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| US4211618 | 16. Mai 1978 | 8. Juli 1980 | Kabushiki Kaisha Kenseido
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| US5651900 | 7. März 1994 | 29. Juli 1997 | The Regents of the University of California | Microfabricated particle filter |
| US5798042 | 14. Juni 1996 | 25. Aug. 1998 | Regents of the University of California | Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters |
| US5948255 | 2. Mai 1997 | 7. Sept. 1999 | The Regents of the University of California | Microfabricated particle thin film filter and method of making it |
| US5985164 | 15. Okt. 1997 | 16. Nov. 1999 | Regents of the University of California | Method for forming a filter |
| US6042879 | 2. Juli 1997 | 28. März 2000 | United Technologies Corporation | Method for preparing an apertured article to be recoated |
| US6044981 | 25. Aug. 1998 | 4. Apr. 2000 | The Regents of the University of California | Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters |
