US20080058624A1 - Silicon microprobe with integrated biosensor - Google Patents
Silicon microprobe with integrated biosensor Download PDFInfo
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- US20080058624A1 US20080058624A1 US11/980,853 US98085307A US2008058624A1 US 20080058624 A1 US20080058624 A1 US 20080058624A1 US 98085307 A US98085307 A US 98085307A US 2008058624 A1 US2008058624 A1 US 2008058624A1
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
- A61B5/6846—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive
- A61B5/6847—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive mounted on an invasive device
- A61B5/685—Microneedles
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
- A61B5/14532—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue for measuring glucose, e.g. by tissue impedance measurement
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
- A61B5/14546—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue for measuring analytes not otherwise provided for, e.g. ions, cytochromes
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
- A61B5/6846—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive
- A61B5/6847—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be brought in contact with an internal body part, i.e. invasive mounted on an invasive device
- A61B5/6848—Needles
- A61B5/6849—Needles in combination with a needle set
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2560/00—Constructional details of operational features of apparatus; Accessories for medical measuring apparatus
- A61B2560/04—Constructional details of apparatus
- A61B2560/0406—Constructional details of apparatus specially shaped apparatus housings
- A61B2560/0412—Low-profile patch shaped housings
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0002—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network
Definitions
- This invention relates to silicon microprobes, and more particularly to microprobes with biosensor capability incorporated therein for measuring analyte concentrations in a subject's blood, tissue, or other bodily fluids.
- Diabetes mellitus is an insidious disease which affects more than 15 million Americans. About 1.5 million of these are Type I diabetics (insulin-dependent) and 12 to 14 million are Type II diabetics (noninsulin-dependent).
- the characteristics of diabetes include chronic and persistently high levels of glucose in blood and in urine. Although urine glucose has been used to monitor glucose levels, the measurement of blood glucose is more reliable and logistically feasible. Blood glucose has therefore become the most commonly followed clinical marker for monitoring the progress of diabetes (and other diseases) to determine treatment and control protocols.
- Glucose levels are routinely measured in doctors' offices, clinical laboratories, and hospitals. However, the most convenient and important measuring is in-home self-monitoring of blood glucose levels by the patients themselves to permit adjustment of the quantities of insulin and hypoglycemics administered. Such self-monitoring is known as self-monitored blood glucose. Normal blood glucose levels in humans are in the 70-100 mg/dl range and in the 160-200 mg/dl range after a heavy meal.
- the smallest lancet or needle currently marketed for blood sampling has a diameter between 300 micrometers and 500 micrometers, and is constructed of stainless steel with beveled edges. Due to the large cross-section of these lancets, fingertip lancing is painful and frequent lancing causes calluses, impairment of the use of hands, psychological trauma and other unpleasant consequences. Further, blood samples recovered from the patient must be transferred to a test strip or cartridge for assaying analyte concentrations. Obtaining blood samples by lancing and performing the analysis can be messy as well as painful for the patient.
- the analyte concentration is determined by a biosensor built into the microprobe, which is in data communication with an external meter via an analyte signal.
- a blood sample is not transferred from the subject to an external test mechanism as in the prior art.
- the present self-contained process minimizes messy blood smears, which is convenient for the subjects. Further, the closed nature of the present process also minimizes ambient exposure of the subject's blood. Blood may harbor undesirable biological forms (such as HIV) which could contaminate the local environment constituting a biohazard. By eliminating the blood transfer step, the present microprobe avoids such hazard.
- the subject simply places the microprobe in a holder against the skin and waits for a signal to be sent to an external meter.
- the microprobe penetrates the stratum corneum (the tough outer layer of the skin) and contacts the tissue within.
- a separate ex vivo testing step with testing strips and the like is not required.
- the present one-step process eliminates the following prior art steps:
- a biosensor may be integrated into the surface of the microprobe. Alternately, the biosensor may be placed in a cavity in the surface of the silicon.
- Silicon is compatible with integrated circuit (IC) fabrication and MEMS (microelectromechanical systems) technologies employing well established masking, deposition, etching, and high resolution photolithographic techniques.
- IC integrated circuit
- MEMS microelectromechanical systems
- the present microprobe devices may be fabricated in mass quantities from silicon wafers through automatic IC and MEMS processing steps at minimal cost per device.
- the dimensions of the probe are very small and cause minimal tissue displacement and related lateral tissue pressure and nerve ending contact. In some cases the displacement may be so minimal that the subject feels no sensation at all during the process. For example in a clinical trial of 62 patients using a microprobe with a thickness of 100 micrometers, the majority found the insertion and retraction of the microprobe device in the arm to be painless. Of the total patients tested, 15% could not even feel the probe penetration and an additional 58% found the penetration to be barely noticeable.
- the microprobe device retains the single-crystal structure of the silicon starting wafer and can reliably penetrate skin without breakage because of the strength provided by this single-crystal structure.
- the strength of the miniature probe may be further increased by optimal shaping. Data from skin puncturing tests show that the average force required to puncture the skin (0.038 Newton) is minimal compared to the buckling force required to break the probe (0.134 Newton).
- the biosensor may be located near the probe tip for maximum penetration.
- the biosensors may be placed in a cavity in the surface of the silicon.
- the probe accesses the blood, and the analyte signal is carried along the length of the probe to the ex vivo environment by conductive leads.
- the biosensor may be distant from the probe on an ex vivo portion of the device, and not in direct contact with the analyte tissue.
- the blood is transported from the in vivo probe tip to the ex vivo portion by one or more channels.
- biosensor(s) may be formed by IC fabrication and are significantly smaller than the microprobe.
- biosensors may be spaced along a single microprobe for sensing several analytes per penetration, or for sensing the same analyte at different depths.
- a biosensor microprobe device for providing a signal to an external analyte meter.
- the signal indicates analyte presence in an analyte-containing fluid of a subject.
- the device is fabricated from a silicon wafer and has a body portion and a microprobe portion.
- the microprobe has a body end connected to the body portion, and having a penetration end extending away from the body portion for penetrating into the subject to access the bodily fluid.
- a biosensor integrated into the silicon substrate senses analyte presence and provides a signal in response to the analyte presence.
