator of the present invention.
- a dashed arrow to a conventional transistor symbol to represent a variable size transistor—a transistor whose size is changeable by control signals.
- the source of a variable size p-channel transistor MPR is connected to Vcc; its gate is connected to ground; its drain is connected to the drain of a variable size n-channel transistor MN, the gate of the same transistor MN, and the gate of an n-channel transistor MNO.
- the voltage at this node is VGN.
- the source of the variable transistor MN is connected to the source of a variable size p-channel transistor MP; the voltage at the source of MN is PCGV. Both the gate and the drain of transistor MP are connected to a node at voltage VGP, which is also connected to the gate of a p-channel transistor MPO and the drain of a variable size n-channel transistor MNR. The gate of MNR is connected to Vcc. The drains of transistors MPO and MNO are connected to the output of this reference voltage generator at voltage VOUT. This output voltage VOUT is applied to loadings such as bit lines and pre-charge circuits. The output current is lout.
- MOS Metal-Oxide-Semiconductor
- Gmn is a constant determined by the carrier mobility and the size of transistor MN
- Vtn is the threshold voltage of transistor MN
- VGN PCGV+Vtn +( Istbr/Gmn ) 1 ⁇ 2 ⁇ PCGV+Vtn (2)
- VGP PCGV ⁇ Vtp ⁇ ( Istbr/Gmp ) 1 ⁇ 2 ⁇ PCGV ⁇ Vtp (3)
- Gmp is a constant determined by the carrier mobility and the size of transistor MP
- Vtp is the threshold voltage of transistor MP
- VGP Istbr*Rp (4)
- Vcc ⁇ VGN Istbr*Rn (5)
- PCGV ( Vcc+Vtp ⁇ Vtn )/2+[(1 ⁇ Rp/Rn )/(1 +Rp/Rn )]*( Vcc ⁇ Vtp ⁇ Vtn )/2 (7)
- Rp is the effective resistance of transistor MPR
- Rn is the effective resistance of transistor MNR
- the output voltage of the reference voltage generator can be adjusted by adjusting the ratio Rp/Rn that is determined by the sizes of transistors MPR and MNR.
- the sizes of transistors MN and MP have little effects on PCGV; they are used to adjust the leakage current and the sensitivity of the reference voltage generator.
- standby leakage current Istb can be reduced by reducing the width ratio Mc or by increasing (Rp+Rn).
- reducing the standby leakage current Istb will also reduce the driving power of driving transistors MPO and MNO, which will make the output voltage VOUT more noisy when the IC is active.
- FIG. 1( b ) shows detailed structures of the variable size transistors MN, MNR, MP, MPR in FIG. 1( a ).
- transistors MPR 1 , MPR 2 and switch SPR form the variable size transistor MPR in FIG. 1( a ).
- the switch control signal ZZ is low, the switch SPR is closed, and the size of the variable transistor MPR is equal to the size of MPR 1 .
- the switch control signal ZZ is high, the switch SPR is open, the size of the variable size transistor MPR is equal to that of two serial transistors MPR 1 , MPR 2 , and its effective resistance Rp is increased.
- FIG. 1( b ) shows detailed structures of the variable size transistors MN, MNR, MP, MPR in FIG. 1( a ).
- transistors MN 1 , MN 2 and switch SN form the variable size transistor MN in FIG. 1( a ).
- the switch control signal ZZ is low, the switch SN is open, and the size of the variable transistor MN is equal to the size of MN 1 .
- the switch control signal ZZ is high, the switch SN is closed, the size of the variable size transistor MN is equal to that of two parallel transistors MN 1 , MN 2 , and its effective width Wmn is increased.
- transistors MNR 1 , MNR 2 and switch SNR form the variable size transistor MNR in FIG. 1( a ).
- the switch SNR When the switch control signal ZZ is low, the switch SNR is closed, and the size of the variable transistor MNR is equal to the size of MNR 1 .
- the switch control signal ZZ When the switch control signal ZZ is high, the switch SNR is open, the size of the variable size transistor MNR is equal to that of two serial transistors MNR 1 , MNR 2 , and the effective resistance Rp is increased.
- transistors MP 1 , MP 2 and switch SP form the variable size transistor MP in FIG. 1( a ).
- the switch control signal ZZ When the switch control signal ZZ is low, the switch SP is open, and the size of the variable transistor MP is equal to the size of MP 1 .
- the switch SP When the switch control signal ZZ is high, the switch SP is closed, the size of the variable size transistor MP is equal to that of two parallel transistors MP 1 , MP 2 , and its effective width Wmp is increased.
- the sizes of transistor MPR 1 , MPR 2 , MNR, MNR 2 are chosen in such as way that Rp/Rn ratio does not change with the switch control signal ZZ. Therefore, the voltage PCGV does not change with ZZ; only the standby current Istb and the driving capability of the reference voltage generator are changed.
- a reference voltage generator of the present invention can be designed by the following procedures:
- step 1 determine the target value of output voltage PCGV, then calculate Rp/Rn ratio using Eq. (7);
- step 2 based on noise margin, calculate the required driving power of the output transistors MNO, MNP, then determine the sizes of transistors MNR 1 , MPR 1 , MN 1 , MP 1 ;
- step 3 determine the value of tolerable standby leakage current Istb to determine the sizes of transistors MNR 2 , MPR 2 , MN 2 , MP 2 according to EQ. (8);
- step 4 design the logic circuit to generate the switch control signal ZZ.
- a reference voltage generator of the present invention has many advantages. It is very convenient to adjust its output voltage, driving power, and leakage current. The values of output voltage and driving power can be adjusted separately following simple procedures. It has very strong driving power to maintain the reference voltage. Almost all the power consumed by this reference voltage generator is used to maintain its output voltage; there is little wasted power. Its standby power can be reduced by orders of magnitudes using simple control mechanism. There is no need to use feedback circuits or operation amplifiers, so the circuit is extremely stable and reliable. It is an ideal reference voltage generator to generate the bit line pre-charge voltage for a DRAM designed to emulate an SRAM device.
- variable size transistors There are a wide varieties of methods to design variable size transistors. Similar reference voltage generators can be manufactured using bipolar transistors instead of MOS transistors.
- the gate voltages of transistors MPR, MNR do not always need to be power supplier voltages. For example, we can connect their gates to PCGV to save area.
- the switches SPR, SNR, SP, SN can be replaced with metal options. We also can use more switches so that each variable transistor can have multiple controllable sizes.
- the output voltage of the reference voltage generator also can be controlled by programmable signals.
- DRAM is more sensitive to alpha particle problem then SRAM because it relies on storage capacitors to hold data. This reliability problem must be solved to make DRAM devices fully compatible to conventional SRAM devices.
- An error correction code (ECC) mechanism of the present invention is used to correct erroneous data caused by alpha particle problem or other sources of problems such as manufacturing defects. Due to the small dimensions of DRAM memory cells, errors tend to happen at nearby memory cells; therefore, ECC circuits of the present invention must be able to correct erroneous data from nearby memory cells.
- Another problem for ECC circuit is the delay caused by resistance and capacitance (RC delay) of long metal lines.
- Error correction logic circuits need to calculate the parity of data distributed in widely separated space; ECC calculation often needs to use long metal lines to collect data. Metal line RC delay became a dominating factor to determine the performance of the ECC circuits. To support high speed operations, this RC delay problem must be solved.
- D[3:2][4:1] means a set of 8 symbols D34, D33, D32, D31, D24, D23, D22, and D21.
- D21 means a set of 8 symbols D34, D33, D32, D31, D24, D23, D22, and D21.
- mod means a set of 8 symbols D34, D33, D32, D31, D24, D23, D22, and D21.
- mod to represent the modulation operation that results in the remain of a divide operation.
- the “mod” function is implemented by a rotational relationship in the input connections of actual circuits.
- FIG. 2( a ) is a high level block diagram describing the geometric relationship between an ECC logic circuit of the present invention and DRAM memory cells.
- Memory cells are represented symbolically by circles ( 301 ) in FIG. 2( a ).
- FIG. 2( b ) is a schematic diagram of a DRAM memory cell.
- Each memory cell ( 301 ) contains one storage capacitor ( 302 ) which is connected to the source of an MOS transistor ( 303 ).
- the gate of the transistor ( 303 ) is controlled by a memory word line (WL), and the source of the transistor is connected to a bit line (BL) as shown in FIG. 2( b ).
- WL memory word line
- BL bit line
- one word line (WL) is activated to turn on the transistors ( 303 ) in all the memory cells ( 301 ) connected to the word line.
- WL word line
- FIG. 2( a ) we assume 288 bits are read from the memory array ( 310 ) during a read operation. These data are divided into 4 groups of 72-bit data; each group contains 64 data bits (D[7:0][7:0]) and 8 ECC bits (C[7:0]). The data read from nearby memory cells are sent to different ECC logic circuits ( 320 - 323 ) as shown in FIG. 2( a ).
- Each set of the ECC logic circuits ( 320 - 323 ) is capable of correcting an erroneous data among its 72 input data. Since the data from nearby memory cells are sent to different ECC logic circuits, errors caused by nearby memory cells can be corrected unless more than 5 nearby memory cells are all wrong.
- FIGS. 2 ( c,d ) are schematic diagrams of one of those 4 sets of ECC logic circuits 320 in FIG. 2( a ).
- the 72 bit inputs to the ECC logic circuit are grouped into 8 sets of data bits D[7:0][7:0], and 8 ECC bits C[7:0].
- the ECC logic ( 320 ) comprises 8 identical parity circuit blocks (P7-P0). Schematic diagram of the parity circuit is shown in FIG. 2( d ).
- Each parity circuit (P7-P0) comprises 20 exclusive-or gates ( 330 ).
- the parity circuit P[k] takes data D[k][7:0] and ECC bit Ck as inputs, where k is an integer between 0 to 7.
- N 11 Parity ⁇ Ck, Dk 0 ⁇ (9a),
- N33 Parity ⁇ N23B, Dk2, Dk5, Dk6 ⁇ (9c),
- N41 Parity ⁇ N33B, N24T, Dk1, Dk4, Dk5 ⁇ (9d),
- N24 Parity ⁇ Dk4, Dk5, Dk6, Dk7 ⁇ (9e),
- N32 Parity ⁇ Dk0, Dk1, Dk2, Dk3, Dk4, Dk5, Dk6, Dk7 ⁇ (9f),
- N42 Parity ⁇ N32T, N11B, Dk0, Dk1, Dk2, Dk3, Dk4, Dk5 ⁇ (9g),
- parity ⁇ ⁇ means the parity value of all the inputs included in “ ⁇ ⁇ ” signs.
- the inputs (N11B, N22B, N33B, N41B, N24T, N32T, N42T) provided by nearby parity circuits can be determined by the fact that all of those parity circuits in FIG. 2( c ) are identical. For example, from Eq. (9a) we know that
- N 11 B Parity ⁇ C [( k+ 1) mod 8 ], D [( k+ 1) mod 8]0 ⁇ (10)
- C[(k+1)mod 8] is the ECC bit
- D[(k+1)mod 8]0 is the first data connected to the parity circuit below it.
- All other inputs (N22B, N33B, N41B, N24T, N32T, N42T) can be determined in similar ways; some of them will need to use data and ECC inputs from parity circuits farther away. Based on the connections in FIG. 2( c ) and Eqs. (9a-9h), we can conclude that
- ECC ( k ) Parity ⁇ D [( k ⁇ 2) mod 8][7:0], D [( k ⁇ 1) mod 8][5:0], D[k][ 7:4,0], D [( k+ 1) mod 8][5,4,1 ], D [( k+ 2) mod 8][6,5,2 ], D [( k+ 3) mod 8][7,4,3] ⁇ (12)
- the error decoding circuit contains eight sets of error decoders (DC7-DC0) as illustrated by the schematic diagram in FIG. 2( f ).
- Each error decoder DC[k] contains eight 5-input AND gates ( 350 ). Each one of those AND gates takes five error correction factors as inputs; some of those inputs are inverted as illustrated by the open circles ( 352 ) in FIG. 2( f ).
- the inputs to the error decoder DC[k] are rotated to right before they are sent to next error decoder DC[k ⁇ 1] as illustrated in FIG. 2( e ); in this way, identical layouts for error decoders can be used.
- the outputs of those AND gates ( 350 ) are connected to sixty four flip signals (flip[7:0][7:0]). If the output data are correct, all the flip signals (flip[7:0][7:0]) will be zero. If one bit of the output data is wrong, its corresponding flip signal will be high, and the correct data can be calculated by flipping the polarity of the wrong bit.
- the ECC mechanism of the present invention is novel by the rotation relationship in the parity calculation; parity calculation of C[k+1] is the result of simple rotation of C[k].
- This rotational relationship allow us to design circuits that can be used repeatedly in physical layout, which is extremely important for memory devices.
- the length of metal connection is also minimized because no signals need to travel more than the distance of a small circuit block. Speed degradation caused by RC delay is therefore avoided.
- Eq. (12) can be modified to different forms while keeping the rotation relationship. Different numbers of data and correction bits can be used to serve the same purpose.
