US20110138610A1 - Apparatus for generating electrical energy and method for manufacturing the same - Google Patents
Apparatus for generating electrical energy and method for manufacturing the same Download PDFInfo
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- US20110138610A1 US20110138610A1 US13/034,041 US201113034041A US2011138610A1 US 20110138610 A1 US20110138610 A1 US 20110138610A1 US 201113034041 A US201113034041 A US 201113034041A US 2011138610 A1 US2011138610 A1 US 2011138610A1
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Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/22—Methods relating to manufacturing, e.g. assembling, calibration
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/092—Forming composite materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/81—Electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/20—Carbon compounds, e.g. carbon nanotubes or fullerenes
- H10K85/221—Carbon nanotubes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49009—Dynamoelectric machine
Definitions
- Exemplary embodiments relate to an apparatus for generating electrical energy and a method for manufacturing the same, more particularly to an apparatus for generating electrical energy using a Schottky contact formed between a nanowire exhibiting a piezoelectric effect and an electrode placed on the nanowire.
- a touch sensor detects the stress applied to devices, and may be used in a touchscreen or other applications. When a user touches the screen with a finger or other body part, the touch sensor detects the stress applied to the screen and registers the applied stress as an input signal.
- a voltage may be applied to one or more edge portions of a screen.
- the stress applied to the screen from the finger or body part may be detected as on a resistance change or voltage drop.
- an apparatus for generating electrical energy which generates electrical energy in response to applied stress.
- a method for manufacturing the apparatus for generating electrical energy there is provided a method for manufacturing the apparatus for generating electrical energy.
- an apparatus for generating electrical energy including a first electrode, a second electrode and a nanowire.
- the second electrode may have a concave portion and a convex portion.
- the nanowire is formed on the first electrode and is positioned between the first electrode and the second electrode.
- the first electrode and the nanowire are formed of different materials.
- the apparatus for generating electrical energy is manufactured by forming a nanowire on a first electrode layer disposed on a substrate, the first electrode layer and the nanowire being formed different materials; preparing a second electrode layer having a concave portion and a convex portion facing the first electrode layer, the second electrode layer being spaced apart from the first electrode layer; with the nanowire of the first electrode in proximity to the second electrode layer; and connecting the first electrode layer with the second electrode layer using a conductor.
- FIG. 1 is a perspective view showing an exemplary embodiment of an apparatus for generating electrical energy according to the present invention
- FIG. 2 is a front view of the apparatus for generating electrical energy as illustrated in FIG. 1 ;
- FIG. 3 is a front view showing the apparatus for generating electrical energy illustrated in FIG. 1 where a stress is applied to the apparatus;
- FIG. 4 is a perspective view showing an exemplary embodiment of an apparatus for generating electrical energy according to the present invention
- FIG. 5 is an exploded view of the apparatus for generating electrical energy illustrated in FIG. 4 ;
- FIG. 6 is a perspective view showing an exemplary embodiment of an apparatus for generating electrical energy according to the present invention.
- FIGS. 7 a through 7 f are cross-sectional views showing an exemplary embodiment illustrating a process of preparing a first electrode and a nanowire of an apparatus for generating electrical energy according to the present invention
- FIGS. 8 a through 8 g are cross-sectional views showing an exemplary embodiment illustrating a process of preparing a second electrode of an apparatus for generating electrical energy according to the present invention.
- FIGS. 9 a and 9 b are cross-sectional views showing an exemplary embodiment illustrating a process of bringing the nanowire of the first electrode into proximity to a second electrode to manufacture an apparatus for generating electrical energy according to the present invention.
- FIG. 1 is a perspective view of an apparatus for generating electrical energy according to an exemplary embodiment
- FIG. 2 is a front view of the apparatus for generating electrical energy illustrated in FIG. 1 .
- the apparatus for generating electrical energy comprises a first electrode 10 , a second electrode 20 and a nanowire 30 disposed between the first electrode 10 and the second electrode 20 .
- the first electrode 10 may be a lower electrode which supports the nanowire 30 .
- the first electrode 10 may be formed on a substrate 1 made of glass, silicon (Si), polymer, sapphire, gallium nitride (GaN) or silicon carbide (SiC).
- the first electrode 10 may be a metal film or conductive ceramic formed on the substrate 1 .
- the second electrode 20 may be spaced apart from the first electrode 10 , and is electrically connected to the first electrode 10 by a conductor 40 .
- the second electrode 20 is formed on a substrate 2 made of glass, silicon (Si), polymer, sapphire, gallium nitride (GaN) or silicon carbide (SiC).
- the second electrode 20 has one or more concave portions A 1 , and one or more convex portions A 2 , and is formed in a ripple shape facing the first electrode 10 .
- At least one of the first electrode 10 and the second electrode 20 is formed of a flexible electrode which can be deformed by an applied stress.
- the first electrode 10 and the second electrode 20 may be formed of a transparent electrode.
- the first electrode 10 and the second electrode 20 may be formed of at least one of ITO, carbon nanotubes (“CNT”), a conductive polymer, a nanofiber, a nanocomposite, gold-palladium alloy (AuPd), gold (Au), palladium (Pd), platinum (Pt) and ruthenium (Ru).
- the substrate 1 on which the first electrode 10 is disposed and the substrate 2 on which the second electrode 20 is disposed may be formed of a flexible material which can be deformed by an applied stress.
- the substrates 1 , 2 may be formed of a transparent material such as but not limited to glass.
- the nanowire 30 is disposed between the first electrode 10 and the second electrode 20 . In another exemplary embodiment, the nanowire 30 extends in a direction D 1 perpendicular to the first electrode 10 and the second electrode 20 . In another exemplary embodiment, the nanowire 30 is aligned with the concave portion A 1 of the second electrode 20 .
- the number of the nanowires 30 illustrated in FIGS. 1 and 2 is non-limiting. The number of the nanowires 30 may be varied depending on the size and application of the apparatus.
