|
| US3931789 | 19. Apr. 1974 | 13. Jan. 1976 | Canon Kabushiki Kaisha | Vapor deposition apparatus |
| US4002141 | 26. Nov. 1975 | 11. Jan. 1977 | Airco, Inc. | System for handling substrate holders for vacuum coating |
| US4030622 | 23. Mai 1975 | 21. Juni 1977 | Pass-Port Systems, Inc. | Wafer transport system |
| US4047624 | 21. Okt. 1975 | 13. Sept. 1977 | Airco, Inc. | Workpiece handling system for vacuum processing |
| US4184448 | 22. Nov. 1978 | 22. Jan. 1980 | Leybold-Heraeus GmbH | Vacuum coating apparatus having a plurality of lock chambers |
| US4212317 | 2. Aug. 1978 | 15. Juli 1980 | The United States of America as represented by the Secretary of the Army | Vacuum interlock |
| US4338883 | 25. Aug. 1980 | 13. Juli 1982 | Leybold-Heraeus GmbH | Vacuum vapor-deposition installation with a vacuum chamber, a vaporizing chamber and an evaporizing chamber |
| US4433951 | 13. Febr. 1981 | 28. Febr. 1984 | Lam Research Corporation | Modular loadlock |
| US4487162 | 24. Febr. 1983 | 11. Dez. 1984 | | Magnetoplasmadynamic apparatus for the separation and deposition of materials |
| US4495966 | 24. Mai 1982 | 29. Jan. 1985 | Electron Beam Corporation | Separable high vacuum valve |
| US4498832 | 21. Mai 1982 | 12. Febr. 1985 | The BOC Group, Inc. | Workpiece accumulating and transporting apparatus |
| US4503807 | 29. Mai 1984 | 12. März 1985 | Nippon Telegraph & Telephone Public Corporation | Chemical vapor deposition apparatus |
| US4516525 | 21. Okt. 1983 | 14. Mai 1985 | International Business Machines Corporation | Electron gun equipment for vacuum deposition |
| US4518846 | 11. Juni 1984 | 21. Mai 1985 | International Business Machines Corporation | Heater assembly for molecular beam epitaxy furnace |
| US4576828 | 17. Mai 1984 | 18. März 1986 | Geotel, Inc. | Method and apparatus for plasma spray coating |
| US4715764 | 28. Apr. 1986 | 29. Dez. 1987 | Varian Associates, Inc. | Gate valve for wafer processing system |
| US4728252 | 22. Aug. 1986 | 1. März 1988 | Lam Research Corporation | Wafer transport mechanism |
| US4753417 | 28. Jan. 1985 | 28. Juni 1988 | The BOC Group, Inc. | Gate valve for vacuum processing apparatus |
| US4764076 | 17. Apr. 1986 | 16. Aug. 1988 | Varian Associates, Inc. | Valve incorporating wafer handling arm |
| US4797054 | 13. Juni 1986 | 10. Jan. 1989 | Fujitsu Limited | Apparatus for loading and unloading a vacuum processing chamber |
| US4909695 | 20. Juli 1988 | 20. März 1990 | Materials Research Corporation | Method and apparatus for handling and processing wafer-like materials |
| US4944645 | 11. Jan. 1989 | 31. Juli 1990 | Toshiba Kikai Kabushiki Kaisha | Method and apparatus for loading objects into evacuated treating chamber |
| US5044314 | 14. Okt. 1988 | 3. Sept. 1991 | Advantage Production Technology, Inc. | Semiconductor wafer processing apparatus |
| US5065698 | 25. März 1991 | 19. Nov. 1991 | Canon Kabushiki Kaisha | Film forming apparatus capable of preventing adhesion of film deposits |
| US5792272 | 12. Aug. 1997 | 11. Aug. 1998 | Watkins-Johnson Company | Plasma enhanced chemical processing reactor and method |
| US5882415 | 7. Okt. 1996 | 16. März 1999 | Von Ardenne Anlagentechnik GmbH | Electron-beam continuous process vaporization installation for thermally high stressed substrata |
| US6001267 | 21. Febr. 1997 | 14. Dez. 1999 | Watkins-Johnson Company | Plasma enchanced chemical method |
| US6073366 | 6. Juli 1998 | 13. Juni 2000 | ASM America, Inc. | Substrate cooling system and method |
| US6108937 | 10. Sept. 1998 | 29. Aug. 2000 | ASM America, Inc. | Method of cooling wafers |
| US6178918 | 5. Juni 1998 | 30. Jan. 2001 | Applied Materials, Inc. | Plasma enhanced chemical processing reactor |
| US6209220 | 11. Nov. 1999 | 3. Apr. 2001 | ASM America, Inc. | Apparatus for cooling substrates |
| US6391387 | 22. Nov. 1999 | 21. Mai 2002 | Preferred Machining Corporation | Pivoting fluid dispensing method |
| US6408537 | 30. Mai 2000 | 25. Juni 2002 | ASM America, Inc. | Substrate cooling system |
| US6578287 | 24. Apr. 2002 | 17. Juni 2003 | ASM America, Inc. | Substrate cooling system and method |
| US6902623 | 16. Jan. 2002 | 7. Juni 2005 | Veeco Instruments Inc. | Reactor having a movable shutter |
| US6923868 | 23. Dez. 2003 | 2. Aug. 2005 | GBA S.A. | Installation for electron-ray coatication of coatings |
| US6957690 | 30. Mai 2000 | 25. Okt. 2005 | ASM America, Inc. | Apparatus for thermal treatment of substrates |
| US7276124 | 13. Mai 2005 | 2. Okt. 2007 | Veeco Instruments Inc. | Reactor having a movable shutter |