- the novel element for the correction mechanism of the present invention is to enforce a rotational relationship in parity calculation of ECC mechanism. Based on the rotational relationship, repeating circuit design can be used to simplify design effort. Higher performance is also achieved by minimizing RC delay.
- a memory device equipped with the above ECC protection mechanism will need additional logic circuits and 12.5% more memory cells than a conventional DRAM. However, this does not necessarily mean a DRAM equipped with the ECC circuits of the present invention is larger than a conventional DRAM.
- One reason is that we no longer need to have redundancy memory arrays because the ECC circuits will correct most of defect problems. Additional area reduction comes from improvements in memory refresh time. DRAM memory cells must be refreshed periodically; otherwise it will lose its storage data due to leakage current. The maximum time between two refresh operations is called the “refresh time” for a memory cell.
- FIG. 3 illustrates a typical distribution of the refresh time for all memory cells in a large DRAM array.
- Tav average refresh time
- the refresh time of a prior art DRAM is determined by that of the worst memory cell (Tmin) among millions of cells in the IC. Tmin is typically more than two orders of magnitudes lower than the average refresh time. For example, a typical average refresh time for current art DRAM maybe around 50 mini-seconds, while we require refresh time less than 0.2 mini-seconds in order to have reasonable yield.
- the refresh period is determined by normal memory cells instead of defective memory cells because the ECC circuits will correct erroneous results from those defective memory cells; the memory refresh period can be much longer than conventional DRAM.
- a DRAM storage capacitor with two fins can be replaced with a single fin storage capacitor.
- the word line transistor ( 303 ) for a prior art DRAM cell must be a long channel transistor with high threshold voltage and thick gate oxide.
- high speed logic circuits would like to use short channel transistors with low threshold voltage and thin gate oxide.
- FIG. 4( a - g ) illustrate the manufacture procedures for a prior art high performance IC technology that has both high speed transistors for its logic circuits and low leakage transistors for its DRAM memory cells on the same chip.
- the cross-section diagrams for an n-channel high performance logic transistor are shown in the left hand side, and the cross-section diagrams for an n-channel low leakage memory transistor are shown in the right hand side for comparison.
- FIG. 4( a ) shows such a side-by-side cross section diagram at threshold voltage implantation (Vt implant) procedure.
- the active areas of transistors are covered by protection oxide layers ( 401 ), and the isolation areas are covered by field oxide layers ( 403 ).
- the threshold voltages of the logic transistor is adjusted by ion implantation ( 405 ), and positive dopants ( 407 , 409 ) are implanted into the active areas of both transistors. Since the memory transistor need to have higher threshold voltage and thicker gate oxide, additional implantation is needed.
- FIG. 4( b ) shows that another ion implantation ( 415 ) is done when the area of the logic transistor is covered with photo-resist ( 411 ). The dopant density in the memory transistor ( 409 ) is therefore different from that of the logic transistor ( 407 ).
- the next procedure is to remove the protection oxide ( 401 ) in the memory transistor while the photo-resist still protects the area for logic transistor, as illustrated in FIG. 4( c ).
- the photo-resist is then removed, and a thin layer of high quality gate oxide ( 411 ) is grown in the memory transistor area as shown in FIG. 4( d ); the protection oxide 443 at the logic transistor also grows slightly thicker at this stage.
- the thickness of the gate oxide ( 411 ) is exaggerated in all the following diagrams because it would not be visible if drawn to scale.
- the next step is to cover the memory transistor with photo-resist ( 451 ) and remove the protection oxide ( 443 ) in the logic area as shown in FIG. 4( e ).
- the photo-resist ( 451 ) is then removed before a thin layer of high quality gate oxide ( 461 ) is grown in the logic transistor area as shown in FIG. 4( f ).
- the gate oxide in the memory area ( 463 ) is grown thicker. All the following procedures, including poly silicon deposition, definition of gate area, interlayer insulator deposition, lightly-doped-region definition, source/drain implantation, are all identical in both types of transistor. Those procedures are well-known to the art so that there is no need to describe them in details.
- the final structure of both types of transistor are shown in FIG. 4( g ). There are three major difference between the logic transistor in the left hand side and the memory transistor in the right hand side.
- the gate oxide ( 473 ) of the logic transistor is thinner than the gate oxide ( 474 ) of the memory transistor. Typical oxide thickness is 7 nm for the logic transistor, and 12 nm for the memory transistor.
- the channel region doping ( 475 ) of the logic transistor is different from the channel region doping ( 476 ) of the memory transistor so that they have different threshold voltages.
- Typical threshold voltage (Vt) for the n-channel logic transistor is around 0.5 volts, while typical threshold voltage for the memory transistor is around 0.7 volts.
- the thin gate, low Vt transistor is optimized to build high speed logic circuits.
- the thick gate, high Vt transistor is optimized for low leakage current; it also can tolerate higher gate voltages.
- This technology allows us to build DRAM devices and high performance logic circuits in the same chip, but it requires at least two more masking steps and many more manufacture procedures; the manufacture cost is increased significantly while yield degrades dramatically.
- One prior art solution is to use the thick gate, high Vt transistor for both memory and logic circuits. This approach reduces complexity in manufacture technology, but it degrades logic circuit performance dramatically; such technology is only useful to build low end products.
- FIGS. 5 ( a - c ) The manufacture procedures of an embedded DRAM technology of the present invention is illustrated in FIGS. 5 ( a - c ).
- the procedure for Vt implant illustrated in FIG. 5( a ) is identical to that in FIG. 4( a ). Both the logic transistor and the memory transistor received the same implantation, and their channel doping ( 507 , 509 ) are identical.
- the next step is to remove protection oxide ( 401 ) from both areas simultaneously as shown in FIG. 5( b ).
- Thin layers of high quality gate oxide ( 521 , 523 ) are grown in both types of transistors simultaneously, as shown in FIG. 5(c ).
- the resulting transistor devices are illustrated in FIG. 5( d ).
- the logic transistor and the memory transistor have identical gate oxide layers ( 543 , 544 ) and identical channel structures ( 545 , 546 ). Therefore, they can be manufactured simultaneously.
- the manufacture procedures described in FIGS. 4 ( a - g ) use 2 masking steps, one gate oxidation, one ion implantation, and one etching step more than the procedures described in FIGS. 5 ( a - d ). All of those manufacture procedures in FIGS. 5 ( a - d ) are known in the of IC industry.
- the circuit design methods of the present invention make it possible to use simpler manufacture technology to achieve better performance, better reliability, and better yield at lower cost.
- ECC protection mechanism of the present invention provides many advantages over prior art devices.
- the alpha particle problem is no longer an issue because the ECC circuits can correct errors from multiple nearby bits. There is no need to have redundancy array for the same reason.
- Our device still can operate at high performance because RC delay problems in prior art ECC circuits is solved by the rotational ECC circuits of the present invention. All the supporting circuits can use repeated layouts, which is very important for memory design.
- the manufacture technology for embedded IC is simplified dramatically because we can use thin gate transistors for DRAM memory cells.
Abstract
This invention provides practical methods to make a DRAM fully compatible with existing SRAM products. This is accomplished by design and manufacture methods according to the invention, which includes a method to reduce standby power of reference voltage generators and a method to avoid the alpha particle problem using a novel error correction code (ECC) mechanism. The reference voltage generator of the present invention can adjust the values of output voltage and driving power separately following simple procedures. It has very strong driving power to maintain the reference voltage, which is necessary to support high- speed operation of memory devices of the present invention. In the mean time, its standby power can be reduced by orders of magnitudes using simple control mechanism, which is necessary to make our memory device compatible with the properties of existing SRAM products. There is no need to use feedback circuits or operation amplifiers, so the circuit is extremely stable and reliable. It is an ideal reference voltage generator to generate the bit line pre-charge voltage for a DRAM designed to emulate an SRAM device. The unique features of the ECC protection of the present invention avoid RC delay problems in prior art ECC circuits, which is necessary to support high speed operation of our products. The alpha particle problem is no longer an issue. All the supporting circuits can use repeated layouts, which is very important for memory design. The manufacture technology for embedded IC is simplified dramatically, which allow us to have high performance logic circuits. The memory devices of the present invention are therefore compatible in every detailed feature with existing SRAM products.
Description
- This Application is a Divisional Application of a co-pending application Ser. No. 08/989,841 filed on Dec. 12, 1997 and application Ser. No. 08/989,841 is a Continuation-in Part Application 08/653,620 filed on March 24, 1996 by the same Applicant of this Application.
- The present invention relates to methods to make a dynamic random access memory (DRAM) fully compatible with a static random access memory (SRAM).
- DRAM and SRAM are two major types of memory devices in the Integrated Circuit (IC) industry. DRAM of current art always has lower performance relative to SRAM, while SRAM is more expensive. Therefore, DRAM of current art is used for cost-sensitive applications, while SRAM is used for applications that require performance, power efficiency, or user-friendliness. Since the logic circuits of current art is operating at much high frequencies than DRAM, memory access operations are often the performance bottleneck for computers. A typical solution for this performance bottleneck is to use a large number of low cost DRAM's as the main memory, while using a smaller number of high performance SRAM's as cache memory. This multiple level memory structure provides necessary compromises to balance cost efficiency and performance requirements. However, complex logic circuits are needed to assure data consistency of this memory structure. In many cases, memory operations are still the performance bottleneck for computer systems. It is therefore highly desirable to be able to manufacture high performance and cost efficient memories to remove multiple level memory structures in computer systems.
- The need to manufacture different types of memory devices causes tremendous wastes in the IC industry. DRAM's are typically manufactured by 4 layer poly, double layer metal (4P2M) technology; SRAM's are typically manufactured by 2 layer poly, double layer metal (2P2M) technology; logic circuits require technologies with many metal layers such as a single layer poly, 4 layer metal (1P4M) technology. Details of transistor manufacture procedures are also different between memory and logic. DRAM technologies emphasize on leakage current reduction and high voltage tolerance, so it needs to use thick gate, long channel transistors with higher threshold voltage. Logic circuits emphasize on performance, so they prefer thin gate, short channel transistors with lower threshold voltage. An SRAM technology needs to have special modules to build poly resistors. Due to these conflicting requirements, researchers in the IC industry must develop different manufacturing technologies to build DRAM's, SRAM's, and logic circuits separately. It is therefore highly desirable to simplify those conflicting needs from different types of products.
- One approach to solve the above long-existing problem is to improve the data access rate of DRAM using parallel processing and pipeline concepts in DRAM design. Well-known products using such approaches are the synchronized DRAM (SDRAM), the RAMBUS system approach, and the multiple-bank DRAM (MDRAM). The major problem for those products is that they are not compatible with existing products. The computer industry does not want to change existing designs to adapt for those new memory structures. The other problem is that these approaches improve data access rate without improving memory latency.
- Another approach is to make a DRAM device behaves as an SRAM device using self-refresh circuits. This type of memory device is user-friendly because it has the same interface as conventional SRAM devices. However, they are not very useful because performance of such self-refresh DRAM is as low as conventional DRAM, while it requires high standby power to support self-refresh operations.
- The above inventions and developments provided partial solutions to memory design problems, but the computer industry resists to adapt to such partial solutions. Meeting requirements in performance and cost efficiency is not enough. To be successful, a novel solution must be compatible to existing memory devices in every details. U.S. Pat. No. 8,653,620 described methods to make a DRAM as fast as SRAM including a self-refresh mechanism which is completely invisible to external users. U.S. Pat. No. 8,805,290 described methods to build smaller memory device using the same manufacture technologies used to build logic IC products. The above two inventions allow us to make memories faster than SRAM of current art while using silicon area as small as that of DRAM of current art. However, there are further detailed problems we must solve to make our products truly compatible with existing industry standards. The present invention is developed to cover those remaining details.
- The first issue is the standby power problem. An SRAM consumes almost no power when it is not used. A DRAM consumes power even when the user is not using the memory. There are two major sources for this waste in energy. The most well-known source comes from the memory refresh operations. The self-refresh mechanism described in U.S. Pat. No. 8,653,620 improved energy efficiency for memory refresh, and solved the problem effectively. The other major source comes from the DRAM pre-charge circuits. Bit lines of DARM are usually pre-charged to a voltage near half of its power supply voltage. In order to make the product fully compatible with SRAM, we must have an internal reference voltage generator to maintain this pre-charge voltage. Reference voltage generators of current art consume standby powers. Because our product is much faster than conventional DRAM, the reference voltage generator need to have much stronger driving capability than those used by conventional DRAM's. It is therefore even more difficult to meet the requirements on standby power. This problem must be solved because the computer industry expects low standby power from SRAM's.
- Another important issue is a reliability problem known as “alpha particle problem”—high energy particles hit an integrated circuit, and change the contents of its memory elements. The memory cells used in our previous inventions are more sensitive to the alpha particle problem than conventional SRAM devices. It is therefore desirable to develop an error correction mechanism to correct errors caused by the alpha particle problem.
