US6180189B1 - Method and apparatus for aluminum nitride coating of a contact surface, especially a cylinder contact surface of a crankcase made of an aluminum basic alloy - Google Patents
Method and apparatus for aluminum nitride coating of a contact surface, especially a cylinder contact surface of a crankcase made of an aluminum basic alloy Download PDFInfo
- Publication number
- US6180189B1 US6180189B1 US09/065,421 US6542198A US6180189B1 US 6180189 B1 US6180189 B1 US 6180189B1 US 6542198 A US6542198 A US 6542198A US 6180189 B1 US6180189 B1 US 6180189B1
- Authority
- US
- United States
- Prior art keywords
- aluminum
- plasma
- nitrogen
- crankcase
- creating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0209—Pretreatment of the material to be coated by heating
- C23C16/0218—Pretreatment of the material to be coated by heating in a reactive atmosphere
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/301—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C23C16/303—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
Definitions
- the invention relates to a method for aluminum nitride coating, especially of a cylinder contact surface of a crankcase consisting of an aluminum basic alloy.
- the invention also relates to an apparatus for performing the method, as well as to a formed product.
- light metal alloys based on aluminum are being used increasingly in engine building.
- An example of reducing moved masses are the aluminum pistons which have been known for a long time.
- An example of reducing static masses is the use of light metal crankcases made of aluminum basic alloys, for example those of eutectic Al—Si materials, such as Al 8 Si—Cu, made by injection molding.
- Cylinder liners are often employed in such engines. At the present time, it is not possible to eliminate the casting of cylinder liners, even though this procedure is not fully satisfactory in all respects. First, the procedure results in a higher engine weight. Second, the connection between the cylinder liner and aluminum alloy represents a sensitive transition for transfer of heat into coolant ducts. If the problem is serious, it is possible for the cylinder liner to come loose, resulting in engine destruction.
- AlN aluminum nitride
- AlN is a hard material that has a thermal conductivity that is comparatively high for ceramic materials.
- it has good tribological properties as far as the AlN layer/Al piston pair is concerned.
- the formation of an oxide-ceramic layer, aluminum oxide-Al 2 O 3 for example has less favorable material properties. It is known that Al 2 O 3 layers obtained by anodization cannot withstand the high alternating mechanical load to the degree and tend to break off.
- the method appears less suitable for the application of the present invention.
- the sprayed-on layer is not optimally anchored to the basic material.
- Second, a homogeneous material is not obtained. Both factors prove unsatisfactory for long-term resistance to the alternating mechanical loads that occur in the intended application.
- the goal of the invention is to provide a method with which a layer, that is firmly anchored to the base material and homogeneous in structure, made of aluminum nitride (AlN) can be applied to an aluminum basic alloy (AlSi 8 Cu, AlSi 9 Cu, AlSi 10 Cu as near-eutectic alloys for example) especially for a crankcase housing in the vicinity of cylinder contact surfaces.
- AlN aluminum nitride
- AlN aluminum basic alloy
- AlSi 8 Cu, AlSi 9 Cu, AlSi 10 Cu as near-eutectic alloys for example
- the aluminum nitride layer can also be applied to predetermined contact path structures by means of a honing process. Additional aftertreatment should not be necessary.
- the method can be used not only in engine manufacturing but also in the repair of used devices.
- AlN coating is produced by surface nitriding of the Al basic alloy.
- the activated nitrogen required for this purpose is produced by a high-pressure plasma process using molecular nitrogen.
- FIG. 1 shows a system for coating the cylinder contact surface of a crankcase by means of a microwave plasma discharge
- FIG. 2 shows a system for coating the cylinder contact surface of a crankcase using a corona or barrier discharge.
- high-pressure plasma will be understood to mean that the plasma state is produced at working pressures above approximately 1 mbar with the pressure range being unlimited at the upper end.
- boundary conditions influencing manufacturing techniques close to atmospheric working pressures are desirable, but this should not be understood as a limitation on the method according to the invention.
- a high-pressure plasma is generated in cylinder bore Z of crankcase KG with the system shown in FIG. 1 using microwave energy.
- the microwave radiation is generated by a magnetron, not shown here, and guided by a hollow waveguide or coaxial cable into the crankcase KG.
- MW coupling is advantageously accomplished by means of a coupling antenna AT at the technically established frequencies of 0.915 GHz and 2.46 GHz. The choice of these frequencies is governed exclusively by the availability of suitable MW components. Other frequencies in the microwave band may be used as well.
- the process gases are admitted through an opening in a cover flange AF mounted on the end of cylinder bore Z.
- a high-pressure plasma is generated in cylinder bore Z of the crankcase by means of a corona or barrier discharge.
- a central electrode EZ is introduced into cylinder bore Z. with additional spray disks S arranged on said electrode shown.
- the spray disks are preferably made with sharply tapering edges, resulting in high electrical field gradients and thus a high field emission probability for electrons.
- a high electrical voltage is applied between central electrode EZ and crankcase KG that serves as the counterelectrode.
- the discharges can be steady-state and/or pulsed, with the pulsed discharges allowing a greater range of variation in plasma parameters.
- FIGS. 1 and 2 are generated by different physical processes, the plasma processes are those employed in the embodiment described below.
- the natural oxide cover layer of the Al base alloy which consists essentially of Al 2 O 3 and SiO 2 , can be removed in a first method step.
- a reductive gas-solid process is employed for the purpose and uses hydrogen, as described below. It should be noted in this situation that molecular hydrogen cannot be used to reduce the relevant oxides because of chemical and thermodynamic restrictions. Instead, atomic hydrogen is required, which can be produced from molecular hydrogen by sufficiently energy-rich plasma discharges. The relevant reactions can be expressed as follows:
- Molecular hydrogen can be used as a pure gas or in the form of working gases that contain diatomic hydrogen, used as, for example, the forming gas of molecular hydrogen (such as nitrogen with a variable hydrogen content, usually about 70 to 95% N 2 , and the remainder being H 2 ).
- the forming gas of molecular hydrogen such as nitrogen with a variable hydrogen content, usually about 70 to 95% N 2 , and the remainder being H 2 ).
- Nitriding of the base material in this connection means forming stoichiometric mixtures of AlN and Si 3 N 4 in the surface of the basic material.
- N 2 (N2)* (4)
- the activated nitrogen has a much higher diffusion probability in the base material than nonactivated molecular nitrogen does. This results in increased reactivity relative to nitride formation in the surface of the basic material.
- the layer thickness of the surface AlN layer is preferably 5 ⁇ 20 ⁇ 10 ⁇ 6 m
- a pure AlN layer is applied to the surface nitride layer in another method step.
- the layer thickness of the pure AlN layer is approximately 5 ⁇ 10 ⁇ 10 ⁇ 6 m
- the reactive components are activated in a reactive high-pressure plasma process.
- an aluminum-containing process gas in concentrations up to the maximum stoichiometric value for AlN formation is added to the pure nitrogen from the nitriding process.
- An example is the use of aluminum trimethyl.
- aluminum chloride which can be obtained in the gas phase by sublimation of the solid. In both cases, the reaction probability can be increased by adding hydrogen.
- the corresponding reactions are written as follows:
Abstract
Description
Claims (8)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19717825A DE19717825B4 (en) | 1997-04-26 | 1997-04-26 | Process for aluminum nitride coating of the cylinder surface of a crankcase made of an Al-based alloy and corresponding crankcase |
DE19717825 | 1997-04-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
US6180189B1 true US6180189B1 (en) | 2001-01-30 |
Family
ID=7827936
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/065,421 Expired - Fee Related US6180189B1 (en) | 1997-04-26 | 1998-04-24 | Method and apparatus for aluminum nitride coating of a contact surface, especially a cylinder contact surface of a crankcase made of an aluminum basic alloy |
Country Status (6)
Country | Link |
---|---|
US (1) | US6180189B1 (en) |
JP (1) | JP2893402B2 (en) |
DE (1) | DE19717825B4 (en) |
FR (1) | FR2762618B1 (en) |
GB (1) | GB2324539B (en) |
IT (1) | IT1299436B1 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2826376A1 (en) * | 2001-06-25 | 2002-12-27 | Serthel | CARBONITRURATION AND CARBONITRURATION PROCESS OF STEELS WITH CARBON OXIDE |
EP1591551A1 (en) * | 2003-01-24 | 2005-11-02 | Research Institute for Applied Sciences | ALUMINUM MATERIAL HAVING AlN REGION ON THE SURFACE THEREOF AND METHOD FOR PRODUCTION THEREOF |
CN109554678A (en) * | 2018-12-26 | 2019-04-02 | 浙江清华柔性电子技术研究院 | Flexible aluminium nitride film and its manufacturing method |
CN109778122A (en) * | 2018-12-26 | 2019-05-21 | 浙江清华柔性电子技术研究院 | Flexible surface acoustic wave sensor and preparation method thereof |
US11124867B1 (en) | 2020-03-13 | 2021-09-21 | National Taiwan University Of Science And Technology | Gradient material layer and method for manufacturing the same |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19815019B4 (en) * | 1998-04-03 | 2007-08-16 | HQM Härterei und Qualitätsmanagement GmbH | Process for producing aluminum nitride layers on aluminum-based components based on plasma nitriding |
FR2801814B1 (en) * | 1999-12-06 | 2002-04-19 | Cebal | METHOD FOR DEPOSITING A COATING ON THE INTERNAL SURFACE OF AEROSOL DISPENSING UNITS |
DE10324279B4 (en) | 2003-05-28 | 2006-04-06 | Daimlerchrysler Ag | Use of FeC alloy to renew the surface of cylinder liners |
DE10316919A1 (en) * | 2003-04-12 | 2004-10-21 | Volkswagen Ag | Repair method for overhauling a motor vehicle's engine component, has bonding agent and plasma spray coating applied to defective piston surface which is subsequently worked at set value |
DE102009004542B4 (en) | 2008-12-11 | 2018-09-06 | Bayerische Motoren Werke Aktiengesellschaft | Method for producing a crankcase of an internal combustion engine |
Citations (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE151635C (en) * | ||||
US4244751A (en) | 1978-06-30 | 1981-01-13 | Hitachi, Ltd. | Method for melt nitriding of aluminum or its alloy |
US4309227A (en) | 1978-07-14 | 1982-01-05 | Kawasaki Jukogyo Kabushiki Kaisha | Ion-nitriding process |
US4522660A (en) | 1982-06-04 | 1985-06-11 | Kubushiki Kaisha Toyota Chuo Kenkyusho | Process for ion nitriding of aluminum or an aluminum alloy and apparatus therefor |
US4597808A (en) | 1984-04-05 | 1986-07-01 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Process for ion nitriding aluminum or aluminum alloys |
JPS62211365A (en) | 1986-02-07 | 1987-09-17 | Nippon Kokan Kk <Nkk> | Surface treatment |
US4698233A (en) | 1985-06-24 | 1987-10-06 | Nippon Light Metal Company Limited | Production of aluminum material having an aluminum nitride layer |
EP0346931A2 (en) | 1988-06-17 | 1989-12-20 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Process for ion nitriding aluminum material |
