US3090169A - Lapping machine fixture - Google Patents

Lapping machine fixture Download PDF

Info

Publication number
US3090169A
US3090169A US109423A US10942361A US3090169A US 3090169 A US3090169 A US 3090169A US 109423 A US109423 A US 109423A US 10942361 A US10942361 A US 10942361A US 3090169 A US3090169 A US 3090169A
Authority
US
United States
Prior art keywords
lapping
plate
work pieces
fixture
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US109423A
Inventor
Stephen A Boettcher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to US109423A priority Critical patent/US3090169A/en
Application granted granted Critical
Publication of US3090169A publication Critical patent/US3090169A/en
Anticipated expiration legal-status Critical
Assigned to SPEEDFAM CORPORATION, AN IL CORP. reassignment SPEEDFAM CORPORATION, AN IL CORP. RELEASED BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: BOETTCHER, STEPHEN A.
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/102Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being able to rotate freely due to a frictional contact with the lapping tool

Definitions

  • JivizenQBoeZZc/zex Sheets-Eben 2 This invention relates to lapping machines and provides a fixture for lapping thin planar parts to an accuracy of one ten-thousandth of an inch or less.
  • the fixture intervenes between the weight or pressure plate and the work pieces on the lapping surface within the truing retainer ring the basic idea being to allow lapping of the work pieces to finish thickness, and then automatically discontinuing the lapping by removal of the down pressure, without stopping the machine.
  • FIGURE 1 is a cross-sectional view of the machine in general, taken approximately on its vertical center line;
  • FIGURE 2 is a horizontal cross-sectional View, taken on the plane of the line 22 of FIGURE 1, looking downwardly, and on a larger scale, portions being broken away;
  • FIGURE 3 is a vertical cross-sectional view, taken on the planes of the dot-and-dash line 33 of FIGURE 2, looking in the direction of the arrows;
  • FIGURES 4 and 5 are two corresponding sectional views of a portion of FIGURE 3, on a still larger scale, showing respectively, the positions of the fixture before and after the lapping operation, the vertical dimension of the work piece being exaggerated for clarity.
  • FIGURE 1 Referring firstly to FIGURE 1:
  • the machine has a substantially cylindrical pedestal 11 supported by a base ring 12.
  • the pedestal has an access door 13.
  • a cylindrical collar 14 is disposed within the upper end of pedestal 11, the same being mounted 'by means of an inclined wall 15 forming a drip pan for receiving abrasive and carrier mixture used in the lapping operation above.
  • a main drive motor 16 operatively connected by means of sheave Wheels 17 and 18 and a V-belt 19 with shaft 20 of a conventional gear reducer unit 21, the output shaft 22 of which carries a hub member 23, upon which the horizontal circular plate or disk 24, which provides the lapping surface 25, is mounted for rotation.
  • This disk has a central well-bore 26, leaving an annular lapping area, and a plurality of radial slots 27 to lead the used abrasive and carrier mixture to the drip pan 15.
  • a staging table 28 Surrounding the lapping disk is a staging table 28 from which work pieces can be moved onto the lapping surface and to which they can be returned when the lapping operation is completed.
  • Each spindle has a knurled upper end 33 for manual grasping, and is held by a set screw 34.
  • the lower end of each spindle is journaled in the center of a circular weight or pressure plate 35 and thus defines the axis of rotation of such plate.
  • Each weight or pressure plate 35 fits, with slight clearance, within a truing-retainer ring 36 which rests on the lapping surface 25 of the plate or disk 24, and the weight or pressure plate rests upon the fixture to be described, which, in turn, rests upon the work pieces on the lapping surface.
  • the rings 36 function continuously to dress the lapping wheel for maintenance of its planar condition.
  • a tank 37 for the abrasive and carrier mixture having a filling tube 37 and, within it, means 38, powered by motor 39, for agitating the said mixture and for circulating it, by means of tubing 40 and 41, passing through one of the channel columns 29, to the level of the bleedotf spout 42, disposed in overlapping relation to the plate or disk 24, for drop-by-drop feed of the mixture to the lapping surface 25.
