WO2001097277A9 - Procede d'encapsulation de pieces electroniques et une telle encapsulation - Google Patents

Procede d'encapsulation de pieces electroniques et une telle encapsulation

Info

Publication number
WO2001097277A9
WO2001097277A9 PCT/JP2001/005050 JP0105050W WO0197277A9 WO 2001097277 A9 WO2001097277 A9 WO 2001097277A9 JP 0105050 W JP0105050 W JP 0105050W WO 0197277 A9 WO0197277 A9 WO 0197277A9
Authority
WO
WIPO (PCT)
Prior art keywords
electronic parts
joining
packaging method
package
joining material
Prior art date
Application number
PCT/JP2001/005050
Other languages
English (en)
French (fr)
Other versions
WO2001097277A1 (fr
Inventor
Hidenobu Nishikawa
Kazuto Nishida
Kazumichi Shimizu
Shuuji Oono
Hiroyuki Otani
Original Assignee
Matsushita Electric Ind Co Ltd
Hidenobu Nishikawa
Kazuto Nishida
Kazumichi Shimizu
Shuuji Oono
Hiroyuki Otani
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000181618A external-priority patent/JP4287987B2/ja
Priority claimed from JP2000326879A external-priority patent/JP4041649B2/ja
Application filed by Matsushita Electric Ind Co Ltd, Hidenobu Nishikawa, Kazuto Nishida, Kazumichi Shimizu, Shuuji Oono, Hiroyuki Otani filed Critical Matsushita Electric Ind Co Ltd
Priority to US10/311,476 priority Critical patent/US7355126B2/en
Publication of WO2001097277A1 publication Critical patent/WO2001097277A1/ja
Publication of WO2001097277A9 publication Critical patent/WO2001097277A9/ja

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    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
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    • H01L21/563Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
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PCT/JP2001/005050 2000-06-16 2001-06-14 Procede d'encapsulation de pieces electroniques et une telle encapsulation WO2001097277A1 (fr)

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JP2000181618A JP4287987B2 (ja) 2000-06-16 2000-06-16 電子部品の実装方法及び電子部品実装体
JP2000-326879 2000-10-26
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Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6960830B2 (en) * 2002-10-31 2005-11-01 Rohm Co., Ltd. Semiconductor integrated circuit device with dummy bumps
JP2007514555A (ja) * 2003-12-19 2007-06-07 インターナショナル・ビジネス・マシーンズ・コーポレーション Memsの部品を自己位置合わせさせるための方法およびシステム
US7109583B2 (en) * 2004-05-06 2006-09-19 Endwave Corporation Mounting with auxiliary bumps
CN100552948C (zh) * 2004-12-28 2009-10-21 松下电器产业株式会社 半导体芯片的安装结构体和其制造方法
JP2006196728A (ja) * 2005-01-14 2006-07-27 Seiko Epson Corp 電子部品、電気光学装置、及び電子機器
JP2006222374A (ja) * 2005-02-14 2006-08-24 Fuji Film Microdevices Co Ltd 半導体チップ
US7564536B2 (en) * 2005-11-08 2009-07-21 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
TWI287661B (en) * 2005-12-23 2007-10-01 Au Optronics Corp Flexible printed circuit board and display device utilizing the same
US8174110B2 (en) * 2007-09-04 2012-05-08 Epson Imaging Devices Corporation Semiconductor device having at least two terminals among the plurality of terminals electrically connected to each other while not being adjacent to one other and not being connected to internal circuit
WO2009035849A2 (en) 2007-09-10 2009-03-19 Vertical Circuits, Inc. Semiconductor die mount by conformal die coating
JP5162226B2 (ja) * 2007-12-12 2013-03-13 新光電気工業株式会社 配線基板及び半導体装置
JP5538682B2 (ja) * 2008-03-06 2014-07-02 ピーエスフォー ルクスコ エスエイアールエル 半導体装置及びその製造方法
CN103325764B (zh) 2008-03-12 2016-09-07 伊文萨思公司 支撑安装的电互连管芯组件
US9153517B2 (en) 2008-05-20 2015-10-06 Invensas Corporation Electrical connector between die pad and z-interconnect for stacked die assemblies
US7863159B2 (en) * 2008-06-19 2011-01-04 Vertical Circuits, Inc. Semiconductor die separation method
CN102084410B (zh) * 2008-07-28 2013-06-26 夏普株式会社 显示面板以及具备该显示面板的显示装置
JP4941509B2 (ja) * 2008-10-20 2012-05-30 株式会社デンソー 電子制御装置
US9147583B2 (en) 2009-10-27 2015-09-29 Invensas Corporation Selective die electrical insulation by additive process
TWI544604B (zh) * 2009-11-04 2016-08-01 英維瑟斯公司 具有降低應力電互連的堆疊晶粒總成
KR101149036B1 (ko) * 2010-04-29 2012-05-24 엘지이노텍 주식회사 임베디드 인쇄회로기판용 전자부품 결합 부재 및 이를 이용한 임베디드 인쇄회로기판 및 임베디드 인쇄회로기판 제조 방법
KR20110124993A (ko) * 2010-05-12 2011-11-18 삼성전자주식회사 반도체 칩 및 이를 포함하는 반도체 패키지 및 반도체 칩의 제조 방법
WO2012060034A1 (ja) * 2010-11-04 2012-05-10 アルプス電気株式会社 電子部品モジュール
KR20140099818A (ko) * 2011-12-08 2014-08-13 파나소닉 주식회사 전자 부품 실장 라인 및 전자 부품 실장 방법
US20140055969A1 (en) * 2012-08-21 2014-02-27 Apple Inc. Board assemblies with minimized warpage and systems and methods for making the same
US9497861B2 (en) 2012-12-06 2016-11-15 Taiwan Semiconductor Manufacturing Company, Ltd. Methods and apparatus for package with interposers
KR101496780B1 (ko) * 2013-05-23 2015-02-27 우영관 인쇄회로기판에 부재플레이트를 부착하는 방법
US9490195B1 (en) 2015-07-17 2016-11-08 Invensas Corporation Wafer-level flipped die stacks with leadframes or metal foil interconnects
US9825002B2 (en) 2015-07-17 2017-11-21 Invensas Corporation Flipped die stack
US9871019B2 (en) 2015-07-17 2018-01-16 Invensas Corporation Flipped die stack assemblies with leadframe interconnects
US10074624B2 (en) 2015-08-07 2018-09-11 Analog Devices, Inc. Bond pads with differently sized openings
US9508691B1 (en) 2015-12-16 2016-11-29 Invensas Corporation Flipped die stacks with multiple rows of leadframe interconnects
US10566310B2 (en) 2016-04-11 2020-02-18 Invensas Corporation Microelectronic packages having stacked die and wire bond interconnects
CN105807514B (zh) * 2016-04-29 2019-02-15 武汉天马微电子有限公司 一种显示装置
US9595511B1 (en) 2016-05-12 2017-03-14 Invensas Corporation Microelectronic packages and assemblies with improved flyby signaling operation
US9728524B1 (en) 2016-06-30 2017-08-08 Invensas Corporation Enhanced density assembly having microelectronic packages mounted at substantial angle to board
KR20180014903A (ko) * 2016-08-01 2018-02-12 삼성디스플레이 주식회사 전자 소자, 이의 실장 방법 및 이를 포함하는 표시 장치의 제조 방법
KR102293940B1 (ko) * 2019-10-21 2021-08-26 (주)파트론 마이크로폰 패키지