US5041304A (en) * | 1989-12-13 | 1991-08-20 | Bridgestone Corporation | Surface treatment method |
US5093150A (en) | 1989-04-20 | 1992-03-03 | Alps Electric Co., Ltd. | Synthesis method by plasma chemical vapor deposition |
US5124014A (en) * | 1990-02-27 | 1992-06-23 | At&T Bell Laboratories | Method of forming oxide layers by bias ECR plasma deposition |
DE4106745A1 (en) | 1991-03-02 | 1992-09-03 | Paedagogische Hochschule Erfur | Plasma nitriding of aluminium@ (alloy) components - at temps. below component m.pt., producing very hard, wear- and corrosion-resistant aluminium nitride coatings |
US5164221A (en) | 1990-01-12 | 1992-11-17 | Alps Electric Co., Ltd. | Forming die manufacturing method |
EP0574115A2 (en) | 1992-04-14 | 1993-12-15 | British Aerospace Public Limited Company | Diffusion bonding of aluminium and aluminium alloys |
US5352494A (en) * | 1989-11-09 | 1994-10-04 | Societe Nationale Industrielle Et Aerospatiale | Process for the production of a composite material protected against oxidation and material obtained by this process |
JPH06279982A (en) | 1993-03-24 | 1994-10-04 | Japan Steel Works Ltd:The | Method for ionically nitriding aluminum material and device therefor |
US5387288A (en) * | 1993-05-14 | 1995-02-07 | Modular Process Technology Corp. | Apparatus for depositing diamond and refractory materials comprising rotating antenna |
JPH08260126A (en) | 1995-03-24 | 1996-10-08 | Japan Steel Works Ltd:The | Method for hardening surface of aluminum substrate under melting |
US5573742A (en) | 1987-10-29 | 1996-11-12 | Martin Marietta Corporation | Method for the preparation of high purity aluminum nitride |
EP0745450A2 (en) | 1995-05-27 | 1996-12-04 | Audi Ag | Process for machining of workpiece surfaces |
US5637150A (en) * | 1993-10-04 | 1997-06-10 | Plasmion | Device and method for forming a plasma by application of microwaves |
US5906866A (en) * | 1997-02-10 | 1999-05-25 | Tokyo Electron Limited | Process for chemical vapor deposition of tungsten onto a titanium nitride substrate surface |
-
1997
- 1997-04-26 DE DE19717825A patent/DE19717825B4/en not_active Expired - Fee Related
-
1998
- 1998-04-16 GB GB9808087A patent/GB2324539B/en not_active Expired - Fee Related
- 1998-04-24 US US09/065,421 patent/US6180189B1/en not_active Expired - Fee Related
- 1998-04-24 FR FR9805162A patent/FR2762618B1/en not_active Expired - Fee Related
- 1998-04-24 IT IT98RM000268A patent/IT1299436B1/en active IP Right Grant
- 1998-04-24 JP JP10151847A patent/JP2893402B2/en not_active Expired - Fee Related
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DE151635C (en) * | ||||
US4244751A (en) | 1978-06-30 | 1981-01-13 | Hitachi, Ltd. | Method for melt nitriding of aluminum or its alloy |
US4309227A (en) | 1978-07-14 | 1982-01-05 | Kawasaki Jukogyo Kabushiki Kaisha | Ion-nitriding process |
US4522660A (en) | 1982-06-04 | 1985-06-11 | Kubushiki Kaisha Toyota Chuo Kenkyusho | Process for ion nitriding of aluminum or an aluminum alloy and apparatus therefor |
US4597808A (en) | 1984-04-05 | 1986-07-01 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Process for ion nitriding aluminum or aluminum alloys |
US4698233A (en) | 1985-06-24 | 1987-10-06 | Nippon Light Metal Company Limited | Production of aluminum material having an aluminum nitride layer |
JPS62211365A (en) | 1986-02-07 | 1987-09-17 | Nippon Kokan Kk <Nkk> | Surface treatment |
US5573742A (en) | 1987-10-29 | 1996-11-12 | Martin Marietta Corporation | Method for the preparation of high purity aluminum nitride |
EP0346931A2 (en) | 1988-06-17 | 1989-12-20 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Process for ion nitriding aluminum material |