  • the fixture of the present invention is there shown in elevation, disposed within the truing-retainer ring 36 between the weight plate 35 and the lapping disk 24 as above stated.
  • FIGURES 2, 3, 4 and 5 illustrating the fixture in detail and on larger scales.
  • the back plate 44 has a peripheral shoulder 49, which engages the top of the stop ring 45, tightly fitted to the reduced periphery of the plate, as shown.
  • the reference plate 46 fits within the stop ring 45 with slight clearance.
  • the work pieces, indicated at w, circular disks for instance lie on the lapping surface 25, within the stop ring 45, and the under surface of the reference plate engages the work pieces, the heavy black lines above and below them indicating the films of lapping medium, i.e. the abrasive and carrier mixture above mentioned.
  • the lower film of lapping medium of course extends under the stop ring and the truing retainer ring 36.
  • the stop ring 45 must not lap, and, accordingly, I make it of ceramic material and select an aluminum oxide or garnet abrasive for the lapping medium.
  • the height of the reference plate, relative to the bottom of the stop ring determines the ultimate vertical dimension of the work pieces and is adjustable by means of the set screws 48, held as adjusted by tightening the retaining screw 47.
  • a convenient method of loading the machine with thin work pieces is as follows: After the fixture has been adjusted for the desired spacing of the under side of the reference plate 46 and the bottom of the stop ring 45, it may be inverted, a small amount of lapping medium spread on its exposed surface, and then laying the work pieces thereon, with light hand pressure, causing them to adhere; the fixture is then righted and placed on the lapping surface within the truing-retaining ring, followed by the weight or pressure plate 35, a felt pad 50 intervening, if desired.
  • FIGURE 4 shows the parts at the start of the operation, and FIGURE 5 shows them at the pre-determined completion of the operation.
  • the vertical dimension of the work piece has been exaggerated for purposes of clarity.
  • the fixture provides means for determining in advance the vertical dimension of the work pieces with the utmost accuracy, and when the selected dimension has been attained the lapping ceases automatically, and continued operation of the machine is without effect.
  • a lapping machine fixture for predetermining the extent of lapping work pieces positioned on a rotating lapping disc within a truing and retaining ring thereon, a plate for resting on said work pieces, a second plate parallel thereto and adjustably distanced therefrom, and means carried by said second plate for engaging the lapping disk to arrest the downward movement of said plates.
  • a lapping machine fixture for predetermining the extent'of lapping work pieces positioned on a rotating lapping disc within a truing and retaining ring thereon, a plate for resting on said Work pieces, a second plate parallel thereto and adjustably distance-d therefrom, and a ring carried by said second plate surrounding said firstnamed plate for engaging the lapping disk to arrest the downward movement of said plates.
  • a lapping machine fixture for predetermining the extent of lapping work pieces positioned on a rotating lapping disc within a truing and retaining ring thereon, a plate for resting on said work pieces, a second plate parallel thereto, set screws in one of said plates for engaging the other plate to adjust the distance between them, means for securing said plates together in adjusted position, and a ring carried by said second plate for engaging the lapping disk to arrest the downward movement of said plates.
  • a lapping machine fixture for predetermining the extent of lapping work pieces positioned on a rotating lapping disc within a truing. and retaining ring thereon, a first horizontal plate for resting on said work pieces, a second horizontal plate parallel thereto and adjustably distanced thereabove, said second plate having an annular reduced periphery defining a peripheral shoulder, an annular ring at its upper end forcibly fitted to said redumd periphery and seated against said shoulder in said second plate, said ring having an inner diameter substantially conforming to the outer diameter of said first plate, and said ring extending axially downwardly beyond the plane of the lower face of said first plate for engaging the lapping disc to arrest the downward movement of said plates.

