US6309916B1 - Method of molding plastic semiconductor packages - Google Patents
Method of molding plastic semiconductor packages Download PDFInfo
- Publication number
- US6309916B1 US6309916B1 US09/441,115 US44111599A US6309916B1 US 6309916 B1 US6309916 B1 US 6309916B1 US 44111599 A US44111599 A US 44111599A US 6309916 B1 US6309916 B1 US 6309916B1
- Authority
- US
- United States
- Prior art keywords
- molding
- package
- mold
- coating
- molding compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14639—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
- B29C45/14655—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/37—Mould cavity walls, i.e. the inner surface forming the mould cavity, e.g. linings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/40—Removing or ejecting moulded articles
- B29C45/4005—Ejector constructions; Ejector operating mechanisms
- B29C45/401—Ejector pin constructions or mountings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49171—Fan-out arrangements
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01012—Magnesium [Mg]
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- H01L2924/01046—Palladium [Pd]
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- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Abstract
Description
Claims (13)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US09/441,115 US6309916B1 (en) | 1999-11-17 | 1999-11-17 | Method of molding plastic semiconductor packages |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/441,115 US6309916B1 (en) | 1999-11-17 | 1999-11-17 | Method of molding plastic semiconductor packages |
Publications (1)
Publication Number | Publication Date |
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US6309916B1 true US6309916B1 (en) | 2001-10-30 |
Family
ID=23751577
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US09/441,115 Expired - Lifetime US6309916B1 (en) | 1999-11-17 | 1999-11-17 | Method of molding plastic semiconductor packages |
Country Status (1)
Country | Link |
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US (1) | US6309916B1 (en) |
Cited By (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020025353A1 (en) * | 2000-08-31 | 2002-02-28 | Williams Vernon M. | Transfer molding and underfilling method and apparatus |
US6358773B1 (en) * | 2000-12-27 | 2002-03-19 | Vincent Lin | Method of making substrate for use in forming image sensor package |
US6444500B1 (en) * | 1999-12-24 | 2002-09-03 | Fujitsu Limited | Split-mold and method for manufacturing semiconductor device by using the same |
US20020151103A1 (en) * | 2001-04-06 | 2002-10-17 | Shigeru Nakamura | Semiconductor device and method of manufacturing the same |
US20020180024A1 (en) * | 2001-05-29 | 2002-12-05 | Siliconware Precision Industries Co., Ltd., Taiwan R.O.C. | Semiconductor package and method for fabricating the same |
US20030062642A1 (en) * | 2001-10-02 | 2003-04-03 | Williams Vernon M. | Leadframe and method for removing cleaning compound flash from mold vents |
US20030067061A1 (en) * | 2001-10-10 | 2003-04-10 | Williams Vernon M. | Leadframe and method for reducing mold compound adhesion problems |
US6566164B1 (en) * | 2000-12-07 | 2003-05-20 | Amkor Technology, Inc. | Exposed copper strap in a semiconductor package |
US6580620B1 (en) * | 1999-04-14 | 2003-06-17 | Amkor Technology, Inc. | Matrix type printed circuit board for semiconductor packages |
US6653173B2 (en) * | 2000-06-16 | 2003-11-25 | Micron Technology, Inc. | Method and apparatus for packaging a microelectronic die |
US20030218263A1 (en) * | 2002-03-25 | 2003-11-27 | Stephan Blaszczak | Electronic component with a semiconductor chip, method of producing an electronic component and a panel with a plurality of electronic components |
US20040031461A1 (en) * | 2002-08-19 | 2004-02-19 | Trw Inc. | Chrome plated engine valve |