- FIG. 1A is a plan view of in vivo microprobe device 10 showing biosensor 12 on probe 16 ;
- FIG. 1B is a side view of device 10 of FIG. 1A ;
- FIG. 2A is a plan view of ex vivo device 20 showing biosensor 22 on body 24 ;
- FIG. 2B is a sectional side view of device 20 of FIG. 2A along line 2 B- 2 B showing biosensor 22 mounted in cavity 20 C on silicon substrate 20 S;
- FIG. 2C is a sectional view across probe 20 of FIG. 2A along line 2 C- 2 C showing V-groove 26 G in silicon substrate 20 S;
- FIG. 3A is a plan view of device 30 showing multiple biosensors 32 D and 32 M and 32 S on probe 36 ;
- FIG. 3B is a side view of device 30 of FIG. 3A ;
- FIG. 4A is a plan view of device 40 showing optical biosensor 42 and waveguide 42 W on probe 46 ;
- FIG. 4B is a sectional side view of device 40 of FIG. 4A along line 4 B- 4 B showing the optical biosensor mounted in hole 40 H through silicon substrate 40 S;
- FIG. 5A is a plan view of microprobe assembly 50 A showing cover member 58 C and base member 58 B;
- FIG. 5B is a sectional side view of assembly 50 A of FIG. 5A along line 5 B- 5 B showing transmitter 54 T and battery 54 B;
- FIG. 6 is a chart comparing the average pain perception values for the silicon microprobe device with those for a conventional metal lancet.
- each reference numeral in the above figures indicates the figure in which an element or feature is most prominently shown.
- the second digit indicates related elements or features, and a final letter (when used) indicates a sub-portion of an element or feature.
- FIGS. 1 A and 1 B are identical to FIGS. 1 A and 1 B.
- Microprobe device 10 provides an analyte signal from biosensor 12 to an external analyte meter (not shown) indicating analyte presence in an analyte-containing fluid of a subject (not shown).
- Silicon substrate 10 S extends in the X length dimension, and the Y width dimension, and the Z thickness dimension, forming large body portion 14 and pointed microprobe portion 16 (as shown in FIG. 1A ).
- the substrate has front side 10 A into which the biosensor is integrated and back side 10 B (as shown in FIG. 1B ).
- the microprobe has a body end 16 B connected to body 14 , and a penetration end 16 P extending away from the body in the X length dimension for penetrating into the subject to access the bodily fluid.
- a suitable signal interface structure such as electrical contact pads 14 P may be deposited onto a side of silicon substrate 10 S on body 14 , for sliding contact connection with the analyte meter.
- a suitable signal carrier such as conductive leads 12 L may be deposited onto a side of the silicon substrate between biosensor 12 and interface pads 14 P for carrying the signal.
- the X length of the body may be from about 0.3 mm to about 2 mm, and the Y width of the body may be from about 0.3 mm to about 2 mm. Smaller body dimensions permit higher wafer density of microprobe devices (acreage) during manufacture.
- the biosensor is positioned on the microprobe sufficiently distant from the body end to pass into the subject during penetration. Positioning the biosensor ex vivo affords greater flexibility in reagent selection.
- in vivo biosensor 12 is positioned on microprobe 16 near penetration end 16 P.
- the biosensor accesses the analyte fluid by penetrating into the subject and contacting the fluid.
- the analyte fluid may be any suitable body fluid such as blood, serum, or interstitial fluid or intracellular fluid.
- the in vivo biosensor is located sufficiently back from the penetration end of the microprobe so as not to affect the sharpness of the point or interfere with penetration of the probe. Access may be assisted by fluid seepage along the microspace between probe and tissue up the side of the probe from the tip to the biosensor.
- Diabetes monitoring is the primary focus of this disclosure for illustrative purposes.
- the microprobe device has uses in the diagnostic procedures and treatment of other diseases, emergency room status monitoring, sports medicine, veterinary medicine, research and development, with human subjects or experimental animals.
- the microprobe may be width tapered along the X length dimension, converging from a larger Y width dimension (of about 200 micrometers) at the body end to a smaller Y width dimension (of about 30 micrometers) at the penetration end.
- the X length of the microprobe may be from about 0.5 mm to about 2.5 mm with a penetration depth of from about 0.5 mm to about 2 mm.
- the discomfort or sensation experienced by the subject normally decreases with decreasing probe cross-section and length. However, a sensation floor exists where sensation is so minimal that probes smaller then this floor threshold do not offer any advantage.
- the taper permits easier penetration due to the gradually increasing cross-section of the probe. In addition, the taper reduces the volume of the probe causing less tissue displacement and less discomfort to the subject.
- the volume of the probe may be further reduced by thinning the Z dimension (see FIG. 3B ) from the initial thickness of the silicon wafer across body 34 to a slender thickness along probe 36 .
- the thickness of the silicon wafer may be from about 500 micrometers (for a 4′′ wafer) to about 700 micrometers (for a 6′′ wafer).
- Back side 30 B of substrate 30 S may be etched away to about 50 micrometers to thin the Z thickness dimension of the probe.
- the convergence of the microprobe taper may be uniform (as shown in FIG. 1A ) establishing a constant change in the Y width dimension and a corresponding constant decrease in the cross-section of probe 16 .
- the convergence of the microprobe taper may be nonuniform (as shown in FIG. 2A ) establishing a continuous change in the Y width dimension.
- This smooth change in width optimizes stress distribution within microprobe 26 during penetration and reduces material failure. That is, the probe is less likely to “snap-off” in the skin of the subject during use.
- the function for such a continuous change may be generated by stress analysis computer programs.
- Rounded microfillet 46 F see FIG.
- the Y width dimension of the microprobe may terminate in a suitably shaped point at the penetration end, such as symmetrically shaped point 16 P (shown in FIG. 1A ) or chisel shaped point 26 P (shown in FIG. 2A ).
- biosensor 22 is positioned on body 24 of device 20 , and does not to pass into the subject during penetration.
- the biosensor may be positioned on the microprobe sufficiently close to the body end so as not to penetrate.
- the analyte fluid may be guided along microprobe 26 to biosensor 22 through a suitable conduit such as open fluid channel or groove 26 G formed along the probe.