- the nanowire 30 is formed on the first electrode 10 . It may have several advantages to form the nanowire 30 on the first electrode 10 . For example, a conductivity of the nanowire energy generating system may be improved since the nanowire 30 is formed on the first electrode 10 which is a conductor. Further, it may become easier to control the growth of the nanowire 30 . For example, the nanowire 30 may be grown vertically on the first electrode 10 . Furthermore, a uniformity of the shapes or longitudinal directions of the nanowires 30 may be improved.
- the distance between the first electrode 10 and the second electrode 20 is changed resulting in the nanowire 30 between the first electrode 10 and the second electrode 20 being deformed.
- the nanowire 30 at the corresponding location may become bent in the lengthwise direction D 1 .
- the bent nanowire 30 exhibits a piezoelectric effect which results in each portion of the nanowire 30 having different electric potentials depending on the compressive stress or tensile stress applied thereto.
- the nanowire 30 may be made of a material exhibiting a piezoelectric effect, such as ZnO, for example, but is not limited thereto.
- ZnO a material exhibiting a piezoelectric effect
- the nanowire 30 made of ZnO is bent, resulting in each portion of the nanowire 30 having a different electric potentials due to the asymmetric crystal structure of the ZnO, resulting in an electrical energy being generated. This will be described in further detail when referring to FIG. 3 .
- the nanowire 30 may be made of other materials which exhibit a piezoelectric effect when a stress is applied.
- the nanowires 30 may be made of lead zirconate titanate (“PZT”) or barium titanate (BaTiO 3 ), for example, but is not limited thereto.
- FIG. 3 is a front view showing the apparatus for generating electrical energy illustrated in FIG. 1 where a stress is applied to the apparatus.
- a portion B of the substrate 2 and the second electrode 20 may be bent downward, as illustrated.
- the distance between the first electrode 10 and the second electrode 20 is decreased, and the nanowire 30 positioned between the first electrode 10 and the second electrode 20 may be bent with respect to the lengthwise direction of the nanowire 30 .
- the bent nanowire 30 exhibits a piezoelectric effect.
- the nanowire 30 is made of ZnO, a portion A 3 of the nanowire 30 corresponding to where a compressive stress is applied has a negative electric potential, and a portion A 4 of the nanowire 30 corresponding to where a tensile stress is applied, opposite the portion A 3 of the nanowire, has a positive electric potential.
- the nanowire 30 is aligned to correspond and be positioned adjacent to the concave portion A 1 of the second electrode 20 . Accordingly, when the distance between the first electrode 10 and the second electrode 20 is decreased, the nanowire 30 is bent and contacts the second electrode 20 .
- the portion A 3 of the nanowire 30 where the compressive stress is applied has a negative electric potential and the second electrode 20 does not have an electric potential. Accordingly, the portion A 3 where the compressive stress is applied and the second electrode 20 forms a forward-biased Schottky diode, and an electric current flows from the second electrode 20 toward the nanowire 30 . The current flows through a closed loop formed by the second electrode 20 , the nanowire 30 , the first electrode 10 and the conductor 40 .
- the portion A 4 of the nanowire 30 corresponding to where the tensile stress is applied has a positive electric potential. Accordingly, the portion A 4 of the nanowire 30 where the tensile stress is applied and the second electrode 20 forms a reverse-biased Schottky diode, and an electric current does not flow.
- a stress is applied to the second electrode 20 and the distance between the first electrode 10 and the second electrode 20 is decreased, an electric current flows due to a Schottky contact between the portion of the nanowire 30 where a compressive stress is applied and the second electrode 20 . Accordingly, it is possible to generate an electrical current in response to the applied stress.
- a stress is applied to the second substrate 2 and the second electrode 20 is bent.
- the same effect is achieved if a stress is applied to the first electrode 10 and the second electrode 20 .
- the same effect is also achieved by pressing a portion of the first electrode 10 or the second electrode 20 , or by bending the first electrode 10 or the second electrode 20 .
- the concave portions A 1 and the convex portions A 2 are formed only on the second electrode 20 .
- FIG. 4 is a perspective view of an apparatus for generating electrical energy according to another embodiment
- FIG. 5 is an exploded view of the apparatus for generating electrical energy illustrated in FIG. 4 .
- FIGS. 4 and 5 the construction and function of substrates 1 , 2 and a nanowire 30 may be the same as those described referring to FIGS. 1 through 3 . Therefore, a detailed description thereof will be omitted.
- the first electrode 11 and the second electrode 21 may be a plurality of first and second electrodes.
- the plurality of the first electrodes 11 extend along a direction D 2 on the substrate 1 , and are disposed so as to be spaced apart from one another.
- the plurality of the second electrodes 21 extend along a direction D 3 perpendicular to the direction D 2 on the substrate 2 , and are disposed so as to be spaced apart from one another.
- the plurality of the first electrodes 11 and the plurality of the second electrodes 21 extend in directions perpendicular to each other, and form a matrix type array.
- the number of the first electrodes 11 and the second electrodes 21 illustrated in FIGS. 4 and 5 is not limiting, and the number of the first electrodes 11 and the second electrodes 21 may be varied depending on the size and application of the apparatus.
- the apparatus for generating electrical energy it is possible to detect the electrode where an electric current flows to the plurality of the first electrodes 11 and the electrode where an electric current flows to the plurality of the second electrodes 21 . Therefore, it is possible to detect the position where a stress is applied. Accordingly, the apparatus for generating electrical energy may be applied in, but not limited to, a touch sensor to detect the position where a stress is applied.
- the nanowire 30 is disposed on the plurality of first electrodes 11 .
- the nanowire 30 is disposed only on the positions where the first electrodes 11 and the second electrodes 21 cross each other.
- the second electrodes 21 may extend in the direction perpendicular to the first electrodes 11 . In another exemplary embodiment, the second electrodes 21 may extend along a direction inclined to the length direction D 2 of the first electrodes 11 .
- FIG. 6 is a cross-sectional view of an apparatus for generating electrical energy according to another embodiment.
- substrates 1 , 2 and a nanowire 30 may be the same as those described referring to FIGS. 1 through 3 . Therefore, a detailed description thereof will be omitted.
- an elastic material 50 is disposed between the first electrode 10 and the second electrode 20 .
- the elastic material 50 may prevent the nanowire 30 from being broken when the apparatus for generating electrical energy is pushed or bent. Accordingly, a durability and reliability of the apparatus for generating electrical energy may be improved.
- the elastic material 50 has a relatively high elasticity.
- the elastic material 50 is formed of a material flexible enough to allow the nanowire 30 to be bent.
- the elastic material 50 may be formed of at least one of silicone, polydimethylsiloxane (PDMS), and urethane.
- the elastic material 50 may be formed of other suitable material.
- a first distance L 1 between the first electrode 10 and a top surface of the elastic material 50 is not greater than a second distance L 2 between the first electrode 10 and the top surface of the nanowire 30 . Accordingly, an end of the nanowire 30 may be exposed, so that the nanowire 30 may contact the second electrode 20 when the nanowire 30 is bent.
- the apparatuses for generating electrical energy described herein are used in an electronic device for sensing a stress, for example but not limited to, a touch sensor.
- the apparatuses for generating electrical energy described herein are used in a display device, such as but not limited to a touch panel, a touchscreen, etc. or a robot skin.
- FIGS. 7 a through 7 f are cross-sectional views illustrating an exemplary embodiment of a process of preparing a first electrode and a nanowire of an apparatus for generating electrical energy.
- a first electrode layer 100 is disposed on a substrate 1 .
- the substrate 1 may be a substrate made of glass, silicon or polymer.
- the first electrode layer 100 may be made of a flexible conductive material which can be deformed by an applied stress.
- the first electrode layer 100 may be made of a transparent material.
- the first electrode layer 100 may be formed of at least one of ITO, CNT, a conductive polymer, nanofibers and a nanocomposite.
- the first electrode layer 100 may also be formed of at least one of AuPd alloy, Au, Pd, Pt and Ru.
- the first electrode layer 100 may serve as a lower electrode which supports the nanowire which will be described later.
- a nanomaterial layer 300 is disposed on the first electrode layer 100 .
- the nanomaterial layer 300 may be disposed having a small thickness on the first electrode layer 100 by spin coating or other methods.
- the nanomaterial layer 300 may have a thickness of 3 nm to 50 nm.
- the nanomaterial layer 300 may be formed of zinc acetate.
- the substrate 1 on which the nanomaterial layer 300 ( FIG. 7 b ) has been formed is heated to form one or more nanonuclei 301 .
- the nanonucleus 301 is formed by heating the substrate 1 on which the nanomaterial layer has been formed at a temperature of 100° C. to 200° C. followed by drying.
- the substrate 1 on which the nanonucleus 301 has been formed is immersed in a solution of a nanomaterial so as to grow a nanowire 30 from each nanonucleus 301 .
- an elastic material layer 500 is disposed on the first electrode layer 100 on which the nanowire 30 has been formed.
- the elastic material layer 500 may prevent the nanowire 30 from being broken.
- the elastic material layer 500 may be formed of a material having a relatively high elasticity.
- the elastic material layer 500 may be formed of a material flexible enough to allow the nanowire 30 to be bent.
- the elastic material layer 500 may be formed of at least one of silicone, PDMS, and urethane.
- the elastic material layer 500 may be formed of other suitable material.
- the elastic material layer 500 is disposed on the first electrode layer 100 using spin coating, dip coating, nozzle printing, or other suitable methods.
- the elastic material layer 500 may be disposed using nozzle printing by spraying a material on the first electrode layer 100 with a fine nozzle and drying the sprayed material.
- a first distance L 1 between the first electrode layer 100 and a top surface of the nanowire 30 is greater than a second distance L 2 between the first electrode layer 100 and the top surface of the nanowire 30 .
- the first distance L 1 may be equal to or less than the second distance L 2 .
- the elastic material layer 500 may be removed so that the first distance L 1 is equal to or less than the second distance L 2 .
- the elastic material layer 500 may be partially removed by etching methods using ultraviolet (UV) radiation or oxygen (O 2 ) plasma, or other suitable methods.
- the process for removing a portion of the elastic material layer 500 may be omitted when the elastic material layer 500 is formed so that the first distance L 1 is equal to or less than the second distance L 2 .
- FIGS. 8 a through 8 g are cross-sectional views illustrating an exemplary embodiment of a process of preparing a second electrode of an apparatus for generating electrical energy.
- a metal layer 200 is disposed on a template substrate 3 .
- the substrate 3 may be a silicon wafer, and the metal layer 200 may be formed of aluminum (Al).
- the metal layer 200 is anodized to form an anodic film 201 .
- the anodizing is an electrolytic process in an electrolytic solution, with the metal layer 200 as an anode. Through the anodizing, the thickness of the natural oxide layer formed on the metal layer 200 increases as the constituent material of the metal layer 200 dissolves into the electrolyte.
- the anodic film 201 which is formed as a result of this process is illustrated in FIG. 8 b.
- the anodic film 201 formed by the anodizing process is removed.
- the anodic film 201 may be removed, for example, but not limited to, by wet or dry etching.
- the surface of the template substrate 3 has a ripple-shaped structure with concave portions and convex portions.
- a second electrode layer 202 is formed on the template substrate 3 .
- the second electrode layer 202 may serve as an upper electrode which contacts the nanowires and allows for the flow of electrical current.
- the second electrode layer 202 is formed of at least one of AuPd alloy, Au, Pt, Pd and Ru. Further, the second electrode layer 202 may be formed by ion sputtering.
- the second electrode layer 202 may be formed of a flexible conductive material capable of being deformed by an applied stress. Further, the second electrode layer 202 may be made of a transparent material.
- the second electrode layer 202 may be formed of at least one of ITO, CNT, a conductive polymer, nanofibers and a nanocomposite.
- an adhesion layer 203 is disposed on the second electrode layer 202 , as illustrated in FIG. 8 e .
- the adhesion layer 203 may serve to improve adhesion between the second electrode layer 202 and a carrier substrate which is formed later in the process.
- the adhesion layer 203 may be formed of nickel (Ni). Further, the adhesion layer 203 is formed by electroplating.
- a carrier substrate 2 is attached on the adhesion layer 203 .