US5093150A (en) | 1989-04-20 | 1992-03-03 | Alps Electric Co., Ltd. | Synthesis method by plasma chemical vapor deposition |
US5352494A (en) * | 1989-11-09 | 1994-10-04 | Societe Nationale Industrielle Et Aerospatiale | Process for the production of a composite material protected against oxidation and material obtained by this process |
US5041304A (en) * | 1989-12-13 | 1991-08-20 | Bridgestone Corporation | Surface treatment method |
US5164221A (en) | 1990-01-12 | 1992-11-17 | Alps Electric Co., Ltd. | Forming die manufacturing method |
US5124014A (en) * | 1990-02-27 | 1992-06-23 | At&T Bell Laboratories | Method of forming oxide layers by bias ECR plasma deposition |
DE4106745A1 (en) | 1991-03-02 | 1992-09-03 | Paedagogische Hochschule Erfur | Plasma nitriding of aluminium@ (alloy) components - at temps. below component m.pt., producing very hard, wear- and corrosion-resistant aluminium nitride coatings |
EP0574115A2 (en) | 1992-04-14 | 1993-12-15 | British Aerospace Public Limited Company | Diffusion bonding of aluminium and aluminium alloys |
JPH06279982A (en) | 1993-03-24 | 1994-10-04 | Japan Steel Works Ltd:The | Method for ionically nitriding aluminum material and device therefor |
US5387288A (en) * | 1993-05-14 | 1995-02-07 | Modular Process Technology Corp. | Apparatus for depositing diamond and refractory materials comprising rotating antenna |
US5637150A (en) * | 1993-10-04 | 1997-06-10 | Plasmion | Device and method for forming a plasma by application of microwaves |
JPH08260126A (en) | 1995-03-24 | 1996-10-08 | Japan Steel Works Ltd:The | Method for hardening surface of aluminum substrate under melting |
EP0745450A2 (en) | 1995-05-27 | 1996-12-04 | Audi Ag | Process for machining of workpiece surfaces |
US5906866A (en) * | 1997-02-10 | 1999-05-25 | Tokyo Electron Limited | Process for chemical vapor deposition of tungsten onto a titanium nitride substrate surface |
Non-Patent Citations (2)
Title |
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Abst. of Jap. JP 08 260126 A, pub. Oct. 1996, plus Derwent WPI Abstract. |
Abst. of Jap. JP 08-260126, pub. Oct. 1996, plus Derwent WPI Abstract. |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2826376A1 (en) * | 2001-06-25 | 2002-12-27 | Serthel | CARBONITRURATION AND CARBONITRURATION PROCESS OF STEELS WITH CARBON OXIDE |
EP1591551A1 (en) * | 2003-01-24 | 2005-11-02 | Research Institute for Applied Sciences | ALUMINUM MATERIAL HAVING AlN REGION ON THE SURFACE THEREOF AND METHOD FOR PRODUCTION THEREOF |
US20070009661A1 (en) * | 2003-01-24 | 2007-01-11 | Research Institute For Applied Sciences | Aluminum material having ain region on the surface thereof and method for production thereof |
EP1591551A4 (en) * | 2003-01-24 | 2008-04-16 | Res Inst For Applied Sciences | ALUMINUM MATERIAL HAVING AlN REGION ON THE SURFACE THEREOF AND METHOD FOR PRODUCTION THEREOF |
CN109554678A (en) * | 2018-12-26 | 2019-04-02 | 浙江清华柔性电子技术研究院 | Flexible aluminium nitride film and its manufacturing method |
CN109778122A (en) * | 2018-12-26 | 2019-05-21 | 浙江清华柔性电子技术研究院 | Flexible surface acoustic wave sensor and preparation method thereof |
US11124867B1 (en) | 2020-03-13 | 2021-09-21 | National Taiwan University Of Science And Technology | Gradient material layer and method for manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
GB2324539B (en) | 2000-01-26 |
ITRM980268A1 (en) | 1999-10-24 |
GB9808087D0 (en) | 1998-06-17 |
GB2324539A (en) | 1998-10-28 |
DE19717825A1 (en) | 1998-10-29 |
ITRM980268A0 (en) | 1998-04-24 |
FR2762618B1 (en) | 2001-04-27 |
JP2893402B2 (en) | 1999-05-24 |
DE19717825B4 (en) | 2004-03-04 |
IT1299436B1 (en) | 2000-03-16 |
JPH10330905A (en) | 1998-12-15 |
FR2762618A1 (en) | 1998-10-30 |
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