US6700077B2 (en) * | 2001-06-07 | 2004-03-02 | Advanced Semiconductor Engineering, Inc. | Packaging substrate with electrostatic discharge protection |
US6750082B2 (en) | 2002-09-13 | 2004-06-15 | Advanpack Solutions Pte. Ltd. | Method of assembling a package with an exposed die backside with and without a heatsink for flip-chip |
US6796028B2 (en) | 2000-08-23 | 2004-09-28 | Micron Technology, Inc. | Method of Interconnecting substrates for electrical coupling of microelectronic components |
US20050035435A1 (en) * | 2001-08-30 | 2005-02-17 | James Steven L. | Method for fabricating semiconductor components using mold cavities having runners configured to minimize venting |
US20050067790A1 (en) * | 2003-09-26 | 2005-03-31 | Smith Thomas J. | Piston ring having chromium coating |
US20050124785A1 (en) * | 2003-12-08 | 2005-06-09 | Matayabas James C.Jr. | Encapsulant mixture having a polymer bound catalyst |
US20050136656A1 (en) * | 2003-12-19 | 2005-06-23 | Zeng Xian T. | Process for depositing composite coating on a surface |
US20060043641A1 (en) * | 2004-08-31 | 2006-03-02 | Bunshi Kuratomi | Method of manufacturing a semiconductor device |
US7026710B2 (en) * | 2000-01-21 | 2006-04-11 | Texas Instruments Incorporated | Molded package for micromechanical devices and method of fabrication |
US7061082B2 (en) | 1997-02-25 | 2006-06-13 | Micron Technology, Inc. | Semiconductor die with attached heat sink and transfer mold |
WO2006101577A2 (en) * | 2005-03-16 | 2006-09-28 | Freescale Semiconductor, Inc. | Lead frame panel and a plurality of half-etched connection bars |
US20060226477A1 (en) * | 2005-03-29 | 2006-10-12 | Brar Berinder P S | Substrate driven field-effect transistor |
US20080029873A1 (en) * | 2006-08-03 | 2008-02-07 | Dal Jae Lee | Integrated circuit package system with molding vents |
US20080036050A1 (en) * | 2006-08-08 | 2008-02-14 | Lin Paul T | Package with solder-filled via holes in molding layers |
US20080160658A1 (en) * | 2007-01-03 | 2008-07-03 | Harvatek Corporation | Mold structure for packaging led chips and method thereof |
US20080251739A1 (en) * | 2007-04-13 | 2008-10-16 | Yoon Hwa Choi | Optical coupler package |
US20100081218A1 (en) * | 2008-09-26 | 2010-04-01 | Craig Hardin | Forming Light Emitting Devices Including Custom Wavelength Conversion Structures |
US7833456B2 (en) | 2007-02-23 | 2010-11-16 | Micron Technology, Inc. | Systems and methods for compressing an encapsulant adjacent a semiconductor workpiece |
US20110169195A1 (en) * | 2010-01-11 | 2011-07-14 | Cheol-Joon Yoo | Molding apparatus and molding method |
US20110198741A1 (en) * | 2010-02-17 | 2011-08-18 | Analog Devices, Inc. | Integrated Circuit Package with Enlarged Die Paddle |
EP2709143A1 (en) * | 2012-09-18 | 2014-03-19 | Gemalto SA | Moulding method for manufacturing an electronic package |
CN104015317A (en) * | 2014-07-04 | 2014-09-03 | 苏州新协力特种工业模板有限公司 | Sliding thimble mechanism of injection mold system |
WO2015140213A1 (en) * | 2014-03-21 | 2015-09-24 | Osram Opto Semiconductors Gmbh | Method for producing a housing for an electronic component and an electronic component, housing for an electronic component, and electronic component |
US10943800B2 (en) | 2017-04-18 | 2021-03-09 | Advanced Semiconductor Engineering, Inc. | Semiconductor package device and method of forming package body |
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Cited By (68)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7061082B2 (en) | 1997-02-25 | 2006-06-13 | Micron Technology, Inc. | Semiconductor die with attached heat sink and transfer mold |
US6580620B1 (en) * | 1999-04-14 | 2003-06-17 | Amkor Technology, Inc. | Matrix type printed circuit board for semiconductor packages |
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