- the carrier substrate 2 may be attached on the second electrode layer 202 , without the adhesion layer 203 .
- the carrier substrate 2 may be formed of a polymer.
- the second electrode layer 202 , the adhesion layer 203 and the carrier substrate 2 is separated from the template substrate 3 .
- the separated second electrode layer 202 has concave portions A 1 and convex portions A 2 because of the shape of the template substrate 3 .
- the second electrode which is connected to the first electrode and the nanowire may be formed as described above.
- FIGS. 9 a and 9 b are cross-sectional views illustrating an exemplary embodiment of a process of bringing into proximity a nanowire to a second electrode to manufacture an apparatus for generating electrical energy.
- the nanowire 30 is brought into proximity to the second electrode layer 202 .
- the nanowire 30 may either contact the second electrode layer 202 or be spaced apart from the second electrode layer 202 with a predetermined spacing.
- the nanowire 30 includes a plurality of nanowires, and each of the nanowires 30 may be positioned in proximity to the concave portions Al of the second electrode layer 202 .
- the first electrode layer 100 and the second electrode layer 202 are connected by the conductor 40 in order to complete the apparatus for generating electrical energy.
- an elastic material layer 500 ( FIG. 7 e ) is disposed between the first electrode layer 100 and the second electrode layer 200 .
Abstract
An apparatus for generating electrical energy including a first electrode, a second electrode and one or more nanowires, and a method for manufacturing the apparatus for generating electrical energy. The second electrode may have a concave portion and a convex portion. The first electrode and the nanowire are formed of different materials. The nanowire is formed on the first electrode and is positioned between the first electrode and the second electrode. Because the nanowire is formed on the first electrode, the nanowire may be grown vertically and the uniformity and conductivity of the nanowires may be improved. When a stress is applied to the first electrode or the second electrode, the nanowire is deformed and an electric current is generated from the nanowire due to a piezoelectric effect of the nanowire and a Schottky contact between the nanowire and the electrode which makes contact with the nanowire. Accordingly, when the apparatus for generating electrical energy is bent or pressed in part, electrical energy is generated in response to the applied stress.
Description
- This application is a divisional application of U.S. patent application Ser. No. 12/350,584 filed on Jan. 8, 2009, which claims priority to Korean Patent Application No. 10-2008-77595 filed on Aug. 7, 2008, and Korean Patent Application No. 10-2008-123612 filed on Dec. 5, 2008, and all the benefits accruing therefrom under 35 U.S.C. §119, the contents of which in its entirety are herein incorporated by reference.
- 1. Field
- Exemplary embodiments relate to an apparatus for generating electrical energy and a method for manufacturing the same, more particularly to an apparatus for generating electrical energy using a Schottky contact formed between a nanowire exhibiting a piezoelectric effect and an electrode placed on the nanowire.
- 2. Description of the Related Art
- A touch sensor detects the stress applied to devices, and may be used in a touchscreen or other applications. When a user touches the screen with a finger or other body part, the touch sensor detects the stress applied to the screen and registers the applied stress as an input signal.
- In such a touch sensor, a voltage may be applied to one or more edge portions of a screen. When a user's finger or body part contacts the screen, the stress applied to the screen from the finger or body part may be detected as on a resistance change or voltage drop.
- In one exemplary embodiment there is provided an apparatus for generating electrical energy which generates electrical energy in response to applied stress. In another exemplary embodiment, there is provided a method for manufacturing the apparatus for generating electrical energy.
- In another exemplary embodiment, there is provided an apparatus for generating electrical energy including a first electrode, a second electrode and a nanowire. The second electrode may have a concave portion and a convex portion. The nanowire is formed on the first electrode and is positioned between the first electrode and the second electrode. The first electrode and the nanowire are formed of different materials. When a stress is applied to the first electrode or the second electrode, the nanowire is deformed, and an electrical current is generated from the nanowire owing to the piezoelectric effect of the nanowire and a Schottky contact that is formed between the nanowire and the electrode which makes contact with the nanowire.
- In another exemplary embodiment, there is provided a method for manufacturing the apparatus for generating electrical energy. In another exemplary embodiment, the apparatus for generating electrical energy is manufactured by forming a nanowire on a first electrode layer disposed on a substrate, the first electrode layer and the nanowire being formed different materials; preparing a second electrode layer having a concave portion and a convex portion facing the first electrode layer, the second electrode layer being spaced apart from the first electrode layer; with the nanowire of the first electrode in proximity to the second electrode layer; and connecting the first electrode layer with the second electrode layer using a conductor.
- The above and other aspects, features and other advantages of the exemplary embodiments will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings, in which:
-
FIG. 1 is a perspective view showing an exemplary embodiment of an apparatus for generating electrical energy according to the present invention; -
FIG. 2 is a front view of the apparatus for generating electrical energy as illustrated inFIG. 1 ; -
FIG. 3 is a front view showing the apparatus for generating electrical energy illustrated inFIG. 1 where a stress is applied to the apparatus; -
FIG. 4 is a perspective view showing an exemplary embodiment of an apparatus for generating electrical energy according to the present invention; -
FIG. 5 is an exploded view of the apparatus for generating electrical energy illustrated inFIG. 4 ; -
FIG. 6 is a perspective view showing an exemplary embodiment of an apparatus for generating electrical energy according to the present invention; -
FIGS. 7 a through 7 f are cross-sectional views showing an exemplary embodiment illustrating a process of preparing a first electrode and a nanowire of an apparatus for generating electrical energy according to the present invention; -
FIGS. 8 a through 8 g are cross-sectional views showing an exemplary embodiment illustrating a process of preparing a second electrode of an apparatus for generating electrical energy according to the present invention; and -
FIGS. 9 a and 9 b are cross-sectional views showing an exemplary embodiment illustrating a process of bringing the nanowire of the first electrode into proximity to a second electrode to manufacture an apparatus for generating electrical energy according to the present invention. - Exemplary embodiments now will be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments are shown. The invention may, however, be embodied in many different forms and should not be construed as limited to the exemplary embodiments set forth herein. Rather, these exemplary embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the description, details of well-known features and techniques may be omitted to avoid unnecessarily obscuring the presented embodiments.