- The primary objective of this invention is, therefore, to provide practical methods to make a DRAM fully compatible with existing SRAM products. This and other objects are accomplished by design and manufacture methods according to the invention, which includes a method to reduce standby power of reference voltage generators and a method to avoid the alpha particle problem using a novel error correction code (ECC) mechanism.
- The reference voltage generator of the present invention can adjust the values of output voltage and driving power separately following simple procedures. It has very strong driving power to maintain the reference voltage, which is necessary to support high speed operation of memory devices of the present invention. In the mean time, its standby power can be reduced by orders of magnitudes using simple control mechanism, which is necessary to make our memory device compatible with the properties of existing SRAM products. There is no need to use feedback circuits or operation amplifiers, so the circuit is extremely stable and reliable. It is an ideal reference voltage generator to generate the bit line pre-charge voltage for a DRAM designed to emulate an SRAM device. The unique features of the ECC protection of the present invention avoid RC delay problems in prior art ECC circuits, which is necessary to support high speed operation of our products. The alpha particle problem is no longer an issue. All the supporting circuits can use repeated layouts, which is very important for memory design. The manufacture technology for embedded IC is simplified dramatically, which allow us to have high performance logic circuits. The memory devices of the present invention is therefore compatible in every detailed feature with existing SRAM products.
- While the novel features of the invention are set forth with particularly in the appended claims, the invention, both as to organization and content, will be better understood and appreciated, along with other objects and features thereof, from the following detailed description taken in conjunction with the drawings.
- FIG. 1(a) is a schematic diagram for a reference voltage generator of the present invention;
- FIG. 1(b) illustrates detailed structures of the circuit in FIG. 1(a);
- FIG. 1(c) shows the output current versus output voltage of the voltage generator in FIG. 1(a);
- FIG. 2(a) is a high level block diagram of an error correction mechanism of the present invention;
- FIG. 2(b) is the schematic diagram of a DRAM cell;
- FIG. 2(c) is a block diagram of an error correction parity circuits of the present invention;
- FIG. 2(d) shows details of the circuit block in FIG. 2(c);
- FIG. 2(e) is a block diagram of an error decoder of the present invention;
- FIG. 2(f) shows details of the decoder in FIG. 2(e);
- FIG. 3 shows a typical distribution of memory refresh time for all memory cells in a DARM array;
- FIGS.4(a-g) illustrate the manufacture procedures for a prior art high performance IC technology that has both high speed transistor for its logic circuits and low leakage transistors for its DRAM memory cells on the same chip; and
- FIGS.5(a-d) show the manufacture procedures for the high performance integrated circuits of the present invention.
- For a DRAM device, memory bit lines are typically pre-charged to a voltage around half of the power supplier voltage Vcc. In order to make a DRAM fully compatible with existing SRAM devices, this bit line pre- charge voltage must be generated internally. It is therefore necessary to have a reference voltage generator that is invisible to external users. Because our emulated “SRAM” is much faster than conventional DRAM, this internal reference generator must have a driving power much stronger than that of reference voltage generators of current art. To emulate an SRAM which has very small standby power, the voltage generator also need to consume very little standby power. These conflicting requirements for lower standby power and higher driving capability requires novel design.
- FIG. 1(a) is a symbolic diagram of a reference voltage generator of the present invention. In this figure, we attach a dashed arrow to a conventional transistor symbol to represent a variable size transistor—a transistor whose size is changeable by control signals. For the circuit in FIG. 1(a), the source of a variable size p-channel transistor MPR is connected to Vcc; its gate is connected to ground; its drain is connected to the drain of a variable size n-channel transistor MN, the gate of the same transistor MN, and the gate of an n-channel transistor MNO. The voltage at this node is VGN. The source of the variable transistor MN is connected to the source of a variable size p-channel transistor MP; the voltage at the source of MN is PCGV. Both the gate and the drain of transistor MP are connected to a node at voltage VGP, which is also connected to the gate of a p-channel transistor MPO and the drain of a variable size n-channel transistor MNR. The gate of MNR is connected to Vcc. The drains of transistors MPO and MNO are connected to the output of this reference voltage generator at voltage VOUT. This output voltage VOUT is applied to loadings such as bit lines and pre-charge circuits. The output current is lout. At steady state condition, lout is zero; there is a standby leakage current Istb leaking from Vcc through output transistor MPO and MNO to ground. There is also a leakage current Istbr leaking from Vcc through variable transistors MPR, MN, MP, MNR to ground as shown in FIG. 1(a).
- Using the current to voltage relationship of Metal-Oxide-Semiconductor (MOS) transistors, we have
- Istbr=Gmn*(VGN−PCGV−Vtn)2 (1)
- where Gmn is a constant determined by the carrier mobility and the size of transistor MN, and Vtn is the threshold voltage of transistor MN.
- Rearranging Eq. (1), we have
- VGN=PCGV+Vtn+(Istbr/Gmn)½ ˜PCGV+Vtn (2)
- where we used the fact that the third term (Istbr/Gmn)½ is usually negligible.
- Similarly, we have
- VGP=PCGV−Vtp−(Istbr/Gmp)½ ˜PCGV−Vtp (3)
- where Gmp is a constant determined by the carrier mobility and the size of transistor MP, and Vtp is the threshold voltage of transistor MP.
- If we describe the current to voltage relationships of transistors MPR and MNR using simplified ohmic relation as
- VGP=Istbr*Rp (4)
- Vcc−VGN=Istbr*Rn (5),
- from Eqs. (2-5) we have
- Istbr=(Vcc−Vtp−Vtn)/(Rp+Rn) (6)
- PCGV=(Vcc+Vtp−Vtn)/2+[(1−Rp/Rn)/(1+Rp/Rn)]*(Vcc−Vtp−Vtn)/2 (7)
- where Rp is the effective resistance of transistor MPR, and Rn is the effective resistance of transistor MNR.
- The transistor MNO in FIG. 1(a) is matched with transistor MN, and transistor MPO is matched with transistor MP so that (Wmno/Wmn)=(Wmpo/Wmp)=Mc, where Wmno is the width of transistor MNO, Wmn is the width of transistor MN, Wmpo is the width of transistor MPO, Wmp is the width of transistor MP, and Mc is the multiplication factor defined by the width ratios of those matched transistors. Since the gate to source voltages of those matched transistors are identical, we will have VOUT=PCGV when lout is zero. Eq. (7) suggests that the output voltage of the reference voltage generator can be adjusted by adjusting the ratio Rp/Rn that is determined by the sizes of transistors MPR and MNR. The sizes of transistors MN and MP have little effects on PCGV; they are used to adjust the leakage current and the sensitivity of the reference voltage generator.
- At steady state, the standby leakage current Istb is
- Istb=Mc*Istbr=Mc*(Vcc−Vtn−Vtp)/(Rn+Rp) (8)
- which suggest that standby leakage current Istb can be reduced by reducing the width ratio Mc or by increasing (Rp+Rn). However, reducing the standby leakage current Istb will also reduce the driving power of driving transistors MPO and MNO, which will make the output voltage VOUT more noisy when the IC is active.
- FIG. 1(b) shows detailed structures of the variable size transistors MN, MNR, MP, MPR in FIG. 1(a). In FIG. 1(b), transistors MPR1, MPR2 and switch SPR form the variable size transistor MPR in FIG. 1(a). When the switch control signal ZZ is low, the switch SPR is closed, and the size of the variable transistor MPR is equal to the size of MPR1. When the switch control signal ZZ is high, the switch SPR is open, the size of the variable size transistor MPR is equal to that of two serial transistors MPR1, MPR2, and its effective resistance Rp is increased. In FIG. 1(b), transistors MN1, MN2 and switch SN form the variable size transistor MN in FIG. 1(a). When the switch control signal ZZ is low, the switch SN is open, and the size of the variable transistor MN is equal to the size of MN1. When the switch control signal ZZ is high, the switch SN is closed, the size of the variable size transistor MN is equal to that of two parallel transistors MN1, MN2, and its effective width Wmn is increased. In FIG. 1(b), transistors MNR1, MNR2 and switch SNR form the variable size transistor MNR in FIG. 1(a). When the switch control signal ZZ is low, the switch SNR is closed, and the size of the variable transistor MNR is equal to the size of MNR1. When the switch control signal ZZ is high, the switch SNR is open, the size of the variable size transistor MNR is equal to that of two serial transistors MNR1, MNR2, and the effective resistance Rp is increased. In FIG. 1(b), transistors MP1, MP2 and switch SP form the variable size transistor MP in FIG. 1(a). When the switch control signal ZZ is low, the switch SP is open, and the size of the variable transistor MP is equal to the size of MP1. When the switch control signal ZZ is high, the switch SP is closed, the size of the variable size transistor MP is equal to that of two parallel transistors MP1, MP2, and its effective width Wmp is increased. The sizes of transistor MPR1, MPR2, MNR, MNR2 are chosen in such as way that Rp/Rn ratio does not change with the switch control signal ZZ. Therefore, the voltage PCGV does not change with ZZ; only the standby current Istb and the driving capability of the reference voltage generator are changed.
- The effective sizes of transistors MPR, MNR, MP, MN for a practical example is shown in Table I. In this example, the standby current Istb equals to 0.01 mAmps when the switch control signal ZZ is high, and Istb increase to 5 mAmps when ZZ is low. In the mean time, the driving capability represented by output current lout increases significantly when ZZ is high as shown in FIG. 1(c).
TABLE I transistor sizes in micrometers. MPR MNR MP MN MPO MNO Width/ 0.7/2.1 0.7/8 3.2/0.35 1.6/0.35 2400/0.35 1200/0.35 Length when ZZ low Width/ 0.7/42 0.7/160 120/0.35 60/0.35 2400/0.35 1200/0.35 Length when ZZ high - A reference voltage generator of the present invention can be designed by the following procedures:
- step 1: determine the target value of output voltage PCGV, then calculate Rp/Rn ratio using Eq. (7);
- step 2: based on noise margin, calculate the required driving power of the output transistors MNO, MNP, then determine the sizes of transistors MNR1, MPR1, MN1, MP1;
- step 3: determine the value of tolerable standby leakage current Istb to determine the sizes of transistors MNR2, MPR2, MN2, MP2 according to EQ. (8);
- step 4: design the logic circuit to generate the switch control signal ZZ.
- A reference voltage generator of the present invention has many advantages. It is very convenient to adjust its output voltage, driving power, and leakage current. The values of output voltage and driving power can be adjusted separately following simple procedures. It has very strong driving power to maintain the reference voltage. Almost all the power consumed by this reference voltage generator is used to maintain its output voltage; there is little wasted power. Its standby power can be reduced by orders of magnitudes using simple control mechanism. There is no need to use feedback circuits or operation amplifiers, so the circuit is extremely stable and reliable. It is an ideal reference voltage generator to generate the bit line pre-charge voltage for a DRAM designed to emulate an SRAM device.
- While specific embodiments of the invention have been illustrated and described herein, it is realized that other modifications and changes will occur to those skilled in the art. There are a wide varieties of methods to design variable size transistors. Similar reference voltage generators can be manufactured using bipolar transistors instead of MOS transistors. The gate voltages of transistors MPR, MNR do not always need to be power supplier voltages. For example, we can connect their gates to PCGV to save area. The switches SPR, SNR, SP, SN can be replaced with metal options. We also can use more switches so that each variable transistor can have multiple controllable sizes. The output voltage of the reference voltage generator also can be controlled by programmable signals. These and other modification are considered falling in the spirit of the present invention.
- DRAM is more sensitive to alpha particle problem then SRAM because it relies on storage capacitors to hold data. This reliability problem must be solved to make DRAM devices fully compatible to conventional SRAM devices. An error correction code (ECC) mechanism of the present invention is used to correct erroneous data caused by alpha particle problem or other sources of problems such as manufacturing defects. Due to the small dimensions of DRAM memory cells, errors tend to happen at nearby memory cells; therefore, ECC circuits of the present invention must be able to correct erroneous data from nearby memory cells. Another problem for ECC circuit is the delay caused by resistance and capacitance (RC delay) of long metal lines. Error correction logic circuits need to calculate the parity of data distributed in widely separated space; ECC calculation often needs to use long metal lines to collect data. Metal line RC delay became a dominating factor to determine the performance of the ECC circuits. To support high speed operations, this RC delay problem must be solved.
- Due to the complexity of the error correction mechanism, we will need to use the array symbol used for C programming language in the following discussions to describe the mechanism. For example, D[3:2][4:1] means a set of 8 symbols D34, D33, D32, D31, D24, D23, D22, and D21. We will also use the symbol “mod” to represent the modulation operation that results in the remain of a divide operation. For example, [(k+3) mod 8] equals 2 when k=7, and [(k−3) mod 8] equals 6 when k=1. The “mod” function is implemented by a rotational relationship in the input connections of actual circuits.
