|
| US4037100 | 1. März 1976 | 19. Juli 1977 | General Ionex Corporation | Ultra-sensitive spectrometer for making mass and elemental analyses |
| US4085330 | 19. Mai 1977 | 18. Apr. 1978 | Burroughs Corporation | Focused ion beam mask maker |
| US4124802 | 24. Juni 1976 | 7. Nov. 1978 | Tokyo Shibaura Electric Co., Ltd. | Method and apparatus for implanting radioactive gas in a base material |
| US4563587 | 7. Apr. 1983 | 7. Jan. 1986 | Hughes Aircraft Company | Focused ion beam microfabrication column |
| US5166519 | 11. März 1991 | 24. Nov. 1992 | | Electron imaging band pass analyser for a photoelectron spectromicroscope |
| US5293134 | 9. März 1992 | 8. März 1994 | United Kingdom Atomic Energy Authority | Tandem accelerator |
| US5313067 | 27. Mai 1992 | 17. Mai 1994 | Iowa State University Research Foundation, Inc. | Ion processing apparatus including plasma ion source and mass spectrometer for ion deposition, ion implantation, or isotope separation |
| US5321262 | 30. Sept. 1992 | 14. Juni 1994 | Kratos Analytical Limited | Electron imaging band pass analyser for a photoelectron spectromicroscope |
| US5729028 | 27. Jan. 1997 | 17. März 1998 | | Ion accelerator for use in ion implanter |
| US5985742 | 19. Febr. 1998 | 16. Nov. 1999 | Silicon Genesis Corporation | Controlled cleavage process and device for patterned films |
| US5994207 | 19. Febr. 1998 | 30. Nov. 1999 | Silicon Genesis Corporation | Controlled cleavage process using pressurized fluid |
| US6010579 | 19. Febr. 1998 | 4. Jan. 2000 | Silicon Genesis Corporation | Reusable substrate for thin film separation |
| US6013563 | 19. Febr. 1998 | 11. Jan. 2000 | Silicon Genesis Corporation | Controlled cleaning process |
| US6027988 | 20. Aug. 1997 | 22. Febr. 2000 | The Regents of the University of California | Method of separating films from bulk substrates by plasma immersion ion implantation |
| US6048411 | 19. Febr. 1998 | 11. Apr. 2000 | Silicon Genesis Corporation | Silicon-on-silicon hybrid wafer assembly |
| US6146979 | 19. Febr. 1998 | 14. Nov. 2000 | Silicon Genesis Corporation | Pressurized microbubble thin film separation process using a reusable substrate |
| US6155909 | 19. Febr. 1998 | 5. Dez. 2000 | Silicon Genesis Corporation | Controlled cleavage system using pressurized fluid |
| US6159824 | 19. Febr. 1998 | 12. Dez. 2000 | Silicon Genesis Corporation | Silicon-on-silicon wafer bonding process using a thin film blister-separation method |
| US6159825 | 19. Febr. 1998 | 12. Dez. 2000 | Silicon Genesis Corporation | Controlled cleavage thin film separation process using a reusable substrate |
| US6162705 | 19. Febr. 1998 | 19. Dez. 2000 | Silicon Genesis Corporation | Controlled cleavage process and resulting device using beta annealing |
| US6187110 | 21. Mai 1999 | 13. Febr. 2001 | Silicon Genesis Corporation | Device for patterned films |
| US6221740 | 10. Aug. 1999 | 24. Apr. 2001 | Silicon Genesis Corporation | Substrate cleaving tool and method |
| US6245161 | 19. Febr. 1998 | 12. Juni 2001 | Silicon Genesis Corporation | Economical silicon-on-silicon hybrid wafer assembly |
| US6263941 | 10. Aug. 1999 | 24. Juli 2001 | Silicon Genesis Corporation | Nozzle for cleaving substrates |
| US6284631 | 10. Jan. 2000 | 4. Sept. 2001 | Silicon Genesis Corporation | Method and device for controlled cleaving process |
| US6290804 | 20. Febr. 1998 | 18. Sept. 2001 | Silicon Genesis Corporation | Controlled cleavage process using patterning |
| US6291313 | 18. Mai 1999 | 18. Sept. 2001 | Silicon Genesis Corporation | Method and device for controlled cleaving process |