- The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms “a”, “an” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. Furthermore, the use of the terms a, an, etc. do not denote a limitation of quantity, but rather denote the presence of at least one of the referenced item. The use of the terms “first”, “second”, and the like do not imply any particular order, but are included to identify individual elements. Moreover, the use of the terms first, second, etc. do not denote any order or importance, but rather the terms first, second, etc. are used to distinguished one element from another. It will be further understood that the terms “comprises” and/or “comprising”, or “includes” and/or “including” when used in this specification, specify the presence of stated features, regions, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, regions, integers, steps, operations, elements, components, and/or groups thereof.
- Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and the present disclosure, and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
- In the drawings, like reference numerals in the drawings denote like elements. The shape, size and regions, and the like, of the drawing may be exaggerated for clarity.
-
FIG. 1 is a perspective view of an apparatus for generating electrical energy according to an exemplary embodiment, andFIG. 2 is a front view of the apparatus for generating electrical energy illustrated inFIG. 1 . - Referring to
FIGS. 1 and 2 , in one exemplary embodiment the apparatus for generating electrical energy comprises afirst electrode 10, asecond electrode 20 and ananowire 30 disposed between thefirst electrode 10 and thesecond electrode 20. - The
first electrode 10 may be a lower electrode which supports thenanowire 30. In another exemplary embodiment, thefirst electrode 10 may be formed on asubstrate 1 made of glass, silicon (Si), polymer, sapphire, gallium nitride (GaN) or silicon carbide (SiC). In another exemplary embodiment, thefirst electrode 10 may be a metal film or conductive ceramic formed on thesubstrate 1. - In another exemplary embodiment, the
second electrode 20 may be spaced apart from thefirst electrode 10, and is electrically connected to thefirst electrode 10 by aconductor 40. In another exemplary embodiment, thesecond electrode 20 is formed on asubstrate 2 made of glass, silicon (Si), polymer, sapphire, gallium nitride (GaN) or silicon carbide (SiC). - In another exemplary embodiment, the
second electrode 20 has one or more concave portions A1, and one or more convex portions A2, and is formed in a ripple shape facing thefirst electrode 10. - In another exemplary embodiment, at least one of the
first electrode 10 and thesecond electrode 20 is formed of a flexible electrode which can be deformed by an applied stress. In another exemplary embodiment, thefirst electrode 10 and thesecond electrode 20 may be formed of a transparent electrode. - In another exemplary embodiment, the
first electrode 10 and thesecond electrode 20 may be formed of at least one of ITO, carbon nanotubes (“CNT”), a conductive polymer, a nanofiber, a nanocomposite, gold-palladium alloy (AuPd), gold (Au), palladium (Pd), platinum (Pt) and ruthenium (Ru). - In another exemplary embodiment, the
substrate 1 on which thefirst electrode 10 is disposed and thesubstrate 2 on which thesecond electrode 20 is disposed may be formed of a flexible material which can be deformed by an applied stress. In another exemplary embodiment, thesubstrates - In another exemplary embodiment, the
nanowire 30 is disposed between thefirst electrode 10 and thesecond electrode 20. In another exemplary embodiment, thenanowire 30 extends in a direction D1 perpendicular to thefirst electrode 10 and thesecond electrode 20. In another exemplary embodiment, thenanowire 30 is aligned with the concave portion A1 of thesecond electrode 20. - The number of the
nanowires 30 illustrated inFIGS. 1 and 2 is non-limiting. The number of thenanowires 30 may be varied depending on the size and application of the apparatus. - In another exemplary embodiment, the
nanowire 30 is formed on thefirst electrode 10. It may have several advantages to form thenanowire 30 on thefirst electrode 10. For example, a conductivity of the nanowire energy generating system may be improved since thenanowire 30 is formed on thefirst electrode 10 which is a conductor. Further, it may become easier to control the growth of thenanowire 30. For example, thenanowire 30 may be grown vertically on thefirst electrode 10. Furthermore, a uniformity of the shapes or longitudinal directions of thenanowires 30 may be improved. - In another exemplary embodiment, when a stress is applied to the apparatus for generating electrical energy or a part thereof, the distance between the
first electrode 10 and thesecond electrode 20 is changed resulting in thenanowire 30 between thefirst electrode 10 and thesecond electrode 20 being deformed. - In another exemplary embodiment, if the distance between the
first electrode 10 and thesecond electrode 20 is decreased, thenanowire 30 at the corresponding location may become bent in the lengthwise direction D1. Thebent nanowire 30 exhibits a piezoelectric effect which results in each portion of thenanowire 30 having different electric potentials depending on the compressive stress or tensile stress applied thereto. - In another exemplary embodiment, the
nanowire 30 may be made of a material exhibiting a piezoelectric effect, such as ZnO, for example, but is not limited thereto. Upon the application of a stress thenanowire 30 made of ZnO is bent, resulting in each portion of thenanowire 30 having a different electric potentials due to the asymmetric crystal structure of the ZnO, resulting in an electrical energy being generated. This will be described in further detail when referring toFIG. 3 . - In another exemplary embodiment, the
nanowire 30 may be made of other materials which exhibit a piezoelectric effect when a stress is applied. In another exemplary embodiment, thenanowires 30 may be made of lead zirconate titanate (“PZT”) or barium titanate (BaTiO3), for example, but is not limited thereto. -
FIG. 3 is a front view showing the apparatus for generating electrical energy illustrated inFIG. 1 where a stress is applied to the apparatus. - Referring to
FIG. 3 , in one exemplary embodiment, as a stress is applied on top of thesubstrate 2, a portion B of thesubstrate 2 and thesecond electrode 20 may be bent downward, as illustrated. As a result, the distance between thefirst electrode 10 and thesecond electrode 20 is decreased, and thenanowire 30 positioned between thefirst electrode 10 and thesecond electrode 20 may be bent with respect to the lengthwise direction of thenanowire 30. Thebent nanowire 30 exhibits a piezoelectric effect. In another exemplary embodiment, thenanowire 30 is made of ZnO, a portion A3 of thenanowire 30 corresponding to where a compressive stress is applied has a negative electric potential, and a portion A4 of thenanowire 30 corresponding to where a tensile stress is applied, opposite the portion A3 of the nanowire, has a positive electric potential. - In another exemplary embodiment, the