- the channel extends between the penetration end of the probe and the biosensor, and conveys the fluid by capillary action.
- the absence of a prior art type internal bore along the length of the probe reduces the probe diameter and simplifies probe fabrication.
- the open fluid channel may be a V-groove etched in the silicon of microprobe 26 .
- V-grooves may be precisely controlled by V-groove etching IC technology. However other channel cross-sections may be produced by other techniques such as plasma etching.
- Electrobiosensors FIGS. 1A and 1B .
- the biosensor may be an electrotype biosensor (see FIG. 1A ), in which the signal is electrical energy carried on electrically conductive leads 12 L and interface pads 14 P. More specifically, the biosensor may be an electrochemical biosensor responsive to the analyte presence by altering the electrical energy of the signal in proportion to the concentration of the analyte presence.
- the analyte signal may be voltage based or current based, and may be a modulation of a quiescent value.
- the biosensor may be an oscillating electrogravimetric biosensor responsive to the analyte presence by altering the oscillation frequency. The magnitude of the alteration in frequency indicates the concentration of the analyte presence, and may be a.c.
- the biosensor may be a thermal biosensor which senses heat generated in an analyte reaction, or an optical biosensor 42 (see FIG. 4A ) in which senses reaction light.
- the light signal alterations are photon energy propagating along optrode signal carrier 42 W which widens into optical coupler 42 C for interfacing with a meter (not shown).
- the optrode may be any suitable photon containment device such as a waveguide or optical fiber transparent at the photon wavelength.
- the biosensor may be self-luminescent or merely return incident interrogation light.
- the biosensor may be integrated into the surface of the substrate, or housed in a cavity formed in the substrate or in a hole extending through the substrate.
- the surface of side 10 A of silicon substrate 10 S is planar (see FIG. 1B ), and biosensor 12 is deposited onto this flat surface.
- Cavity 20 C (see in FIG. 2B ) is etched into side 20 A of silicon substrate 20 S. Cavity 20 C extends into the silicon substrate in the Z thickness dimension.
- the biosensor is deposited onto the silicon within the cavity.
- Hole 40 H (see FIG. 4B ) is etched into side 40 A of silicon substrate 40 S. Hole 40 H extends through the silicon substrate in the Z thickness dimension.
- the electrotype biosensor may have a suitable electrically insulative layer such as silicon oxide film 10 F (see FIG. 1A ) on side 10 A between conductive leads 12 L and silicon substrate 10 S. Silicon oxide is a better insulator than silicon, and may be employed to reduce shunt signal loss between the signal leads.
- Biosensor 12 is deposited on the insulative layer and is electrically isolated from the silicon substrate.
- the conductive leads and the conductive contacts of the electrotype biosensors may be a suitably conductive material also deposited on the insulative layer such as metal (sputtered Al Au Ti Ag W Cr for example) or carbon or doped silicon.
- Doped silicon leads may have a customized electrical resistance (and other characteristics) to optimize electrical features such as impedance matching or current limiting.
- the silicon substrate may also be sufficiently doped to form the conductive material for one of the pair of conductive leads and one of the pair of conductive contacts (see FIG. 3A ).
- FIGS. 3 A and 3 B are identical to FIGS. 3 A and 3 B.
- biosensors may be employed on a single probe. Each of these multiple biosensors may sense the presence of a different analyte. Further, each of the multiple biosensors may be positioned at a different location along the X dimension of microprobe 36 to sense analyte presence at a different penetration depth (deep, medium, and shallow). In other embodiments, multiple biosensors may sense the same analyte at different depths, or sense different analytes at the same depth. For example (see FIGS. 3A and 3B ), three biosensor 32 D (deep), 32 M (medium), and 32 S (shallow) may be deposited onto side 30 A of silicon substrate 30 S.
- Silicon substrate 30 S is conductive and forms common return conductive path 30 C (or ground) cooperating with conductive leads 33 D, 33 M, and 33 S and interface contacts 34 D, 34 M, and 34 S.
- the return conductive path completes the electric circuit from the biosensors 32 D, 32 M, and 32 S to an external meter and back to the biosensors.
- Silicon oxide layer 30 F insulates the conductive return path from the source paths and source pads.
- Biosensor 32 S is located on back side 30 B on insulating layer 31 F, with conductive lead 33 S extending though layer 31 F and substrate 30 S and layer 30 F to front side 30 A.
- Microprobe device 50 M may be sealed within a housing or cover 58 C with signal transmitter 54 T forming monitoring assembly 50 A as shown in FIGS. 5A and 5B .
- the assembly is emplaced at a suitable site on the subject (not shown) for continuous monitoring of the analyte.
- Analyte data may be transmitted during an extended monitoring period of a few hours or several days or even weeks. Alternatively, the monitoring may be for a short period or even for a single transmission.
- the assembly transmits analyte concentration data to a remote meter (not shown).
- the emplacement site is not subject to disturbance by daily activity of the subject.
- the inside of the subject's arm is a convenient protected site.
- Microprobe portion 56 penetrates into the subject to access the analyte-containing fluid.
- Biosensor 52 on the microprobe senses analyte presence and provides a sensed signal in response to the analyte presence.
- Base 58 B extends in the Y dimension and Z dimension generally normal to the X dimension of microprobe portion 56 , and forms the bottom of the assembly.
- Cover 58 C is installed over body portion 54 of the substrate and engages base 58 B for sealing the assembly.
- Stabilizing surface 58 S forms an in vivo face of base member 58 B and disposed toward the subject when emplaced. The stabilizing surface engages the subject to maintain the penetration orientation of the microprobe portion into the subject.
- the stabilizing surface may have adhesive film 58 A thereon for retaining the assembly at the emplacement site for the duration of the monitoring period. The adhesive holds the assembly onto the skin preventing displacement along the X dimension. The adhesive prevents the probe from working loose during the monitoring period as the subject moves around.
- the adhesive prevents lateral displacement of the assembly along the Y and Z dimensions. This lateral retention minimizes shear forces along the length of probe 56 preventing the probe from snapping off during subject activity. As the assembly is emplaced, the stabilizing surface engages the subject's skin and limits the penetration of the microprobe portion.