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63239826A (ja) * 1987-03-27 1988-10-05 Hitachi Ltd 半導体装置
JPH0394437A (ja) 1989-09-06 1991-04-19 Sanyo Electric Co Ltd チップオングラス基板
JP3207222B2 (ja) * 1991-08-29 2001-09-10 株式会社東芝 電子部品装置
JP2940252B2 (ja) * 1991-09-09 1999-08-25 富士通株式会社 半導体素子の実装構造および実装方法
JP3052300B2 (ja) 1992-06-23 2000-06-12 ソニーケミカル株式会社 配線基板及び加圧ツール
JP2964781B2 (ja) 1992-07-03 1999-10-18 セイコーエプソン株式会社 半導体装置
JPH06349890A (ja) 1993-06-14 1994-12-22 Hitachi Ltd 半導体装置
US5700715A (en) * 1994-06-14 1997-12-23 Lsi Logic Corporation Process for mounting a semiconductor device to a circuit substrate
US5539153A (en) * 1994-08-08 1996-07-23 Hewlett-Packard Company Method of bumping substrates by contained paste deposition
JP3724606B2 (ja) 1995-05-22 2005-12-07 日立化成工業株式会社 半導体チップの接続構造及びこれに用いる配線基板
DE69618458T2 (de) * 1995-05-22 2002-11-07 Hitachi Chemical Co Ltd Halbleiterteil mit einem zu einem verdrahtungsträger elektrisch verbundenem chip
JPH09120975A (ja) * 1995-10-24 1997-05-06 Seiko Epson Corp 半導体チップの実装構造
JPH09153519A (ja) * 1995-11-30 1997-06-10 Citizen Watch Co Ltd 半導体の実装構造
JPH09213745A (ja) * 1996-01-30 1997-08-15 Victor Co Of Japan Ltd 部品の表面実装方法
JPH09260435A (ja) * 1996-03-26 1997-10-03 Toshiba Microelectron Corp 半導体装置
JPH10144725A (ja) * 1996-11-13 1998-05-29 Hitachi Ltd 集積回路の実装方法
JP3390664B2 (ja) 1997-10-16 2003-03-24 新光電気工業株式会社 フリップチップ実装用基板及びフリップチップ実装構造
US6324069B1 (en) * 1997-10-29 2001-11-27 Hestia Technologies, Inc. Chip package with molded underfill
JP3367886B2 (ja) 1998-01-20 2003-01-20 株式会社村田製作所 電子回路装置
JP4311774B2 (ja) * 1998-03-11 2009-08-12 富士通株式会社 電子部品パッケージおよびプリント配線板
JP4417596B2 (ja) * 2001-09-19 2010-02-17 富士通株式会社 電子部品の実装方法
JP2004134648A (ja) * 2002-10-11 2004-04-30 Seiko Epson Corp 回路基板、ボール・グリッド・アレイの実装構造、及び電気光学装置、並びに電子機器

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