nanowire 30 is aligned to correspond and be positioned adjacent to the concave portion A1 of thesecond electrode 20. Accordingly, when the distance between thefirst electrode 10 and thesecond electrode 20 is decreased, thenanowire 30 is bent and contacts thesecond electrode 20. - In another exemplary embodiment, the portion A3 of the
nanowire 30 where the compressive stress is applied has a negative electric potential and thesecond electrode 20 does not have an electric potential. Accordingly, the portion A3 where the compressive stress is applied and thesecond electrode 20 forms a forward-biased Schottky diode, and an electric current flows from thesecond electrode 20 toward thenanowire 30. The current flows through a closed loop formed by thesecond electrode 20, thenanowire 30, thefirst electrode 10 and theconductor 40. - In another exemplary embodiment, the portion A4 of the
nanowire 30 corresponding to where the tensile stress is applied has a positive electric potential. Accordingly, the portion A4 of thenanowire 30 where the tensile stress is applied and thesecond electrode 20 forms a reverse-biased Schottky diode, and an electric current does not flow. - In another exemplary embodiment, a stress is applied to the
second electrode 20 and the distance between thefirst electrode 10 and thesecond electrode 20 is decreased, an electric current flows due to a Schottky contact between the portion of thenanowire 30 where a compressive stress is applied and thesecond electrode 20. Accordingly, it is possible to generate an electrical current in response to the applied stress. - In another exemplary embodiment, illustrated in
FIG. 3 , a stress is applied to thesecond substrate 2 and thesecond electrode 20 is bent. The same effect is achieved if a stress is applied to thefirst electrode 10 and thesecond electrode 20. The same effect is also achieved by pressing a portion of thefirst electrode 10 or thesecond electrode 20, or by bending thefirst electrode 10 or thesecond electrode 20. - Referring to
FIG. 1 throughFIG. 3 , in another exemplary embodiment, the concave portions A1 and the convex portions A2 are formed only on thesecond electrode 20. -
FIG. 4 is a perspective view of an apparatus for generating electrical energy according to another embodiment, andFIG. 5 is an exploded view of the apparatus for generating electrical energy illustrated inFIG. 4 . - In another exemplary embodiment, illustrated in
FIGS. 4 and 5 , the construction and function ofsubstrates nanowire 30 may be the same as those described referring toFIGS. 1 through 3 . Therefore, a detailed description thereof will be omitted. - In one exemplary embodiment, the
first electrode 11 and thesecond electrode 21 may be a plurality of first and second electrodes. The plurality of thefirst electrodes 11 extend along a direction D2 on thesubstrate 1, and are disposed so as to be spaced apart from one another. The plurality of thesecond electrodes 21 extend along a direction D3 perpendicular to the direction D2 on thesubstrate 2, and are disposed so as to be spaced apart from one another. - In another exemplary embodiment, the plurality of the
first electrodes 11 and the plurality of thesecond electrodes 21 extend in directions perpendicular to each other, and form a matrix type array. The number of thefirst electrodes 11 and thesecond electrodes 21 illustrated inFIGS. 4 and 5 is not limiting, and the number of thefirst electrodes 11 and thesecond electrodes 21 may be varied depending on the size and application of the apparatus. - In another exemplary embodiment, using the apparatus for generating electrical energy, it is possible to detect the electrode where an electric current flows to the plurality of the
first electrodes 11 and the electrode where an electric current flows to the plurality of thesecond electrodes 21. Therefore, it is possible to detect the position where a stress is applied. Accordingly, the apparatus for generating electrical energy may be applied in, but not limited to, a touch sensor to detect the position where a stress is applied. - In another exemplary embodiment, illustrated in
FIGS. 4 and 5 , thenanowire 30 is disposed on the plurality offirst electrodes 11. Thenanowire 30 is disposed only on the positions where thefirst electrodes 11 and thesecond electrodes 21 cross each other. - In another exemplary embodiment, the
second electrodes 21 may extend in the direction perpendicular to thefirst electrodes 11. In another exemplary embodiment, thesecond electrodes 21 may extend along a direction inclined to the length direction D2 of thefirst electrodes 11. -
FIG. 6 is a cross-sectional view of an apparatus for generating electrical energy according to another embodiment. - In another exemplary embodiment, illustrated in
FIG. 6 , the construction and function ofsubstrates nanowire 30 may be the same as those described referring toFIGS. 1 through 3 . Therefore, a detailed description thereof will be omitted. - In one exemplary embodiment, an
elastic material 50 is disposed between thefirst electrode 10 and thesecond electrode 20. Theelastic material 50 may prevent thenanowire 30 from being broken when the apparatus for generating electrical energy is pushed or bent. Accordingly, a durability and reliability of the apparatus for generating electrical energy may be improved. - In one exemplary embodiment, the
elastic material 50 has a relatively high elasticity. At the same time, theelastic material 50 is formed of a material flexible enough to allow thenanowire 30 to be bent. For example, theelastic material 50 may be formed of at least one of silicone, polydimethylsiloxane (PDMS), and urethane. Alternatively, theelastic material 50 may be formed of other suitable material. - If the
nanowire 30 is completely covered with theelastic material 50, thenanowire 30 may not contact thesecond electrode 20. Therefore, in another exemplary embodiment, a first distance L1 between thefirst electrode 10 and a top surface of theelastic material 50 is not greater than a second distance L2 between thefirst electrode 10 and the top surface of thenanowire 30. Accordingly, an end of thenanowire 30 may be exposed, so that thenanowire 30 may contact thesecond electrode 20 when thenanowire 30 is bent. - In another exemplary embodiment, the apparatuses for generating electrical energy described herein are used in an electronic device for sensing a stress, for example but not limited to, a touch sensor. In another exemplary embodiment, the apparatuses for generating electrical energy described herein are used in a display device, such as but not limited to a touch panel, a touchscreen, etc. or a robot skin.
