|
| US4007037 | 9. Juli 1975 | 8. Febr. 1977 | General Electric Company | Composition and method for chemically etching copper elements |
| US4197139 | 23. Aug. 1978 | 8. Apr. 1980 | | Process for the reclamation of acid from spent pickle liquor |
| US4272492 | 31. Mai 1979 | 9. Juni 1981 | | Selective extraction and recovery of copper |
| US4557811 | 7. Nov. 1984 | 10. Dez. 1985 | Kernforschungsanlage Julich Gesellschaft mit beschrankter Haftung
Elo-Chem Atztechnik GmbH | Regeneration of an ammoniacal etching solution with recycling of solution with electrolytically reduced metal content to the regeneration input |
| US5248382 | 7. Febr. 1992 | 28. Sept. 1993 | Maria Helena Soukup | Process for manufacture of printed circuit boards by etching |
| US6001215 | 25. Sept. 1996 | 14. Dez. 1999 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor nitride film etching system |
| US6290865 | 30. Nov. 1998 | 18. Sept. 2001 | Applied Materials, Inc. | Spin-rinse-drying process for electroplated semiconductor wafers |
| US6516815 | 9. Juli 1999 | 11. Febr. 2003 | Applied Materials, Inc. | Edge bead removal/spin rinse dry (EBR/SRD) module |
| US6770565 | 8. Jan. 2002 | 3. Aug. 2004 | Applied Materials Inc. | System for planarizing metal conductive layers |
| US6824612 | 26. Dez. 2001 | 30. Nov. 2004 | Applied Materials, Inc. | Electroless plating system |
| US6864570 | 8. Juni 2001 | 8. März 2005 | The Regents of The University of California | Method and apparatus for fabricating self-assembling microstructures |
| US7326654 | 26. Mai 2004 | 5. Febr. 2008 | Hitachi Software Engineering Co., Ltd. | Monodisperse nanoparticles produced by size-selective photoetching reaction |
| US7727804 | 6. Juni 2007 | 1. Juni 2010 | The Regents of the University of California | Method and apparatus for fabricating self-assembling microstructures |
| US7897056 | 18. Okt. 2002 | 1. März 2011 | LG Display Co., Ltd. | Apparatus for etching or stripping substrate of liquid crystal display device and method thereof |
| US8236189 | 7. Juli 2008 | 7. Aug. 2012 | Sigma Engineering AB | Method for etching copper and recovery of the spent etching solution |
