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Zitiert von PatentEingetragenAusgestelltUrsprünglich Bevollmächtigter Titel
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US578348924. Sept. 199621. Juli 1998Cabot CorporationMulti-oxidizer slurry for chemical mechanical polishing
US580085911. Dez. 19951. Sept. 1998Copper coating of printed circuit boards
US601550618. Apr. 199718. Jan. 2000Cabot CorporationComposition and method for polishing rigid disks
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US638306522. Jan. 20017. Mai 2002Cabot Microelectronics CorporationCatalytic reactive pad for metal CMP
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US644414017. März 19993. Sept. 2002Morton International Inc.Micro-etch solution for producing metal surface topography
US653390524. Jan. 200118. März 2003TiNi Alloy Company
Smart Therapeutics, Inc.
Method for sputtering tini shape-memory alloys
US656935015. März 200227. Mai 2003Cabot Microelectronics CorporationChemical mechanical polishing slurry useful for copper substrates
US657959117. Juli 200117. Juni 2003Atotech Deutschland GmbHMethod of producing copper surfaces for improved bonding, compositions used therein and articles made therefrom
US65932394. Aug. 199915. Juli 2003Cabot Microelectronics Corp.Chemical mechanical polishing method useful for copper substrates
US660244013. Aug. 20015. Aug. 2003Atotech Deutschland GmbHMethod of producing copper surfaces for improved bonding, compositions used therein and articles made therefrom
US66351867. Jan. 199921. Okt. 2003EKC Technology, Inc.Chemical mechanical polishing composition and process
US684108411. Febr. 200211. Jan. 2005Nikko Materials USA, Inc.Etching solution for forming an embedded resistor
US73148232. Aug. 20051. Jan. 2008DuPont Airproducts NanoMaterials LLCChemical mechanical polishing composition and process
US821161717. Aug. 20093. Juli 2012Palo Alto Research Center IncorporatedSolid inks for printed masks