- FIG. 2(a) is a high level block diagram describing the geometric relationship between an ECC logic circuit of the present invention and DRAM memory cells. Memory cells are represented symbolically by circles (301) in FIG. 2(a). FIG. 2(b) is a schematic diagram of a DRAM memory cell. Each memory cell (301) contains one storage capacitor (302) which is connected to the source of an MOS transistor (303). The gate of the transistor (303) is controlled by a memory word line (WL), and the source of the transistor is connected to a bit line (BL) as shown in FIG. 2(b). During a memory read operation, one word line (WL) is activated to turn on the transistors (303) in all the memory cells (301) connected to the word line. For the example in FIG. 2(a), we assume 288 bits are read from the memory array (310) during a read operation. These data are divided into 4 groups of 72-bit data; each group contains 64 data bits (D[7:0][7:0]) and 8 ECC bits (C[7:0]). The data read from nearby memory cells are sent to different ECC logic circuits (320-323) as shown in FIG. 2(a). Each set of the ECC logic circuits (320-323) is capable of correcting an erroneous data among its 72 input data. Since the data from nearby memory cells are sent to different ECC logic circuits, errors caused by nearby memory cells can be corrected unless more than 5 nearby memory cells are all wrong.
- FIGS.2(c,d) are schematic diagrams of one of those 4 sets of
ECC logic circuits 320 in FIG. 2(a). The 72 bit inputs to the ECC logic circuit are grouped into 8 sets of data bits D[7:0][7:0], and 8 ECC bits C[7:0]. The ECC logic (320) comprises 8 identical parity circuit blocks (P7-P0). Schematic diagram of the parity circuit is shown in FIG. 2(d). Each parity circuit (P7-P0) comprises 20 exclusive-or gates (330). The parity circuit P[k] takes data D[k][7:0] and ECC bit Ck as inputs, where k is an integer between 0 to 7. It sends four outputs (N11, N22, N33, N41) to the parity circuit on top of it, and receives corresponding outputs (N11B, N22B, N33B, N41B) from the parity circuit below it. It also sends three outputs (N24, N32, N42) to the parity circuit below it, and receives the corresponding outputs (N24T, N32T, N42T) from the parity circuit below it. It also outputs a correction factor Fk to the memory array and to the output correction circuits. Using the schematic diagram in FIG. 2(d), we can determine the logic function of the outputs of the k'th parity circuit (P[k]) as - N11=Parity{Ck, Dk0} (9a),
- N23=Parity{Dk3, Dk4, Dk7} (9b),
- N33=Parity{N23B, Dk2, Dk5, Dk6} (9c),
- N41=Parity{N33B, N24T, Dk1, Dk4, Dk5} (9d),
- N24=Parity{Dk4, Dk5, Dk6, Dk7} (9e),
- N32=Parity{Dk0, Dk1, Dk2, Dk3, Dk4, Dk5, Dk6, Dk7} (9f),
- N42=Parity{N32T, N11B, Dk0, Dk1, Dk2, Dk3, Dk4, Dk5} (9g),
- and
- Fk=Parity{N42T, N41B} (9h),
- where “Parity{ }” means the parity value of all the inputs included in “{ }” signs. The inputs (N11B, N22B, N33B, N41B, N24T, N32T, N42T) provided by nearby parity circuits can be determined by the fact that all of those parity circuits in FIG. 2(c) are identical. For example, from Eq. (9a) we know that
- N11B=Parity{C[(k+1)mod8], D[(k+1)mod8]0} (10)
- where C[(k+1)mod 8] is the ECC bit, and D[(k+1)mod 8]0 is the first data connected to the parity circuit below it. All other inputs (N22B, N33B, N41B, N24T, N32T, N42T) can be determined in similar ways; some of them will need to use data and ECC inputs from parity circuits farther away. Based on the connections in FIG. 2(c) and Eqs. (9a-9h), we can conclude that
- Fk=Parity{Ck, D[(k−2)mod8][7:0], D[(k−1)mod 8][5:0],D[k][7:4,0],D[(k+1)mod 8][5,4,1],D[(k+2)mod 8][6,5,2], D[(k+3)mod 8][7,4,3]} (11)
- where k=(0,1,2,3,4,5,6,7).
- During a memory write operation, external data are sent to the parity circuits (320) and the Ck inputs are forced to zero to calculate the ECC bits of the external data. Based on Eq. (11), we have
- ECC(k)=Parity{D[(k−2)mod 8][7:0], D[(k−1)mod 8][5:0],D[k][7:4,0],D[(k+1)mod 8][5,4,1], D[(k+2)mod 8][6,5,2], D[(k+3)mod 8][7,4,3]} (12)
- where ECC(k) is the value of ECC bit, and k=(0,1,2,3,4,5,6,7). These ECC values are written into the memory array together with the input data during a write operation.
- During a read operation, the data and the stored ECC values are read from the memory, and the correction factors (F7-F0) are calculated using the same parity circuits based on Eq. (11). When there is no error in the 72-bit data, all the error correction factors will be zero. When one of the 72 bit data is wrong, an odd number of the correction factors (F7-F0) will be high. Based on Eq. (12), we know that the failure pattern of the correction bits for each data bit is unique; it is therefore possible to determine which bit is wrong by observing the failure pattern of the correction bits. These error correction factors are sent to an error decoding circuit (340) shown in FIG. 2(e). The error decoding circuit contains eight sets of error decoders (DC7-DC0) as illustrated by the schematic diagram in FIG. 2(f). Each error decoder DC[k] contains eight 5-input AND gates (350). Each one of those AND gates takes five error correction factors as inputs; some of those inputs are inverted as illustrated by the open circles (352) in FIG. 2(f). The inputs to the error decoder DC[k] are rotated to right before they are sent to next error decoder DC[k−1] as illustrated in FIG. 2(e); in this way, identical layouts for error decoders can be used. The outputs of those AND gates (350) are connected to sixty four flip signals (flip[7:0][7:0]). If the output data are correct, all the flip signals (flip[7:0][7:0]) will be zero. If one bit of the output data is wrong, its corresponding flip signal will be high, and the correct data can be calculated by flipping the polarity of the wrong bit.
- The ECC mechanism of the present invention is novel by the rotation relationship in the parity calculation; parity calculation of C[k+1] is the result of simple rotation of C[k]. This rotational relationship allow us to design circuits that can be used repeatedly in physical layout, which is extremely important for memory devices. The length of metal connection is also minimized because no signals need to travel more than the distance of a small circuit block. Speed degradation caused by RC delay is therefore avoided.
- While specific embodiments of the invention have been illustrated and described herein, it is realized that other modifications and changes will occur to those skilled in the art. For example, Eq. (12) can be modified to different forms while keeping the rotation relationship. Different numbers of data and correction bits can be used to serve the same purpose. The novel element for the correction mechanism of the present invention is to enforce a rotational relationship in parity calculation of ECC mechanism. Based on the rotational relationship, repeating circuit design can be used to simplify design effort. Higher performance is also achieved by minimizing RC delay.
- A memory device equipped with the above ECC protection mechanism will need additional logic circuits and 12.5% more memory cells than a conventional DRAM. However, this does not necessarily mean a DRAM equipped with the ECC circuits of the present invention is larger than a conventional DRAM. One reason is that we no longer need to have redundancy memory arrays because the ECC circuits will correct most of defect problems. Additional area reduction comes from improvements in memory refresh time. DRAM memory cells must be refreshed periodically; otherwise it will lose its storage data due to leakage current. The maximum time between two refresh operations is called the “refresh time” for a memory cell. FIG. 3 illustrates a typical distribution of the refresh time for all memory cells in a large DRAM array. The refresh time of most of memory cells follow a normal distribution centered at an average refresh time (Tav). However, there are always a small number of defective memory cells that do not follow normal distributions. These defective memory cells requires much higher refresh rate than normal memory cells. The refresh time of a prior art DRAM is determined by that of the worst memory cell (Tmin) among millions of cells in the IC. Tmin is typically more than two orders of magnitudes lower than the average refresh time. For example, a typical average refresh time for current art DRAM maybe around 50 mini-seconds, while we require refresh time less than 0.2 mini-seconds in order to have reasonable yield. For a DRAM equipped with the ECC protection of the present invention, the refresh period is determined by normal memory cells instead of defective memory cells because the ECC circuits will correct erroneous results from those defective memory cells; the memory refresh period can be much longer than conventional DRAM. There are many ways to take advantage of this improvement in refresh requirement. We can save power by reducing refresh frequency. We can save area by reducing the area of the storage capacitor in memory cells (302). We also can simplify the DRAM manufacture technology by using smaller storage capacitors. For example, a DRAM storage capacitor with two fins can be replaced with a single fin storage capacitor. For the purpose of emulating SRAM using DRAM, we take advantage of the improvement in refresh requirement by simplifying manufacture technology.
- To understand the method to simplify manufacture technology using ECC method, we must understand the limitations of prior art manufacture technologies. To reduce sub-threshold leakage current, the word line transistor (303) for a prior art DRAM cell must be a long channel transistor with high threshold voltage and thick gate oxide. For performance optimization, high speed logic circuits would like to use short channel transistors with low threshold voltage and thin gate oxide. In order to meet those conflicting requirements, we must build both types of transistor on the same IC; the manufacture technology became more complex than a typical logic technology or a typical DRAM technology. FIGS. 4(a-g) illustrate the manufacture procedures for a prior art high performance IC technology that has both high speed transistors for its logic circuits and low leakage transistors for its DRAM memory cells on the same chip. In the following figures, the cross-section diagrams for an n-channel high performance logic transistor are shown in the left hand side, and the cross-section diagrams for an n-channel low leakage memory transistor are shown in the right hand side for comparison. FIG. 4(a) shows such a side-by-side cross section diagram at threshold voltage implantation (Vt implant) procedure. The active areas of transistors are covered by protection oxide layers (401), and the isolation areas are covered by field oxide layers (403). The threshold voltages of the logic transistor is adjusted by ion implantation (405), and positive dopants (407, 409) are implanted into the active areas of both transistors. Since the memory transistor need to have higher threshold voltage and thicker gate oxide, additional implantation is needed. FIG. 4(b) shows that another ion implantation (415) is done when the area of the logic transistor is covered with photo-resist (411). The dopant density in the memory transistor (409) is therefore different from that of the logic transistor (407). The next procedure is to remove the protection oxide (401) in the memory transistor while the photo-resist still protects the area for logic transistor, as illustrated in FIG. 4(c). The photo-resist is then removed, and a thin layer of high quality gate oxide (411) is grown in the memory transistor area as shown in FIG. 4(d); the
protection oxide 443 at the logic transistor also grows slightly thicker at this stage. The thickness of the gate oxide (411) is exaggerated in all the following diagrams because it would not be visible if drawn to scale. The next step is to cover the memory transistor with photo-resist (451) and remove the protection oxide (443) in the logic area as shown in FIG. 4(e). The photo-resist (451) is then removed before a thin layer of high quality gate oxide (461) is grown in the logic transistor area as shown in FIG. 4(f). In the mean time, the gate oxide in the memory area (463) is grown thicker. All the following procedures, including poly silicon deposition, definition of gate area, interlayer insulator deposition, lightly-doped-region definition, source/drain implantation, are all identical in both types of transistor. Those procedures are well-known to the art so that there is no need to describe them in details. The final structure of both types of transistor are shown in FIG. 4(g). There are three major difference between the logic transistor in the left hand side and the memory transistor in the right hand side. The gate oxide (473) of the logic transistor is thinner than the gate oxide (474) of the memory transistor. Typical oxide thickness is 7 nm for the logic transistor, and 12 nm for the memory transistor. The channel region doping (475) of the logic transistor is different from the channel region doping (476) of the memory transistor so that they have different threshold voltages. Typical threshold voltage (Vt) for the n-channel logic transistor is around 0.5 volts, while typical threshold voltage for the memory transistor is around 0.7 volts. The thin gate, low Vt transistor is optimized to build high speed logic circuits. The thick gate, high Vt transistor is optimized for low leakage current; it also can tolerate higher gate voltages. This technology allows us to build DRAM devices and high performance logic circuits in the same chip, but it requires at least two more masking steps and many more manufacture procedures; the manufacture cost is increased significantly while yield degrades dramatically. One prior art solution is to use the thick gate, high Vt transistor for both memory and logic circuits. This approach reduces complexity in manufacture technology, but it degrades logic circuit performance dramatically; such technology is only useful to build low end products. - When the DRAM array is equipped with the above ECC protection mechanism, the memory refresh requirement is improved by many orders of magnitudes; we can use the same transistor for logic circuits and for memory cells without any charge retention problem. Using methods described in our previous patent applications, we no longer need to use high word line voltage. Therefore, we can achieve high performance by using logic transistors everywhere, and simplify the manufacture technology at the same time. The manufacture procedures of an embedded DRAM technology of the present invention is illustrated in FIGS.5(a-c). At the first step, the procedure for Vt implant illustrated in FIG. 5(a) is identical to that in FIG. 4(a). Both the logic transistor and the memory transistor received the same implantation, and their channel doping (507,509) are identical. The next step is to remove protection oxide (401) from both areas simultaneously as shown in FIG. 5(b). Thin layers of high quality gate oxide (521, 523) are grown in both types of transistors simultaneously, as shown in FIG. 5(c ). The resulting transistor devices are illustrated in FIG. 5(d). The logic transistor and the memory transistor have identical gate oxide layers (543, 544) and identical channel structures (545, 546). Therefore, they can be manufactured simultaneously. The manufacture procedures described in FIGS. 4(a-g) use 2 masking steps, one gate oxidation, one ion implantation, and one etching step more than the procedures described in FIGS. 5(a-d). All of those manufacture procedures in FIGS. 5(a-d) are known in the of IC industry. The circuit design methods of the present invention make it possible to use simpler manufacture technology to achieve better performance, better reliability, and better yield at lower cost.