| US6291326 | 17. Juni 1999 | 18. Sept. 2001 | Silicon Genesis Corporation | Pre-semiconductor process implant and post-process film separation |
| US6294814 | 24. Aug. 1999 | 25. Sept. 2001 | Silicon Genesis Corporation | Cleaved silicon thin film with rough surface |
| US6391740 | 28. Apr. 1999 | 21. Mai 2002 | Silicon Genesis Corporation | Generic layer transfer methodology by controlled cleavage process |
| US6458672 | 2. Nov. 2000 | 1. Okt. 2002 | Silicon Genesis Corporation | Controlled cleavage process and resulting device using beta annealing |
| US6486041 | 20. Febr. 2001 | 26. Nov. 2002 | Silicon Genesis Corporation | Method and device for controlled cleaving process |
| US6500732 | 27. Juli 2000 | 31. Dez. 2002 | Silicon Genesis Corporation | Cleaving process to fabricate multilayered substrates using low implantation doses |
| US6511899 | 6. Mai 1999 | 28. Jan. 2003 | Silicon Genesis Corporation | Controlled cleavage process using pressurized fluid |
| US6513564 | 14. März 2001 | 4. Febr. 2003 | Silicon Genesis Corporation | Nozzle for cleaving substrates |
| US6528391 | 21. Mai 1999 | 4. März 2003 | Silicon Genesis, Corporation | Controlled cleavage process and device for patterned films |
| US6548382 | 4. Aug. 2000 | 15. Apr. 2003 | Silicon Genesis Corporation | Gettering technique for wafers made using a controlled cleaving process |
| US6558802 | 29. Febr. 2000 | 6. Mai 2003 | Silicon Genesis Corporation | Silicon-on-silicon hybrid wafer assembly |
| US6573517 | 31. Juli 2000 | 3. Juni 2003 | Sumitomo Eaton Nova Corporation | Ion implantation apparatus |
| US6632724 | 13. Jan. 2000 | 14. Okt. 2003 | Silicon Genesis Corporation | Controlled cleaving process |
| US6790747 | 9. Okt. 2002 | 14. Sept. 2004 | Silicon Genesis Corporation | Method and device for controlled cleaving process |
| US6890838 | 26. März 2003 | 10. Mai 2005 | Silicon Genesis Corporation | Gettering technique for wafers made using a controlled cleaving process |
| US7056808 | 20. Nov. 2002 | 6. Juni 2006 | Silicon Genesis Corporation | Cleaving process to fabricate multilayered substrates using low implantation doses |
| US7160790 | 19. Aug. 2003 | 9. Jan. 2007 | Silicon Genesis Corporation | Controlled cleaving process |
| US7268358 | 1. Juni 2006 | 11. Sept. 2007 | Fox Chase Cancer Center | Method of modulating laser-accelerated protons for radiation therapy |
| US7317192 | 2. Juni 2004 | 8. Jan. 2008 | Fox Chase Cancer Center | High energy polyenergetic ion selection systems, ion beam therapy systems, and ion beam treatment centers |
| US7348258 | 6. Aug. 2004 | 25. März 2008 | Silicon Genesis Corporation | Method and device for controlled cleaving process |
| US7371660 | 16. Nov. 2005 | 13. Mai 2008 | Silicon Genesis Corporation | Controlled cleaving process |
| US7410887 | 26. Jan. 2007 | 12. Aug. 2008 | Silicon Genesis Corporation | Controlled process and resulting device |
| US7759217 | 26. Jan. 2007 | 20. Juli 2010 | Silicon Genesis Corporation | Controlled process and resulting device |
| US7776717 | 20. Aug. 2007 | 17. Aug. 2010 | Silicon Genesis Corporation | Controlled process and resulting device |
| US7811900 | 7. Sept. 2007 | 12. Okt. 2010 | Silicon Genesis Corporation | Method and structure for fabricating solar cells using a thick layer transfer process |
| US7846818 | 10. Juli 2008 | 7. Dez. 2010 | Silicon Genesis Corporation | Controlled process and resulting device |
| US8187377 | 4. Okt. 2002 | 29. Mai 2012 | Silicon Genesis Corporation | Non-contact etch annealing of strained layers |
| USRE33344 | 24. Dez. 1985 | 18. Sept. 1990 | Finnigan Corporation | Apparatus and method for detecting negative ions |