- Signal transmitter 54 T provides a transmitted analyte signal to a meter (not shown).
- Analog to digital converter 54 A converts the sensed signal from the biosensor into a digital transmitted signal.
- a suitable power source such as battery 54 B may be provided to activate the signal transmitter and the converter.
- the transmitter, converter and battery may be deposited into the silicon of body portion 54 .
- FIG. 6 shows the averaged response from 62 patients in a clinical trial to determine the relative pain perceived from punctures with a silicone microprobe in the arm compared with punctures in the arm and finger with conventional metal lancets.
- the punctures from the silicon microprobe were found to be noticeably less painful than those from the lancet, with the more painful of the two lancet tests being the finger stick, as expected.
- the test subjects repeatedly commented that the microprobe puncture was virtually painless and far more comfortable than the finger stick with the lancet.
- microprobe device with integrated analyte sensing capability, which accesses the blood and determines the analyte concentration in one simple step.
- the device is fabricated from a silicon wafer for compatibility with IC fabrication and MEMS technologies. Because the strength of the single-crystal structure of the starting silicon wafer is retained in the finished device, the microprobe can penetrate skin reliably without breaking. The small length, width, and thickness dimensions of the probe introduce minimal tissue displacement, rendering probe insertion and retraction essentially painless. Minimal penetration effort is required which also minimizes mechanical probe failure.
- the device may function in vivo or ex vivo with one or multiple biosensors, and has both single measurement and continuous monitoring applications.
- biosensors may be employed in either the ex vivo embodiment ( FIG. 2A ) or the in vivo embodiment ( FIG. 1A ).
- the stress reducing microfillet shown in the optical biosensor embodiment ( FIG. 4A ) may be employed in other types of biosensors.
- the cavity housing ( FIG. 2B ) and hole housing ( FIG. 4B ) of the biosensor may be employed in other embodiments.
- features of embodiments shown in various figures may be employed in combination with embodiments shown in other figures. Therefore, the scope of the invention is to be determined by the terminology of the following claims and the legal equivalents thereof.
Abstract
Microprobe device 10 provides an analyte signal from biosensor 12 to an external analyte meter indicating analyte presence in an analyte-containing bodily fluid of a subject (not shown).
Description
- The present application is a division of U.S. patent application Ser. No. 09/816,472 filed on Mar. 26, 2001, which is pending.
- This invention relates to silicon microprobes, and more particularly to microprobes with biosensor capability incorporated therein for measuring analyte concentrations in a subject's blood, tissue, or other bodily fluids.
- Diabetes mellitus is an insidious disease which affects more than 15 million Americans. About 1.5 million of these are Type I diabetics (insulin-dependent) and 12 to 14 million are Type II diabetics (noninsulin-dependent). The characteristics of diabetes include chronic and persistently high levels of glucose in blood and in urine. Although urine glucose has been used to monitor glucose levels, the measurement of blood glucose is more reliable and logistically feasible. Blood glucose has therefore become the most commonly followed clinical marker for monitoring the progress of diabetes (and other diseases) to determine treatment and control protocols. Glucose levels are routinely measured in doctors' offices, clinical laboratories, and hospitals. However, the most convenient and important measuring is in-home self-monitoring of blood glucose levels by the patients themselves to permit adjustment of the quantities of insulin and hypoglycemics administered. Such self-monitoring is known as self-monitored blood glucose. Normal blood glucose levels in humans are in the 70-100 mg/dl range and in the 160-200 mg/dl range after a heavy meal.
- There are many products for diabetes related testing of glucose for diagnostic and monitoring purposes. These products range from skin swabs, reagent test strips, portable electronic meters, sensors and other instruments, lancets and needles of various shapes and sizes, syringes and other paraphernalia. Most of the currently available technologies, especially for self-monitored blood glucose measurements, are not satisfactory because they require some kind of deep lancing or finger stick with associated pain and sometimes excessive bleeding.
- The smallest lancet or needle currently marketed for blood sampling has a diameter between 300 micrometers and 500 micrometers, and is constructed of stainless steel with beveled edges. Due to the large cross-section of these lancets, fingertip lancing is painful and frequent lancing causes calluses, impairment of the use of hands, psychological trauma and other unpleasant consequences. Further, blood samples recovered from the patient must be transferred to a test strip or cartridge for assaying analyte concentrations. Obtaining blood samples by lancing and performing the analysis can be messy as well as painful for the patient.
- It is therefore an object of this invention to provide a miniature microprobe device with integrated analyte sensing capability. The analyte concentration is determined by a biosensor built into the microprobe, which is in data communication with an external meter via an analyte signal. A blood sample is not transferred from the subject to an external test mechanism as in the prior art. The present self-contained process minimizes messy blood smears, which is convenient for the subjects. Further, the closed nature of the present process also minimizes ambient exposure of the subject's blood. Blood may harbor undesirable biological forms (such as HIV) which could contaminate the local environment constituting a biohazard. By eliminating the blood transfer step, the present microprobe avoids such hazard.
- It is another object of this invention to provide such a miniature microprobe device which accesses the blood and determines the analyte concentration in one simple step. The subject simply places the microprobe in a holder against the skin and waits for a signal to be sent to an external meter. The microprobe penetrates the stratum corneum (the tough outer layer of the skin) and contacts the tissue within. A separate ex vivo testing step with testing strips and the like is not required. The present one-step process eliminates the following prior art steps:
-
- A) Preparation step in which the subject gathers required materials including a test strip or cartridge to receive the blood sample and absorbent material for controlling blood smear and leakage.
- B) Transfer step in which the subject transfers the blood sample to the test strip.
- C) Waste blood step in which the subject cleans-up any waste blood, and disposes of the blood
- D) Reset step in which the subject puts away the above material in readiness for the next blood sampling.
- It is a further object of this invention to provide such a miniature microprobe device which is fabricated from a silicon wafer. A biosensor may be integrated into the surface of the microprobe. Alternately, the biosensor may be placed in a cavity in the surface of the silicon.
- Silicon is compatible with integrated circuit (IC) fabrication and MEMS (microelectromechanical systems) technologies employing well established masking, deposition, etching, and high resolution photolithographic techniques. The present microprobe devices may be fabricated in mass quantities from silicon wafers through automatic IC and MEMS processing steps at minimal cost per device.