Description

y 1963 s. A. BOETTCHER 3,090,169
LAPPING MACHINE FIXTURE Filed May 11, 1961 28heets-Sheet 1 INVENTOR. fiiyhenflzfioeiidzer J2 May 21, 1963 s. A. BOETTCHER 3,
LAPPING MACHINE FIXTURE Filed May 11, 1961 2 W fiV/VW/ T f 45 4446 w 24 INVENTOR.
JivizenQBoeZZc/zex Sheets-Eben 2 This invention relates to lapping machines and provides a fixture for lapping thin planar parts to an accuracy of one ten-thousandth of an inch or less.
The fixture intervenes between the weight or pressure plate and the work pieces on the lapping surface within the truing retainer ring the basic idea being to allow lapping of the work pieces to finish thickness, and then automatically discontinuing the lapping by removal of the down pressure, without stopping the machine.
The invention is illustrated in the accompanying drawings, in which:
FIGURE 1 is a cross-sectional view of the machine in general, taken approximately on its vertical center line;
FIGURE 2 is a horizontal cross-sectional View, taken on the plane of the line 22 of FIGURE 1, looking downwardly, and on a larger scale, portions being broken away;
FIGURE 3 is a vertical cross-sectional view, taken on the planes of the dot-and-dash line 33 of FIGURE 2, looking in the direction of the arrows; and
FIGURES 4 and 5 are two corresponding sectional views of a portion of FIGURE 3, on a still larger scale, showing respectively, the positions of the fixture before and after the lapping operation, the vertical dimension of the work piece being exaggerated for clarity.
Referring firstly to FIGURE 1:
The machine has a substantially cylindrical pedestal 11 supported by a base ring 12. The pedestal has an access door 13. A cylindrical collar 14 is disposed within the upper end of pedestal 11, the same being mounted 'by means of an inclined wall 15 forming a drip pan for receiving abrasive and carrier mixture used in the lapping operation above.
Mounted within the pedestal is a main drive motor 16 operatively connected by means of sheave Wheels 17 and 18 and a V-belt 19 with shaft 20 of a conventional gear reducer unit 21, the output shaft 22 of which carries a hub member 23, upon which the horizontal circular plate or disk 24, which provides the lapping surface 25, is mounted for rotation. This disk has a central well-bore 26, leaving an annular lapping area, and a plurality of radial slots 27 to lead the used abrasive and carrier mixture to the drip pan 15.
Surrounding the lapping disk is a staging table 28 from which work pieces can be moved onto the lapping surface and to which they can be returned when the lapping operation is completed.
Vertical channel columns 29, 29 are mounted in upright position at diametrically opposite sides of the pedestal housing 11, joined at the top by bridge member 30, which is provided with two intermediary transverse arms 31, 31, having vertical bores for receiving vertically adjustable spindles 32, two of which are shown. Each spindle has a knurled upper end 33 for manual grasping, and is held by a set screw 34. The lower end of each spindle is journaled in the center of a circular weight or pressure plate 35 and thus defines the axis of rotation of such plate.
Each weight or pressure plate 35 fits, with slight clearance, within a truing-retainer ring 36 which rests on the lapping surface 25 of the plate or disk 24, and the weight or pressure plate rests upon the fixture to be described, which, in turn, rests upon the work pieces on the lapping surface. The rings 36 function continuously to dress the lapping wheel for maintenance of its planar condition.
atent ce 3,090,169 Patented May 21, 1963 In the lower portion of the pedestal housing 11 there is provided a tank 37 for the abrasive and carrier mixture, having a filling tube 37 and, within it, means 38, powered by motor 39, for agitating the said mixture and for circulating it, by means of tubing 40 and 41, passing through one of the channel columns 29, to the level of the bleedotf spout 42, disposed in overlapping relation to the plate or disk 24, for drop-by-drop feed of the mixture to the lapping surface 25.
The fixture of the present invention, indicated as a whole in FIGURE 1 by the reference numeral 43, is there shown in elevation, disposed within the truing-retainer ring 36 between the weight plate 35 and the lapping disk 24 as above stated.
Reference is now made to FIGURES 2, 3, 4 and 5, illustrating the fixture in detail and on larger scales.
It comprises three elements, i.e. circular back plate 44, stop ring 45, and circular reference plate 46, together with retaining screw 47 and three set screws 48.
The back plate 44 has a peripheral shoulder 49, which engages the top of the stop ring 45, tightly fitted to the reduced periphery of the plate, as shown. The reference plate 46 fits within the stop ring 45 with slight clearance. The work pieces, indicated at w, circular disks for instance lie on the lapping surface 25, within the stop ring 45, and the under surface of the reference plate engages the work pieces, the heavy black lines above and below them indicating the films of lapping medium, i.e. the abrasive and carrier mixture above mentioned. The lower film of lapping medium of course extends under the stop ring and the truing retainer ring 36.