- Using the ECC protection mechanism of the present invention in DRAM devices provides many advantages over prior art devices. The alpha particle problem is no longer an issue because the ECC circuits can correct errors from multiple nearby bits. There is no need to have redundancy array for the same reason. Our device still can operate at high performance because RC delay problems in prior art ECC circuits is solved by the rotational ECC circuits of the present invention. All the supporting circuits can use repeated layouts, which is very important for memory design. The manufacture technology for embedded IC is simplified dramatically because we can use thin gate transistors for DRAM memory cells.
- While specific embodiments of the invention have been illustrated and described herein, it is realized that other modifications and changes will occur to those skilled in the art. It is therefore to be understood that the appended claims are intended to cover all modifications and changes as fall within the true spirit and scope of the invention.
Claims (24)
1. A reference voltage generator connected to a high voltage VCC and a low voltage VSS lower than VCC for generating a reference voltage comprising:
a first variable-size p-channel transistor MPR having a source connected to said high voltage VCC, a gate connected to a voltage lower than said high voltage VCC;
a first variable size n-channel transistor MN having a source and a gate connected to a drain of said transistor MPR;
a n-channel transistor MNO having a gate connected to said drain of said transistor MPR, a source connected to said voltage Vcc, and a drain connected to an output reference voltage Vout;
a second variable size p-channel transistor MP having a source connected to said drain of said transistor MN;
a second variable size n-channel transistor MNR having a drain connected to a gate and a drain of said transistor MP, a gate connected to a voltage higher than said low voltage VSS, and a source connected to said low voltage VSS;
a p-channel transistor MPO having a gate connected to said drain of said transistor MP, a source connected to said low voltage VSS and a drain connected to said output reference voltage; and
said MNO transistor is a matching transistor with said transistor MN and said transistor MPO is a matching transistor with said transistor MP wherein (Wmno/Wmn)=(Wmpo/Wmp)=Mc where Wmno is a width of said transistor MNO, Wmn is a variable width of said transistor MN, Wmpo is a width of said transistor MPO, Wmp is a variable width of said transistor MP, and Mc is a variable transistor matching ratio.
2. The reference voltage generator of claim 1 wherein:
said first variable-size p-channel MPR defining an adjustable effective resistance Rp and said first variable-size n-channel transistor MNR defining an adjustable effective resistance Rn; and
said output reference voltage Vout generated from said reference voltage generator constituting a voltage adjustable by adjusting a ratio of said effective resistance Rp to said effective resistance Rn.
3. The reference voltage generator of claim 2 wherein:
a connection between said n-channel transistor MNO and said p-channel transistor MPO defining a standby leakage current Istb therein, and said standby leakage current Istb is provided for adjustment by adjusting said variable transistor matching ratio Mc and a sum of said adjustable effective resistances defined by (Rp+Rn).
4. The reference voltage generator of claim 2 wherein:
said first variable-size n-channel transistor MN and said second variable-size p-channel transistor MP are provided with a transistor width adjustment means for receiving control signals for adjusting said variable transistor matching ratio Mc to adjust said standby leakage current in response to said control signal.
5. The voltage reference generator of claim 1 wherein:
said first variable-size p-channel transistor MPR further includes two p-channel transistors MPR1 and MPR2 connected in series and a switch SPR;
said switch SPR is connected to an activating voltage ZZ provided to control a serial connection of said second p-channel transistor MPR2 between said first p-channel transistor MPR1 and said n-channel transistor MN thus adjusting a size and effective resistance of said first variable-size p-channel transistor MPR;
said first variable size n-channel transistor MN further includes two n-channel transistors MN1 and MN2 connected in parallel and a switch SN;
said switch SN is connected to said activating voltage ZZ provided to control a parallel connection of said second n-channel transistor MN2 to said first n-channel transistor MN1 thus adjusting a size and said variable width Wmn of said variable-size n-channel transistor MN;
said second variable-size n-channel transistor MNR further includes two n-channel transistors MNR1 and MNR2 connected in series and a switch SNR;
said switch SNR is connected to an activating voltage ZZ provided to control a serial connection of said second p-channel transistor MNR2 between said first n-channel transistor MNR1 and said p-channel transistor MP thus adjusting a size and effective resistance of said second variable-size n-channel transistor MNR;
said second variable size p-channel transistor MP further includes two p-channel transistors MP1 and MP2 connected in parallel and a switch SP;
said switch SP is connected to said activating voltage ZZ provided to control a parallel connection of said second p-channel transistor MP2 to said first p-channel transistor MP1 thus adjusting a size and said variable width Wmp of said variable-size p-channel transistor MP.
6. The voltage reference generator of claim 5 wherein:
said first variable-size p-channel transistor MPR and said second variable-size n-channel transistor MNR are adjusted to define substantially a constant ratio of RP to RN to maintain said output reference voltage substantially unchanged.
7 A method for generating an output reference voltage comprising:
connecting a source of a first variable-size p-channel transistor MPR to a high voltage VCC and a gate of said transistor MPR to a voltage lower than said high voltage VCC;
connecting a gate and a source of a first variable-size n-channel transistor MN to a drain of said p-channel transistor MPR;
connecting a gate of a n-channel transistor MNO to said drain of transistor MPR, connecting a source of said n-channel transistor MNO to said a voltage higher than said low voltage VSS, and connecting a drain of said n-channel transistor MNO to said output reference voltage Vout;
connecting a source of a second variable size p-channel transistor MP to said drain of said variable-size n-channel transistor MN;
connecting a drain of a second variable-size n-channel transistor MNR to a gate and a drain of said p-channel transistor MP, and connecting a gate of said second variable-size n-channel transistor MNR to a voltage higher than a low VSS, and connecting a source of said transistor MNR to said low voltage VSS;
connecting a gate of a p-channel transistor MPO to a drain of said transistor MP, connecting a source of said p-channel transistor MP to said low voltage VSS, and connecting a drain of said p-channel transistor MPO to said output reference voltage Vout;
matching said transistor MNO with said transistor MN and said transistor MPO to said transistor MP by providing (Wmno/Wmn)=(Wmpo/Wmp)=Mc where WMNO is a width of said transistor MNO, Wmn is a variable width of said transistor MN, Wmpo is a width of said transistor MPO, Wmp is a variable width of said transistor MP, and Mc is a variable transistor matching ratio.
8 The method of generating an output reference voltage of claim 7 wherein:
configuring said first variable-size p-channel transistor MPR for defining an adjustable effective resistance Rp and said first variable-size n-channel transistor MNR for defining an adjustable effective resistance Rn; and
adjusting said output reference voltage Vout by adjusting a ratio of said effective resistance Rp to said effective resistance Rn.
9. The method of generating an output reference voltage of claim 7 wherein:
adjusting a standby leakage current Istb conducting from said n-channel transistor MNO to said p-channel transistor MPO by adjusting a said variable transistor matching ratio Mc and a sum of said adjustable effective resistance defined as (Rp+Rn).
10. The method of generating an output reference voltage of claim 7 wherein:
providing a control signal for controlling a width of said first variable-size n-channel transistor MN and said second variable-size p-channel transistor MP for adjusting said variable transistor matching ratio Mc to adjust a leakage current Istbr conducting from said transistor MN to said transistor MP.
11. A memory circuit comprising a plurality of memory cells connected by a word-line, comprising:
a plurality of error correction code (ECC) logic circuits for generating a error correction code for each of said bits stored in said memory cells;
each of said memory cells being connected to one of said ECC logic circuits with every two of neighboring memory cells connected to two different ECC logic circuits.
12. The memory circuit of claim 11 wherein:
each of said plurality of memory cells being a dynamic random access memory (DRAM) cell.
13. The memory circuit of claim 11 wherein:
each of said error correction code (ECC) logic circuits being connected to N sets of memory bits for receiving input data bits D(i, j) and error correction bit C(i), for generating a set of correction bit F(i), where i=1, 2, 3, . . . N, and j=1, 2, 3, . . . , M, and N and M are positive integers,
each of said error correction code (ECC) logic circuits further includes a set of parity check blocks {P(i), i=1, 2, 3, . . . , N} wherein each of said parity check blocks P(i) being identical to each other and includes an external input means for receiving said input data bits D(i, j) and said error correction bit C(i);
each of said parity check blocks P(i) further includes a plurality of internal input means for receiving internal input bits from neighboring parity check block P(i−1) and P(i+1) and each of said parity check blocks P(i) further includes a plurality of internal output means for providing internal output bits to neighboring parity check block P(i−1) and P(i+1) wherein parity check block P(N) having two neighboring blocks of P(N−1) and P(1); and
each of said parity check blocks P(i) further includes an external output means for outputting said parity correction bit F(i) wherein a combination of said parity correction bits {F(i), i=1, 2, 3, . . . N} being provided as a N-bit error decoding input to a set of identical error decoding circuits {DC(i) i=1, 2, 3, . . . , N}, defined by a combination of said parity correction bits {F(i), i=1, 2, 3, . . . N} and said combination constituting a single-bit circular shifting relationship, and said error decoding circuits DC(i) generating a unique bit pattern for an error occurring to each of said data bits D(i, j).
14. The memory circuit of claim 13 wherein:
each of said parity checking blocks P(i), i=1, 2, 3, . . . , N being arranged physically next to two neighboring blocks and said parity check block P(N) being positioned next to said parity check block P(1) such that said internal input means and said internal output means are extended only to a neighboring parity check block.
15. The memory circuit of claim 14 further comprising:
an I/O device for zeroing out all of said error correction bits C(i)=0 for i=1, 2, 3, . . . , N, in a write cycle for generating said parity correction bits C(i)=F(i), i=1, 2, 3, . . . N, for writing into said memory cells.
16. The memory circuit of claim 14 further comprising:
an I/O device for transmitting said data D(i,j) and said error correction bits C(i)=0 to each of said ECC logic circuits for checking and correcting said data bits D(i, j) for reading said data bits D(i, j) from said memory.
17. The memory circuit of claim 13 wherein:
each of said logic circuits further includes a set of identical error decoding circuits DC(i) with i=1, 2, 3, . . . , N, and
each of said output means of said parity check blocks being connected, with a fixed identical combinations, as input lines, to said set of identical error decoding circuits DC(i), wherein said output means for each of said parity correction bits {F(i), i=1, 2, 3, . . . N} being rotationally shifted by a single bit line from a sequence of connection for that of D(i) when connected to a next error decoding circuits DC(i+1).
18. A memory circuit comprising a plurality of memory cells connected by a word-line, wherein:
each of said memory cells having a cell refreshing rate requirement for periodically refreshing a bit stored therein with at least one of said memory cells having a highest refreshing rate;
said memory circuit further includes a plurality of error correction code (ECC) logic circuits connected to said memory cells for generating a error correction code for each of said bits stored in said memory cells to correct a bit error whereby said memory circuit is provided to operate with an overall refreshing rate lower than and independent of said highest refreshing rate.
19 A logic transistor supported on a substrate having an embedded memory transistor also supported on same substrate provided for connection to an error-code-correction (ECC) circuit and memory cells, wherein:
said logic transistor having a logic-transistor gate, a logic-transistor gate-oxide disposed under said logic-transistor gate, and a logic-transistor channel disposed under said logic-transistor gate oxide;
said memory transistor having a memory-transistor gate, a memory-transistor gate-oxide disposed under said memory-transistor gate, and a memory-transistor channel disposed under said logic-transistor gate oxide; and
said logic-transistor gate-oxide having substantially a same thickness as said memory-transistor gate-oxide, and said logic-transistor channel having substantially a same dopant concentration as said memory-transistor channel.
20. The logic transistor of claim 19 wherein:
said memory-transistor gate-oxide and said logic-transistor gate-oxide having a thickness less than or equal to one-hundred Angstroms.
21 A method for manufacturing a logic transistor on a substrate with an embedded memory transistor also on said substrate ready for connection to an error-code-correction (ECC) circuit, comprising:
forming an first-oxide layer;
performing an channel ion implant to form a logic-transistor channel and a gate-transistor channel having substantially same doping concentration followed by removing said first-oxide layer from said logic transistor and said memory transistor; and
forming a gate-oxide layer for said logic transistor and said memory transistor having substantially same thickness over said logic transistor channel and said memory-transistor channel.
22 The method for manufacturing said logic transistor of claim 21 further comprising a step of:
forming a gate on top of said gate-oxide layer for said logic-transistor and said memory transistor having substantially same thickness.
23 The method for manufacturing said logic transistor of claim 21 wherein:
said step of forming said gate-oxide layer for said logic transistor and said memory transistor is a step of forming said gate-oxide layer with a thickness less than or equal to one-hundred Angstroms.
