|
| US4008683 | 7. Apr. 1975 | 22. Febr. 1977 | Varian Associates | Machine for treating wafer-form items |
| US4192253 | 21. Nov. 1978 | 11. März 1980 | Leybold-Hereaus GmbH | Vacuum coating apparatus |
| US4690098 | 29. Okt. 1985 | 1. Sept. 1987 | ATOMIKA Technische Physik GmbH
Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V. | Vacuum vapor-deposition system |
| US4776299 | 15. Mai 1986 | 11. Okt. 1988 | The United States of America as represented by the United States Department of Energy | Source replenishment device for vacuum deposition |