- It is a further object of this invention to provide such a miniature microprobe device which minimizes subject discomfort during probe penetration and analyte measurement. The dimensions of the probe (length, width, and thickness) are very small and cause minimal tissue displacement and related lateral tissue pressure and nerve ending contact. In some cases the displacement may be so minimal that the subject feels no sensation at all during the process. For example in a clinical trial of 62 patients using a microprobe with a thickness of 100 micrometers, the majority found the insertion and retraction of the microprobe device in the arm to be painless. Of the total patients tested, 15% could not even feel the probe penetration and an additional 58% found the penetration to be barely noticeable.
- It is a further object of this invention to provide such a miniature microprobe device which minimizes mechanical probe failure (breakage) during penetration and removal. Only minimal penetration effort is required due to the small probe cross-section defined by the width and thickness dimensions. These dimensions are much smaller than those of conventional metal lancets. The microprobe device retains the single-crystal structure of the silicon starting wafer and can reliably penetrate skin without breakage because of the strength provided by this single-crystal structure. The strength of the miniature probe may be further increased by optimal shaping. Data from skin puncturing tests show that the average force required to puncture the skin (0.038 Newton) is minimal compared to the buckling force required to break the probe (0.134 Newton).
- It is a further object of this invention to provide such a miniature microprobe device which functions in vivo. The biosensor may be located near the probe tip for maximum penetration. The biosensors may be placed in a cavity in the surface of the silicon. The probe accesses the blood, and the analyte signal is carried along the length of the probe to the ex vivo environment by conductive leads.
- It is a further object of this invention to provide such a miniature microprobe device which functions ex vivo. The biosensor may be distant from the probe on an ex vivo portion of the device, and not in direct contact with the analyte tissue. The blood is transported from the in vivo probe tip to the ex vivo portion by one or more channels.
- It is a further object of this invention to provide such a miniature microprobe device which may be emplaced into the skin of the subject for a single measurement of analytes.
- It is a further object of this invention to provide such a miniature microprobe device which may be installed on the subject for continuous monitoring of analytes.
- It is a further object of this invention to provide such a miniature microprobe device which has multiple biosensors. The biosensor(s) may be formed by IC fabrication and are significantly smaller than the microprobe. Several biosensors may be spaced along a single microprobe for sensing several analytes per penetration, or for sensing the same analyte at different depths.
- Briefly, these and other objects of the present invention are accomplished by providing a biosensor microprobe device for providing a signal to an external analyte meter. The signal indicates analyte presence in an analyte-containing fluid of a subject. The device is fabricated from a silicon wafer and has a body portion and a microprobe portion. The microprobe has a body end connected to the body portion, and having a penetration end extending away from the body portion for penetrating into the subject to access the bodily fluid. A biosensor integrated into the silicon substrate senses analyte presence and provides a signal in response to the analyte presence.
- Further objects and advantages of the present microprobe and the operation of the biosensor become apparent from the following detailed description and drawings (not drawn to scale) in which:
-
FIG. 1A is a plan view of invivo microprobe device 10 showingbiosensor 12 onprobe 16; -
FIG. 1B is a side view ofdevice 10 ofFIG. 1A ; -
FIG. 2A is a plan view of ex vivodevice 20 showingbiosensor 22 onbody 24; -
FIG. 2B is a sectional side view ofdevice 20 ofFIG. 2A alongline 2B-2 B showing biosensor 22 mounted incavity 20C onsilicon substrate 20S; -
FIG. 2C is a sectional view acrossprobe 20 ofFIG. 2A alongline 2C-2C showing V-groove 26G insilicon substrate 20S; -
FIG. 3A is a plan view ofdevice 30 showingmultiple biosensors probe 36; -
FIG. 3B is a side view ofdevice 30 ofFIG. 3A ; -
FIG. 4A is a plan view ofdevice 40 showingoptical biosensor 42 andwaveguide 42W onprobe 46; -
FIG. 4B is a sectional side view ofdevice 40 ofFIG. 4A alongline 4B-4B showing the optical biosensor mounted inhole 40H throughsilicon substrate 40S; -
FIG. 5A is a plan view ofmicroprobe assembly 50A showingcover member 58C andbase member 58B; -
FIG. 5B is a sectional side view ofassembly 50A ofFIG. 5A alongline 5B-5 B showing transmitter 54T andbattery 54B; and -
FIG. 6 is a chart comparing the average pain perception values for the silicon microprobe device with those for a conventional metal lancet. - The first digit of each reference numeral in the above figures indicates the figure in which an element or feature is most prominently shown. The second digit indicates related elements or features, and a final letter (when used) indicates a sub-portion of an element or feature.
- The table below lists the reference numerals employed in the figures, and identifies the element designated by each numeral.