24 The method for manufacturing said logic transistor of claim 21 wherein:
said step of performing an channel ion implant to form a logic-transistor channel and a gate-transistor channel is a step of forming said logic-transistor channel and said gate-transistor channel having a channel length less than or equal to 0.5 micrometers.
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US11/484,803 Abandoned US20070168829A1 (en) | 1996-05-24 | 2006-07-10 | Methods to make DRAM fully compatible with SRAM |
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US08/989,841 Expired - Fee Related US6216246B1 (en) | 1996-05-24 | 1997-12-12 | Methods to make DRAM fully compatible with SRAM using error correction code (ECC) mechanism |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030061439A1 (en) * | 2001-09-25 | 2003-03-27 | Jeng-Jye Shau | Distributed executing units of logic integrated circuits connected to & executes on data in local data storage |
US20040066676A1 (en) * | 2002-09-26 | 2004-04-08 | Lee Sun Hyoung | SRAM-compatible memory for correcting invalid output data using parity and method of driving the same |
US11893474B2 (en) | 2015-10-23 | 2024-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
Families Citing this family (121)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5928365A (en) * | 1995-11-30 | 1999-07-27 | Kabushiki Kaisha Toshiba | Computer system using software controlled power management method with respect to the main memory according to a program's main memory utilization states |
US6504745B2 (en) * | 1996-05-24 | 2003-01-07 | Uniram Technology, Inc. | High performance erasable programmable read-only memory (EPROM) devices with multiple dimension first-level bit lines |
US6108229A (en) * | 1996-05-24 | 2000-08-22 | Shau; Jeng-Jye | High performance embedded semiconductor memory device with multiple dimension first-level bit-lines |
US7064376B2 (en) * | 1996-05-24 | 2006-06-20 | Jeng-Jye Shau | High performance embedded semiconductor memory devices with multiple dimension first-level bit-lines |
US5748547A (en) * | 1996-05-24 | 1998-05-05 | Shau; Jeng-Jye | High performance semiconductor memory devices having multiple dimension bit lines |
US20020152442A1 (en) * | 1996-05-24 | 2002-10-17 | Jeng-Jye Shau | Error correction code circuits |
US20050036363A1 (en) * | 1996-05-24 | 2005-02-17 | Jeng-Jye Shau | High performance embedded semiconductor memory devices with multiple dimension first-level bit-lines |
KR100200312B1 (en) * | 1996-11-13 | 1999-06-15 | 김영환 | Method for connecting bit line sense amp and data bus line |
US6016390A (en) * | 1998-01-29 | 2000-01-18 | Artisan Components, Inc. | Method and apparatus for eliminating bitline voltage offsets in memory devices |
US5933387A (en) * | 1998-03-30 | 1999-08-03 | Richard Mann | Divided word line architecture for embedded memories using multiple metal layers |
US5963486A (en) * | 1998-06-19 | 1999-10-05 | International Business Machines Corporation | Bit switch circuit and bit line selection method |
US6334167B1 (en) * | 1998-08-31 | 2001-12-25 | International Business Machines Corporation | System and method for memory self-timed refresh for reduced power consumption |
US6292869B1 (en) * | 1998-08-31 | 2001-09-18 | International Business Machines Corporation | System and method for memory scrub during self timed refresh |
US6504780B2 (en) * | 1998-10-01 | 2003-01-07 | Monolithic System Technology, Inc. | Method and apparatus for completely hiding refresh operations in a dram device using clock division |
US6415353B1 (en) | 1998-10-01 | 2002-07-02 | Monolithic System Technology, Inc. | Read/write buffers for complete hiding of the refresh of a semiconductor memory and method of operating same |
US6898140B2 (en) | 1998-10-01 | 2005-05-24 | Monolithic System Technology, Inc. | Method and apparatus for temperature adaptive refresh in 1T-SRAM compatible memory using the subthreshold characteristics of MOSFET transistors |
US5999474A (en) | 1998-10-01 | 1999-12-07 | Monolithic System Tech Inc | Method and apparatus for complete hiding of the refresh of a semiconductor memory |
US6707743B2 (en) | 1998-10-01 | 2004-03-16 | Monolithic System Technology, Inc. | Method and apparatus for completely hiding refresh operations in a DRAM device using multiple clock division |
KR20000025777A (en) * | 1998-10-14 | 2000-05-06 | 김영환 | Self refresh control circuit of semiconductor memory device |
US6075740A (en) * | 1998-10-27 | 2000-06-13 | Monolithic System Technology, Inc. | Method and apparatus for increasing the time available for refresh for 1-t SRAM compatible devices |
CA2254535C (en) | 1998-11-26 | 2003-10-28 | Canpolar East Inc. | Sensor for detection of acceleration and attitude within a vehicle |
KR100388319B1 (en) | 1998-12-30 | 2003-10-10 | 주식회사 하이닉스반도체 | Output Signal Arrangement Structure of Low Decoding Array |
US6271080B1 (en) | 1999-12-16 | 2001-08-07 | International Business Machines Corporation | Structure and method for planar MOSFET DRAM cell free of wordline gate conductor to storage trench overlay sensitivity |
US6646949B1 (en) | 2000-03-29 | 2003-11-11 | International Business Machines Corporation | Word line driver for dynamic random access memories |
US6831924B1 (en) | 2000-07-20 | 2004-12-14 | Silicon Graphics, Inc. | Variable mode bi-directional and uni-directional computer communication system |
US6839856B1 (en) | 2000-07-20 | 2005-01-04 | Silicon Graphics, Inc. | Method and circuit for reliable data capture in the presence of bus-master changeovers |
US7248635B1 (en) | 2000-07-20 | 2007-07-24 | Silicon Graphics, Inc. | Method and apparatus for communicating computer data from one point to another over a communications medium |
US7333516B1 (en) | 2000-07-20 | 2008-02-19 | Silicon Graphics, Inc. | Interface for synchronous data transfer between domains clocked at different frequencies |
DE10041796A1 (en) * | 2000-08-25 | 2002-03-14 | Infineon Technologies Ag | Electronic amplifier circuit with switchable input transistor |
US6700827B2 (en) | 2001-02-08 | 2004-03-02 | Integrated Device Technology, Inc. | Cam circuit with error correction |
US6449203B1 (en) * | 2001-03-08 | 2002-09-10 | Micron Technology, Inc. | Refresh controller and address remapping circuit and method for dual mode full/reduced density DRAMs |
DE10114280A1 (en) * | 2001-03-23 | 2002-09-26 | Infineon Technologies Ag | Semiconducting memory with refresh has adiabatic amplifier controlled by output signal from read amplifier to write signal read from memory cell back into memory cell amplified |
US7085186B2 (en) * | 2001-04-05 | 2006-08-01 | Purple Mountain Server Llc | Method for hiding a refresh in a pseudo-static memory |
US6788614B2 (en) * | 2001-06-14 | 2004-09-07 | Micron Technology, Inc. | Semiconductor memory with wordline timing |
US6751159B2 (en) | 2001-10-26 | 2004-06-15 | Micron Technology, Inc. | Memory device operable in either a high-power, full-page size mode or a low-power, reduced-page size mode |
US7139893B2 (en) * | 2001-10-30 | 2006-11-21 | Micron Technology, Inc. | Transparent SDRAM in an embedded environment |
JP2003151267A (en) * | 2001-11-09 | 2003-05-23 | Fujitsu Ltd | Semiconductor memory device |
US6730842B2 (en) * | 2001-12-19 | 2004-05-04 | Lsi Logic Corporation | Self-extraction panel hinge |
JP2003196977A (en) | 2001-12-27 | 2003-07-11 | Fujitsu Ltd | Data access method for semiconductor memory and semiconductor memory |
US6838331B2 (en) * | 2002-04-09 | 2005-01-04 | Micron Technology, Inc. | Method and system for dynamically operating memory in a power-saving error correction mode |
US6751143B2 (en) * | 2002-04-11 | 2004-06-15 | Micron Technology, Inc. | Method and system for low power refresh of dynamic random access memories |
US6731528B2 (en) * | 2002-05-03 | 2004-05-04 | Micron Technology, Inc. | Dual write cycle programmable conductor memory system and method of operation |
JP4597470B2 (en) * | 2002-07-25 | 2010-12-15 | 富士通セミコンダクター株式会社 | Semiconductor memory |
JP4094379B2 (en) * | 2002-08-27 | 2008-06-04 | エルピーダメモリ株式会社 | Semiconductor device and manufacturing method thereof |
JP2004094338A (en) * | 2002-08-29 | 2004-03-25 | Seiko Epson Corp | Semiconductor integrated circuit |
US20040123037A1 (en) * | 2002-12-20 | 2004-06-24 | Wilfred Gomes | Interconnect structure including write and read structures |
US6795364B1 (en) * | 2003-02-28 | 2004-09-21 | Monolithic System Technology, Inc. | Method and apparatus for lengthening the data-retention time of a DRAM device in standby mode |
US7096374B2 (en) * | 2003-05-21 | 2006-08-22 | Agilent Technologies, Inc. | Method and apparatus for defining an input state vector that achieves low power consumption in digital circuit in an idle state |
JP2005025827A (en) * | 2003-06-30 | 2005-01-27 | Toshiba Corp | Semiconductor integrated circuit device and its error detecting and correcting method |
US6870749B1 (en) | 2003-07-15 | 2005-03-22 | Integrated Device Technology, Inc. | Content addressable memory (CAM) devices with dual-function check bit cells that support column redundancy and check bit cells with reduced susceptibility to soft errors |
US7193876B1 (en) | 2003-07-15 | 2007-03-20 | Kee Park | Content addressable memory (CAM) arrays having memory cells therein with different susceptibilities to soft errors |
US6987684B1 (en) | 2003-07-15 | 2006-01-17 | Integrated Device Technology, Inc. | Content addressable memory (CAM) devices having multi-block error detection logic and entry selective error correction logic therein |
US7304875B1 (en) | 2003-12-17 | 2007-12-04 | Integrated Device Technology. Inc. | Content addressable memory (CAM) devices that support background BIST and BISR operations and methods of operating same |
US7099221B2 (en) | 2004-05-06 | 2006-08-29 | Micron Technology, Inc. | Memory controller method and system compensating for memory cell data losses |
US20060010339A1 (en) * | 2004-06-24 | 2006-01-12 | Klein Dean A | Memory system and method having selective ECC during low power refresh |
US7340668B2 (en) * | 2004-06-25 | 2008-03-04 | Micron Technology, Inc. | Low power cost-effective ECC memory system and method |
US7116602B2 (en) | 2004-07-15 | 2006-10-03 | Micron Technology, Inc. | Method and system for controlling refresh to avoid memory cell data losses |
US6965537B1 (en) * | 2004-08-31 | 2005-11-15 | Micron Technology, Inc. | Memory system and method using ECC to achieve low power refresh |
US7379368B2 (en) * | 2005-02-25 | 2008-05-27 | Frankfurt Gmbh, Llc | Method and system for reducing volatile DRAM power budget |
US7274245B2 (en) * | 2005-04-13 | 2007-09-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Voltage transfer circuit |
US20080082763A1 (en) | 2006-10-02 | 2008-04-03 | Metaram, Inc. | Apparatus and method for power management of memory circuits by a system or component thereof |
US8130560B1 (en) | 2006-11-13 | 2012-03-06 | Google Inc. | Multi-rank partial width memory modules |
US7274618B2 (en) * | 2005-06-24 | 2007-09-25 | Monolithic System Technology, Inc. | Word line driver for DRAM embedded in a logic process |
US8055833B2 (en) | 2006-10-05 | 2011-11-08 | Google Inc. | System and method for increasing capacity, performance, and flexibility of flash storage |
US8041881B2 (en) | 2006-07-31 | 2011-10-18 | Google Inc. | Memory device with emulated characteristics |
US9171585B2 (en) | 2005-06-24 | 2015-10-27 | Google Inc. | Configurable memory circuit system and method |
US8359187B2 (en) | 2005-06-24 | 2013-01-22 | Google Inc. | Simulating a different number of memory circuit devices |
US9542352B2 (en) | 2006-02-09 | 2017-01-10 | Google Inc. | System and method for reducing command scheduling constraints of memory circuits |
US20080028136A1 (en) * | 2006-07-31 | 2008-01-31 | Schakel Keith R | Method and apparatus for refresh management of memory modules |
US8090897B2 (en) | 2006-07-31 | 2012-01-03 | Google Inc. | System and method for simulating an aspect of a memory circuit |