-
FIGS. 7 a through 7 f are cross-sectional views illustrating an exemplary embodiment of a process of preparing a first electrode and a nanowire of an apparatus for generating electrical energy. - In an exemplary embodiment, referring to
FIG. 7 a, afirst electrode layer 100 is disposed on asubstrate 1. Thesubstrate 1 may be a substrate made of glass, silicon or polymer. In another exemplary embodiment, thefirst electrode layer 100 may be made of a flexible conductive material which can be deformed by an applied stress. In another exemplary embodiment, thefirst electrode layer 100 may be made of a transparent material. - In another exemplary embodiment, the
first electrode layer 100 may be formed of at least one of ITO, CNT, a conductive polymer, nanofibers and a nanocomposite. Thefirst electrode layer 100 may also be formed of at least one of AuPd alloy, Au, Pd, Pt and Ru. - The
first electrode layer 100 may serve as a lower electrode which supports the nanowire which will be described later. - Next, referring to
FIG. 7 b, ananomaterial layer 300 is disposed on thefirst electrode layer 100. Thenanomaterial layer 300 may be disposed having a small thickness on thefirst electrode layer 100 by spin coating or other methods. As a non-limiting example thenanomaterial layer 300 may have a thickness of 3 nm to 50 nm. According to exemplary embodiments, thenanomaterial layer 300 may be formed of zinc acetate. - Next, referring to
FIG. 7 c, thesubstrate 1 on which the nanomaterial layer 300 (FIG. 7 b) has been formed is heated to form one or more nanonuclei 301. As a non-limiting example thenanonucleus 301 is formed by heating thesubstrate 1 on which the nanomaterial layer has been formed at a temperature of 100° C. to 200° C. followed by drying. - Next, referring to
FIG. 7 d, thesubstrate 1 on which thenanonucleus 301 has been formed is immersed in a solution of a nanomaterial so as to grow ananowire 30 from eachnanonucleus 301. - This results in the formation of the first electrode and the nanowire of the apparatus for generating electrical energy.
- Next, referring to
FIG. 7 e, anelastic material layer 500 is disposed on thefirst electrode layer 100 on which thenanowire 30 has been formed. Theelastic material layer 500 may prevent thenanowire 30 from being broken. Theelastic material layer 500 may be formed of a material having a relatively high elasticity. And theelastic material layer 500 may be formed of a material flexible enough to allow thenanowire 30 to be bent. For example, theelastic material layer 500 may be formed of at least one of silicone, PDMS, and urethane. Alternatively, theelastic material layer 500 may be formed of other suitable material. - In another exemplary embodiment, the
elastic material layer 500 is disposed on thefirst electrode layer 100 using spin coating, dip coating, nozzle printing, or other suitable methods. For example, theelastic material layer 500 may be disposed using nozzle printing by spraying a material on thefirst electrode layer 100 with a fine nozzle and drying the sprayed material. - In another exemplary embodiment, illustrated in
FIG. 7 e, a first distance L1 between thefirst electrode layer 100 and a top surface of thenanowire 30 is greater than a second distance L2 between thefirst electrode layer 100 and the top surface of thenanowire 30. Alternatively, the first distance L1 may be equal to or less than the second distance L2. - In another exemplary embodiment, if the first distance L1 is greater than the second distance L2, a portion of the
elastic material layer 500 is removed to expose an end of thenanowire 30. When the first distance L1 is greater than the second distance L2, thenanowire 30 is completely covered with theelastic material layer 500 and thenanowire 30 may not contact metal. Therefore, a portion of theelastic material layer 500 may be removed so that the first distance L1 is equal to or less than the second distance L2. Theelastic material layer 500 may be partially removed by etching methods using ultraviolet (UV) radiation or oxygen (O2) plasma, or other suitable methods. - In another exemplary embodiment, the process for removing a portion of the
elastic material layer 500 may be omitted when theelastic material layer 500 is formed so that the first distance L1 is equal to or less than the second distance L2. -
FIGS. 8 a through 8 g are cross-sectional views illustrating an exemplary embodiment of a process of preparing a second electrode of an apparatus for generating electrical energy. - First, referring to
FIG. 8 a, ametal layer 200 is disposed on atemplate substrate 3. According to exemplary embodiments, thesubstrate 3 may be a silicon wafer, and themetal layer 200 may be formed of aluminum (Al). - Next, referring to
FIG. 8 b, themetal layer 200 is anodized to form ananodic film 201. The anodizing is an electrolytic process in an electrolytic solution, with themetal layer 200 as an anode. Through the anodizing, the thickness of the natural oxide layer formed on themetal layer 200 increases as the constituent material of themetal layer 200 dissolves into the electrolyte. Theanodic film 201 which is formed as a result of this process is illustrated inFIG. 8 b. - Next, referring to
FIG. 8 c, theanodic film 201 formed by the anodizing process is removed. Theanodic film 201 may be removed, for example, but not limited to, by wet or dry etching. Upon the removal of theanodic film 201, the surface of thetemplate substrate 3 has a ripple-shaped structure with concave portions and convex portions. - Next, referring to
FIG. 8 d, asecond electrode layer 202 is formed on thetemplate substrate 3. Thesecond electrode layer 202 may serve as an upper electrode which contacts the nanowires and allows for the flow of electrical current. - According to exemplary embodiments, the
second electrode layer 202 is formed of at least one of AuPd alloy, Au, Pt, Pd and Ru. Further, thesecond electrode layer 202 may be formed by ion sputtering. - Also, as in the first electrode layer described above, the
second electrode layer 202 may be formed of a flexible conductive material capable of being deformed by an applied stress. Further, thesecond electrode layer 202 may be made of a transparent material. - For example, the
second electrode layer 202 may be formed of at least one of ITO, CNT, a conductive polymer, nanofibers and a nanocomposite. - According to exemplary embodiments, an
adhesion layer 203 is disposed on thesecond electrode layer 202, as illustrated inFIG. 8 e. Theadhesion layer 203 may serve to improve adhesion between thesecond electrode layer 202 and a carrier substrate which is formed later in the process. According to exemplary embodiments, theadhesion layer 203 may be formed of nickel (Ni). Further, theadhesion layer 203 is formed by electroplating. - Next, referring to
FIG. 8 f, acarrier substrate 2 is attached on theadhesion layer 203. In another exemplary embodiment, thecarrier substrate 2 may be attached on thesecond electrode layer 202, without theadhesion layer 203. Further, thecarrier substrate 2 may be formed of a polymer. - Next, referring to
FIG. 8 g, thesecond electrode layer 202, theadhesion layer 203 and thecarrier substrate 2 is separated from thetemplate substrate 3. The separatedsecond electrode layer 202 has concave portions A1 and convex portions A2 because of the shape of thetemplate substrate 3. - In another exemplary embodiment, the second electrode which is connected to the first electrode and the nanowire may be formed as described above.
