WO2001037322A3 - System and method for product yield prediction using a logic characterization vehicle - Google Patents

System and method for product yield prediction using a logic characterization vehicle Download PDF

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Publication number
WO2001037322A3
WO2001037322A3 PCT/US2000/031839 US0031839W WO0137322A3 WO 2001037322 A3 WO2001037322 A3 WO 2001037322A3 US 0031839 W US0031839 W US 0031839W WO 0137322 A3 WO0137322 A3 WO 0137322A3
Authority
WO
WIPO (PCT)
Prior art keywords
product yield
yield prediction
characterization vehicle
combinatorial logic
logic circuit
Prior art date
Application number
PCT/US2000/031839
Other languages
French (fr)
Other versions
WO2001037322A9 (en
WO2001037322A2 (en
Inventor
Brian E Stine
Christopher Hess
Larg H Weiland
Dennis J Ciplickas
Original Assignee
Pdf Solutions Inc
Brian E Stine
Christopher Hess
Larg H Weiland
Dennis J Ciplickas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/442,699 external-priority patent/US6449749B1/en
Application filed by Pdf Solutions Inc, Brian E Stine, Christopher Hess, Larg H Weiland, Dennis J Ciplickas filed Critical Pdf Solutions Inc
Priority to US10/130,380 priority Critical patent/US6834375B1/en
Priority to AU17807/01A priority patent/AU1780701A/en
Priority to JP2001537778A priority patent/JP3811649B2/en
Publication of WO2001037322A2 publication Critical patent/WO2001037322A2/en
Publication of WO2001037322A3 publication Critical patent/WO2001037322A3/en
Publication of WO2001037322A9 publication Critical patent/WO2001037322A9/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H01L22/34Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A characterization vehicle includes at least one combinatorial logic circuit element, and a control circuit (102) that controls the combinatorial logic circuit element. The control circuit includes an input mechanism (103) for inputting a test pattern of signals into the combinatorial logic circuit element. An output mechanism (104) stores an output pattern that is output by the combinatorial logic circuit element based on the test pattern.
PCT/US2000/031839 1999-11-18 2000-11-17 System and method for product yield prediction using a logic characterization vehicle WO2001037322A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US10/130,380 US6834375B1 (en) 1999-11-18 2000-11-17 System and method for product yield prediction using a logic characterization vehicle
AU17807/01A AU1780701A (en) 1999-11-18 2000-11-17 System and method for product yield prediction using a logic characterization vehicle
JP2001537778A JP3811649B2 (en) 1999-11-18 2000-11-17 System and method for product yield prediction using a logical characterization vehicle

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US16630799P 1999-11-18 1999-11-18
US16630899P 1999-11-18 1999-11-18
US60/166,308 1999-11-18
US09/442,699 1999-11-18
US09/442,699 US6449749B1 (en) 1999-11-18 1999-11-18 System and method for product yield prediction
US60/166,307 1999-11-18

Publications (3)

Publication Number Publication Date
WO2001037322A2 WO2001037322A2 (en) 2001-05-25
WO2001037322A3 true WO2001037322A3 (en) 2002-01-24
WO2001037322A9 WO2001037322A9 (en) 2002-09-06

Family

ID=27389249

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/031839 WO2001037322A2 (en) 1999-11-18 2000-11-17 System and method for product yield prediction using a logic characterization vehicle

Country Status (4)

Country Link
US (2) US6834375B1 (en)
JP (2) JP3811649B2 (en)
AU (2) AU1770301A (en)
WO (1) WO2001037322A2 (en)

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Also Published As

Publication number Publication date
JP4070998B2 (en) 2008-04-02
JP2003514475A (en) 2003-04-15
JP2003517193A (en) 2003-05-20
WO2001037322A9 (en) 2002-09-06
US6834375B1 (en) 2004-12-21
AU1780701A (en) 2001-05-30
WO2001037322A2 (en) 2001-05-25
US6795952B1 (en) 2004-09-21
AU1770301A (en) 2001-05-30
JP3811649B2 (en) 2006-08-23

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