US8244971B2 (en) | 2006-07-31 | 2012-08-14 | Google Inc. | Memory circuit system and method |
US8077535B2 (en) | 2006-07-31 | 2011-12-13 | Google Inc. | Memory refresh apparatus and method |
US8438328B2 (en) | 2008-02-21 | 2013-05-07 | Google Inc. | Emulation of abstracted DIMMs using abstracted DRAMs |
US8796830B1 (en) | 2006-09-01 | 2014-08-05 | Google Inc. | Stackable low-profile lead frame package |
US7392338B2 (en) | 2006-07-31 | 2008-06-24 | Metaram, Inc. | Interface circuit system and method for autonomously performing power management operations in conjunction with a plurality of memory circuits |
US8081474B1 (en) | 2007-12-18 | 2011-12-20 | Google Inc. | Embossed heat spreader |
US8386722B1 (en) | 2008-06-23 | 2013-02-26 | Google Inc. | Stacked DIMM memory interface |
US7386656B2 (en) | 2006-07-31 | 2008-06-10 | Metaram, Inc. | Interface circuit system and method for performing power management operations in conjunction with only a portion of a memory circuit |
US8060774B2 (en) * | 2005-06-24 | 2011-11-15 | Google Inc. | Memory systems and memory modules |
US10013371B2 (en) | 2005-06-24 | 2018-07-03 | Google Llc | Configurable memory circuit system and method |
US8397013B1 (en) | 2006-10-05 | 2013-03-12 | Google Inc. | Hybrid memory module |
US9507739B2 (en) | 2005-06-24 | 2016-11-29 | Google Inc. | Configurable memory circuit system and method |
US8327104B2 (en) | 2006-07-31 | 2012-12-04 | Google Inc. | Adjusting the timing of signals associated with a memory system |
US8335894B1 (en) | 2008-07-25 | 2012-12-18 | Google Inc. | Configurable memory system with interface circuit |
US8111566B1 (en) | 2007-11-16 | 2012-02-07 | Google, Inc. | Optimal channel design for memory devices for providing a high-speed memory interface |
US8089795B2 (en) | 2006-02-09 | 2012-01-03 | Google Inc. | Memory module with memory stack and interface with enhanced capabilities |
US7580312B2 (en) * | 2006-07-31 | 2009-08-25 | Metaram, Inc. | Power saving system and method for use with a plurality of memory circuits |
GB2444663B (en) | 2005-09-02 | 2011-12-07 | Metaram Inc | Methods and apparatus of stacking drams |
US7366047B2 (en) * | 2005-11-09 | 2008-04-29 | Infineon Technologies Ag | Method and apparatus for reducing standby current in a dynamic random access memory during self refresh |
US9632929B2 (en) | 2006-02-09 | 2017-04-25 | Google Inc. | Translating an address associated with a command communicated between a system and memory circuits |
US7636250B2 (en) * | 2006-07-17 | 2009-12-22 | Qimonda North America Corp. | Random access memory that selectively provides data to amplifiers |
US7724589B2 (en) | 2006-07-31 | 2010-05-25 | Google Inc. | System and method for delaying a signal communicated from a system to at least one of a plurality of memory circuits |
JP2008052876A (en) * | 2006-08-28 | 2008-03-06 | Toshiba Corp | Semiconductor storage device |
US7894289B2 (en) * | 2006-10-11 | 2011-02-22 | Micron Technology, Inc. | Memory system and method using partial ECC to achieve low power refresh and fast access to data |
US7900120B2 (en) | 2006-10-18 | 2011-03-01 | Micron Technology, Inc. | Memory system and method using ECC with flag bit to identify modified data |
US8156247B2 (en) * | 2007-04-30 | 2012-04-10 | Lsi Corportion | Systems and methods for reducing network performance degradation |
US8209479B2 (en) | 2007-07-18 | 2012-06-26 | Google Inc. | Memory circuit system and method |
US8080874B1 (en) | 2007-09-14 | 2011-12-20 | Google Inc. | Providing additional space between an integrated circuit and a circuit board for positioning a component therebetween |
EP2441007A1 (en) | 2009-06-09 | 2012-04-18 | Google, Inc. | Programming of dimm termination resistance values |
US8470136B2 (en) * | 2010-02-02 | 2013-06-25 | Safety-Kleen Systems, Inc. | Parts washer with recycler assembly |
US20110186080A1 (en) * | 2010-02-02 | 2011-08-04 | Safety-Kleen Systems, Inc. | Method of Service for a Recycler Assembly |
US8425732B2 (en) * | 2010-02-02 | 2013-04-23 | Safety-Kleen Systems, Inc. | Method of operation for a recycler assembly |
US8506761B2 (en) * | 2010-02-02 | 2013-08-13 | Safety-Kleen Systems, Inc. | Recycler module for a recycler assembly |
USD620511S1 (en) | 2010-02-02 | 2010-07-27 | Rudy Publ | Solvent recycler |
US8381767B2 (en) | 2010-02-02 | 2013-02-26 | Safety-Kleen Systems, Inc. | Reservoir module for a recycler assembly |
US8470137B2 (en) * | 2010-02-02 | 2013-06-25 | Safety-Kleen Systems, Inc. | Recycler assembly |
US8470138B2 (en) * | 2010-02-02 | 2013-06-25 | Safety-Kleen Systems, Inc. | Odor mitigation in a recycler assembly |
US8582338B1 (en) | 2010-08-31 | 2013-11-12 | Netlogic Microsystems, Inc. | Ternary content addressable memory cell having single transistor pull-down stack |
US8462532B1 (en) | 2010-08-31 | 2013-06-11 | Netlogic Microsystems, Inc. | Fast quaternary content addressable memory cell |
US8625320B1 (en) | 2010-08-31 | 2014-01-07 | Netlogic Microsystems, Inc. | Quaternary content addressable memory cell having one transistor pull-down stack |
US8553441B1 (en) | 2010-08-31 | 2013-10-08 | Netlogic Microsystems, Inc. | Ternary content addressable memory cell having two transistor pull-down stack |
US8837188B1 (en) | 2011-06-23 | 2014-09-16 | Netlogic Microsystems, Inc. | Content addressable memory row having virtual ground and charge sharing |
US8773880B2 (en) | 2011-06-23 | 2014-07-08 | Netlogic Microsystems, Inc. | Content addressable memory array having virtual ground nodes |
US9254998B2 (en) * | 2013-03-11 | 2016-02-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | MEMS device with a capping substrate |
US8953365B2 (en) | 2013-06-07 | 2015-02-10 | International Business Machines Corporation | Capacitor backup for SRAM |
CN109710450B (en) * | 2017-10-25 | 2022-05-31 | 群联电子股份有限公司 | Data coding method, memory control circuit unit and memory storage device |
JP6360610B1 (en) * | 2017-11-22 | 2018-07-18 | 力晶科技股▲ふん▼有限公司 | Redundant circuit for SRAM device, SRAM device, and semiconductor device |
US11373695B2 (en) * | 2019-12-18 | 2022-06-28 | Micron Technology, Inc. | Memory accessing with auto-precharge |
WO2022160114A1 (en) * | 2021-01-27 | 2022-08-04 | Yangtze Memory Technologies Co., Ltd. | Method and system for asynchronous multi-plane independent (ampi) memory read operation |
CN113228181B (en) | 2021-03-29 | 2023-10-03 | 长江存储科技有限责任公司 | Memory device and asynchronous multi-faceted independent read operation thereof |
KR20230010764A (en) | 2021-03-29 | 2023-01-19 | 양쯔 메모리 테크놀로지스 씨오., 엘티디. | Memory device and its asynchronous multi-plane independent read operation |
Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5127014A (en) * | 1990-02-13 | 1992-06-30 | Hewlett-Packard Company | Dram on-chip error correction/detection |
US5160997A (en) * | 1988-08-12 | 1992-11-03 | Sanyo Electric Co., Ltd. | Semiconductor integrated circuit with shield electrodes for protecting the interconnection lines from undesirable radiation |
US5224107A (en) * | 1989-05-31 | 1993-06-29 | Siemens Aktiengesellschaft | Method in a parallel test apparatus for semiconductor memories |
US5375127A (en) * | 1992-03-25 | 1994-12-20 | Ncr Corporation | Method and apparatus for generating Reed-Soloman error correcting code across multiple word boundaries |
US5413949A (en) * | 1994-04-26 | 1995-05-09 | United Microelectronics Corporation | Method of making self-aligned MOSFET |
US5475695A (en) * | 1993-03-19 | 1995-12-12 | Semiconductor Diagnosis & Test Corporation | Automatic failure analysis system |
US5652754A (en) * | 1995-12-27 | 1997-07-29 | Hughes Electronics | Signature analysis usage for fault isolation |
US5763314A (en) * | 1994-11-30 | 1998-06-09 | Lucent Technologies Inc. | Process for forming isolation regions in an integrated circuit |
US5828825A (en) * | 1993-12-22 | 1998-10-27 | Intel Corporation | Method and apparatus for pseudo-direct access to embedded memories of a micro-controller integrated circuit via the IEEE test access port |
US5879990A (en) * | 1996-03-22 | 1999-03-09 | U.S. Philips Corporation | Semiconductor device having an embedded non-volatile memory and method of manufacturing such a semicondutor device |
US5888860A (en) * | 1994-02-18 | 1999-03-30 | Mitsubishi Denki Kabushiki Kaisha | Method of making field effect transistor |
US6154714A (en) * | 1997-11-17 | 2000-11-28 | Heuristic Physics Laboratories | Method for using wafer navigation to reduce testing times of integrated circuit wafers |
US6507800B1 (en) * | 2000-03-13 | 2003-01-14 | Promos Technologies, Inc. | Method for testing semiconductor wafers |
US6580960B1 (en) * | 2000-06-22 | 2003-06-17 | Promos Technologies, Inc. | System and method for finding an operation/tool combination that causes integrated failure in a semiconductor fabrication facility |
Family Cites Families (89)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3090631A (en) * | 1958-01-07 | 1963-05-21 | Vaino A Hoover | Mechanical actuator |
IT1041882B (en) * | 1975-08-20 | 1980-01-10 | Honeywell Inf Systems | SEMICONDUCTOR DYNAMIC MEMORY AND RELATIVE RECHARGE SYSTEM |
US4055444A (en) * | 1976-01-12 | 1977-10-25 | Texas Instruments Incorporated | Method of making N-channel MOS integrated circuits |
US4240092A (en) * | 1976-09-13 | 1980-12-16 | Texas Instruments Incorporated | Random access memory cell with different capacitor and transistor oxide thickness |
US4295218A (en) * | 1979-06-25 | 1981-10-13 | Regents Of The University Of California | Error-correcting coding system |
US4412314A (en) * | 1980-06-02 | 1983-10-25 | Mostek Corporation | Semiconductor memory for use in conjunction with error detection and correction circuit |
US4373250A (en) * | 1980-11-17 | 1983-02-15 | Signetics Corporation | Process for fabricating a high capacity memory cell |
US4574465A (en) * | 1982-04-13 | 1986-03-11 | Texas Instruments Incorporated | Differing field oxide thicknesses in dynamic memory device |
US4570331A (en) * | 1984-01-26 | 1986-02-18 | Inmos Corporation | Thick oxide field-shield CMOS process |
JPS60223153A (en) * | 1984-04-19 | 1985-11-07 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor device with mis type capacitor and manufacture thereof |
US4721987A (en) * | 1984-07-03 | 1988-01-26 | Texas Instruments Incorporated | Trench capacitor process for high density dynamic RAM |
US4758993A (en) * | 1984-11-19 | 1988-07-19 | Fujitsu Limited | Random access memory device formed on a semiconductor substrate having an array of memory cells divided into sub-arrays |
US5045916A (en) * | 1985-01-22 | 1991-09-03 | Fairchild Semiconductor Corporation | Extended silicide and external contact technology |
JPS61214298A (en) * | 1985-03-20 | 1986-09-24 | Toshiba Corp | Semiconductor memory with error correcting function |
JPS62136069A (en) * | 1985-12-10 | 1987-06-19 | Hitachi Ltd | Semiconductor device and manufacture of the same |
JPS62188095A (en) * | 1986-02-14 | 1987-08-17 | Toshiba Corp | Control circuit for semiconductor memory device |
JPH0612613B2 (en) * | 1986-03-18 | 1994-02-16 | 富士通株式会社 | Semiconductor memory device |
JPS62220028A (en) * | 1986-03-20 | 1987-09-28 | Fujitsu Ltd | Logic circuit |
US4920517A (en) * | 1986-04-24 | 1990-04-24 | Matsushita Electric Industrial Co., Ltd. | Semiconductor memory device having sub bit lines |
US4875046A (en) * | 1986-07-11 | 1989-10-17 | Brooktree Corporation | Centroiding algorithm for networks used in A/D and D/A converters |
JPH06101229B2 (en) * | 1986-09-09 | 1994-12-12 | 三菱電機株式会社 | Dynamic random access memory |
US4801988A (en) * | 1986-10-31 | 1989-01-31 | International Business Machines Corporation | Semiconductor trench capacitor cell with merged isolation and node trench construction |
JPS63282997A (en) * | 1987-05-15 | 1988-11-18 | Mitsubishi Electric Corp | Block access memory |
US5226147A (en) * | 1987-11-06 | 1993-07-06 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor memory device for simple cache system |