-
FIGS. 9 a and 9 b are cross-sectional views illustrating an exemplary embodiment of a process of bringing into proximity a nanowire to a second electrode to manufacture an apparatus for generating electrical energy. - First, referring to
FIG. 9 a, thenanowire 30 is brought into proximity to thesecond electrode layer 202. Thenanowire 30 may either contact thesecond electrode layer 202 or be spaced apart from thesecond electrode layer 202 with a predetermined spacing. In another exemplary embodiment, thenanowire 30 includes a plurality of nanowires, and each of thenanowires 30 may be positioned in proximity to the concave portions Al of thesecond electrode layer 202. - Next, referring to
FIG. 9 b, thefirst electrode layer 100 and thesecond electrode layer 202 are connected by theconductor 40 in order to complete the apparatus for generating electrical energy. - Although not shown in
FIGS. 9 a and 9 b, in another exemplary embodiment, an elastic material layer 500 (FIG. 7 e) is disposed between thefirst electrode layer 100 and thesecond electrode layer 200. - While the exemplary embodiments have been shown and described, it will be understood by those skilled in the art that various changes in form and details may be made thereto without departing from the spirit and scope of the present invention as defined by the appended claims.
- In addition, many modifications can be made to adapt a particular situation or material to the teachings of the invention without departing from the essential scope thereof Therefore, it is intended that the present invention not be limited to the particular exemplary embodiments disclosed as the best mode contemplated for carrying out this invention, but that the present invention will include all embodiments falling within the scope of the appended claims.
Claims (12)
1. A method for manufacturing an apparatus for generating electrical energy, comprising:
disposing a nanowire on a first electrode layer disposed on a substrate, the first electrode layer and the nanowire being formed of different materials;
preparing a second electrode layer having a concave portion and a convex portion facing the first electrode layer, the second electrode layer being spaced apart from the first electrode layer;
bringing the nanowire into proximity to the second electrode layer; and
connecting the first electrode layer with the second electrode layer using a conductor.
2. The method for manufacturing an apparatus for generating electrical energy according to claim 1 , wherein the first electrode layer and the second electrode layer are formed of at least one of the group consisting of indium tin oxide, carbon nanotubes, a conductive polymer, nanofibers, a nanocomposite, gold-palladium alloy, gold, palladium, platinum and ruthenium.
3. The method for manufacturing an apparatus for generating electrical energy according to claim 1 , wherein the disposing the nanowire on the first electrode layer comprises:
forming a nanomaterial layer on the first electrode layer,
heating the nanomaterial layer so as to form one or more nanonuclei; and
forming a nanowire from each nanonucleus.
4. The method for manufacturing an apparatus for generating electrical energy, according to claim 3 , wherein
the nanomaterial layer is formed of zinc acetate, and
the nanowire is formed of zinc oxide.
5. The method for manufacturing an apparatus for generating electrical energy, according to claim 1 , wherein the preparing the second electrode layer comprises:
disposing a metal layer on a template substrate;
anodizing the metal layer so as to form an anodic film;
removing the anodic film and forming a second electrode layer on the template substrate; and
attaching the second electrode layer to a carrier substrate, and separating the second electrode layer and the carrier substrate from the template substrate.
6. The method for manufacturing an apparatus for generating electrical energy, according to claim 5 , further comprising, forming an adhesion layer on the second electrode layer prior to attaching the second electrode layer to the carrier substrate.
7. The method for manufacturing an apparatus for generating electrical energy, according to claim 6 , wherein the adhesion layer is formed of nickel.
8. The method for manufacturing an apparatus for generating electrical energy, according to claim 1 , wherein the bringing the nanowire into proximity to the second electrode layer comprises bringing the nanowire into proximity with the concave portion of the second electrode layer.
9. The method for manufacturing an apparatus for generating electrical energy, according to claim 1 , further comprising, disposing an elastic material layer on the first electrode layer on which the nanowire has been disposed.
10. The method for manufacturing an apparatus for generating electrical energy, according to claim 9 , wherein the elastic material layer is formed of at least one of the group consisting of silicone, polydimethylsiloxane, and urethane.
11. The method for manufacturing an apparatus for generating electrical energy, according to claim 9 , wherein a first distance between the first electrode layer and a top surface of the elastic material layer is equal to or less than a second distance between the first electrode layer and the top surface of the elastic material layer.
12. The method for manufacturing an apparatus for generating electrical energy, according to claim 9 , further comprising, removing a portion of the elastic material layer to expose an end of the nanowire after disposing the elastic material layer on the first electrode layer.
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US13/034,041 US20110138610A1 (en) | 2008-08-07 | 2011-02-24 | Apparatus for generating electrical energy and method for manufacturing the same |
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KR1020080123612A KR101524766B1 (en) | 2008-08-07 | 2008-12-05 | Apparatus for generating electrical energy and method for manufacturing the same |
KR1020080123612 | 2008-12-05 | ||
US12/350,584 US7936111B2 (en) | 2008-08-07 | 2009-01-08 | Apparatus for generating electrical energy and method for manufacturing the same |
US13/034,041 US20110138610A1 (en) | 2008-08-07 | 2011-02-24 | Apparatus for generating electrical energy and method for manufacturing the same |
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