-
- 10
Microprobe Device 10-
10 A Front Side 10A - 10F
Silicon Oxide Film 10F -
10 B Back Side 10B -
10 S Silicon Substrate 10S
-
-
Biosensor 12- 12L Conductive Leads 12L
- 14
Body 14- 14P Electrical
Interface Contact Pads 14P
- 14P Electrical
-
Probe 16-
16 B Body End 16B -
16 P Penetration End 16P
-
- 20
Microprobe Device 20-
20 A Front Side 20A -
20 C Cavity 20C -
20 S Silicon Substrate 20S
-
- 22
Biosensor 22 - 24
Body 24 - 26
Probe 26-
26 A Apex 26A -
26 G Groove 26G -
26 P Point 26P
-
- 30
Device 30-
30 A Front Side 30A - 30C
Common Return Path 30C - 30F
Silicon oxide layer 30F -
30 B Back Surface 30B -
30 S Substrate 30S-
Multiple 32MBiosensors 32D -
Multiple 33MLeads 33D
-
-
-
Body 34-
Multiple 34Sinterface 34MContacts 34D
-
- 36
Probe 36 - 40
Device 40-
40 A Front side 40A -
40 H Hole 40H -
40 S Silicon Substrate 40S
-
- 42
Optical biosensor 42-
42 C Optical Coupler 42C -
42 W Waveguide 42W
-
- 44
Body 44 - 46
Probe 46- 46F Rounded
Microfillet 46F
- 46F Rounded
-
50 A Microprobe Assembly 50A -
50 M Microprobe Device 50M - 52
Biosensor 52 - 54
Body 54- 54A A/
D Converter 54A -
54 B Battery 54B -
54 T Transmitter 54T
- 54A A/
- 56
Microprobe 56- 58A
Adhesive Film 58A -
58 B Base Member 58B -
58 C Cover Member 58C
- 58A
-
58 S Stabilizing Surface 58S
- 10
-
Microprobe device 10 provides an analyte signal frombiosensor 12 to an external analyte meter (not shown) indicating analyte presence in an analyte-containing fluid of a subject (not shown).Silicon substrate 10S extends in the X length dimension, and the Y width dimension, and the Z thickness dimension, forminglarge body portion 14 and pointed microprobe portion 16 (as shown inFIG. 1A ). The substrate hasfront side 10A into which the biosensor is integrated and backside 10B (as shown inFIG. 1B ). The microprobe has abody end 16B connected tobody 14, and apenetration end 16P extending away from the body in the X length dimension for penetrating into the subject to access the bodily fluid. A suitable signal interface structure such aselectrical contact pads 14P may be deposited onto a side ofsilicon substrate 10S onbody 14, for sliding contact connection with the analyte meter. A suitable signal carrier such as conductive leads 12L may be deposited onto a side of the silicon substrate betweenbiosensor 12 andinterface pads 14P for carrying the signal. The X length of the body may be from about 0.3 mm to about 2 mm, and the Y width of the body may be from about 0.3 mm to about 2 mm. Smaller body dimensions permit higher wafer density of microprobe devices (acreage) during manufacture. - In the in vivo embodiment the biosensor is positioned on the microprobe sufficiently distant from the body end to pass into the subject during penetration. Positioning the biosensor ex vivo affords greater flexibility in reagent selection. As shown in
FIG. 1A , invivo biosensor 12 is positioned onmicroprobe 16 nearpenetration end 16P. The biosensor accesses the analyte fluid by penetrating into the subject and contacting the fluid. The analyte fluid may be any suitable body fluid such as blood, serum, or interstitial fluid or intracellular fluid. Preferably the in vivo biosensor is located sufficiently back from the penetration end of the microprobe so as not to affect the sharpness of the point or interfere with penetration of the probe. Access may be assisted by fluid seepage along the microspace between probe and tissue up the side of the probe from the tip to the biosensor. - Diabetes monitoring is the primary focus of this disclosure for illustrative purposes. However, the microprobe device has uses in the diagnostic procedures and treatment of other diseases, emergency room status monitoring, sports medicine, veterinary medicine, research and development, with human subjects or experimental animals.
- Probe Shape
- The microprobe may be width tapered along the X length dimension, converging from a larger Y width dimension (of about 200 micrometers) at the body end to a smaller Y width dimension (of about 30 micrometers) at the penetration end. The X length of the microprobe may be from about 0.5 mm to about 2.5 mm with a penetration depth of from about 0.5 mm to about 2 mm. The discomfort or sensation experienced by the subject normally decreases with decreasing probe cross-section and length. However, a sensation floor exists where sensation is so minimal that probes smaller then this floor threshold do not offer any advantage. The taper permits easier penetration due to the gradually increasing cross-section of the probe. In addition, the taper reduces the volume of the probe causing less tissue displacement and less discomfort to the subject. The volume of the probe may be further reduced by thinning the Z dimension (see
FIG. 3B ) from the initial thickness of the silicon wafer acrossbody 34 to a slender thickness alongprobe 36. For example, the thickness of the silicon wafer may be from about 500 micrometers (for a 4″ wafer) to about 700 micrometers (for a 6″ wafer).Back side 30B ofsubstrate 30S may be etched away to about 50 micrometers to thin the Z thickness dimension of the probe. - The convergence of the microprobe taper may be uniform (as shown in
FIG. 1A ) establishing a constant change in the Y width dimension and a corresponding constant decrease in the cross-section ofprobe 16. Alternatively, the convergence of the microprobe taper may be nonuniform (as shown inFIG. 2A ) establishing a continuous change in the Y width dimension. This smooth change in width optimizes stress distribution withinmicroprobe 26 during penetration and reduces material failure. That is, the probe is less likely to “snap-off” in the skin of the subject during use. The function for such a continuous change may be generated by stress analysis computer programs.Rounded microfillet 46F (seeFIG. 4A ) provides a smooth transition along the connection betweenbody 44 and the body end ofmicroprobe 46 which assists in eliminating stress points. The fillet transition prevents stress concentrations produced by cantilever bending of the probe. The Y width dimension of the microprobe may terminate in a suitably shaped point at the penetration end, such as symmetricallyshaped point 16P (shown inFIG. 1A ) or chisel shapedpoint 26P (shown inFIG. 2A ). - In the ex
vivo embodiment biosensor 22 is positioned onbody 24 ofdevice 20, and does not to pass into the subject during penetration. Alternatively, the biosensor may be positioned on the microprobe sufficiently close to the body end so as not to penetrate. The analyte fluid may be guided alongmicroprobe 26 tobiosensor 22 through a suitable conduit such as open fluid channel or groove 26G formed along the probe. The channel extends between the penetration end of the probe and the biosensor, and conveys the fluid by capillary action. The absence of a prior art type internal bore along the length of the probe reduces the probe diameter and simplifies probe fabrication. The open fluid channel may be a V-groove etched in the silicon ofmicroprobe 26. The minute dimensions along apex 26A oftriangular groove 26G (shown inFIG. 2C cross-section view) produce strong capillary forces that are more reliable than fluid seepage. The width and depth of V-grooves may be precisely controlled by V-groove etching IC technology. However other channel cross-sections may be produced by other techniques such as plasma etching. - Electrobiosensors (
FIGS. 1A and 1B ) - In general the biosensor may be an electrotype biosensor (see