US4887240A (en) * | 1987-12-15 | 1989-12-12 | National Semiconductor Corporation | Staggered refresh for dram array |
JPH01183000A (en) * | 1988-01-14 | 1989-07-20 | Mitsubishi Electric Corp | Semiconductor memory device having error correcting circuit |
US5297097A (en) * | 1988-06-17 | 1994-03-22 | Hitachi Ltd. | Large scale integrated circuit for low voltage operation |
US5045898A (en) * | 1988-08-30 | 1991-09-03 | At&T Bell Laboratories | CMOS integrated circuit having improved isolation |
JPH02122563A (en) * | 1988-10-31 | 1990-05-10 | Nec Corp | Manufacture of semiconductor device |
US5023838A (en) * | 1988-12-02 | 1991-06-11 | Ncr Corporation | Random access memory device with integral logic capability |
US5251177A (en) * | 1989-01-23 | 1993-10-05 | Matsushita Electric Industrial Co., Ltd. | Semiconductor memory device having an improved refresh operation |
CA2011518C (en) * | 1989-04-25 | 1993-04-20 | Ronald N. Fortino | Distributed cache dram chip and control method |
JPH04141886A (en) * | 1990-10-01 | 1992-05-15 | Nec Corp | Micro computer |
JP2776599B2 (en) * | 1990-01-25 | 1998-07-16 | 日本電気株式会社 | MOS type DRAM device |
US5134616A (en) * | 1990-02-13 | 1992-07-28 | International Business Machines Corporation | Dynamic ram with on-chip ecc and optimized bit and word redundancy |
GB9007791D0 (en) * | 1990-04-06 | 1990-06-06 | Foss Richard C | High voltage boosted wordline supply charge pump and regulator for dram |
US5307356A (en) * | 1990-04-16 | 1994-04-26 | International Business Machines Corporation | Interlocked on-chip ECC system |
JP2524862B2 (en) * | 1990-05-01 | 1996-08-14 | 三菱電機株式会社 | Semiconductor memory device and manufacturing method thereof |
KR950008385B1 (en) * | 1990-05-24 | 1995-07-28 | 삼성전자주식회사 | Semiconductor memory device |
US5120675A (en) * | 1990-06-01 | 1992-06-09 | Texas Instruments Incorporated | Method for forming a trench within a semiconductor layer of material |
JP2918307B2 (en) * | 1990-08-07 | 1999-07-12 | 沖電気工業株式会社 | Semiconductor storage element |
US5122986A (en) * | 1990-11-21 | 1992-06-16 | Micron Technology, Inc. | Two transistor dram cell |
JP2876799B2 (en) * | 1991-03-13 | 1999-03-31 | 富士通株式会社 | Semiconductor storage device |
US5171700A (en) * | 1991-04-01 | 1992-12-15 | Sgs-Thomson Microelectronics, Inc. | Field effect transistor structure and method |
JPH04307495A (en) * | 1991-04-04 | 1992-10-29 | Mitsubishi Electric Corp | Semiconductor storage device |
US5276843A (en) * | 1991-04-12 | 1994-01-04 | Micron Technology, Inc. | Dynamic RAM array for emulating a static RAM array |
JPH04318391A (en) * | 1991-04-16 | 1992-11-09 | Mitsubishi Electric Corp | Semiconductor storage device |
JP2509764B2 (en) * | 1991-05-17 | 1996-06-26 | 株式会社東芝 | Dynamic memory cell and dynamic memory |
JP2745252B2 (en) * | 1991-06-24 | 1998-04-28 | 三菱電機株式会社 | Semiconductor storage device |
JPH05110017A (en) * | 1991-10-18 | 1993-04-30 | Hitachi Ltd | Semiconductor and manufacture thereof |
US5291444A (en) * | 1991-12-23 | 1994-03-01 | Texas Instruments Incorporated | Combination DRAM and SRAM memory array |
KR950009815B1 (en) * | 1991-12-23 | 1995-08-28 | 삼성전자주식회사 | Vlsi semiconductor memory device having a tripole well structure |
DE69324508T2 (en) * | 1992-01-22 | 1999-12-23 | Enhanced Memory Systems Inc | DRAM with integrated registers |
JP3070025B2 (en) * | 1992-02-04 | 2000-07-24 | 富士通株式会社 | Semiconductor storage device |
US5365487A (en) * | 1992-03-24 | 1994-11-15 | Texas Instruments Incorporated | DRAM power management with self-refresh |
US5215937A (en) * | 1992-05-07 | 1993-06-01 | Advanced Micro Devices, Inc. | Optimizing doping control in short channel MOS |
JP3085782B2 (en) * | 1992-05-29 | 2000-09-11 | 株式会社東芝 | Semiconductor storage device |
JPH06124587A (en) * | 1992-10-09 | 1994-05-06 | Mitsubishi Electric Corp | Dynamic random access memory device |
JPH06177349A (en) * | 1992-12-02 | 1994-06-24 | Matsushita Electric Ind Co Ltd | High density dram and manufacture thereof |
JP2851757B2 (en) * | 1992-12-18 | 1999-01-27 | 三菱電機株式会社 | Semiconductor device and semiconductor storage device |
US5395784A (en) * | 1993-04-14 | 1995-03-07 | Industrial Technology Research Institute | Method of manufacturing low leakage and long retention time DRAM |
JPH07130163A (en) * | 1993-11-01 | 1995-05-19 | Matsushita Electron Corp | Semiconductor memory |
US5448513A (en) * | 1993-12-02 | 1995-09-05 | Regents Of The University Of California | Capacitorless DRAM device on silicon-on-insulator substrate |
US5526305A (en) * | 1994-06-17 | 1996-06-11 | The United States Of America As Represented By The Secretary Of The Air Force | Two-transistor dynamic random-access memory cell |
JPH10502181A (en) * | 1994-06-20 | 1998-02-24 | ネオマジック・コーポレイション | Graphics controller integrated circuit without memory interface |
US5429978A (en) * | 1994-06-22 | 1995-07-04 | Industrial Technology Research Institute | Method of forming a high density self-aligned stack in trench |
JP3521979B2 (en) * | 1994-11-28 | 2004-04-26 | 富士通株式会社 | Semiconductor storage device |
US5600598A (en) * | 1994-12-14 | 1997-02-04 | Mosaid Technologies Incorporated | Memory cell and wordline driver for embedded DRAM in ASIC process |
US5471421A (en) * | 1994-12-16 | 1995-11-28 | Sun Microsystems, Inc. | Storage cell using low powered/low threshold CMOS pass transistors having reduced charge leakage |
DE69623440T2 (en) * | 1995-01-19 | 2003-08-07 | Micron Technology Inc | METHOD FOR PRODUCING TRANSISTORS IN A PERIPHERAL CIRCUIT |
US5547893A (en) * | 1995-12-27 | 1996-08-20 | Vanguard International Semiconductor Corp. | method for fabricating an embedded vertical bipolar transistor and a memory cell |
TW318932B (en) * | 1995-12-28 | 1997-11-01 | Hitachi Ltd | |
US5702988A (en) * | 1996-05-02 | 1997-12-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Blending integrated circuit technology |
US5748547A (en) * | 1996-05-24 | 1998-05-05 | Shau; Jeng-Jye | High performance semiconductor memory devices having multiple dimension bit lines |
US6108229A (en) * | 1996-05-24 | 2000-08-22 | Shau; Jeng-Jye | High performance embedded semiconductor memory device with multiple dimension first-level bit-lines |
US5712201A (en) * | 1996-06-07 | 1998-01-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Fabrication method for integrating logic and single level polysilicon DRAM devices on the same semiconductor chip |
US6084274A (en) * | 1996-09-27 | 2000-07-04 | Sony Corporation | Semiconductor memory cell and its fabrication process |
JPH10177800A (en) * | 1996-10-21 | 1998-06-30 | Texas Instr Inc <Ti> | Error correction dynamic memory and its error correcting method |
US5981324A (en) * | 1996-10-23 | 1999-11-09 | Samsung Electronics Co., Ltd. | Methods of forming integrated circuits having memory cell arrays and peripheral circuits therein |
JP3712150B2 (en) * | 1996-10-25 | 2005-11-02 | 株式会社日立製作所 | Semiconductor integrated circuit device |
JPH10135424A (en) * | 1996-11-01 | 1998-05-22 | Mitsubishi Electric Corp | Semiconductor integrated circuit device |
US5978952A (en) * | 1996-12-31 | 1999-11-02 | Intel Corporation | Time-distributed ECC scrubbing to correct memory errors |
US6016268A (en) * | 1997-02-18 | 2000-01-18 | Richard Mann | Three transistor multi-state dynamic memory cell for embedded CMOS logic applications |
US5910735A (en) * | 1997-05-22 | 1999-06-08 | International Business Machines Corporation | Method and apparatus for safe mode in dynamic logic using dram cell |
JPH1197649A (en) * | 1997-09-25 | 1999-04-09 | Mitsubishi Electric Corp | Semiconductor device and manufacture of the same |
US5943270A (en) * | 1997-11-26 | 1999-08-24 | Intel Corporation | Two-transistor DRAM cell for logic process technology |
US6207991B1 (en) * | 1998-03-20 | 2001-03-27 | Cypress Semiconductor Corp. | Integrated non-volatile and CMOS memories having substantially the same thickness gates and methods of forming the same |
US5959914A (en) * | 1998-03-27 | 1999-09-28 | Lsi Logic Corporation | Memory controller with error correction memory test application |
US6136638A (en) * | 1998-11-19 | 2000-10-24 | Taiwan Semiconductor Manufacturing Company | Process technology architecture of embedded DRAM |
-
1996
- 1996-05-24 US US08/653,620 patent/US5748547A/en not_active Expired - Fee Related
-
1997
- 1997-02-25 US US08/805,290 patent/US5825704A/en not_active Expired - Fee Related
- 1997-05-23 WO PCT/US1997/008957 patent/WO1997044789A1/en active Application Filing
- 1997-12-12 US US08/989,841 patent/US6216246B1/en not_active Expired - Fee Related
-
2001
- 2001-02-20 US US09/790,356 patent/US20020121886A1/en not_active Abandoned
-
2006
- 2006-07-10 US US11/484,803 patent/US20070168829A1/en not_active Abandoned
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5160997A (en) * | 1988-08-12 | 1992-11-03 | Sanyo Electric Co., Ltd. | Semiconductor integrated circuit with shield electrodes for protecting the interconnection lines from undesirable radiation |
US5224107A (en) * | 1989-05-31 | 1993-06-29 | Siemens Aktiengesellschaft | Method in a parallel test apparatus for semiconductor memories |
US5127014A (en) * | 1990-02-13 | 1992-06-30 | Hewlett-Packard Company | Dram on-chip error correction/detection |
US5375127A (en) * | 1992-03-25 | 1994-12-20 | Ncr Corporation | Method and apparatus for generating Reed-Soloman error correcting code across multiple word boundaries |
US5475695A (en) * | 1993-03-19 | 1995-12-12 | Semiconductor Diagnosis & Test Corporation | Automatic failure analysis system |
US5828825A (en) * | 1993-12-22 | 1998-10-27 | Intel Corporation | Method and apparatus for pseudo-direct access to embedded memories of a micro-controller integrated circuit via the IEEE test access port |
US5888860A (en) * | 1994-02-18 | 1999-03-30 | Mitsubishi Denki Kabushiki Kaisha | Method of making field effect transistor |
US5413949A (en) * | 1994-04-26 | 1995-05-09 | United Microelectronics Corporation | Method of making self-aligned MOSFET |
US5763314A (en) * | 1994-11-30 | 1998-06-09 | Lucent Technologies Inc. | Process for forming isolation regions in an integrated circuit |
US5652754A (en) * | 1995-12-27 | 1997-07-29 | Hughes Electronics | Signature analysis usage for fault isolation |
US5879990A (en) * | 1996-03-22 | 1999-03-09 | U.S. Philips Corporation | Semiconductor device having an embedded non-volatile memory and method of manufacturing such a semicondutor device |
US6154714A (en) * | 1997-11-17 | 2000-11-28 | Heuristic Physics Laboratories | Method for using wafer navigation to reduce testing times of integrated circuit wafers |
US6507800B1 (en) * | 2000-03-13 | 2003-01-14 | Promos Technologies, Inc. | Method for testing semiconductor wafers |
US6580960B1 (en) * | 2000-06-22 | 2003-06-17 | Promos Technologies, Inc. | System and method for finding an operation/tool combination that causes integrated failure in a semiconductor fabrication facility |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030061439A1 (en) * | 2001-09-25 | 2003-03-27 | Jeng-Jye Shau | Distributed executing units of logic integrated circuits connected to & executes on data in local data storage |
US20040066676A1 (en) * | 2002-09-26 | 2004-04-08 | Lee Sun Hyoung | SRAM-compatible memory for correcting invalid output data using parity and method of driving the same |
US7165206B2 (en) * | 2002-09-26 | 2007-01-16 | Silicon7 Inc. | SRAM-compatible memory for correcting invalid output data using parity and method of driving the same |
US11893474B2 (en) | 2015-10-23 | 2024-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and electronic device |
Also Published As
Publication number | Publication date |
---|---|
US6216246B1 (en) | 2001-04-10 |
US5825704A (en) | 1998-10-20 |
WO1997044789A1 (en) | 1997-11-27 |
US20070168829A1 (en) | 2007-07-19 |
US5748547A (en) | 1998-05-05 |
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