The stop ring 45 must not lap, and, accordingly, I make it of ceramic material and select an aluminum oxide or garnet abrasive for the lapping medium.
The height of the reference plate, relative to the bottom of the stop ring determines the ultimate vertical dimension of the work pieces and is adjustable by means of the set screws 48, held as adjusted by tightening the retaining screw 47.
Work pieces which have been lapped on the one side in the usual manner, are inverted and so placed on the lapping surface 25 within the inner area of the stop ring, and then the fixture 43 is placed upon them, followed by the Weight or pressure plate 35, a felt pad 51} between them, if desired. A convenient method of loading the machine with thin work pieces, is as follows: After the fixture has been adjusted for the desired spacing of the under side of the reference plate 46 and the bottom of the stop ring 45, it may be inverted, a small amount of lapping medium spread on its exposed surface, and then laying the work pieces thereon, with light hand pressure, causing them to adhere; the fixture is then righted and placed on the lapping surface within the truing-retaining ring, followed by the weight or pressure plate 35, a felt pad 50 intervening, if desired.
FIGURE 4 shows the parts at the start of the operation, and FIGURE 5 shows them at the pre-determined completion of the operation. In these figures the vertical dimension of the work piece has been exaggerated for purposes of clarity.
The fixture provides means for determining in advance the vertical dimension of the work pieces with the utmost accuracy, and when the selected dimension has been attained the lapping ceases automatically, and continued operation of the machine is without effect.
I claim:
1. In a lapping machine fixture for predetermining the extent of lapping work pieces positioned on a rotating lapping disc within a truing and retaining ring thereon, a plate for resting on said work pieces, a second plate parallel thereto and adjustably distanced therefrom, and means carried by said second plate for engaging the lapping disk to arrest the downward movement of said plates.
2. In a lapping machine fixture for predetermining the extent'of lapping work pieces positioned on a rotating lapping disc within a truing and retaining ring thereon, a plate for resting on said Work pieces, a second plate parallel thereto and adjustably distance-d therefrom, and a ring carried by said second plate surrounding said firstnamed plate for engaging the lapping disk to arrest the downward movement of said plates.
3. In a lapping machine fixture for predetermining the extent of lapping work pieces positioned on a rotating lapping disc within a truing and retaining ring thereon, a plate for resting on said work pieces, a second plate parallel thereto, set screws in one of said plates for engaging the other plate to adjust the distance between them, means for securing said plates together in adjusted position, and a ring carried by said second plate for engaging the lapping disk to arrest the downward movement of said plates.
4. In a lapping machine fixed for predetermining the extent of lapping work pieces positioned on a rotating lapping disc within a timing and retaining ring thereon, a plate for resting on said work pieces, a second plate parallel thereto and adjustably distanced therefrom, and a ceramic ring carried by said second plate surrounding said first-named plate for engaging the lapping disk to arrest the downward movement of said plates.
5. In a lapping machine fixture for predetermining the extent of lapping work pieces positioned on a rotating lapping disc within a truing. and retaining ring thereon, a first horizontal plate for resting on said work pieces, a second horizontal plate parallel thereto and adjustably distanced thereabove, said second plate having an annular reduced periphery defining a peripheral shoulder, an annular ring at its upper end forcibly fitted to said redumd periphery and seated against said shoulder in said second plate, said ring having an inner diameter substantially conforming to the outer diameter of said first plate, and said ring extending axially downwardly beyond the plane of the lower face of said first plate for engaging the lapping disc to arrest the downward movement of said plates.
6. The combination of claim 5 characterized by the provision of set screws in one of said plates for engaging the other plate to adjust the distance between them, and
means for securing said plates together in adjusted 1 position.
References Cited in the file of this patent UNlTE-D STATES PATENTS 2,565,590 Bullard Aug. 28, 1951 2,722,089 Boettcher Nov. 1, 1955 2,842,906 Carter et al. July 15, 1958 2,967,380 =Damgaard Ian. 10, 1961 2,971,298 Garthwaite et al. Feb. 14, 1961 2,979,868 Emeis Apr. 18, .1961 2,983,086 La Chapelle May 9, 1961