FIG. 1A ), in which the signal is electrical energy carried on electrically conductive leads 12L andinterface pads 14P. More specifically, the biosensor may be an electrochemical biosensor responsive to the analyte presence by altering the electrical energy of the signal in proportion to the concentration of the analyte presence. The analyte signal may be voltage based or current based, and may be a modulation of a quiescent value. The biosensor may be an oscillating electrogravimetric biosensor responsive to the analyte presence by altering the oscillation frequency. The magnitude of the alteration in frequency indicates the concentration of the analyte presence, and may be a.c. coupled to an analyte meter (not shown) through a suitable coupling circuit such as a capacitance device. Gravimetric devices are typically quartz crystal based and alter frequency in response to mass accumulation due to reactant buildup during the analyte sensing. Alternatively, the biosensor may be a thermal biosensor which senses heat generated in an analyte reaction, or an optical biosensor 42 (seeFIG. 4A ) in which senses reaction light. The light signal alterations are photon energy propagating alongoptrode signal carrier 42W which widens intooptical coupler 42C for interfacing with a meter (not shown). The optrode may be any suitable photon containment device such as a waveguide or optical fiber transparent at the photon wavelength. The biosensor may be self-luminescent or merely return incident interrogation light. - The biosensor may be integrated into the surface of the substrate, or housed in a cavity formed in the substrate or in a hole extending through the substrate. The surface of
side 10A ofsilicon substrate 10S is planar (seeFIG. 1B ), andbiosensor 12 is deposited onto this flat surface.Cavity 20C (see inFIG. 2B ) is etched intoside 20A ofsilicon substrate 20S.Cavity 20C extends into the silicon substrate in the Z thickness dimension. The biosensor is deposited onto the silicon within the cavity.Hole 40H (seeFIG. 4B ) is etched intoside 40A ofsilicon substrate 40S.Hole 40H extends through the silicon substrate in the Z thickness dimension. - The electrotype biosensor may have a suitable electrically insulative layer such as
silicon oxide film 10F (seeFIG. 1A ) onside 10A betweenconductive leads 12L andsilicon substrate 10S. Silicon oxide is a better insulator than silicon, and may be employed to reduce shunt signal loss between the signal leads.Biosensor 12 is deposited on the insulative layer and is electrically isolated from the silicon substrate. The conductive leads and the conductive contacts of the electrotype biosensors may be a suitably conductive material also deposited on the insulative layer such as metal (sputtered Al Au Ti Ag W Cr for example) or carbon or doped silicon. Doped silicon leads may have a customized electrical resistance (and other characteristics) to optimize electrical features such as impedance matching or current limiting. The silicon substrate may also be sufficiently doped to form the conductive material for one of the pair of conductive leads and one of the pair of conductive contacts (seeFIG. 3A ). - Multiple biosensors may be employed on a single probe. Each of these multiple biosensors may sense the presence of a different analyte. Further, each of the multiple biosensors may be positioned at a different location along the X dimension of
microprobe 36 to sense analyte presence at a different penetration depth (deep, medium, and shallow). In other embodiments, multiple biosensors may sense the same analyte at different depths, or sense different analytes at the same depth. For example (seeFIGS. 3A and 3B ), threebiosensor 32D (deep), 32M (medium), and 32S (shallow) may be deposited ontoside 30A ofsilicon substrate 30S. These multiple biosensors require multipleconductive leads multiple interface contacts Silicon substrate 30S is conductive and forms common returnconductive path 30C (or ground) cooperating withconductive leads interface contacts biosensors Silicon oxide layer 30F insulates the conductive return path from the source paths and source pads. - Further, the multiple biosensors may be located on either or both sides of the microprobe.
Biosensor 32S is located onback side 30B on insulatinglayer 31F, withconductive lead 33S extending thoughlayer 31F andsubstrate 30S andlayer 30F tofront side 30A. -
Microprobe device 50M may be sealed within a housing or cover 58C withsignal transmitter 54T formingmonitoring assembly 50A as shown inFIGS. 5A and 5B . The assembly is emplaced at a suitable site on the subject (not shown) for continuous monitoring of the analyte. Analyte data may be transmitted during an extended monitoring period of a few hours or several days or even weeks. Alternatively, the monitoring may be for a short period or even for a single transmission. The assembly transmits analyte concentration data to a remote meter (not shown). Preferably the emplacement site is not subject to disturbance by daily activity of the subject. The inside of the subject's arm is a convenient protected site.Microprobe portion 56 penetrates into the subject to access the analyte-containing fluid.Biosensor 52 on the microprobe senses analyte presence and provides a sensed signal in response to the analyte presence. -
Base 58B extends in the Y dimension and Z dimension generally normal to the X dimension ofmicroprobe portion 56, and forms the bottom of the assembly.Cover 58C is installed overbody portion 54 of the substrate and engagesbase 58B for sealing the assembly. Stabilizingsurface 58S forms an in vivo face ofbase member 58B and disposed toward the subject when emplaced. The stabilizing surface engages the subject to maintain the penetration orientation of the microprobe portion into the subject. The stabilizing surface may haveadhesive film 58A thereon for retaining the assembly at the emplacement site for the duration of the monitoring period. The adhesive holds the assembly onto the skin preventing displacement along the X dimension. The adhesive prevents the probe from working loose during the monitoring period as the subject moves around. In addition, the adhesive prevents lateral displacement of the assembly along the Y and Z dimensions. This lateral retention minimizes shear forces along the length ofprobe 56 preventing the probe from snapping off during subject activity. As the assembly is emplaced, the stabilizing surface engages the subject's skin and limits the penetration of the microprobe portion. -
Signal transmitter 54T provides a transmitted analyte signal to a meter (not shown). Analog todigital converter 54A converts the sensed signal from the biosensor into a digital transmitted signal. A suitable power source such asbattery 54B may be provided to activate the signal transmitter and the converter. The transmitter, converter and battery may be deposited into the silicon ofbody portion 54. - Pain Perception Testing
-
FIG. 6 shows the averaged response from 62 patients in a clinical trial to determine the relative pain perceived from punctures with a silicone microprobe in the arm compared with punctures in the arm and finger with conventional metal lancets. As can be seen from theFIG. 6 , the punctures from the silicon microprobe were found to be noticeably less painful than those from the lancet, with the more painful of the two lancet tests being the finger stick, as expected. The test subjects repeatedly commented that the microprobe puncture was virtually painless and far more comfortable than the finger stick with the lancet. - It will be apparent to those skilled in the art that the objects of this invention have been achieved as described hereinbefore by providing a microprobe device with integrated analyte sensing capability, which accesses the blood and determines the analyte concentration in one simple step. The device is fabricated from a silicon wafer for compatibility with IC fabrication and MEMS technologies. Because the strength of the single-crystal structure of the starting silicon wafer is retained in the finished device, the microprobe can penetrate skin reliably without breaking. The small length, width, and thickness dimensions of the probe introduce minimal tissue displacement, rendering probe insertion and retraction essentially painless. Minimal penetration effort is required which also minimizes mechanical probe failure. The device may function in vivo or ex vivo with one or multiple biosensors, and has both single measurement and continuous monitoring applications.
- Various changes may be made in the structure and embodiments shown herein without departing from the concept of the invention. For example, the various types of biosensors may be employed in either the ex vivo embodiment (
FIG. 2A ) or the in vivo embodiment (FIG. 1A ). The stress reducing microfillet shown in the optical biosensor embodiment (FIG. 4A ) may be employed in other types of biosensors. The cavity housing (FIG. 2B ) and hole housing (FIG. 4B ) of the biosensor may be employed in other embodiments. Further, features of embodiments shown in various figures may be employed in combination with embodiments shown in other figures. Therefore, the scope of the invention is to be determined by the terminology of the following claims and the legal equivalents thereof.
Claims (25)
1. A microprobe device to provide a signal to an analyte meter indicating analyte presence in an analyte-containing bodily fluid of a subject comprising:
a single substrate having a body portion and a microprobe portion, the body portion and microprobe portion integrally formed together on the substrate;
an open fluid channel formed in the substrate, the channel positioned longitudinally along a surface of the substrate from a penetration end of the microprobe portion to the body portion of the substrate;
a cavity extending into the body portion of the substrate; and
a biosensor integrated with a surface of the substrate, the biosensor located over the cavity and configured to sense the analyte presence and provide a signal in response thereto.
2. The device of claim 1 , wherein a portion of the fluid channel that passes into the subject during penetration is uncovered.
3. The device of claim 2 , wherein the open fluid channel is configured to transport the analyte-containing fluid to the biosensor by capillary action even in the absence of a cover over any portion of the fluid channel that passes into the subject during penetration.
4. The device of claim 5 , wherein the cavity is in fluid contact with the open fluid channel.
5. The device of claim 3 , wherein the open fluid channel has a cross-section of any shape etched into the substrate of the microprobe portion.
6. The device of claim 4 , wherein the cavity has at least one cross-sectional dimension that is greater than that of the channel.
7. The device of claim 1 , wherein the biosensor is coupled with the cavity, the cavity located in at least part of the open fluid channel.
8. The device of claim 7 , wherein the biosensor is located in the cavity.
9. The device of claim 1 , wherein the substrate is a silicon substrate.
10. A microprobe device to provide a signal to an analyte meter indicating analyte presence in an analyte-containing bodily fluid of a subject comprising:
a single substrate having a body portion and a microprobe portion, the body portion and microprobe portion integrally formed together on the substrate;
a biosensor integrated with the substrate, the biosensor located on the body portion of the microprobe and configured to sense the analyte presence and provide a signal in response thereto; and
an open fluid channel formed in the substrate, the channel positioned longitudinally along a surface of the substrate from a penetration end of the microprobe portion to the body portion of the substrate.
11. The device of claim 10 , wherein a portion of the fluid channel that passes into the subject during penetration is uncovered.
12. The device of claim 11 , wherein the open fluid channel is to transport the analyte-containing fluid to the biosensor by capillary action even in the absence of a cover over any portion of the fluid channel that passes into the subject during penetration.
13. The device of claim 12 , wherein the biosensor is uncovered.
14. The device of claim 10 , further comprising a cavity extending into the substrate, the cavity located in at least part of the open fluid channel.
15. The device of claim 14 , wherein the cavity is in fluid contact with the open fluid channel.
16. The device of claim 15 , wherein the biosensor is coupled with the cavity.
17. The device of claim 10 , wherein the biosensor is positioned over the open fluid channel.
18. The device of claim 10 , wherein the substrate is a silicon substrate.
19. The device of claim 10 , wherein the microprobe portion is width tapered along an entire length dimension, wherein the rate of decrease in width at a penetration end of the microprobe portion of the substrate is greater than the rate of decrease in width at a body end of the microprobe portion of the substrate.
20. The device of claim 19 , wherein the surface is a planar surface.
21. A microprobe device to provide a signal to an analyte meter indicating analyte presence in an analyte-containing bodily fluid of a subject comprising:
a single silicon substrate having a body portion and a microprobe portion, the body portion and microprobe portion integrally formed together on the substrate;
an open fluid channel formed in the substrate, the channel positioned longitudinally along a surface of the substrate from a penetration end of the microprobe portion to the body portion of the substrate;
a cavity extending into the body portion of the substrate; and
a biosensor integrated with a surface of the substrate, the biosensor located over the cavity and configured to sense the analyte presence and provide a signal in response thereto.
22. The device of claim 21 , wherein a portion of the fluid channel that passes into the subject during penetration is uncovered.
23. The device of claim 22 , wherein the open fluid channel is configured to transport the analyte-containing fluid to the biosensor by capillary action even in the absence of a cover over any portion of the fluid channel that passes into the subject during penetration.
24. The device of claim 23 , wherein the cavity is in fluid contact with the open fluid channel.
25. The device of claim 24 , wherein the open fluid channel has a cross-section of any shape etched into the substrate of the microprobe portion.
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US11/980,853 Abandoned US20080058624A1 (en) | 2001-03-26 | 2007-10-30 | Silicon microprobe with integrated biosensor |
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Also Published As
Publication number | Publication date |
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US7310543B2 (en) | 2007-12-18 |
EP1379165A2 (en) | 2004-01-14 |
WO2002077638A2 (en) | 2002-10-03 |
WO2002077638A3 (en) | 2003-02-27 |
US20020137998A1 (en) | 2002-09-26 |
AU2002255910A1 (en) | 2002-10-08 |
US20080097171A1 (en) | 2008-04-24 |
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