Claims (1)

1. IN A LAPPING MACHINE FIXTURE FOR PREDETERMINING THE EXTENT OF LAPPING WORK PIECES POSITIONED ON A ROTATING LAPPING DISC WITHIN A TRUING AND RETAINING RING THEREON, A PLATE FOR RESTING ON SAID WORK PIECES, A SECOND PLATE PARALLEL THERETO AND ADJUSTABLY DISTANCED THEREFROM, AND MEANS CARRIED BY SAID SECOND PLATE FOR ENGAGING THE LAPPING DISK TO ARREST THE DOWNWARD MOVEMENT OF SAID PLATES.
US109423A 1961-05-11 1961-05-11 Lapping machine fixture Expired - Lifetime US3090169A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US109423A US3090169A (en) 1961-05-11 1961-05-11 Lapping machine fixture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US109423A US3090169A (en) 1961-05-11 1961-05-11 Lapping machine fixture

Publications (1)

Publication Number Publication Date
US3090169A true US3090169A (en) 1963-05-21

Family

ID=22327558

Family Applications (1)

Application Number Title Priority Date Filing Date
US109423A Expired - Lifetime US3090169A (en) 1961-05-11 1961-05-11 Lapping machine fixture

Country Status (1)

Country Link
US (1) US3090169A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3388506A (en) * 1964-11-16 1968-06-18 Speedlap Corp Lap limiting fixture means
US3518798A (en) * 1967-08-10 1970-07-07 Speedfam Corp Polishing machine
US3571978A (en) * 1967-09-11 1971-03-23 Spitfire Tool & Machine Co Inc Lapping machine having pressure plates, the temperature of which is controlled by a coolant
US3898770A (en) * 1974-11-25 1975-08-12 Speedfam Corp Lapping fixture reference plate assembly
US3977130A (en) * 1975-05-12 1976-08-31 Semimetals, Inc. Removal-compensating polishing apparatus
JPS53160364U (en) * 1977-05-24 1978-12-15
US5695392A (en) * 1995-08-09 1997-12-09 Speedfam Corporation Polishing device with improved handling of fluid polishing media
US6089961A (en) * 1998-12-07 2000-07-18 Speedfam-Ipec Corporation Wafer polishing carrier and ring extension therefor

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2565590A (en) * 1948-03-12 1951-08-28 Earl J Bullard Lapping machine
US2722089A (en) * 1952-04-18 1955-11-01 Crane Packing Co Method of and apparatus for lapping articles
US2842906A (en) * 1955-10-26 1958-07-15 Lyle E Carter Work holder for lapping machine
US2967380A (en) * 1958-04-22 1961-01-10 Struers Chemiske Lab H Grinding or polishing apparatuses
US2971298A (en) * 1958-10-03 1961-02-14 Ibm Workholder for a lapping machine
US2979868A (en) * 1957-11-29 1961-04-18 Siemens Ag Lapping device for semiconductor wafers
US2983086A (en) * 1959-04-30 1961-05-09 Pacific Semiconductors Inc Flanged lapping jig

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2565590A (en) * 1948-03-12 1951-08-28 Earl J Bullard Lapping machine
US2722089A (en) * 1952-04-18 1955-11-01 Crane Packing Co Method of and apparatus for lapping articles
US2842906A (en) * 1955-10-26 1958-07-15 Lyle E Carter Work holder for lapping machine
US2979868A (en) * 1957-11-29 1961-04-18 Siemens Ag Lapping device for semiconductor wafers
US2967380A (en) * 1958-04-22 1961-01-10 Struers Chemiske Lab H Grinding or polishing apparatuses
US2971298A (en) * 1958-10-03 1961-02-14 Ibm Workholder for a lapping machine
US2983086A (en) * 1959-04-30 1961-05-09 Pacific Semiconductors Inc Flanged lapping jig

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3388506A (en) * 1964-11-16 1968-06-18 Speedlap Corp Lap limiting fixture means
US3518798A (en) * 1967-08-10 1970-07-07 Speedfam Corp Polishing machine
US3571978A (en) * 1967-09-11 1971-03-23 Spitfire Tool & Machine Co Inc Lapping machine having pressure plates, the temperature of which is controlled by a coolant
US3898770A (en) * 1974-11-25 1975-08-12 Speedfam Corp Lapping fixture reference plate assembly
US3977130A (en) * 1975-05-12 1976-08-31 Semimetals, Inc. Removal-compensating polishing apparatus
JPS53160364U (en) * 1977-05-24 1978-12-15
US5695392A (en) * 1995-08-09 1997-12-09 Speedfam Corporation Polishing device with improved handling of fluid polishing media
US6089961A (en) * 1998-12-07 2000-07-18 Speedfam-Ipec Corporation Wafer polishing carrier and ring extension therefor

Similar Documents

Publication Publication Date Title
US3691694A (en) Wafer polishing machine
US2565590A (en) Lapping machine
US3090169A (en) Lapping machine fixture
US2826009A (en) Work holder for lapping machines
EP0180175A2 (en) Surface grinding apparatus
US3579916A (en) Polishing machine
US2870580A (en) Flat lapping machine
US2688215A (en) Double lap for lapping parallel faces
US1870328A (en) Lapping machine
US3375614A (en) Lapping machine truing ring and fixture
US2855729A (en) Grinding machine
USRE23937E (en) Lapping machine
US2912799A (en) Lapping machine
US3388506A (en) Lap limiting fixture means
US2821818A (en) Lapping machine and automatic feed mechanism therefor
US3561167A (en) Machine for lapping elements obtained from crystalline materials, and particularly semiconductor crystals
US2414784A (en) Tool dressing apparatus
US1990002A (en) Glass grinding apparatus
US4034515A (en) Vertical grinder
US2968135A (en) Lapping machine
US971861A (en) Grinding-machine.
US2749673A (en) Grinding machine set-up means
US2308512A (en) Grinding machine
US1467518A (en) Grinding machine
US3535830A (en) Lapping machine fixture

Legal Events

Date Code Title Description
AS Assignment

Owner name: SPEEDFAM CORPORATION, 509 NORTH THIRD AVE., DES PL

Free format text: RELEASED BY SECURED PARTY;ASSIGNOR:BOETTCHER, STEPHEN A.;REEL/FRAME:003932/0923

Effective date: 19811105